TW201835574A - Physical quantity detector, physical quantity detection device, electronic apparatus, and vehicle - Google Patents
Physical quantity detector, physical quantity detection device, electronic apparatus, and vehicle Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
Abstract
Description
本發明係關於一種物理量檢測器、具備該物理量檢測器之物理量檢測裝置、電子機器及移動體。The present invention relates to a physical quantity detector, a physical quantity detecting apparatus including the physical quantity detector, an electronic apparatus, and a moving body.
先前以來，已知有使用了振子等之物理量檢測元件之物理量檢測裝置(例如，加速度感測器)。此般物理量檢測裝置構成為，藉由向檢測軸方向作用力，而使物理量檢測元件之共振頻率變化，藉此檢測施加於物理量檢測裝置之物理量(加速度)。又，為了提高輸出感度，而將物理量檢測元件固定於懸臂，且於懸臂之一端安裝錘。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開2014-21094號公報A physical quantity detecting device (for example, an acceleration sensor) using a physical quantity detecting element such as a vibrator has been known. The physical quantity detecting device is configured to detect the physical quantity (acceleration) applied to the physical quantity detecting device by changing the resonance frequency of the physical quantity detecting element by applying a force to the detecting axis. Further, in order to improve the output sensitivity, the physical quantity detecting element is fixed to the cantilever, and a hammer is attached to one end of the cantilever. [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2014-21094
[發明所欲解決之問題] 然而，專利文獻1所記載之物理量檢測裝置雖採用了於設置於懸臂周邊之框部(支持部)抵接錘，藉此抑制懸臂之破壞的構造，但於施加了超過容許值之物理量之情形或為了進而提高輸出感度而加重錘之情形時，存在錘之位移量變大，而於設置於懸臂周邊之框部抵接錘時，破壞設置於懸臂周邊之框部的課題。 [解決問題之技術手段] 本發明係為了解決上述課題之至少一部分而完成者，可作為以下應用例或形態而實現。 [應用例1]本應用例之物理量檢測器之特徵在於，具備：基部；可動部，其連接於上述基部；支持部，其自上述基部延伸；延伸部，其自上述支持部延伸；基板部，其具備固定於上述基部與上述可動部之物理量檢測元件；及錘，其固定於上述可動部；且自上述延伸部之厚度方向俯視，上述延伸部與上述錘重疊。 根據本應用例，因自支持部延伸之延伸部，於俯視時與錘重疊，故於施加了超過容許值之物理量之情形時，錘進行大幅度位移而抵接於延伸部。然而，因延伸部為單側構造，即便抵接了錘，延伸部亦向錘之位移方向彎曲，可抑制錘之位移量及錘之衝擊。因此，可抑制於懸臂周邊設置之支持部之破壞。因此，可提供具有高感度之物理量檢測器。 [應用例2]如上述應用例記載之物理量檢測器，其中上述延伸部之厚度，較佳為較上述支持部之厚度更厚。 根據本應用例，因延伸部之厚度較支持部之厚度更厚，故延伸部之強度增加，即便抵接了錘，亦可進而抑制錘之位移量及錘之衝擊，可抑制於懸臂周邊設置之支持部之破壞。 [應用例3]如上述應用例記載之物理量檢測器，其中上述延伸部較佳具備凹部。 根據本應用例，因於延伸部具備了凹部，故錘抵接於延伸部時，由於以凹部為起點，延伸部之前端側容易彎曲，故可抑制錘之位移量及錘之衝擊，可抑制於懸臂之周邊設置之支持部之破壞。 [應用例4]如上述應用例記載之物理量檢測器，其中於上述俯視時，與上述支持部重疊之上述錘之厚度，較佳為較與上述可動部重疊之上述錘之厚度更薄。 根據本應用例，因與支持部重疊之錘之厚度較與可動部重疊之錘之厚度更薄，故與支持部重疊之區域之錘容易彎曲。因此，於錘抵接於支持部時，可藉由錘彎曲而抑制錘之位移量及錘之衝擊，並可抑制於懸臂周邊設置之支持部之破壞。 [應用例5]如上述應用例記載之物理量檢測器，其中於上述俯視時，上述錘較佳為，於上述錘固定於上述可動部之區域、及上述錘與上述延伸部重疊之區域之間之一部分設置有凹部。 