TW201835574A - 物理量檢測器、物理量檢測裝置、電子機器及移動體 - Google Patents
物理量檢測器、物理量檢測裝置、電子機器及移動體 Download PDFInfo
- Publication number
- TW201835574A TW201835574A TW107103774A TW107103774A TW201835574A TW 201835574 A TW201835574 A TW 201835574A TW 107103774 A TW107103774 A TW 107103774A TW 107103774 A TW107103774 A TW 107103774A TW 201835574 A TW201835574 A TW 201835574A
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- TW
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- Prior art keywords
- physical quantity
- quantity detector
- hammer
- extending
- hammers
- Prior art date
Links
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- 229910052744 lithium Inorganic materials 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-050920 | 2017-03-16 | ||
| JP2017050920A JP6897187B2 (ja) | 2017-03-16 | 2017-03-16 | 物理量検出器、物理量検出デバイス、電子機器および移動体 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201835574A true TW201835574A (zh) | 2018-10-01 |
Family
ID=63520610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107103774A TW201835574A (zh) | 2017-03-16 | 2018-02-02 | 物理量檢測器、物理量檢測裝置、電子機器及移動體 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10677813B2 (enExample) |
| JP (1) | JP6897187B2 (enExample) |
| CN (1) | CN108627675B (enExample) |
| TW (1) | TW201835574A (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7087479B2 (ja) * | 2018-03-09 | 2022-06-21 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体 |
| JP2020134391A (ja) * | 2019-02-22 | 2020-08-31 | セイコーエプソン株式会社 | センサーモジュール、センサーシステム及び慣性センサーの異常判定方法 |
| US11119116B2 (en) | 2019-04-01 | 2021-09-14 | Honeywell International Inc. | Accelerometer for determining an acceleration based on modulated optical signals |
| US11079227B2 (en) * | 2019-04-01 | 2021-08-03 | Honeywell International Inc. | Accelerometer system enclosing gas |
| US10956768B2 (en) | 2019-04-22 | 2021-03-23 | Honeywell International Inc. | Feedback cooling and detection for optomechanical devices |
| US10705112B1 (en) | 2019-04-22 | 2020-07-07 | Honeywell International Inc. | Noise rejection for optomechanical devices |
| US11408911B2 (en) | 2019-07-17 | 2022-08-09 | Honeywell International Inc. | Optomechanical structure with corrugated edge |
| US11119114B2 (en) | 2019-07-17 | 2021-09-14 | Honeywell International Inc. | Anchor structure for securing optomechanical structure |
| US11150264B2 (en) | 2019-08-13 | 2021-10-19 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices using elements |
| US11408912B2 (en) | 2019-08-13 | 2022-08-09 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices |
| US11372019B2 (en) | 2019-08-13 | 2022-06-28 | Honeywell International Inc. | Optomechanical resonator stabilization for optomechanical devices |
| JP7735705B2 (ja) * | 2021-07-28 | 2025-09-09 | セイコーエプソン株式会社 | 物理量センサーデバイス |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09318650A (ja) * | 1996-05-27 | 1997-12-12 | Matsushita Electric Works Ltd | センサ装置及びその製造方法 |
| JP5678741B2 (ja) * | 2011-03-11 | 2015-03-04 | セイコーエプソン株式会社 | 加速度検出器、加速度検出デバイス及び電子機器 |
| JP5712755B2 (ja) * | 2011-04-14 | 2015-05-07 | セイコーエプソン株式会社 | 加速度検出器、加速度検出デバイス及び電子機器 |
| JP5838694B2 (ja) * | 2011-09-29 | 2016-01-06 | セイコーエプソン株式会社 | 物理量検出器、物理量検出デバイス及び電子機器 |
| JP5896114B2 (ja) * | 2011-10-31 | 2016-03-30 | セイコーエプソン株式会社 | 物理量検出デバイス、物理量検出器、および電子機器 |
| JP2013122375A (ja) * | 2011-11-07 | 2013-06-20 | Seiko Epson Corp | 物理量検出デバイス、物理量検出器、および電子機器 |
| JP2013217667A (ja) * | 2012-04-04 | 2013-10-24 | Seiko Epson Corp | 物理量検出デバイス、物理量検出器、および電子機器、並びに物理量検出デバイスの製造方法 |
| JP5983142B2 (ja) * | 2012-07-24 | 2016-08-31 | セイコーエプソン株式会社 | 物理量検出器の製造方法および物理量検出器、並びに電子機器および移動体 |
| EP3153461B1 (en) * | 2014-06-05 | 2021-03-10 | Murata Manufacturing Co., Ltd. | Mems device having spring stop |
| JP6705168B2 (ja) * | 2015-12-28 | 2020-06-03 | セイコーエプソン株式会社 | センサー用基板、物理量検出センサー、加速度センサー、電子機器、および移動体 |
-
2017
- 2017-03-16 JP JP2017050920A patent/JP6897187B2/ja active Active
-
2018
- 2018-02-02 TW TW107103774A patent/TW201835574A/zh unknown
- 2018-03-01 US US15/909,202 patent/US10677813B2/en active Active
- 2018-03-12 CN CN201810202798.6A patent/CN108627675B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2018155531A (ja) | 2018-10-04 |
| JP6897187B2 (ja) | 2021-06-30 |
| CN108627675B (zh) | 2022-02-08 |
| US20180267078A1 (en) | 2018-09-20 |
| US10677813B2 (en) | 2020-06-09 |
| CN108627675A (zh) | 2018-10-09 |
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