JP2007121167A5 - - Google Patents

Download PDF

Info

Publication number
JP2007121167A5
JP2007121167A5 JP2005315586A JP2005315586A JP2007121167A5 JP 2007121167 A5 JP2007121167 A5 JP 2007121167A5 JP 2005315586 A JP2005315586 A JP 2005315586A JP 2005315586 A JP2005315586 A JP 2005315586A JP 2007121167 A5 JP2007121167 A5 JP 2007121167A5
Authority
JP
Japan
Prior art keywords
glass substrate
fixed electrode
substrate
silicon
protruding portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005315586A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007121167A (ja
JP4585426B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005315586A priority Critical patent/JP4585426B2/ja
Priority claimed from JP2005315586A external-priority patent/JP4585426B2/ja
Priority to DE602006001098T priority patent/DE602006001098D1/de
Priority to EP06022314A priority patent/EP1780525B1/en
Priority to US11/553,861 priority patent/US7382599B2/en
Publication of JP2007121167A publication Critical patent/JP2007121167A/ja
Publication of JP2007121167A5 publication Critical patent/JP2007121167A5/ja
Application granted granted Critical
Publication of JP4585426B2 publication Critical patent/JP4585426B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005315586A 2005-10-31 2005-10-31 静電容量型圧力センサ Expired - Fee Related JP4585426B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005315586A JP4585426B2 (ja) 2005-10-31 2005-10-31 静電容量型圧力センサ
DE602006001098T DE602006001098D1 (de) 2005-10-31 2006-10-25 Kapazitiver Drucksensor
EP06022314A EP1780525B1 (en) 2005-10-31 2006-10-25 Capacitive pressure sensor
US11/553,861 US7382599B2 (en) 2005-10-31 2006-10-27 Capacitive pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005315586A JP4585426B2 (ja) 2005-10-31 2005-10-31 静電容量型圧力センサ

Publications (3)

Publication Number Publication Date
JP2007121167A JP2007121167A (ja) 2007-05-17
JP2007121167A5 true JP2007121167A5 (enExample) 2007-11-08
JP4585426B2 JP4585426B2 (ja) 2010-11-24

Family

ID=37499473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005315586A Expired - Fee Related JP4585426B2 (ja) 2005-10-31 2005-10-31 静電容量型圧力センサ

Country Status (4)

