FR2939003B1 - Cellule cmut formee d'une membrane de nano-tubes ou de nano-fils ou de nano-poutres et dispositif d'imagerie acoustique ultra haute frequence comprenant une pluralite de telles cellules - Google Patents

Cellule cmut formee d'une membrane de nano-tubes ou de nano-fils ou de nano-poutres et dispositif d'imagerie acoustique ultra haute frequence comprenant une pluralite de telles cellules

Info

Publication number
FR2939003B1
FR2939003B1 FR0857928A FR0857928A FR2939003B1 FR 2939003 B1 FR2939003 B1 FR 2939003B1 FR 0857928 A FR0857928 A FR 0857928A FR 0857928 A FR0857928 A FR 0857928A FR 2939003 B1 FR2939003 B1 FR 2939003B1
Authority
FR
France
Prior art keywords
nano
membrane
beams
imaging device
threads
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0857928A
Other languages
English (en)
Other versions
FR2939003A1 (fr
Inventor
Berengere Lebental
Anne Ghis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laboratoire Central des Ponts et Chaussees
Ecole Nationale des Ponts et Chaussess ENPC
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Laboratoire Central des Ponts et Chaussees
Commissariat a lEnergie Atomique CEA
Ecole Nationale des Ponts et Chaussess ENPC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laboratoire Central des Ponts et Chaussees, Commissariat a lEnergie Atomique CEA, Ecole Nationale des Ponts et Chaussess ENPC filed Critical Laboratoire Central des Ponts et Chaussees
Priority to FR0857928A priority Critical patent/FR2939003B1/fr
Priority to EP09752873A priority patent/EP2349593A1/fr
Priority to PCT/EP2009/065582 priority patent/WO2010057992A1/fr
Priority to JP2011536880A priority patent/JP2012509631A/ja
Priority to US13/130,397 priority patent/US8873341B2/en
Publication of FR2939003A1 publication Critical patent/FR2939003A1/fr
Application granted granted Critical
Publication of FR2939003B1 publication Critical patent/FR2939003B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60B—VEHICLE WHEELS; CASTORS; AXLES FOR WHEELS OR CASTORS; INCREASING WHEEL ADHESION
    • B60B1/00—Spoked wheels; Spokes thereof
    • B60B1/02—Wheels with wire or other tension spokes
    • B60B1/0261—Wheels with wire or other tension spokes characterised by spoke form
    • B60B1/0292—Wheels with wire or other tension spokes characterised by spoke form the spoke being bent at both ends
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
    • H01L29/1606—Graphene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

L'invention concerne un transducteur électrostatique capacitif comprenant : au moins une membrane (105, 205) prévue pour osciller sous l'effet d'un champ électrique et/ou d'une onde acoustique, la membrane étant formée d'une ou plusieurs couches (301-306) de nanotubes ou de nano-fils ou de nano-poutres juxtaposés, ainsi qu'un dispositif d'imagerie acoustique ou un sonar UHF comportant de tels transducteurs.
FR0857928A 2008-11-21 2008-11-21 Cellule cmut formee d'une membrane de nano-tubes ou de nano-fils ou de nano-poutres et dispositif d'imagerie acoustique ultra haute frequence comprenant une pluralite de telles cellules Active FR2939003B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0857928A FR2939003B1 (fr) 2008-11-21 2008-11-21 Cellule cmut formee d'une membrane de nano-tubes ou de nano-fils ou de nano-poutres et dispositif d'imagerie acoustique ultra haute frequence comprenant une pluralite de telles cellules
EP09752873A EP2349593A1 (fr) 2008-11-21 2009-11-20 Cellule cmut formee d'une membrane de nano-tubes ou de nano-fils ou de nano-poutres
PCT/EP2009/065582 WO2010057992A1 (fr) 2008-11-21 2009-11-20 Cellule cmut formee d'une membrane de nano-tubes ou de nano-fils ou de nano-poutres
JP2011536880A JP2012509631A (ja) 2008-11-21 2009-11-20 ナノチューブまたはナノワイヤーまたはナノビームの薄膜よりなるｃｍｕｔセル
US13/130,397 US8873341B2 (en) 2008-11-21 2009-11-20 CMUT cell formed from a membrane of nanotubes or nanowires or nanorods and device for ultra high frequency acoustic imaging including multiple cells of this kind

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0857928A FR2939003B1 (fr) 2008-11-21 2008-11-21 Cellule cmut formee d'une membrane de nano-tubes ou de nano-fils ou de nano-poutres et dispositif d'imagerie acoustique ultra haute frequence comprenant une pluralite de telles cellules

Publications (2)

Publication Number Publication Date
FR2939003A1 FR2939003A1 (fr) 2010-05-28
FR2939003B1 true FR2939003B1 (fr) 2011-02-25

Family

ID=40718579

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0857928A Active FR2939003B1 (fr) 2008-11-21 2008-11-21 Cellule cmut formee d'une membrane de nano-tubes ou de nano-fils ou de nano-poutres et dispositif d'imagerie acoustique ultra haute frequence comprenant une pluralite de telles cellules

Country Status (5)

