JP4585426B2 - 静電容量型圧力センサ - Google Patents

静電容量型圧力センサ Download PDF

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Publication number
JP4585426B2
JP4585426B2 JP2005315586A JP2005315586A JP4585426B2 JP 4585426 B2 JP4585426 B2 JP 4585426B2 JP 2005315586 A JP2005315586 A JP 2005315586A JP 2005315586 A JP2005315586 A JP 2005315586A JP 4585426 B2 JP4585426 B2 JP 4585426B2
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JP
Japan
Prior art keywords
glass substrate
fixed electrode
substrate
silicon substrate
silicon
Prior art date
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Expired - Fee Related
Application number
JP2005315586A
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English (en)
Japanese (ja)
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JP2007121167A (ja
JP2007121167A5 (enExample
Inventor
勝也 菊入
清 佐藤
哲也 福田
吉延 中村
弘之 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co Ltd filed Critical Alps Electric Co Ltd
Priority to JP2005315586A priority Critical patent/JP4585426B2/ja
Priority to DE602006001098T priority patent/DE602006001098D1/de
Priority to EP06022314A priority patent/EP1780525B1/en
Priority to US11/553,861 priority patent/US7382599B2/en
Publication of JP2007121167A publication Critical patent/JP2007121167A/ja
Publication of JP2007121167A5 publication Critical patent/JP2007121167A5/ja
Application granted granted Critical
Publication of JP4585426B2 publication Critical patent/JP4585426B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP2005315586A 2005-10-31 2005-10-31 静電容量型圧力センサ Expired - Fee Related JP4585426B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005315586A JP4585426B2 (ja) 2005-10-31 2005-10-31 静電容量型圧力センサ
DE602006001098T DE602006001098D1 (de) 2005-10-31 2006-10-25 Kapazitiver Drucksensor
EP06022314A EP1780525B1 (en) 2005-10-31 2006-10-25 Capacitive pressure sensor
US11/553,861 US7382599B2 (en) 2005-10-31 2006-10-27 Capacitive pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005315586A JP4585426B2 (ja) 2005-10-31 2005-10-31 静電容量型圧力センサ

Publications (3)

Publication Number Publication Date
JP2007121167A JP2007121167A (ja) 2007-05-17
JP2007121167A5 JP2007121167A5 (enExample) 2007-11-08
JP4585426B2 true JP4585426B2 (ja) 2010-11-24

Family

ID=37499473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005315586A Expired - Fee Related JP4585426B2 (ja) 2005-10-31 2005-10-31 静電容量型圧力センサ

Country Status (4)

Country Link
US (1) US7382599B2 (enExample)
EP (1) EP1780525B1 (enExample)
JP (1) JP4585426B2 (enExample)
DE (1) DE602006001098D1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016526157A (ja) * 2013-05-10 2016-09-01 株式会社村田製作所 改良された圧力センサー

