JP4585426B2 - 静電容量型圧力センサ - Google Patents
静電容量型圧力センサ Download PDFInfo
- Publication number
- JP4585426B2 JP4585426B2 JP2005315586A JP2005315586A JP4585426B2 JP 4585426 B2 JP4585426 B2 JP 4585426B2 JP 2005315586 A JP2005315586 A JP 2005315586A JP 2005315586 A JP2005315586 A JP 2005315586A JP 4585426 B2 JP4585426 B2 JP 4585426B2
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- Prior art keywords
- glass substrate
- fixed electrode
- substrate
- silicon substrate
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000758 substrate Substances 0.000 claims description 159
- 239000011521 glass Substances 0.000 claims description 90
- 229910052710 silicon Inorganic materials 0.000 claims description 84
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 82
- 239000010703 silicon Substances 0.000 claims description 82
- 229910018557 Si O Inorganic materials 0.000 claims description 5
- 229910008045 Si-Si Inorganic materials 0.000 claims description 5
- 229910006411 Si—Si Inorganic materials 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 5
- 238000003801 milling Methods 0.000 claims description 3
- 238000000605 extraction Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003071 parasitic effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- -1 sodium (for example Chemical class 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
図1は、本発明の実施の形態に係る静電容量型圧力センサの図であり、(a)は断面図であり、(b)は平面図である。
11a,11b 主面
11c 凹部
11d 接合面
12,14,16 シリコン基板
12a 固定電極
12b 突出部
12c 溝部
13 引き出し電極
14a,16a 感圧ダイヤフラム
16b 厚肉部
15,17 キャビティ
Claims (3)
- 相互に対向する一対の主面を有するガラス基板と、前記ガラス基板を貫通して一方の主面側で露出した固定電極を有すると共に、前記ガラス基板を貫通して前記一方の主面側で露出した突出部を有する第1シリコン基板と、前記ガラス基板の一方の主面上に接合されており、前記第固定電極との間でキャビティを形成するように対向して配置された可動電極を有する第2シリコン基板と、を具備し、前記突出部上に前記固定電極用の引き出し電極が形成され、前記第1シリコン基板は、前記固定電極の外側に前記突出部が位置し、前記固定電極と前記突出部とで構成される溝部内に前記ガラス基板が配置され、前記キャビティを形成するガラス基板の凹部が前記固定電極の外側で前記固定電極よりリセスしていることを特徴とする静電容量型圧力センサ。
- 前記ガラス基板と前記第1及び第2シリコンとの界面においてSi−Si結合又はSi−O結合を有することを特徴とする請求項1に記載の静電容量型圧力センサ。
- 第1シリコン基板を準備し、前記第1シリコン基板の一方の主面をエッチングして、固定電極及び突出部を形成する工程と、前記固定電極及び前記突出部を形成した前記第1シリコン基板上にガラス基板を置き、真空下で、前記第1シリコン基板及び前記ガラス基板を加熱し、前記第1シリコン基板を前記ガラス基板に押圧して前記固定電極及び前記突出部を前記ガラス基板の主面に押し込んで前記第1シリコン基板と前記ガラス基板とを接合する工程と、前記ガラス基板の主面側を研磨処理して、前記第1シリコン基板の前記固定電極及び前記突出部を露出させ、前記ガラス基板及び前記固定電極をミリング加工してキャビティ用の凹部を形成する工程と、前記固定電極の外側をミリング加工してリセスを形成する工程と、前記第1シリコン基板の前記突出部上に、前記固定電極用の引き出し電極を形成する工程と、感圧ダイヤフラムが前記固定電極と所定の間隔をおいて位置するようにして所定の厚さに形成した第2シリコン基板を、前記ガラス基板の接合面上に陽極接合処理により接合する工程と、を具備することを特徴とする静電容量型圧力センサの製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005315586A JP4585426B2 (ja) | 2005-10-31 | 2005-10-31 | 静電容量型圧力センサ |
EP06022314A EP1780525B1 (en) | 2005-10-31 | 2006-10-25 | Capacitive pressure sensor |
DE602006001098T DE602006001098D1 (de) | 2005-10-31 | 2006-10-25 | Kapazitiver Drucksensor |
US11/553,861 US7382599B2 (en) | 2005-10-31 | 2006-10-27 | Capacitive pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005315586A JP4585426B2 (ja) | 2005-10-31 | 2005-10-31 | 静電容量型圧力センサ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007121167A JP2007121167A (ja) | 2007-05-17 |
JP2007121167A5 JP2007121167A5 (ja) | 2007-11-08 |
JP4585426B2 true JP4585426B2 (ja) | 2010-11-24 |
Family