Country Link
US (1) US8873341B2 (fr)
EP (1) EP2349593A1 (fr)
JP (1) JP2012509631A (fr)
FR (1) FR2939003B1 (fr)
WO (1) WO2010057992A1 (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3689250B1 (fr) 2011-10-17 2022-12-07 BFLY Operations, Inc. Imagerie transmissive et appareil et procédés associés
JP6190387B2 (ja) * 2012-01-27 2017-08-30 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 容量型微細加工トランスデューサ及びその製造方法
CN104066521B (zh) * 2012-01-27 2017-07-11 皇家飞利浦有限公司 电容式微机械换能器及制造所述电容式微机械换能器的方法
US9470710B2 (en) 2013-02-27 2016-10-18 Texas Instruments Incorporated Capacitive MEMS sensor devices
US9351081B2 (en) * 2013-02-27 2016-05-24 Texas Instruments Incorporated Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug
EP2811525B1 (fr) * 2013-03-14 2019-02-13 Karlsruher Institut für Technologie Transistor à effet de champ commandé éledctro-chimiquement, procédé de son fabrication, son utilisation, et électronique comprenant un tel transistor à effet de champ
US9667889B2 (en) 2013-04-03 2017-05-30 Butterfly Network, Inc. Portable electronic devices with integrated imaging capabilities
US9232317B2 (en) * 2013-10-11 2016-01-05 Turtle Beach Corporation Parametric transducer with graphene conductive surface
CN103916801A (zh) * 2014-04-25 2014-07-09 瑞声光电科技(常州)有限公司 一种复合振膜及其制备方法
DE102014217153A1 (de) * 2014-08-28 2015-12-03 Robert Bosch Gmbh MEMS-Bauelement mit einer druckempfindlichen Membran
JP2018514980A (ja) * 2015-03-16 2018-06-07 ザ リージェンツ オブ ザ ユニバーシティ オブ カリフ 超音波マイクロフォン及び超音波音響無線機
US10315224B2 (en) * 2015-05-20 2019-06-11 uBeam Inc. Ultrasonic transducer
US10058892B2 (en) 2015-05-20 2018-08-28 uBeam Inc. Membrane bonding
US10065854B2 (en) 2015-05-20 2018-09-04 uBeam Inc. Membrane bonding with photoresist
US10106398B2 (en) * 2015-05-28 2018-10-23 Infineon Technologies Ag Micromechanical structure comprising carbon material and method for fabricating the same
US10284957B2 (en) 2015-07-22 2019-05-07 Google Llc Devices and methods for a high performance electromagnetic speaker based on monolayers
GB201519620D0 (en) * 2015-11-06 2015-12-23 Univ Manchester Device and method of fabricating such a device
SE539636C2 (en) * 2016-03-14 2017-10-24 Fingerprint Cards Ab Capacitive fingerprint sensing device and method for capturing a fingerprint using the sensing device
US9898640B2 (en) 2016-05-02 2018-02-20 Fingerprint Cards Ab Capacitive fingerprint sensing device and method for capturing a fingerprint using the sensing device
US10841709B2 (en) 2018-12-06 2020-11-17 Waves Audio Ltd. Nanocomposite graphene polymer membrane assembly, and manufacturing method thereof
KR102196437B1 (ko) * 2019-01-29 2020-12-30 한국과학기술연구원 정전용량형 미세가공 초음파 트랜스듀서