根據本應用例，因於錘固定於可動部之區域、及錘與延伸部重疊之區域之間之一部分設置有凹部，故於錘抵接於延伸部時，因以凹部為起點，錘容易彎曲，故可抑制錘之位移量及錘之衝擊，並可抑制於懸臂周邊設置之支持部之破壞。 [應用例6]如上述應用例記載之物理量檢測器，其中上述錘之接合面較佳為粗面。 根據本應用例，因錘之接合面為粗面，故向可動部固定錘時，接合面中之接合面積變大，可提高接合強度。因此，錘變得不易脫落，可提供具有高感度之物理量檢測器。 [應用例7]本應用例之物理量檢測裝置之特徵在於，具備上述應用例記載之物理量檢測器。 根據本應用例，可抑制於懸臂周邊設置之支持部之破壞，並可提供具備了具有高感度之物理量檢測器之物理量檢測裝置。 [應用例8]本應用例之電子機器之特徵在於，具備上述應用例記載之物理量檢測器。 根據本應用例，可抑制於懸臂周邊設置之支持部之破壞，並可提供具備了具有高感度之物理量檢測器之電子機器。 [應用例9]本應用例之移動體之特徵在於，具備上述應用例記載之物理量檢測器。 根據本應用例，可抑制於懸臂周邊設置之支持部之破壞，並可提供具備了具有高感度之物理量檢測器之移動體。[Problems to be Solved by the Invention] However, the physical quantity detecting device described in Patent Document 1 employs a structure in which a frame portion (support portion) provided around the cantilever abuts against the hammer, thereby suppressing the destruction of the cantilever. When the physical quantity exceeds the allowable value or the weight is increased to increase the output sensitivity, the displacement amount of the hammer increases, and when the frame portion provided around the cantilever abuts the hammer, the frame portion provided around the cantilever is broken. Question. [Technical means for solving the problem] The present invention has been completed in order to solve at least a part of the above problems, and can be realized as the following application examples or aspects. [Application Example 1] The physical quantity detector of the application example is characterized by comprising: a base portion; a movable portion connected to the base portion; a support portion extending from the base portion; an extension portion extending from the support portion; and a substrate portion And a physical quantity detecting element fixed to the base portion and the movable portion; and a hammer fixed to the movable portion; and the extending portion overlaps the hammer from a plan view in a thickness direction of the extending portion. According to this application example, since the extension portion extending from the support portion overlaps with the weight in a plan view, when a physical amount exceeding the allowable value is applied, the hammer is largely displaced and abuts against the extension portion. However, since the extension portion has a one-sided structure, even if the hammer is abutted, the extension portion is bent in the direction in which the hammer is displaced, and the displacement