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008101917A (ja) * 2006-10-17 2008-05-01 Alps Electric Co Ltd 圧力センサのパッケージ
MX2010003680A (es) 2007-10-05 2010-09-28 Nippon Filcon Kk Tela industrial de dos capas.
US7874322B2 (en) * 2007-10-05 2011-01-25 Nippon Filcon Co., Ltd. Industrial two-layer fabric
US8608321B2 (en) 2008-06-17 2013-12-17 The Invention Science Fund I, Llc Systems and methods for projecting in response to conformation
US8267526B2 (en) 2008-06-17 2012-09-18 The Invention Science Fund I, Llc Methods associated with receiving and transmitting information related to projection
US8384005B2 (en) 2008-06-17 2013-02-26 The Invention Science Fund I, Llc Systems and methods for selectively projecting information in response to at least one specified motion associated with pressure applied to at least one projection surface
US20090309826A1 (en) 2008-06-17 2009-12-17 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Systems and devices
US8936367B2 (en) 2008-06-17 2015-01-20 The Invention Science Fund I, Llc Systems and methods associated with projecting in response to conformation
US8733952B2 (en) 2008-06-17 2014-05-27 The Invention Science Fund I, Llc Methods and systems for coordinated use of two or more user responsive projectors
US8308304B2 (en) 2008-06-17 2012-11-13 The Invention Science Fund I, Llc Systems associated with receiving and transmitting information related to projection
US8641203B2 (en) 2008-06-17 2014-02-04 The Invention Science Fund I, Llc Methods and systems for receiving and transmitting signals between server and projector apparatuses
US8944608B2 (en) 2008-06-17 2015-02-03 The Invention Science Fund I, Llc Systems and methods associated with projecting in response to conformation
US8723787B2 (en) 2008-06-17 2014-05-13 The Invention Science Fund I, Llc Methods and systems related to an image capture projection surface
US8262236B2 (en) 2008-06-17 2012-09-11 The Invention Science Fund I, Llc Systems and methods for transmitting information associated with change of a projection surface
US8376558B2 (en) 2008-06-17 2013-02-19 The Invention Science Fund I, Llc Systems and methods for projecting in response to position change of a projection surface
US8820939B2 (en) 2008-06-17 2014-09-02 The Invention Science Fund I, Llc Projection associated methods and systems
US20090310038A1 (en) 2008-06-17 2009-12-17 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Projection in response to position
US8141430B2 (en) * 2009-07-01 2012-03-27 Brooks Instrument, Llc Monolithic vacuum manometer utilizing electrostatic interference as a means of detection
JP5913038B2 (ja) * 2012-10-01 2016-04-27 アルプス電気株式会社 静電容量型圧力センサ及びその製造方法
CH708708A1 (de) * 2013-10-03 2015-04-15 Kistler Holding Ag Messelement zum Messen eines Drucks und Druckmesssensor.
DE102014101700A1 (de) * 2014-02-12 2015-08-13 Vega Grieshaber Kg Druckmesszelle
DE102014117911A1 (de) 2014-12-04 2016-06-09 Endress + Hauser Gmbh + Co. Kg Druckmesszelle
JP6922788B2 (ja) * 2018-03-05 2021-08-18 三菱電機株式会社 半導体圧力センサ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI842307L (fi) * 1984-06-07 1985-12-08 Vaisala Oy Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion.
FI78784C (fi) * 1988-01-18 1989-09-11 Vaisala Oy Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.
US4998179A (en) * 1989-02-28 1991-03-05 United Technologies Corporation Capacitive semiconductive sensor with hinged diaphragm for planar movement
DE4006108A1 (de) * 1990-02-27 1991-08-29 Bosch Gmbh Robert Verfahren zum aufbau von mikromechanischen bauelementen in dickschichttechnik
US5369544A (en) * 1993-04-05 1994-11-29 Ford Motor Company Silicon-on-insulator capacitive surface micromachined absolute pressure sensor
FI93059C (fi) * 1993-07-07 1995-02-10 Vaisala Oy Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
JPH0749278A (ja) 1993-08-05 1995-02-21 Omron Corp 圧力センサ
JPH0875582A (ja) 1994-09-08 1996-03-22 Omron Corp 静電容量型圧力センサ及び圧力測定方法並びに血圧計
US5528452A (en) * 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
JP3114570B2 (ja) * 1995-05-26 2000-12-04 オムロン株式会社 静電容量型圧力センサ
JP2900235B2 (ja) * 1995-07-17 1999-06-02 株式会社山武 静電容量式圧力センサ
US6556417B2 (en) * 1998-03-10 2003-04-29 Mcintosh Robert B. Method to construct variable-area capacitive transducers
JP4773630B2 (ja) * 2001-05-15 2011-09-14 株式会社デンソー ダイアフラム型半導体装置とその製造方法
JP2006170893A (ja) * 2004-12-17 2006-06-29 Alps Electric Co Ltd 静電容量型圧力センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016526157A (ja) * 2013-05-10 2016-09-01 株式会社村田製作所 改良された圧力センサー

Also Published As

Publication number Publication date
DE602006001098D1 (de) 2008-06-19
JP2007121167A (ja) 2007-05-17
EP1780525B1 (en) 2008-05-07
US7382599B2 (en) 2008-06-03
US20070095147A1 (en) 2007-05-03
EP1780525A1 (en) 2007-05-02

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