KR101955060B1 - 광학 인터포저 및 그 제조 방법 - Google Patents

광학 인터포저 및 그 제조 방법 Download PDF

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Publication number
KR101955060B1
KR101955060B1 KR1020147022313A KR20147022313A KR101955060B1 KR 101955060 B1 KR101955060 B1 KR 101955060B1 KR 1020147022313 A KR1020147022313 A KR 1020147022313A KR 20147022313 A KR20147022313 A KR 20147022313A KR 101955060 B1 KR101955060 B1 KR 101955060B1
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South Korea
Prior art keywords
cavity
interposer
sidewall
layer
optical
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Korean (ko)
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KR20140112069A (ko
Inventor
발렌틴 코센코
에드워드 리 백베인
시프리언 에메카 유조
페즈만 모나게미
세르게이 사바스티오크
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인벤사스 코포레이션
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Priority claimed from US13/362,898 external-priority patent/US8757897B2/en
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Publication of KR20140112069A publication Critical patent/KR20140112069A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Micromachines (AREA)
  • Weting (AREA)
  • Optical Integrated Circuits (AREA)
KR1020147022313A 2012-01-10 2013-01-07 광학 인터포저 및 그 제조 방법 Active KR101955060B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201261585217P 2012-01-10 2012-01-10
US61/585,217 2012-01-10
US13/362,898 US8757897B2 (en) 2012-01-10 2012-01-31 Optical interposer
US13/362,898 2012-01-31
US13/454,713 2012-04-24
US13/454,713 US9323010B2 (en) 2012-01-10 2012-04-24 Structures formed using monocrystalline silicon and/or other materials for optical and other applications
PCT/US2013/020578 WO2013106288A1 (en) 2012-01-10 2013-01-07 Optical interposer

Publications (2)

Publication Number Publication Date
KR20140112069A KR20140112069A (ko) 2014-09-22
KR101955060B1 true KR101955060B1 (ko) 2019-03-06

Family

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Family Applications (2)

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KR1020147022313A Active KR101955060B1 (ko) 2012-01-10 2013-01-07 광학 인터포저 및 그 제조 방법
KR1020147022311A Active KR101870490B1 (ko) 2012-01-10 2013-01-07 단결정 실리콘을 사용하여 형성된 구조체

Family Applications After (1)

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KR1020147022311A Active KR101870490B1 (ko) 2012-01-10 2013-01-07 단결정 실리콘을 사용하여 형성된 구조체

Country Status (7)

Country Link
US (1) US9323010B2 (enExample)
EP (2) EP2802915B1 (enExample)
JP (1) JP5970081B2 (enExample)
KR (2) KR101955060B1 (enExample)
CN (2) CN104364688B (enExample)
TW (2) TWI539191B (enExample)
WO (2) WO2013106285A2 (enExample)

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Publication number Publication date
TW201333567A (zh) 2013-08-16
WO2013106285A3 (en) 2013-09-26
EP2802915A1 (en) 2014-11-19
CN104364688B (zh) 2016-08-24
KR101870490B1 (ko) 2018-06-22
CN104169768A (zh) 2014-11-26
US20130177274A1 (en) 2013-07-11
KR20140112069A (ko) 2014-09-22
JP2015515113A (ja) 2015-05-21
EP2802916A2 (en) 2014-11-19
WO2013106285A2 (en) 2013-07-18
JP5970081B2 (ja) 2016-08-17
TWI539191B (zh) 2016-06-21
EP2802916B1 (en) 2020-03-11
TW201333562A (zh) 2013-08-16
EP2802915B1 (en) 2017-04-12
CN104364688A (zh) 2015-02-18
TWI553368B (zh) 2016-10-11
US9323010B2 (en) 2016-04-26
CN104169768B (zh) 2016-03-02
WO2013106288A1 (en) 2013-07-18
KR20140112068A (ko) 2014-09-22

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