amount of the hammer and the impact of the hammer can be suppressed. Therefore, it is possible to suppress the destruction of the support portion provided around the cantilever. Therefore, a physical quantity detector having high sensitivity can be provided. [Application Example 2] The physical quantity detector according to the application example described above, wherein the thickness of the extending portion is preferably thicker than the thickness of the support portion. According to this application example, since the thickness of the extending portion is thicker than the thickness of the supporting portion, the strength of the extending portion is increased, and even if the hammer is abutted, the displacement amount of the hammer and the impact of the hammer can be suppressed, and the periphery of the cantilever can be suppressed. The destruction of the support department. [Application Example 3] The physical quantity detector according to the application example described above, wherein the extending portion preferably includes a concave portion. According to the application example, since the extending portion is provided with the concave portion, when the hammer abuts against the extending portion, the front end side of the extending portion is easily bent by using the concave portion as a starting point, so that the displacement amount of the hammer and the impact of the hammer can be suppressed, and the impact can be suppressed. Destruction of the support portion provided around the cantilever. [Aspect 4] The physical quantity detector according to the application example described above, wherein the thickness of the hammer overlapping the support portion in the plan view is preferably thinner than the thickness of the hammer overlapping the movable portion. According to this application example, since the thickness of the hammer which overlaps with the support portion is thinner than the thickness of the hammer which overlaps with the movable portion, the hammer in the region overlapping the support portion is easily bent. Therefore, when the hammer abuts against the support portion, the displacement of the hammer and the impact of the hammer can be suppressed by the bending of the hammer, and the damage of the support portion provided around the cantilever can be suppressed. [Application Example 5] The physical quantity detector