JP5970081B2 - 光学用途及び他の用途のための、単結晶シリコン及び／または他の材料を用いて形成された構造体 - Google Patents

光学用途及び他の用途のための、単結晶シリコン及び／または他の材料を用いて形成された構造体 Download PDF

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JP5970081B2
JP5970081B2 JP2014552231A JP2014552231A JP5970081B2 JP 5970081 B2 JP5970081 B2 JP 5970081B2 JP 2014552231 A JP2014552231 A JP 2014552231A JP 2014552231 A JP2014552231 A JP 2014552231A JP 5970081 B2 JP5970081 B2 JP 5970081B2
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substrate
single crystal
crystal silicon
membrane
angle
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Japanese (ja)
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JP2015515113A5 (enExample
JP2015515113A (ja
Inventor
コセンコ、バレンティン
リー マクベイン、エドワード
リー マクベイン、エドワード
エメカ ウゾ、サイプリアン
エメカ ウゾ、サイプリアン
モナジェミ、ペズマン
サバスティウク、セルゲイ
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インヴェンサス・コーポレイション
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Micromachines (AREA)
  • Weting (AREA)
  • Optical Integrated Circuits (AREA)
JP2014552231A 2012-01-10 2013-01-07 光学用途及び他の用途のための、単結晶シリコン及び／または他の材料を用いて形成された構造体 Active JP5970081B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201261585217P 2012-01-10 2012-01-10
US61/585,217 2012-01-10
US13/362,898 US8757897B2 (en) 2012-01-10 2012-01-31 Optical interposer
US13/362,898 2012-01-31
US13/454,713 2012-04-24
US13/454,713 US9323010B2 (en) 2012-01-10 2012-04-24 Structures formed using monocrystalline silicon and/or other materials for optical and other applications
PCT/US2013/020562 WO2013106285A2 (en) 2012-01-10 2013-01-07 Structures formed using monocrystalline silicon and/or other materials for optical and other applications

Publications (3)

Publication Number Publication Date
JP2015515113A JP2015515113A (ja) 2015-05-21
JP2015515113A5 JP2015515113A5 (enExample) 2016-02-12
JP5970081B2 true JP5970081B2 (ja) 2016-08-17

Family

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JP2014552231A Active JP5970081B2 (ja) 2012-01-10 2013-01-07 光学用途及び他の用途のための、単結晶シリコン及び／または他の材料を用いて形成された構造体

Country Status (7)

Country Link
US (1) US9323010B2 (enExample)
EP (2) EP2802915B1 (enExample)
JP (1) JP5970081B2 (enExample)
KR (2) KR101955060B1 (enExample)
CN (2) CN104364688B (enExample)
TW (2) TWI539191B (enExample)
WO (2) WO2013106285A2 (enExample)

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Also Published As

Publication number Publication date
TW201333567A (zh) 2013-08-16
WO2013106285A3 (en) 2013-09-26
EP2802915A1 (en) 2014-11-19
CN104364688B (zh) 2016-08-24
KR101870490B1 (ko) 2018-06-22
CN104169768A (zh) 2014-11-26
US20130177274A1 (en) 2013-07-11
KR20140112069A (ko) 2014-09-22
JP2015515113A (ja) 2015-05-21
EP2802916A2 (en) 2014-11-19
WO2013106285A2 (en) 2013-07-18
TWI539191B (zh) 2016-06-21
EP2802916B1 (en) 2020-03-11
TW201333562A (zh) 2013-08-16
EP2802915B1 (en) 2017-04-12
KR101955060B1 (ko) 2019-03-06
CN104364688A (zh) 2015-02-18
TWI553368B (zh) 2016-10-11
US9323010B2 (en) 2016-04-26
CN104169768B (zh) 2016-03-02
WO2013106288A1 (en) 2013-07-18
KR20140112068A (ko) 2014-09-22

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