JP2017211375A5 - - Google Patents

Download PDF

Info

Publication number
JP2017211375A5
JP2017211375A5 JP2017094380A JP2017094380A JP2017211375A5 JP 2017211375 A5 JP2017211375 A5 JP 2017211375A5 JP 2017094380 A JP2017094380 A JP 2017094380A JP 2017094380 A JP2017094380 A JP 2017094380A JP 2017211375 A5 JP2017211375 A5 JP 2017211375A5
Authority
JP
Japan
Prior art keywords
overpressure
cavity
pressure sensor
diaphragm
pressure sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2017094380A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017211375A (ja
JP6586126B2 (ja
Filing date
Publication date
Priority claimed from US15/164,696 external-priority patent/US10197462B2/en
Application filed filed Critical
Publication of JP2017211375A publication Critical patent/JP2017211375A/ja
Publication of JP2017211375A5 publication Critical patent/JP2017211375A5/ja
Application granted granted Critical
Publication of JP6586126B2 publication Critical patent/JP6586126B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2017094380A 2016-05-25 2017-05-11 差圧センサ最大過剰圧保護機器 Active JP6586126B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/164,696 US10197462B2 (en) 2016-05-25 2016-05-25 Differential pressure sensor full overpressure protection device
US15/164,696 2016-05-25

Publications (3)

Publication Number Publication Date
JP2017211375A JP2017211375A (ja) 2017-11-30
JP2017211375A5 true JP2017211375A5 (enExample) 2019-09-12
JP6586126B2 JP6586126B2 (ja) 2019-10-02

Family

ID=58640713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017094380A Active JP6586126B2 (ja) 2016-05-25 2017-05-11 差圧センサ最大過剰圧保護機器

Country Status (3)

Country Link
US (1) US10197462B2 (enExample)
EP (1) EP3249371B1 (enExample)
JP (1) JP6586126B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9963340B2 (en) 2015-12-03 2018-05-08 Honeywell International Inc. Pressure sensor die over pressure protection for high over pressure to operating span ratios
CN112105901B (zh) * 2018-04-10 2022-11-01 沃特世科技公司 压力换能器、系统和方法
JP6352573B1 (ja) * 2018-04-20 2018-07-04 株式会社三重ロボット外装技術研究所 接触検出装置
CN112014027B (zh) * 2019-05-28 2023-09-01 武汉杰开科技有限公司 多器件封装结构及其制作方法
DE102020203868B4 (de) 2020-03-25 2022-04-28 Vitesco Technologies GmbH Gassensor für ein Fahrzeug
DE102020211142B4 (de) 2020-09-03 2022-08-18 Vitesco Technologies GmbH Gassensor für ein Fahrzeug
CN113432778B (zh) * 2021-05-25 2023-09-29 歌尔微电子股份有限公司 Mems差压传感器及其制造方法
WO2023286758A1 (ja) * 2021-07-14 2023-01-19 京セラ株式会社 接合体
US12467802B2 (en) * 2022-10-18 2025-11-11 Te Connectivity Solutions Gmbh Membrane of a sensor with multiple deflectable sections for different ranges of a sensed force or pressure