according to the application example described above, wherein the hammer is preferably disposed between a region where the hammer is fixed to the movable portion and a region where the hammer overlaps with the extending portion in a plan view. A part of the recess is provided. According to this application example, since the concave portion is provided in a portion between the region where the hammer is fixed to the movable portion and the region where the hammer and the extending portion overlap, when the hammer abuts against the extending portion, the hammer is easily bent by using the concave portion as a starting point. Therefore, the displacement of the hammer and the impact of the hammer can be suppressed, and the damage of the support portion provided around the cantilever can be suppressed. [Application Example 6] The physical quantity detector according to the application example described above, wherein the joint surface of the hammer is preferably a rough surface. According to this application example, since the joint surface of the hammer is a rough surface, when the hammer is fixed to the movable portion, the joint area in the joint surface is increased, and the joint strength can be improved. Therefore, the hammer becomes less likely to fall off, and a physical quantity detector having high sensitivity can be provided. [Application Example 7] The physical quantity detecting device according to the application example is characterized by comprising the physical quantity detector described in the above application example. According to this application example, it is possible to suppress the destruction of the support portion provided around the cantilever, and to provide a physical quantity detecting device having a physical quantity detector having high sensitivity. [Application Example 8] The electronic device of the application example is characterized by comprising the physical quantity detector described in the above application example. According to this application example, it is possible to suppress the destruction of the support portion provided around the cantilever, and to provide an electronic device having a physical sensor having high sensitivity. [Application Example 9] The mobile object of the application example is characterized by comprising the physical quantity detector described in the above application example. According to this application example, it is possible to suppress the destruction of the support portion provided around the cantilever, and to provide a moving body having a physical quantity detector having high sensitivity.