ID=37499473
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005315586A Expired - Fee Related JP4585426B2 (ja) | 2005-10-31 | 2005-10-31 | 静電容量型圧力センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7382599B2 (ja) |
EP (1) | EP1780525B1 (ja) |
JP (1) | JP4585426B2 (ja) |
DE (1) | DE602006001098D1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016526157A (ja) * | 2013-05-10 | 2016-09-01 | 株式会社村田製作所 | 改良された圧力センサー |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008101917A (ja) * | 2006-10-17 | 2008-05-01 | Alps Electric Co Ltd | 圧力センサのパッケージ |
JP5466945B2 (ja) | 2007-10-05 | 2014-04-09 | 日本フイルコン株式会社 | 工業用二層織物 |
EP2213787B1 (en) * | 2007-10-05 | 2019-12-04 | Nippon Filcon Co., Ltd. | Industrial two-layer fabric |
US8602564B2 (en) | 2008-06-17 | 2013-12-10 | The Invention Science Fund I, Llc | Methods and systems for projecting in response to position |
US8262236B2 (en) | 2008-06-17 | 2012-09-11 | The Invention Science Fund I, Llc | Systems and methods for transmitting information associated with change of a projection surface |
US8430515B2 (en) | 2008-06-17 | 2013-04-30 | The Invention Science Fund I, Llc | Systems and methods for projecting |
US8641203B2 (en) | 2008-06-17 | 2014-02-04 | The Invention Science Fund I, Llc | Methods and systems for receiving and transmitting signals between server and projector apparatuses |
US8936367B2 (en) | 2008-06-17 | 2015-01-20 | The Invention Science Fund I, Llc | Systems and methods associated with projecting in response to conformation |
US8820939B2 (en) | 2008-06-17 | 2014-09-02 | The Invention Science Fund I, Llc | Projection associated methods and systems |
US8608321B2 (en) | 2008-06-17 | 2013-12-17 | The Invention Science Fund I, Llc | Systems and methods for projecting in response to conformation |
US8267526B2 (en) | 2008-06-17 | 2012-09-18 | The Invention Science Fund I, Llc | Methods associated with receiving and transmitting information related to projection |
US8308304B2 (en) | 2008-06-17 | 2012-11-13 | The Invention Science Fund I, Llc | Systems associated with receiving and transmitting information related to projection |
US8944608B2 (en) | 2008-06-17 | 2015-02-03 | The Invention Science Fund I, Llc | Systems and methods associated with projecting in response to conformation |
US8384005B2 (en) | 2008-06-17 | 2013-02-26 | The Invention Science Fund I, Llc | Systems and methods for selectively projecting information in response to at least one specified motion associated with pressure applied to at least one projection surface |
US8733952B2 (en) | 2008-06-17 | 2014-05-27 | The Invention Science Fund I, Llc | Methods and systems for coordinated use of two or more user responsive projectors |
US8723787B2 (en) | 2008-06-17 | 2014-05-13 | The Invention Science Fund I, Llc | Methods and systems related to an image capture projection surface |
US20090309826A1 (en) | 2008-06-17 | 2009-12-17 | Searete Llc, A Limited Liability Corporation Of The State Of Delaware | Systems and devices |
US8141430B2 (en) * | 2009-07-01 | 2012-03-27 | Brooks Instrument, Llc | Monolithic vacuum manometer utilizing electrostatic interference as a means of detection |