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4072058A (en) 1976-05-03 1978-02-07 Honeywell Inc. Differential pressure transmitter with pressure sensor protection
JPH06105787B2 (ja) 1983-02-25 1994-12-21 株式会社日立製作所 高耐圧圧力センサ
US4670733A (en) 1985-07-01 1987-06-02 Bell Microsensors, Inc. Differential pressure transducer
JPH0629819B2 (ja) 1985-12-20 1994-04-20 株式会社東芝 半導体圧力センサ
US4668889A (en) 1986-06-06 1987-05-26 Adams Donald L Static overpressure protection system for differential pressure transducer
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
US4852408A (en) * 1987-09-03 1989-08-01 Scott Fetzer Company Stop for integrated circuit diaphragm
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors
US4905575A (en) 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction
US5157973A (en) * 1989-03-16 1992-10-27 Process Automation Business, Inc. Pressure sensor with integral overpressure protection
DE58905475D1 (de) 1989-05-30 1993-10-07 Siemens Ag Drucksensor und Verfahren zu seiner Herstellung.
US5295395A (en) * 1991-02-07 1994-03-22 Hocker G Benjamin Diaphragm-based-sensors
WO1992017757A1 (en) 1991-04-05 1992-10-15 Mark Iv Transducer Corporation Differential pressure device
US5264820A (en) * 1992-03-31 1993-11-23 Eaton Corporation Diaphragm mounting system for a pressure transducer
JPH0635592A (ja) 1992-07-13 1994-02-10 Fujikura Rubber Ltd スタイラスペン
US5333504A (en) 1992-09-01 1994-08-02 Rosemount Inc. High overpressure low range pressure sensor
US5447071A (en) * 1992-12-16 1995-09-05 Hanson; Richard A. Direct coupled pressure sensing device
US5316619A (en) * 1993-02-05 1994-05-31 Ford Motor Company Capacitive surface micromachine absolute pressure sensor and method for processing
US5581038A (en) * 1994-04-04 1996-12-03 Sentir, Inc. Pressure measurement apparatus having a reverse mounted transducer and overpressure guard
US6030851A (en) 1995-06-07 2000-02-29 Grandmont; Paul E. Method for overpressure protected pressure sensor
IT1287123B1 (it) * 1996-10-31 1998-08-04 Abb Kent Taylor Spa Dispositivo per la misura di una pressione
US20010001550A1 (en) * 1998-11-12 2001-05-24 Janusz Bryzek Integral stress isolation apparatus and technique for semiconductor devices
US6588281B2 (en) * 2001-10-24 2003-07-08 Kulite Semiconductor Products, Inc. Double stop structure for a pressure transducer
US6595066B1 (en) * 2002-04-05 2003-07-22 Kulite Semiconductor Products, Inc. Stopped leadless differential sensor
JP3847281B2 (ja) * 2003-08-20 2006-11-22 株式会社山武 圧力センサ装置
US8350345B2 (en) 2003-12-29 2013-01-08 Vladimir Vaganov Three-dimensional input control device
US7089790B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with laminated membrane
US7198981B2 (en) * 2004-10-21 2007-04-03 Honeywell International Inc. Vacuum sealed surface acoustic wave pressure sensor
DE102007003544A1 (de) 2007-01-24 2008-07-31 Robert Bosch Gmbh Verfahren zur Herstellung eines Bauteils und Sensorelement
US20090120194A1 (en) 2007-11-08 2009-05-14 Honeywell International Inc. Silicon pressure sensor
KR101273700B1 (ko) 2011-09-15 2013-06-12 삼성전기주식회사 Ｍｅｍｓ 소자
FR2982023B1 (fr) * 2011-10-26 2015-03-06 Auxitrol Sa Structure micromecanique a membrane deformable et a protection contre de fortes deformations
US8786040B2 (en) 2012-12-21 2014-07-22 Intel Corporation Perpendicular spin transfer torque memory (STTM) device having offset cells and method to form same
FR3007134B1 (fr) * 2013-06-17 2018-11-16 Auxitrol S.A. Systeme de mesure de pression discriminant une panne d'une surpression ou d'une depression
US9379314B2 (en) 2013-12-17 2016-06-28 Qualcomm Incorporated Hybrid synthetic antiferromagnetic layer for perpendicular magnetic tunnel junction (MTJ)
US9410861B2 (en) 2014-03-25 2016-08-09 Honeywell International Inc. Pressure sensor with overpressure protection
JP6552400B2 (ja) * 2015-12-10 2019-07-31 アズビル株式会社 圧力センサチップ

Similar Documents

Publication Publication Date Title
JP2017211375A5 (enExample)
CN104897333B (zh) 一种mems压力传感元件及其制造方法
CN107848788B (zh) 具有容差沟槽的加固的晶圆级mems力传感器
JP2013224937A5 (enExample)
JP4585426B2 (ja) 静電容量型圧力センサ
US10197462B2 (en) Differential pressure sensor full overpressure protection device
JP2007121167A5 (enExample)
JP2015052594A (ja) 改良されたキャップ接合境界を備えた絶対圧力センサ
US9963340B2 (en) Pressure sensor die over pressure protection for high over pressure to operating span ratios
US20230126598A1 (en) Attachment of Stress Sensitive Integrated Circuit Dies
US10156489B2 (en) Piezoresistive pressure sensor
JP5220866B2 (ja) 半導体圧力センサ
JP5357469B2 (ja) 半導体圧力センサ
JPS59155971A (ja) 高耐圧圧力センサ
JP6131819B2 (ja) 圧力センサ
CN110779638A (zh) 压力传感器
KR101633027B1 (ko) Mems 센서
JP2013011478A (ja) 圧力測定器及び半導体圧力センサの台座
CN107421663A (zh) 用于模收缩和高灵敏度的具有锚定件的压力传感器装置
KR101573367B1 (ko) 압저항형 세라믹 압력센서
JP6015384B2 (ja) 半導体圧力センサ
JP2008089421A (ja) 圧力センサのパッケージ
JP3678090B2 (ja) 半導体加速度センサ及びその製造方法
JP2016048217A (ja) 圧力センサ
CN108394855B (zh) 一种mems传感器悬梁结构