以下，對於本發明之物理量檢測器、具備了該物理量檢測器之物理量檢測裝置、電子機器及移動體，基於附加圖式說明其較好之構成例。 [物理量檢測器] (第1實施形態) 首先，對於本發明之第1實施形態之物理量檢測器1，參照圖1～圖3進行說明。 圖1係顯示本發明之第1實施形態之物理檢測器1之構成之立體圖，圖2係顯示第1實施形態之物理量檢測器1之構成之俯視圖，圖3係圖2之P1-P1線之剖視圖。另，於以下各圖中，為了便於說明，而圖示有X軸、Y軸、Z軸，作為彼此正交之三條軸。又，於以下之說明中，為了便於說明，亦將自延伸部38a、38b之厚度方向即Z軸方向觀察時之俯視，簡單稱為「俯視」。 物理量檢測器1如圖1～圖3所示，包含基板部5、及4個錘50、52、54、56而構成。 基板部5具備：板狀之基部10，其具有延伸於X軸方向且彼此反向之主表面10a、10b；接合部12，其自基部10朝Y軸方向延伸；可動部13，其自接合部12朝與基部10之相反方向成矩形狀而延伸；2個支持部30a、30b，其自基部10之X軸方向之兩端沿可動部13之外緣延伸；及物理量檢測元件40，其自基部10架設於可動部13，並固定於基部10與可動部13。 於2個支持部30a、30b中，支持部30a係以與可動部13隔開間隙32a並沿Y軸之方式延伸，且設置有固定支持部30a之固定部36a、及以與可動部13隔開間隙32c並沿X軸之方式延伸之延伸部38a。換言之，支持部30a以與可動部13隔開間隙32a並沿Y軸之方式延伸，設置有以與可動部13隔開間隙32c並沿X軸之方式延伸之延伸部38a，且於支持部30a至延伸部38a部分設置有固定部36a。又，支持部30b係以與可動部13隔開間隙32b並沿Y軸之方式延伸，設置有固定支持部30b之固定部36b、及以與可動部13隔開間隙32c並沿X軸之方式延伸之延伸部38b。換言之，支持部30b以與可動部13隔開間隙32b並沿Y軸之方式延伸，設置有以與可動部13隔開間隙32c並沿X軸之方式延伸之延伸部38b，且於支持部30b至延伸部38b部分設置有固定部36b。 另，設置於支持部30a、30b之固定部36a、36b係用以將物理量檢測器1之基板部5安裝於封裝體等之外部構件者。又，基部10、接合部12、可動部13、支持部30a、30b及延伸部38a、38b係一體而形成。 可動部13係由支持部30a、30b及基部10包圍，於基部10經由接合部12連接，並受單側支持之狀態。且，可動部13具有彼此反向之主表面13a、13b、形成俯視時之主表面13a、13b之側面，即沿支持部30a之側面13c及沿支持部30b之側面13d。主表面13a係朝向與基部10之主表面10a相同側之面，主表面13b係朝向與基部10之主表面10b相同側之面。 接合部12設置於基部10與可動部13之間，連接了基部10與可動部13。接合部12之厚度形成得較基部10或可動部13之厚度更薄。於該情形時，基部10、支持部30a、30b及可動部13由水晶板形成，接合部12具有自水晶板之兩面藉由半蝕刻而形成之槽部12a、12b。該槽部12a、12b沿X軸形成，接合部12於可動部13相對於基部10位移(轉動)時，槽部12a、12b作為支點，即中間鉸鏈發揮機能。此般接合部12及可動部13作為懸臂發揮機能，該懸臂具備物理量檢測元件40，可稱為由基部10單側支持。 又，於基部10之主表面10a至可動部13之主表面13a之面，物理量檢測元件40由接著劑60固定。物理量檢測元件40之固定位置係主表面10a及主表面13a各者之X軸方向中之中央位置的2個部位。 物理量檢測元件40具有：基底部42a，其以接著劑60固定於基部10之主表面10a；基底部42b，其以接著劑60固定於可動部13之主表面13a；及振動樑部41a、41b，其位於基底部42a與基底部42b之間，用以檢測物理量。該情形中，振動樑部41a、41b之形狀為角柱狀，若對設置於振動樑部41a、41b之激發電極(未圖示)施加驅動信號(交流電壓)，則以沿X軸，彼此離開或近接之方式彎曲振動。即，物理量檢測元件40為音叉型振動片。另，作為接著劑60，例如使用低熔點玻璃、可共晶接合之Au/Sn合金被膜等，此處使用了低熔點玻璃。 於物理量檢測元件40之基底部42a上設置有引出電極44a、44b。該等引出電極44a、44b係與設置於振動樑部41a、41b之激發電極(未圖示)電氣連接。引出電極44a、44b係藉由金屬線48，而與設置於基部10之主表面10a之連接端子46a、46b電氣連接。連接端子46a、46b藉由未圖示之配線，而與外部連接端子49a、49b電氣連接。外部連接端子49a、49b係於物理量檢測器1安裝於封裝體等之側之面(基部10之主表面10b側)，以俯視時與封裝體固定部34重疊之方式設置。封裝體固定部34係用以將物理量檢測器1之基板部5安裝於封裝體等之外部構件者，於基部10之X軸方向之兩端側之端部設置有2部位。 物理量檢測元件40係藉由將自水晶之原石等以特定之角度切出之水晶基板利用光微影技術及蝕刻技術圖形化而形成。