Country Link
US (1) US7382599B2 (enExample)
EP (1) EP1780525B1 (enExample)
JP (1) JP4585426B2 (enExample)
DE (1) DE602006001098D1 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008101917A (ja) * 2006-10-17 2008-05-01 Alps Electric Co Ltd 圧力センサのパッケージ
MX2010003680A (es) 2007-10-05 2010-09-28 Nippon Filcon Kk Tela industrial de dos capas.
US7874322B2 (en) * 2007-10-05 2011-01-25 Nippon Filcon Co., Ltd. Industrial two-layer fabric
US8608321B2 (en) 2008-06-17 2013-12-17 The Invention Science Fund I, Llc Systems and methods for projecting in response to conformation
US8267526B2 (en) 2008-06-17 2012-09-18 The Invention Science Fund I, Llc Methods associated with receiving and transmitting information related to projection
US8384005B2 (en) 2008-06-17 2013-02-26 The Invention Science Fund I, Llc Systems and methods for selectively projecting information in response to at least one specified motion associated with pressure applied to at least one projection surface
US20090309826A1 (en) 2008-06-17 2009-12-17 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Systems and devices
US8936367B2 (en) 2008-06-17 2015-01-20 The Invention Science Fund I, Llc Systems and methods associated with projecting in response to conformation
US8733952B2 (en) 2008-06-17 2014-05-27 The Invention Science Fund I, Llc Methods and systems for coordinated use of two or more user responsive projectors
US8308304B2 (en) 2008-06-17 2012-11-13 The Invention Science Fund I, Llc Systems associated with receiving and transmitting information related to projection
US8641203B2 (en) 2008-06-17 2014-02-04 The Invention Science Fund I, Llc Methods and systems for receiving and transmitting signals between server and projector apparatuses
US8944608B2 (en) 2008-06-17 2015-02-03 The Invention Science Fund I, Llc Systems and methods associated with projecting in response to conformation
US8723787B2 (en) 2008-06-17 2014-05-13 The Invention Science Fund I, Llc Methods and systems related to an image capture projection surface
US8262236B2 (en) 2008-06-17 2012-09-11 The Invention Science Fund I, Llc Systems and methods for transmitting information associated with change of a projection surface
US8376558B2 (en) 2008-06-17 2013-02-19 The Invention Science Fund I, Llc Systems and methods for projecting in response to position change of a projection surface
US8820939B2 (en) 2008-06-17 2014-09-02 The Invention Science Fund I, Llc Projection associated methods and systems
US20090310038A1 (en) 2008-06-17 2009-12-17 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Projection in response to position
US8141430B2 (en) * 2009-07-01 2012-03-27 Brooks Instrument, Llc Monolithic vacuum manometer utilizing electrostatic interference as a means of detection
JP5913038B2 (ja) * 2012-10-01 2016-04-27 アルプス電気株式会社 静電容量型圧力センサ及びその製造方法
FI125958B (en) * 2013-05-10 2016-04-29 Murata Manufacturing Co Improved pressure sensor
CH708708A1 (de) * 2013-10-03 2015-04-15 Kistler Holding Ag Messelement zum Messen eines Drucks und Druckmesssensor.
DE102014101700A1 (de) * 2014-02-12 2015-08-13 Vega Grieshaber Kg Druckmesszelle
DE102014117911A1 (de) 2014-12-04 2016-06-09 Endress + Hauser Gmbh + Co. Kg Druckmesszelle
JP6922788B2 (ja) * 2018-03-05 2021-08-18 三菱電機株式会社 半導体圧力センサ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI842307L (fi) * 1984-06-07 1985-12-08 Vaisala Oy Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion.
FI78784C (fi) * 1988-01-18 1989-09-11 Vaisala Oy Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.
US4998179A (en) * 1989-02-28 1991-03-05 United Technologies Corporation Capacitive semiconductive sensor with hinged diaphragm for planar movement
DE4006108A1 (de) * 1990-02-27 1991-08-29 Bosch Gmbh Robert Verfahren zum aufbau von mikromechanischen bauelementen in dickschichttechnik
US5369544A (en) * 1993-04-05 1994-11-29 Ford Motor Company Silicon-on-insulator capacitive surface micromachined absolute pressure sensor
FI93059C (fi) * 1993-07-07 1995-02-10 Vaisala Oy Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
JPH0749278A (ja) 1993-08-05 1995-02-21 Omron Corp 圧力センサ
JPH0875582A (ja) 1994-09-08 1996-03-22 Omron Corp 静電容量型圧力センサ及び圧力測定方法並びに血圧計
US5528452A (en) * 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
JP3114570B2 (ja) * 1995-05-26 2000-12-04 オムロン株式会社 静電容量型圧力センサ
JP2900235B2 (ja) * 1995-07-17 1999-06-02 株式会社山武 静電容量式圧力センサ
US6556417B2 (en) * 1998-03-10 2003-04-29 Mcintosh Robert B. Method to construct variable-area capacitive transducers
JP4773630B2 (ja) * 2001-05-15 2011-09-14 株式会社デンソー ダイアフラム型半導体装置とその製造方法
JP2006170893A (ja) * 2004-12-17 2006-06-29 Alps Electric Co Ltd 静電容量型圧力センサ

Similar Documents

Publication Publication Date Title
JP2007121167A5 (enExample)
JP4585426B2 (ja) 静電容量型圧力センサ
JP2008516787A5 (enExample)
EP1860417A3 (en) A pressure sensor having a chamber and a method for fabricating the same
WO2007079454A3 (en) Pressure sensor with silicon frit bonded cap
WO2009001564A1 (ja) 半導体素子の実装構造体及びその製造方法、半導体素子の実装方法、並びに加圧ツール
WO2002003043A1 (en) Capacity type pressure sensor and method of manufacturing the pressure sensor
RU2014152353A (ru) Керамичесткий элемент, инкрустированный по меньшей мере одним декорированием из композиционной керамики
CN106794981A (zh) 用于电容式压力传感器的悬置膜
CN101825505A (zh) 一种mems压力敏感芯片及其制作方法
JP2017211375A5 (enExample)
JP2008205888A5 (enExample)
ITTO20030444A1 (it) Sensore di pressione a struttura integrata.
JP2006047279A (ja) ガラス基板及びそれを用いた静電容量型圧力センサ
CN100510667C (zh) 玻璃衬底和使用了该玻璃衬底的静电电容式压力传感器
CN107421663A (zh) 用于模收缩和高灵敏度的具有锚定件的压力传感器装置
JP2008039593A (ja) 静電容量型加速度センサ
JP2001284603A5 (enExample)
WO2008114728A1 (ja) 磁気式圧力センサ
JP2008261750A5 (enExample)
JP2007163456A (ja) 静電容量型圧力センサ
JP2014055868A (ja) 圧力センサ及びその製造方法並びに部材接合方法
JP2007127440A (ja) 静電容量型圧力センサ
JP2007155542A (ja) 静電容量型圧力センサ
JP2006047300A (ja) ガラス基板及びそれを用いた静電容量型圧力センサ