JP6586126B2 - 差圧センサ最大過剰圧保護機器 - Google Patents

差圧センサ最大過剰圧保護機器 Download PDF

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Publication number
JP6586126B2
JP6586126B2 JP2017094380A JP2017094380A JP6586126B2 JP 6586126 B2 JP6586126 B2 JP 6586126B2 JP 2017094380 A JP2017094380 A JP 2017094380A JP 2017094380 A JP2017094380 A JP 2017094380A JP 6586126 B2 JP6586126 B2 JP 6586126B2
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Japan
Prior art keywords
overpressure
diaphragm
cavity
pressure sensor
pressure sensitive
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JP2017094380A
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English (en)
Japanese (ja)
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JP2017211375A (ja
JP2017211375A5 (enExample
Inventor
グレゴリー・シー．ブラウン
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Honeywell International Inc
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Honeywell International Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0047—Diaphragm with non uniform thickness, e.g. with grooves, bosses or continuously varying thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP2017094380A 2016-05-25 2017-05-11 差圧センサ最大過剰圧保護機器 Active JP6586126B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/164,696 US10197462B2 (en) 2016-05-25 2016-05-25 Differential pressure sensor full overpressure protection device
US15/164,696 2016-05-25

Publications (3)

Publication Number Publication Date
JP2017211375A JP2017211375A (ja) 2017-11-30
JP2017211375A5 JP2017211375A5 (enExample) 2019-09-12
JP6586126B2 true JP6586126B2 (ja) 2019-10-02

Family

ID=58640713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017094380A Active JP6586126B2 (ja) 2016-05-25 2017-05-11 差圧センサ最大過剰圧保護機器

Country Status (3)

Country Link
US (1) US10197462B2 (enExample)
EP (1) EP3249371B1 (enExample)
JP (1) JP6586126B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9963340B2 (en) 2015-12-03 2018-05-08 Honeywell International Inc. Pressure sensor die over pressure protection for high over pressure to operating span ratios
CN112105901B (zh) * 2018-04-10 2022-11-01 沃特世科技公司 压力换能器、系统和方法
JP6352573B1 (ja) * 2018-04-20 2018-07-04 株式会社三重ロボット外装技術研究所 接触検出装置
CN112014027B (zh) * 2019-05-28 2023-09-01 武汉杰开科技有限公司 多器件封装结构及其制作方法
DE102020203868B4 (de) 2020-03-25 2022-04-28 Vitesco Technologies GmbH Gassensor für ein Fahrzeug
DE102020211142B4 (de) 2020-09-03 2022-08-18 Vitesco Technologies GmbH Gassensor für ein Fahrzeug
CN113432778B (zh) * 2021-05-25 2023-09-29 歌尔微电子股份有限公司 Mems差压传感器及其制造方法
WO2023286758A1 (ja) * 2021-07-14 2023-01-19 京セラ株式会社 接合体
US12467802B2 (en) * 2022-10-18 2025-11-11 Te Connectivity Solutions Gmbh Membrane of a sensor with multiple deflectable sections for different ranges of a sensed force or pressure

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US4072058A (en) 1976-05-03 1978-02-07 Honeywell Inc. Differential pressure transmitter with pressure sensor protection
JPH06105787B2 (ja) 1983-02-25 1994-12-21 株式会社日立製作所 高耐圧圧力センサ
US4670733A (en) 1985-07-01 1987-06-02 Bell Microsensors, Inc. Differential pressure transducer
JPH0629819B2 (ja) 1985-12-20 1994-04-20 株式会社東芝 半導体圧力センサ
US4668889A (en) 1986-06-06 1987-05-26 Adams Donald L Static overpressure protection system for differential pressure transducer
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
US4852408A (en) * 1987-09-03 1989-08-01 Scott Fetzer Company Stop for integrated circuit diaphragm
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors
US4905575A (en) 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction
US5157973A (en) * 1989-03-16 1992-10-27 Process Automation Business, Inc. Pressure sensor with integral overpressure protection
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US5295395A (en) * 1991-02-07 1994-03-22 Hocker G Benjamin Diaphragm-based-sensors
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JPH0635592A (ja) 1992-07-13 1994-02-10 Fujikura Rubber Ltd スタイラスペン
US5333504A (en) 1992-09-01 1994-08-02 Rosemount Inc. High overpressure low range pressure sensor
US5447071A (en) * 1992-12-16 1995-09-05 Hanson; Richard A. Direct coupled pressure sensing device
US5316619A (en) * 1993-02-05 1994-05-31 Ford Motor Company Capacitive surface micromachine absolute pressure sensor and method for processing
US5581038A (en) * 1994-04-04 1996-12-03 Sentir, Inc. Pressure measurement apparatus having a reverse mounted transducer and overpressure guard
US6030851A (en) 1995-06-07 2000-02-29 Grandmont; Paul E. Method for overpressure protected pressure sensor
IT1287123B1 (it) * 1996-10-31 1998-08-04 Abb Kent Taylor Spa Dispositivo per la misura di una pressione
US20010001550A1 (en) * 1998-11-12 2001-05-24 Janusz Bryzek Integral stress isolation apparatus and technique for semiconductor devices
US6588281B2 (en) * 2001-10-24 2003-07-08 Kulite Semiconductor Products, Inc. Double stop structure for a pressure transducer
US6595066B1 (en) * 2002-04-05 2003-07-22 Kulite Semiconductor Products, Inc. Stopped leadless differential sensor
JP3847281B2 (ja) * 2003-08-20 2006-11-22 株式会社山武 圧力センサ装置
US8350345B2 (en) 2003-12-29 2013-01-08 Vladimir Vaganov Three-dimensional input control device
US7089790B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with laminated membrane
US7198981B2 (en) * 2004-10-21 2007-04-03 Honeywell International Inc. Vacuum sealed surface acoustic wave pressure sensor
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US8786040B2 (en) 2012-12-21 2014-07-22 Intel Corporation Perpendicular spin transfer torque memory (STTM) device having offset cells and method to form same
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US9379314B2 (en) 2013-12-17 2016-06-28 Qualcomm Incorporated Hybrid synthetic antiferromagnetic layer for perpendicular magnetic tunnel junction (MTJ)
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JP6552400B2 (ja) * 2015-12-10 2019-07-31 アズビル株式会社 圧力センサチップ

Also Published As

Publication number Publication date
US20170343438A1 (en) 2017-11-30
EP3249371B1 (en) 2019-09-25
US10197462B2 (en) 2019-02-05
JP2017211375A (ja) 2017-11-30
EP3249371A1 (en) 2017-11-29

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