該情形，對於物理量檢測元件40，若考慮縮小其與基部10及可動部13之線膨脹係數之差，則期望採用與基部10及可動部13之材質相同的材質。 錘50、52、54、56俯視時為矩形狀，設置於可動部13。錘50、52以接合構件62固定於可動部13之主表面13a，錘54、56以接合構件62固定於可動部13之主表面13b。此處，固定於主表面13a之錘50係於俯視時，矩形之緣邊之1邊與可動部13之側面13c之方向重合，且另1邊與延伸部38a之側面31d之方向重合，藉由此方向重合而配置於可動部13之側面13c之側，並以俯視時錘50與延伸部38a重疊之方式配置。同樣，固定於主表面13a之錘52係於俯視時，矩形之緣邊之1邊與可動部13之側面13d之方向重合，且另1邊與延伸部38b之側面31e之方向重合，藉此配置於可動部13之側面13d之側，並以俯視時錘52與延伸部38b重疊之方式配置。固定於主表面13b之錘54係於俯視時，將矩形之1邊與可動部13之側面13c之方向重合，且另1邊與延伸部38a之側面31d之方向重合，藉此配置於可動部13之側面13c之側，並以俯視時錘54與延伸部38a重疊之方式配置。同樣，固定於主表面13b之錘56係於俯視時，將矩形之1邊與可動部13之側面13d之方向重合，且另1邊與延伸部38b之側面31e之方向重合，藉此配置於可動部13之側面13d之側，並以俯視時錘56與延伸部38b重疊之方式配置。 如此配置之錘50、52、54、56係錘50、52以物理量檢測元件40為中心左右對稱地配置，錘54、56以俯視時與錘50、52分別重疊之方式配置。該等錘50、52、54、56中係藉由分別設置於錘50、52、54、56之重心位置之接合構件62，而固定於可動部13。又，因俯視時，錘50、54與延伸部38a及錘52、56與延伸部38b分別重疊，故於施加過多之物理量之情形時，錘50、52、54、56抵接於延伸部38a、38b，可抑制錘50、52、54、56之位移量。 接合構件62由矽樹脂系之熱硬化型接著劑等構成。於可動部13之主表面13a及主表面13b，分別塗布2個位置，載置了錘50、52、54、56後，藉由加熱硬化，而將錘50、52、54、56固定於可動部13。另，錘50、52、54、56之與可動部13之主表面13a及主表面13b對向之接合面為粗面。藉此，朝可動部13固定錘50、52、54、56時，接合面中之接合面積變大，可提高接合強度。 其次，對於物理量檢測器1之動作，參照圖4及圖5進行說明。 圖4及圖5係顯示物理量檢測器1之動作之剖視圖。 如圖4所示，若對物理量檢測器1，施加箭頭α1方向之(+Z方向之)加速度，則對可動部13沿-Z方向作用力，可動部13係以接合部12為支點而沿-Z方向位移。藉此，對於物理量檢測元件40，沿Y軸施加使基底部42a與基底部42b彼此離開之方向之力，於振動樑部41a、41b產生拉伸應力。因此，振動樑部41a、41b之振動之頻率即共振頻率變高。 另一方面，如圖5所示，若對物理量檢測器1，施加箭頭α2方向之(-Z方向之)加速度，則對可動部13上沿+Z方向作用力，可動部13係以接合部12為支點而沿+Z方向位移。藉此，對於物理量檢測器40，沿Y軸施加使基底部42a與基底部42b彼此靠近之方向之力，於振動樑部41a、41b產生壓縮應力。因此，振動樑部41a、41b之共振頻率變低。 以物理量檢測器1，檢測上述物理量檢測元件40之共振頻率之變化。即，對物理量檢測器1施加之加速度係根據上述檢測之共振頻率之變化之比例，利用查找表等轉換為設定之數值，藉此而導出。 另，物理量檢測器1亦可作為測斜計使用。作為測斜計之物理量檢測器1係根據傾斜引起之姿勢之變化，使對物理量檢測器1之施加重力加速度之方向變化，而於振動樑部41a、41b產生拉伸應力或壓縮應力。且，振動樑部41a、41b之共振頻率變化，導出傾斜引起之姿勢之變化。 如上所述，根據第1實施形態之物理量檢測器1，可獲得以下效果。 因延伸部38a、38b俯視時與錘50、52、54、56重疊，故於施加過多物理量之情形，錘50、52、54、56大幅度位移而抵接於延伸部38a、38b。然而，因延伸部38a、38b為單側構造，即便錘50、52、54、56抵接，延伸部38a、38b亦可向錘50、52、54、56之位移方向彎曲，可抑制錘50、52、54、56之位移量及錘50、52、54、56之衝擊。因此，可抑制設置於懸臂周邊之延伸部38a、38b(支持部30a、30b)之破壞。藉此，可提供具有高感度之物理量檢測器1。 又，因錘50、52、54、56之接合面為粗面，故朝可動部13固定錘50、52、54、56時，接合面中之接合面積變大，可提高接合強度。因此，錘50、52、54、56不易自可動部13脫落，可提供具有高感度之物理量檢測器1。 另，於本實施形態中，基部10、接合部12、可動部13、支持部30a、30b及物理量檢測元件40之材質未限定於水晶者，亦可為鉭酸鋰(LiTaO3 )、四硼酸鋰(Li2 B4 O7 )、鈮酸鋰(LiNbO3 )、鋯鈦酸鉛(PZT)、氧化鋅(ZnO)、氮化鋁(AlN)等之壓電材料。進而，基部10、接合部12、可動部13、支持部30a、30b亦可為矽或鍺等之非壓電材料等。 又，於本實施形態中，對於作為物理量檢測器40，使用了音叉型振動片之例進行說明，但只要頻率根據可動部13之位移而變化，則物理量檢測元件40之形態未特別限定於音叉型振動片。又，物理量檢測元件40僅設置於可動部13之主表面13a側，亦可為僅設置於可動部13之主表面13b側之構成、或設置於主表面13a側及主表面13b側之兩面之構成。 (第2實施形態) 其次，對於本發明之第2實施形態之物理量檢測器1a，參照圖6及圖7進行說明。 