JP2008516787A5 - - Google Patents

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Publication number
JP2008516787A5
JP2008516787A5 JP2007536908A JP2007536908A JP2008516787A5 JP 2008516787 A5 JP2008516787 A5 JP 2008516787A5 JP 2007536908 A JP2007536908 A JP 2007536908A JP 2007536908 A JP2007536908 A JP 2007536908A JP 2008516787 A5 JP2008516787 A5 JP 2008516787A5
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JP
Japan
Prior art keywords
piezoelectric
conductive
conductive material
chambers
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007536908A
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English (en)
Japanese (ja)
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JP2008516787A (ja
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Publication date
Priority claimed from US10/967,073 external-priority patent/US7420317B2/en
Application filed filed Critical
Publication of JP2008516787A publication Critical patent/JP2008516787A/ja
Publication of JP2008516787A5 publication Critical patent/JP2008516787A5/ja
Pending legal-status Critical Current

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JP2007536908A 2004-10-15 2005-10-12 圧電ブロックを有するマイクロ電子機械デバイスおよびこれを作製する方法 Pending JP2008516787A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/967,073 US7420317B2 (en) 2004-10-15 2004-10-15 Forming piezoelectric actuators
PCT/US2005/036926 WO2006044592A1 (en) 2004-10-15 2005-10-12 Microelectromechanical device having piezoelectric blocks and method of fabrication same

Publications (2)

Publication Number Publication Date
JP2008516787A JP2008516787A (ja) 2008-05-22
JP2008516787A5 true JP2008516787A5 (enExample) 2008-10-23

Family

ID=35632644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007536908A Pending JP2008516787A (ja) 2004-10-15 2005-10-12 圧電ブロックを有するマイクロ電子機械デバイスおよびこれを作製する方法

Country Status (9)

Country Link
US (3) US7420317B2 (enExample)
EP (1) EP1815538B1 (enExample)
JP (1) JP2008516787A (enExample)
KR (1) KR101184060B1 (enExample)
CN (1) CN100533800C (enExample)
AT (1) ATE506704T1 (enExample)
DE (1) DE602005027601D1 (enExample)
TW (1) TWI390779B (enExample)
WO (1) WO2006044592A1 (enExample)

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