JP2013096806A5 - - Google Patents

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Publication number
JP2013096806A5
JP2013096806A5 JP2011239119A JP2011239119A JP2013096806A5 JP 2013096806 A5 JP2013096806 A5 JP 2013096806A5 JP 2011239119 A JP2011239119 A JP 2011239119A JP 2011239119 A JP2011239119 A JP 2011239119A JP 2013096806 A5 JP2013096806 A5 JP 2013096806A5
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JP
Japan
Prior art keywords
physical quantity
base
detection device
quantity detection
support
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Application number
JP2011239119A
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English (en)
Japanese (ja)
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JP5896114B2 (ja
JP2013096806A (ja
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Priority to JP2011239119A priority Critical patent/JP5896114B2/ja
Priority claimed from JP2011239119A external-priority patent/JP5896114B2/ja
Priority to US13/661,433 priority patent/US9322650B2/en
Priority to CN201210422835.7A priority patent/CN103090887B/zh
Publication of JP2013096806A publication Critical patent/JP2013096806A/ja
Publication of JP2013096806A5 publication Critical patent/JP2013096806A5/ja
Application granted granted Critical
Publication of JP5896114B2 publication Critical patent/JP5896114B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011239119A 2011-10-31 2011-10-31 物理量検出デバイス、物理量検出器、および電子機器 Active JP5896114B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011239119A JP5896114B2 (ja) 2011-10-31 2011-10-31 物理量検出デバイス、物理量検出器、および電子機器
US13/661,433 US9322650B2 (en) 2011-10-31 2012-10-26 Physical quantity detection device, physical quantity detector, and electronic apparatus
CN201210422835.7A CN103090887B (zh) 2011-10-31 2012-10-29 物理量检测装置、物理量检测器及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011239119A JP5896114B2 (ja) 2011-10-31 2011-10-31 物理量検出デバイス、物理量検出器、および電子機器

Publications (3)

Publication Number Publication Date
JP2013096806A JP2013096806A (ja) 2013-05-20
JP2013096806A5 true JP2013096806A5 (enExample) 2014-12-11
JP5896114B2 JP5896114B2 (ja) 2016-03-30

Family

ID=48171022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011239119A Active JP5896114B2 (ja) 2011-10-31 2011-10-31 物理量検出デバイス、物理量検出器、および電子機器

Country Status (3)

Country Link
US (1) US9322650B2 (enExample)
JP (1) JP5896114B2 (enExample)
CN (1) CN103090887B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5678741B2 (ja) * 2011-03-11 2015-03-04 セイコーエプソン株式会社 加速度検出器、加速度検出デバイス及び電子機器
CN105429607B (zh) * 2014-09-16 2020-12-29 精工爱普生株式会社 振动装置、电子设备以及移动体
CN110726498B (zh) * 2015-04-30 2021-12-31 意法半导体股份有限公司 用于检测诸如冲击、加速度、旋转力等平面内的力的集成压电传感器
US20170097278A1 (en) * 2015-10-02 2017-04-06 Seiko Epson Corporation Measurement instrument, measurement method, measurement system, and program
JP6604200B2 (ja) * 2015-12-28 2019-11-13 セイコーエプソン株式会社 加速度センサー、計測システム、および計測装置
JP6627501B2 (ja) * 2015-12-28 2020-01-08 セイコーエプソン株式会社 計測装置、減衰特性算出方法、プログラム、および計測システム
JP6897187B2 (ja) * 2017-03-16 2021-06-30 セイコーエプソン株式会社 物理量検出器、物理量検出デバイス、電子機器および移動体
CN110243343B (zh) * 2018-03-09 2022-07-29 精工爱普生株式会社 传感器模块、倾斜仪以及结构物监视装置
JP7087479B2 (ja) * 2018-03-09 2022-06-21 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
FR3084167B1 (fr) * 2018-07-23 2020-10-16 Commissariat Energie Atomique Accelerometre a detection par jauge de contraintes a precision amelioree
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
IT202100023795A1 (it) * 2021-09-15 2023-03-15 St Microelectronics Srl Accelerometro risonante ad asse z con struttura di rilevamento avente prestazioni migliorate

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
JPS5873821A (ja) * 1981-10-28 1983-05-04 Yamato Scale Co Ltd ロ−ドセル式はかり
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
US4881408A (en) * 1989-02-16 1989-11-21 Sundstrand Data Control, Inc. Low profile accelerometer
US5130600A (en) * 1989-06-02 1992-07-14 Mitsubishi Petrochemical Co., Ltd. Acceleration sensor
JPH0372338U (enExample) * 1989-11-18 1991-07-22
US5113698A (en) 1990-02-26 1992-05-19 Sundstrand Data Control, Inc. Vibrating beam transducer drive system
JP2807919B2 (ja) * 1990-05-30 1998-10-08 株式会社コパル 加速度センサ
US5241861A (en) 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
JP2762807B2 (ja) * 1991-12-09 1998-06-04 株式会社日立製作所 差圧センサ
JPH0666828A (ja) * 1992-08-14 1994-03-11 Japan Aviation Electron Ind Ltd 振動式加速度計
JP2002082009A (ja) * 2000-06-30 2002-03-22 Denso Corp 圧力センサ
WO2007080908A1 (ja) * 2006-01-13 2007-07-19 Citizen Holdings Co., Ltd. 角速度センサー用振動体
CN101529257B (zh) * 2006-11-14 2011-06-15 松下电器产业株式会社 传感器
JP2009250859A (ja) * 2008-04-09 2009-10-29 Epson Toyocom Corp 加速度検知装置
JP5187529B2 (ja) 2008-07-22 2013-04-24 セイコーエプソン株式会社 圧力センサー
JP5446175B2 (ja) * 2008-09-02 2014-03-19 セイコーエプソン株式会社 振動型センサ
JP2012145497A (ja) * 2011-01-13 2012-08-02 Fanuc Ltd 静電容量式力センサ

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