圖6係顯示第2實施形態之物理量檢測器1a之構成之俯視圖，圖7係圖6之P2-P2線之剖視圖。另，以與上述之第1實施形態之不同點為中心加以說明，對於同樣之構成，附註同一符號，對於同樣之事項，省略其說明。 第2實施形態之物理量檢測器1a與第1實施形態之物理量檢測器1係僅設置於基板部5a之延伸部38aa、38ab之構成不同。 物理量檢測器1a如圖6及圖7所示，以俯視時延伸部38aa、38ab之厚度較支持部30a、30b之厚度更厚之方式構成。 根據第2實施形態之物理量檢測器1a，因延伸部38aa、38ab之厚度較支持部30a、30b之厚度更厚，故延伸部38aa、38ab之強度增加，即便抵接錘50、52、54、56，亦可進而抑制錘50、52、54、56之位移量及錘50、52、54、56之衝擊，並可抑制設置於懸臂周邊之延伸部38aa、38ab(支持部30a、30b)之破壞。 另，因延伸部38aa、38ab之兩主表面突出，故延伸部38aa、38ab之厚度較支持部30a、30b之厚度更厚，亦可僅使延伸部38aa、38ab之兩主表面內之任一者之主表面突出而不厚於支持部30a、30b之厚度。 (第3實施形態) 其次，對於本發明之第3實施形態之物理量檢測器1b，參照圖8及圖9進行說明。 圖8係顯示第3實施形態之物理量檢測器1b之構成之俯視圖，圖9係圖8之P3-P3線之剖視圖。另，以與上述之實施形態之不同點為中心進行說明，對同樣之構成，附註同一符號，且對同樣之事項，省略其說明。 第3實施形態之物理量檢測器1b與第1實施形態之物理量檢測器1係僅設置於基板部5b之延伸部38ba、38bb之構成不同。 物理量檢測器1b如圖8及圖9所示，延伸部38ba之前端部與固定部36a之間設置有凹部70a、70c，延伸部38bb之前端部與固定部36b之間設置有凹部70b、70d。 根據第3實施形態之物理量檢測器1b，因於延伸部38ba、38bb具備了凹部70a、70b、70c、70d，故於錘50、52、54、56抵接於延伸部38ba、38bb時，以凹部70a、70b、70c、70d為起點，延伸部38ba、38bb之前端側容易彎曲，因而可抑制錘50、52、54、56之位移量及錘50、52、54、56之衝擊，且可抑制設置於懸臂周邊之延伸部38ba、38bb(支持部30a、30b)之破壞。 另，凹部70a、70b、70c、70d設置於延伸部38ba、38bb之兩主表面上，亦可僅設置於延伸部38ba、38bb之兩主表面內之任一主表面。 (第4實施形態) 接下來，對於本發明之第4實施形態之物理量檢測器1c，參照圖10及圖11進行說明。 圖10係顯示第4實施形態之物理量檢測器1c之構成之俯視圖，圖11係圖10之P4-P4線之剖視圖。再者，以與上述實施形態之不同點為中心加以說明，對於同樣之構成，附註同一符號，且對於同樣之事項，省略其說明。 第4實施形態之物理量檢測器1c與第1實施形態之物理量檢測器1係僅固定於可動部13之錘50c、52c、54c、56c之構成不同。 物理量檢測器1c如圖10及圖11所示，以俯視時與支持部30a、30b重疊之錘50c、52c、54c、56c之厚度，較與可動部13重疊之錘50c、52c、54c、56c之厚度更薄之方式構成。即，於錘50c、52c、54c、56c之與支持部30a、30b重疊之區域設置有薄壁部72a、72b、72c、72d。 根據第4實施形態之物理量檢測器1c，因與支持部30a、30b重疊之錘50c、52c、54c、56c之厚度，較與可動部13重疊之錘50c、52c、54c、56c之厚度更薄，故與支持部30a、30b重疊之區域之錘50c、52c、54c、56c容易彎曲。因此，錘50c、52c、54c、56c抵接於支持部30a、30b時，藉由薄壁部72a、72b、72c、72d彎曲可抑制錘50c、52c、54c、56c之位移量及錘50c、52c、54c、56c之衝擊，並可控制設置於懸臂周邊之支持部30a、30b之破壞。 另，藉由使錘50c、52c、54c、56c之與支持部30a、30b所對向之主表面之相反側之面凹陷，而使與支持部30a、30b重疊之錘50c、52c、54c、56c之厚度，較與可動部13重疊之錘50c、52c、54c、56c之厚度更薄，亦可使與支持部30a、30b對向之主表面凹陷而變薄，又可使錘50c、52c、54c、56c之兩主表面凹陷而變薄。進而，可使錘50c、52c、54c、56c之延伸部38a、38b所對向之區域之厚度，較與可動部13重疊之錘50c、52c、54c、56c之厚度更薄。 (第5實施形態) 其次，對於本發明之第5實施形態之物理量檢測器1d，參照圖12及圖13進行說明。 圖12係顯示第5實施形態之物理量檢測器1d之構成之俯視圖，圖13係圖12之P5-P5線之剖視圖。另，以與上述之實施形態之不同點為中心加以說明，對於同樣之構成，附註相一符號，且對於同樣之事項，省略其說明。 第5實施形態之物理量檢測器1d與第1實施形態之物理量檢測器1係僅固定於可動部13之錘50d、52d、54d、56d之構成不同。 物理量檢測器1d如圖12及圖13所示，於俯視時錘50d、52d、54d、56d固定於可動部13之區域、與錘50d、52d、54d、56d與延伸部38a、38b重疊之區域之間之一部分，設置有凹部74a、74b、74c、74d。 