JP2012024564A5 - - Google Patents

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Publication number
JP2012024564A5
JP2012024564A5 JP2011137705A JP2011137705A JP2012024564A5 JP 2012024564 A5 JP2012024564 A5 JP 2012024564A5 JP 2011137705 A JP2011137705 A JP 2011137705A JP 2011137705 A JP2011137705 A JP 2011137705A JP 2012024564 A5 JP2012024564 A5 JP 2012024564A5
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JP
Japan
Prior art keywords
electrode
ultrasonic transducer
backing material
convex portion
matching layer
Prior art date
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Application number
JP2011137705A
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English (en)
Japanese (ja)
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JP2012024564A (ja
JP5620345B2 (ja
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Publication date
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Priority to JP2011137705A priority Critical patent/JP5620345B2/ja
Priority claimed from JP2011137705A external-priority patent/JP5620345B2/ja
Priority to US13/167,276 priority patent/US8674587B2/en
Publication of JP2012024564A publication Critical patent/JP2012024564A/ja
Priority to US14/137,578 priority patent/US20140103782A1/en
Publication of JP2012024564A5 publication Critical patent/JP2012024564A5/ja
Application granted granted Critical
Publication of JP5620345B2 publication Critical patent/JP5620345B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011137705A 2010-06-23 2011-06-21 超音波トランスデューサとその製造方法 Expired - Fee Related JP5620345B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011137705A JP5620345B2 (ja) 2010-06-23 2011-06-21 超音波トランスデューサとその製造方法
US13/167,276 US8674587B2 (en) 2010-06-23 2011-06-23 Ultrasonic transducer and fabricating the same
US14/137,578 US20140103782A1 (en) 2010-06-23 2013-12-20 Ultrasonic transducer and fabricating the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010143167 2010-06-23
JP2010143167 2010-06-23
JP2011137705A JP5620345B2 (ja) 2010-06-23 2011-06-21 超音波トランスデューサとその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014140950A Division JP5820511B2 (ja) 2010-06-23 2014-07-08 超音波トランスデューサとその製造方法

Publications (3)

Publication Number Publication Date
JP2012024564A JP2012024564A (ja) 2012-02-09
JP2012024564A5 true JP2012024564A5 (enExample) 2014-02-06
JP5620345B2 JP5620345B2 (ja) 2014-11-05

Family

ID=45351857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011137705A Expired - Fee Related JP5620345B2 (ja) 2010-06-23 2011-06-21 超音波トランスデューサとその製造方法

Country Status (2)

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US (2) US8674587B2 (enExample)
JP (1) JP5620345B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2965249B1 (fr) * 2010-09-28 2013-03-15 Eurocopter France Systeme de degivrage ameliore pour voilure fixe ou tournante d'un aeronef
JP5259762B2 (ja) 2011-03-24 2013-08-07 株式会社東芝 超音波プローブ及び超音波プローブ製造方法
KR101909131B1 (ko) * 2012-09-11 2018-12-18 삼성전자주식회사 초음파 변환기 및 그 제조방법
KR102107729B1 (ko) * 2013-08-19 2020-05-07 삼성메디슨 주식회사 초음파 프로브 및 그 제조 방법
US9604255B2 (en) * 2014-01-10 2017-03-28 Fujifilm Dimatix, Inc. Method, apparatus and system for a transferable micromachined piezoelectric transducer array
JP6505453B2 (ja) * 2014-02-10 2019-04-24 キヤノンメディカルシステムズ株式会社 超音波プローブ
EP3288290A4 (en) * 2015-04-21 2018-10-17 Olympus Corporation Ultrasonic transducer, ultrasonic probe, and method for manufacturing ultrasonic transducer
JP6594807B2 (ja) * 2016-03-16 2019-10-23 株式会社日立製作所 超音波探触子
US10347818B2 (en) 2016-03-31 2019-07-09 General Electric Company Method for manufacturing ultrasound transducers
US11471911B2 (en) * 2016-05-16 2022-10-18 Baker Hughes, A Ge Company, Llc Phased array ultrasonic transducer and method of manufacture
JP6681784B2 (ja) * 2016-05-20 2020-04-15 新光電気工業株式会社 バッキング部材及びその製造方法と超音波探触子
US10561398B2 (en) * 2016-12-20 2020-02-18 General Electric Company Ultrasound transducer and method for wafer level back face attachment
JP7047253B2 (ja) * 2017-03-22 2022-04-05 セイコーエプソン株式会社 超音波デバイスユニット、超音波探触子、及び超音波装置
JP7487473B2 (ja) * 2019-12-26 2024-05-21 セイコーエプソン株式会社 圧電デバイス、及びｍｅｍｓデバイス

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4385255A (en) * 1979-11-02 1983-05-24 Yokogawa Electric Works, Ltd. Linear array ultrasonic transducer
JP3376139B2 (ja) * 1994-12-27 2003-02-10 株式会社東芝 超音波トランスジューサとその製造方法
US6551248B2 (en) * 2001-07-31 2003-04-22 Koninklijke Philips Electronics N.V. System for attaching an acoustic element to an integrated circuit
JP3857170B2 (ja) * 2002-03-29 2006-12-13 日本電波工業株式会社 超音波探触子
US7741756B2 (en) * 2003-12-04 2010-06-22 Koninklijke Philips Electronics N.V. Ultrasound transducer and method for implementing flip-chip two dimensional array technology to curved arrays
US7230368B2 (en) * 2004-04-20 2007-06-12 Visualsonics Inc. Arrayed ultrasonic transducer
US7105986B2 (en) * 2004-08-27 2006-09-12 General Electric Company Ultrasound transducer with enhanced thermal conductivity
JP4990272B2 (ja) * 2006-04-28 2012-08-01 パナソニック株式会社 超音波探触子
JP4171038B2 (ja) * 2006-10-31 2008-10-22 株式会社東芝 超音波プローブおよび超音波診断装置
JP2008302098A (ja) * 2007-06-11 2008-12-18 Fujifilm Corp 超音波探触子、超音波探触子用バッキング材及びその製造方法
JP4386109B2 (ja) * 2007-07-11 2009-12-16 株式会社デンソー 超音波センサ及び超音波センサの製造方法
JP5259762B2 (ja) * 2011-03-24 2013-08-07 株式会社東芝 超音波プローブ及び超音波プローブ製造方法

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