Family Cites Families (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6683783B1 (en) * 1997-03-07 2004-01-27 William Marsh Rice University Carbon fibers formed from single-wall carbon nanotubes
AUPQ065099A0 (en) * 1999-05-28 1999-06-24 Commonwealth Scientific And Industrial Research Organisation Substrate-supported aligned carbon nanotube films
US6803840B2 (en) * 2001-03-30 2004-10-12 California Institute Of Technology Pattern-aligned carbon nanotube growth and tunable resonator apparatus
US7052854B2 (en) * 2001-05-23 2006-05-30 University Of Florida Research Foundation, Inc. Application of nanotechnology and sensor technologies for ex-vivo diagnostics
US6585653B2 (en) * 2001-07-31 2003-07-01 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) array
US7522040B2 (en) * 2004-04-20 2009-04-21 Nanomix, Inc. Remotely communicating, battery-powered nanostructure sensor devices
JP2003319490A (ja) * 2002-04-19 2003-11-07 Sony Corp 振動板及びその製造方法、並びにスピーカ
US20060263255A1 (en) * 2002-09-04 2006-11-23 Tzong-Ru Han Nanoelectronic sensor system and hydrogen-sensitive functionalization
US20070045756A1 (en) * 2002-09-04 2007-03-01 Ying-Lan Chang Nanoelectronic sensor with integral suspended micro-heater
US7253434B2 (en) * 2002-10-29 2007-08-07 President And Fellows Of Harvard College Suspended carbon nanotube field effect transistor
US20060102871A1 (en) * 2003-04-08 2006-05-18 Xingwu Wang Novel composition
US7019391B2 (en) * 2004-04-06 2006-03-28 Bao Tran NANO IC packaging
US20050218398A1 (en) * 2004-04-06 2005-10-06 Availableip.Com NANO-electronics
KR100879392B1 (ko) 2004-04-19 2009-01-20 도꾸리쯔교세이호징 가가꾸 기쥬쯔 신꼬 기꼬 탄소계 미세 구조물군, 탄소계 미세 구조물의 집합체, 그이용 및 제조방법
JP2005341143A (ja) 2004-05-26 2005-12-08 Seiko Epson Corp 超音波トランスデューサ及びこれを用いた超音波スピーカ
JP4800305B2 (ja) 2004-06-24 2011-10-26 コーネル リサーチ ファンデーション インク． ファイバー状の複合材料ベースのｍｅｍｓ光スキャナー
JP4746291B2 (ja) 2004-08-05 2011-08-10 オリンパス株式会社 静電容量型超音波振動子、及びその製造方法
WO2007015710A2 (fr) * 2004-11-09 2007-02-08 Board Of Regents, The University Of Texas System Fabrication et applications de rubans, feuilles et fils retors ou non de nanofibres
KR100904939B1 (ko) * 2004-11-22 2009-06-29 하르만 인터내셔날 인더스트리즈, 인코포레이티드 라우드스피커 플라스틱 콘 몸체
US7489593B2 (en) 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
US7037746B1 (en) 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
US7776269B2 (en) 2005-03-15 2010-08-17 The United States Of America As Represented By The Secretary Of The Navy Capacitive based sensing of molecular adsorbates on the surface of single wall nanotubes
US20060257883A1 (en) * 2005-05-10 2006-11-16 Bjoraker David G Detection and measurement of hematological parameters characterizing cellular blood components
JP4885211B2 (ja) * 2005-05-18 2012-02-29 コロ テクノロジーズ インコーポレイテッド 微細電子機械変換器
US7777118B2 (en) * 2005-07-25 2010-08-17 Russell Stoneback Electromagnetic musical instrument systems and related methods
US7777119B2 (en) * 2005-07-25 2010-08-17 Russell Stoneback Electromagnetic musical instruments
WO2007015218A2 (fr) * 2005-08-03 2007-02-08 Kolo Technologies, Inc. Transducteur micro-electromecanique possedant une surface non plate optimisee
CN101287698A (zh) 2005-09-06 2008-10-15 诺华丝国际股份有限公司 含有甲硫氨酸的羟基类似物以及衍生物的罐装和干法涂布的抗微生物组合物
US7995777B2 (en) * 2005-10-03 2011-08-09 Xun Yu Thin film transparent acoustic transducer
KR100767260B1 (ko) 2005-10-31 2007-10-17 (주)케이에이치 케미컬 음향 진동판 및 이를 구비하는 스피커
JP4797589B2 (ja) * 2005-11-18 2011-10-19 セイコーエプソン株式会社 静電アクチュエータ、液滴吐出ヘッド、液滴吐出装置及び静電デバイス
US20070180916A1 (en) 2006-02-09 2007-08-09 General Electric Company Capacitive micromachined ultrasound transducer and methods of making the same
US7615834B2 (en) * 2006-02-28 2009-11-10 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
JP2009528254A (ja) * 2006-03-03 2009-08-06 ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ 空間的に配列したナノチューブ及びナノチューブアレイの作製方法
US7723684B1 (en) * 2007-01-30 2010-05-25 The Regents Of The University Of California Carbon nanotube based detector
US7819005B2 (en) * 2007-06-25 2010-10-26 Micron Technology, Inc. Sensor and transducer devices comprising carbon nanotubes, methods of making and using the same
CN101344447A (zh) * 2007-07-13 2009-01-14 清华大学 微机电压力传感器
US8345513B2 (en) * 2007-12-03 2013-01-01 Kolo Technologies, Inc. Stacked transducing devices
WO2009097357A1 (fr) * 2008-01-29 2009-08-06 Medtronic Minimed, Inc. Capteurs d'analyte ayant des électrodes nanostructurées et leurs procédés de fabrication et d'utilisation
US8249279B2 (en) * 2008-04-28 2012-08-21 Beijing Funate Innovation Technology Co., Ltd. Thermoacoustic device
US8259968B2 (en) * 2008-04-28 2012-09-04 Tsinghua University Thermoacoustic device
US8452031B2 (en) * 2008-04-28 2013-05-28 Tsinghua University Ultrasonic thermoacoustic device
US8259967B2 (en) * 2008-04-28 2012-09-04 Tsinghua University Thermoacoustic device
US8270639B2 (en) * 2008-04-28 2012-09-18 Tsinghua University Thermoacoustic device
US8068624B2 (en) * 2008-04-28 2011-11-29 Beijing Funate Innovation Technology Co., Ltd. Thermoacoustic device
CN101715160B (zh) * 2008-10-08 2013-02-13 清华大学 柔性发声装置及发声旗帜

Also Published As

Publication number Publication date
US20110242932A1 (en) 2011-10-06
JP2012509631A (ja) 2012-04-19
FR2939003A1 (fr) 2010-05-28
US8873341B2 (en) 2014-10-28
EP2349593A1 (fr) 2011-08-03
WO2010057992A1 (fr) 2010-05-27

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