JP2006186999A5 - - Google Patents

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Publication number
JP2006186999A5
JP2006186999A5 JP2005367304A JP2005367304A JP2006186999A5 JP 2006186999 A5 JP2006186999 A5 JP 2006186999A5 JP 2005367304 A JP2005367304 A JP 2005367304A JP 2005367304 A JP2005367304 A JP 2005367304A JP 2006186999 A5 JP2006186999 A5 JP 2006186999A5
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JP
Japan
Prior art keywords
epitaxial layer
substrate
polysilicon layer
ultrasonic transducer
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005367304A
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English (en)
Japanese (ja)
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JP2006186999A (ja
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Publication date
Priority claimed from US11/023,252 external-priority patent/US7037746B1/en
Application filed filed Critical
Publication of JP2006186999A publication Critical patent/JP2006186999A/ja
Publication of JP2006186999A5 publication Critical patent/JP2006186999A5/ja
Pending legal-status Critical Current

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JP2005367304A 2004-12-27 2005-12-21 エピタキシャル・シリコン膜によって製作した容量性マイクロマシン加工超音波トランスジューサ Pending JP2006186999A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/023,252 US7037746B1 (en) 2004-12-27 2004-12-27 Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane

Publications (2)

Publication Number Publication Date
JP2006186999A JP2006186999A (ja) 2006-07-13
JP2006186999A5 true JP2006186999A5 (enExample) 2011-08-11

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Family Applications (1)

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JP2005367304A Pending JP2006186999A (ja) 2004-12-27 2005-12-21 エピタキシャル・シリコン膜によって製作した容量性マイクロマシン加工超音波トランスジューサ

Country Status (3)

Country Link
US (2) US7037746B1 (enExample)
JP (1) JP2006186999A (enExample)
FR (1) FR2880232B1 (enExample)

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