JP2018155531A5 - - Google Patents

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Publication number
JP2018155531A5
JP2018155531A5 JP2017050920A JP2017050920A JP2018155531A5 JP 2018155531 A5 JP2018155531 A5 JP 2018155531A5 JP 2017050920 A JP2017050920 A JP 2017050920A JP 2017050920 A JP2017050920 A JP 2017050920A JP 2018155531 A5 JP2018155531 A5 JP 2018155531A5
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JP
Japan
Prior art keywords
weight
physical quantity
axis
main surface
quantity detector
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Application number
JP2017050920A
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English (en)
Japanese (ja)
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JP2018155531A (ja
JP6897187B2 (ja
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Priority to JP2017050920A priority Critical patent/JP6897187B2/ja
Priority claimed from JP2017050920A external-priority patent/JP6897187B2/ja
Priority to TW107103774A priority patent/TW201835574A/zh
Priority to US15/909,202 priority patent/US10677813B2/en
Priority to CN201810202798.6A priority patent/CN108627675B/zh
Publication of JP2018155531A publication Critical patent/JP2018155531A/ja
Publication of JP2018155531A5 publication Critical patent/JP2018155531A5/ja
Application granted granted Critical
Publication of JP6897187B2 publication Critical patent/JP6897187B2/ja
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JP2017050920A 2017-03-16 2017-03-16 物理量検出器、物理量検出デバイス、電子機器および移動体 Active JP6897187B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017050920A JP6897187B2 (ja) 2017-03-16 2017-03-16 物理量検出器、物理量検出デバイス、電子機器および移動体
TW107103774A TW201835574A (zh) 2017-03-16 2018-02-02 物理量檢測器、物理量檢測裝置、電子機器及移動體
US15/909,202 US10677813B2 (en) 2017-03-16 2018-03-01 Physical quantity detector, physical quantity detection device, electronic apparatus, and vehicle
CN201810202798.6A CN108627675B (zh) 2017-03-16 2018-03-12 物理量检测器、物理量检测装置、电子设备以及移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017050920A JP6897187B2 (ja) 2017-03-16 2017-03-16 物理量検出器、物理量検出デバイス、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2018155531A JP2018155531A (ja) 2018-10-04
JP2018155531A5 true JP2018155531A5 (enExample) 2020-02-27
JP6897187B2 JP6897187B2 (ja) 2021-06-30

Family

ID=63520610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017050920A Active JP6897187B2 (ja) 2017-03-16 2017-03-16 物理量検出器、物理量検出デバイス、電子機器および移動体

Country Status (4)

Country Link
US (1) US10677813B2 (enExample)
JP (1) JP6897187B2 (enExample)
CN (1) CN108627675B (enExample)
TW (1) TW201835574A (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7087479B2 (ja) * 2018-03-09 2022-06-21 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
JP2020134391A (ja) * 2019-02-22 2020-08-31 セイコーエプソン株式会社 センサーモジュール、センサーシステム及び慣性センサーの異常判定方法
US11119116B2 (en) 2019-04-01 2021-09-14 Honeywell International Inc. Accelerometer for determining an acceleration based on modulated optical signals
US11079227B2 (en) * 2019-04-01 2021-08-03 Honeywell International Inc. Accelerometer system enclosing gas
US10956768B2 (en) 2019-04-22 2021-03-23 Honeywell International Inc. Feedback cooling and detection for optomechanical devices
US10705112B1 (en) 2019-04-22 2020-07-07 Honeywell International Inc. Noise rejection for optomechanical devices
US11408911B2 (en) 2019-07-17 2022-08-09 Honeywell International Inc. Optomechanical structure with corrugated edge
US11119114B2 (en) 2019-07-17 2021-09-14 Honeywell International Inc. Anchor structure for securing optomechanical structure
US11150264B2 (en) 2019-08-13 2021-10-19 Honeywell International Inc. Feedthrough rejection for optomechanical devices using elements
US11408912B2 (en) 2019-08-13 2022-08-09 Honeywell International Inc. Feedthrough rejection for optomechanical devices
US11372019B2 (en) 2019-08-13 2022-06-28 Honeywell International Inc. Optomechanical resonator stabilization for optomechanical devices
JP7735705B2 (ja) * 2021-07-28 2025-09-09 セイコーエプソン株式会社 物理量センサーデバイス

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09318650A (ja) * 1996-05-27 1997-12-12 Matsushita Electric Works Ltd センサ装置及びその製造方法
JP5678741B2 (ja) * 2011-03-11 2015-03-04 セイコーエプソン株式会社 加速度検出器、加速度検出デバイス及び電子機器
JP5712755B2 (ja) * 2011-04-14 2015-05-07 セイコーエプソン株式会社 加速度検出器、加速度検出デバイス及び電子機器
JP5838694B2 (ja) * 2011-09-29 2016-01-06 セイコーエプソン株式会社 物理量検出器、物理量検出デバイス及び電子機器
JP5896114B2 (ja) * 2011-10-31 2016-03-30 セイコーエプソン株式会社 物理量検出デバイス、物理量検出器、および電子機器
JP2013122375A (ja) * 2011-11-07 2013-06-20 Seiko Epson Corp 物理量検出デバイス、物理量検出器、および電子機器
JP2013217667A (ja) * 2012-04-04 2013-10-24 Seiko Epson Corp 物理量検出デバイス、物理量検出器、および電子機器、並びに物理量検出デバイスの製造方法
JP5983142B2 (ja) * 2012-07-24 2016-08-31 セイコーエプソン株式会社 物理量検出器の製造方法および物理量検出器、並びに電子機器および移動体
EP3153461B1 (en) * 2014-06-05 2021-03-10 Murata Manufacturing Co., Ltd. Mems device having spring stop
JP6705168B2 (ja) * 2015-12-28 2020-06-03 セイコーエプソン株式会社 センサー用基板、物理量検出センサー、加速度センサー、電子機器、および移動体

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