JP5913038B2 (ja) * | 2012-10-01 | 2016-04-27 | アルプス電気株式会社 | 静電容量型圧力センサ及びその製造方法 |
CH708708A1 (de) * | 2013-10-03 | 2015-04-15 | Kistler Holding Ag | Messelement zum Messen eines Drucks und Druckmesssensor. |
DE102014101700A1 (de) * | 2014-02-12 | 2015-08-13 | Vega Grieshaber Kg | Druckmesszelle |
DE102014117911A1 (de) * | 2014-12-04 | 2016-06-09 | Endress + Hauser Gmbh + Co. Kg | Druckmesszelle |
JP6922788B2 (ja) * | 2018-03-05 | 2021-08-18 | 三菱電機株式会社 | 半導体圧力センサ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01288747A (ja) * | 1988-01-18 | 1989-11-21 | Vaisala Oy | 圧力センサ構造およびその製造方法 |
JP2918272B2 (ja) * | 1989-02-28 | 1999-07-12 | ブリード・オートモティブ・テクノロジィ・インク | 線形応答性を有する容量型センサ及び線形応答性を得るための方法 |
JP5085857B2 (ja) * | 2005-09-22 | 2012-11-28 | Towa株式会社 | 切断装置及び切断方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI842307A (fi) * | 1984-06-07 | 1985-12-08 | Vaisala Oy | Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion. |
DE4006108A1 (de) * | 1990-02-27 | 1991-08-29 | Bosch Gmbh Robert | Verfahren zum aufbau von mikromechanischen bauelementen in dickschichttechnik |
US5369544A (en) * | 1993-04-05 | 1994-11-29 | Ford Motor Company | Silicon-on-insulator capacitive surface micromachined absolute pressure sensor |
FI93059C (fi) * | 1993-07-07 | 1995-02-10 | Vaisala Oy | Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi |
JPH0749278A (ja) | 1993-08-05 | 1995-02-21 | Omron Corp | 圧力センサ |
JPH0875582A (ja) | 1994-09-08 | 1996-03-22 | Omron Corp | 静電容量型圧力センサ及び圧力測定方法並びに血圧計 |
US5528452A (en) * | 1994-11-22 | 1996-06-18 | Case Western Reserve University | Capacitive absolute pressure sensor |
JP3114570B2 (ja) * | 1995-05-26 | 2000-12-04 | オムロン株式会社 | 静電容量型圧力センサ |
JP2900235B2 (ja) * | 1995-07-17 | 1999-06-02 | 株式会社山武 | 静電容量式圧力センサ |
US6556417B2 (en) * | 1998-03-10 | 2003-04-29 | Mcintosh Robert B. | Method to construct variable-area capacitive transducers |
JP4773630B2 (ja) * | 2001-05-15 | 2011-09-14 | 株式会社デンソー | ダイアフラム型半導体装置とその製造方法 |
JP2006170893A (ja) * | 2004-12-17 | 2006-06-29 | Alps Electric Co Ltd | 静電容量型圧力センサ |
-
2005
- 2005-10-31 JP JP2005315586A patent/JP4585426B2/ja not_active Expired - Fee Related
-
2006
- 2006-10-25 EP EP06022314A patent/EP1780525B1/en not_active Expired - Fee Related
- 2006-10-25 DE DE602006001098T patent/DE602006001098D1/de not_active Expired - Fee Related
- 2006-10-27 US US11/553,861 patent/US7382599B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01288747A (ja) * | 1988-01-18 | 1989-11-21 | Vaisala Oy | 圧力センサ構造およびその製造方法 |
JP2918272B2 (ja) * | 1989-02-28 | 1999-07-12 | ブリード・オートモティブ・テクノロジィ・インク | 線形応答性を有する容量型センサ及び線形応答性を得るための方法 |
JP5085857B2 (ja) * | 2005-09-22 | 2012-11-28 | Towa株式会社 | 切断装置及び切断方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016526157A (ja) * | 2013-05-10 | 2016-09-01 | 株式会社村田製作所 | 改良された圧力センサー |
Also Published As
Publication number | Publication date |
---|---|
EP1780525A1 (en) | 2007-05-02 |
DE602006001098D1 (de) | 2008-06-19 |
US20070095147A1 (en) | 2007-05-03 |
JP2007121167A (ja) | 2007-05-17 |
US7382599B2 (en) | 2008-06-03 |
EP1780525B1 (en) | 2008-05-07 |
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