根據第5實施形態之物理量檢測器1d，因於錘50d、52d、54d、56d固定於可動部13之區域、與錘50d、52d、54d、56d與延伸部38a、38b重疊之區域之間之一部分，設置有凹部74a、74b、74c、74d，故錘50d、52d、54d、56d抵接於延伸部時，以凹部74a、74b、74c、74d為起點錘50d、52d、54d、56d容易彎曲，因而可抑制錘50d、52d、54d、56d之位移量及錘50d、52d、54d、56d之衝擊，且可抑制設置於懸臂周邊之延伸部38a、38b(支持部30a、30b)之破壞。 另，凹部74a、74b、74c、74d設置於錘50d、52d、54d、56d之延伸部38a、38b所對向之主表面，亦可設置於與延伸部38a、38b對向之主表面之相反側之面，又可設置於錘50d、52d、54d、56d之兩主表面。 [物理量檢測裝置] 其次，對於具備物理量檢測器1～1d之物理量檢測裝置100，參照圖14及圖15進行說明。 圖14係顯示具備物理量檢測器1之物理量檢測裝置100之立體圖，圖15係圖14之P6-P6線之剖視圖。 於物理量檢測裝置100中，可使用本發明之物理量檢測器1～1d，於該情形，如圖14及圖15所示，具備物理量檢測器1。另，作為物理量檢測裝置100，亦可具備控制物理量檢測器1之電氣電路等。 物理量檢測裝置100包含固定錘50、52、54、56之基板部5與封裝體410而構成。封裝體410由封裝體基底420及蓋430組成。另，於圖14中，省略蓋430。於封裝體基底420，形成凹部421，於凹部421內收納有物理量檢測器1。封裝體基底420由積層陶瓷生片並焙燒之氧化鋁燒結體形成，亦可使用水晶、玻璃及矽等之材料。 封裝體基底420具有自內底面(凹部421之內側之底面)422向蓋430側突出之台座部426、427及階差部423，於台座部426及台座部427，支持部30a之固定部36a及支持部30b之固定部36b，分別經由接著劑462而固定。又，於階差部423，設置有內部端子440、442。內部端子440、442設置於與設置於物理量檢測器1之基部10之外部連接端子49a、49b對向之位置。封裝體基底420之外底面(內底面422之相反側之面)424，設置有安裝於電子機器等之外部構件時使用之外部端子444、446，外部端子444、446經由未圖示之內部配線而與內部端子440、442電氣連接。 於封裝體基底420設置有設置於凹部421之底部且自外底面424貫通至內底面422的貫通孔425、及封塞貫通孔425而用以將封裝體410之內部密封為氣密狀態的密封部450。另，封裝體410之內部亦可為大致真空或減壓氣體環境或填充有氮、氦、氬等惰性氣體之氣體環境。 物理量檢測器1係藉由基部10之封裝體固定部34經由導電性接著劑460，固定於封裝體基底420之階差部423，而收納於封裝體410內部。藉此，設置於封裝體固定部34之外部連接端子49a、49b與設置於階差部423之內部端子440、442藉由導電性接著劑460電氣連接。 蓋430形成板狀，覆蓋封裝體基底420之凹部421而設置。該蓋430可使用與封裝體基底420相同之材料、或科伐合金、不鏽鋼等之金屬等，該情形時，使用科伐合金。蓋430經由焊縫環432接合於封裝體基底420。 此般構成之物理量檢測裝置100若經由外部端子444、446、內部端子440、442、外部連接端子49a、49b、連接端子46a、46b等，對物理量檢測元件40之激發電極施加驅動信號，則物理量檢測元件40之振動樑部41a、41b以特定之頻率振動。物理量檢測裝置100藉由根據物理量檢測元件40被施加之加速度或傾斜等變化，可將該振動之共振頻率作為輸出信號輸出，並作為具有高檢測感度之加速度感測器或傾斜感測器等使用。 [電子機器] 其次，對於具備物理量檢測器1～1d之電子機器，參照圖16及圖17進行說明。 圖16係顯示具備物理量檢測器1之電子機器即攝錄影機之立體圖，圖17係顯示具備物理量檢測器1之電子機器即行動電話之立體圖。 該等電子機器，搭載有本發明之物理量檢測器1～1d中之物理量檢測器1。首先，如圖16所示之攝錄影機500具備顯像部501、操作部502、聲音輸入部503、及顯示單元504。該攝錄影機500具備物理量檢測器1，根據物理量檢測器1之搭載數，檢測繞各自正交之X軸、Y軸、Z軸(未圖示)之至少1軸之加速度或傾斜等，可發揮手制動修正機能。藉此，攝錄影機500可記錄鮮明之動畫影像。 又，如圖17所示之行動電話600，具備複數個操作按鈕601、顯示單元602、攝像機機構603及快門按鍵604。該行動電話600具備物理量檢測器1，根據物理量檢測器1之搭載數，檢測繞各自正交之X軸、Y軸、Z軸(未圖示)之至少1軸之加速度或傾斜等，攝像機機構603可發揮手制動修正機能。藉此，行動電話600可藉由攝像機機構603記錄鮮明之畫像。 [移動體] 其次，對於具備物理量檢測器1～1d之移動體，參照圖18進行說明。 圖18係顯示具備物理量檢測器1之移動體即汽車之立體圖。 於汽車(移動體)700，如圖18所示，使用物理量檢測器1作為一例。汽車700中，物理量檢測器1內置於車體701所搭載之電子控制單元(ECU：Electronic Control Unit)703內。電子控制單元703藉由物理量檢測器1檢測車體701之加速度或傾斜等，可把握汽車700之移動狀態或姿勢等，並準確地進行輪胎702等之控制。藉此，汽車700可安全穩定行進。 以上說明之物理量檢測器1～1d，除搭載於已述之電子器或移動體以外，亦可搭載於免鑰匙啟動系統、防盜器、汽車導航系統、汽車空調、防抱死・制動・系統(ABS：Antilock Brake System)、氣囊、輪胎・壓力・監控・系統(TPMS：Tire Pressure Monitoring System)、引擎控制、混合動力汽車或電氣汽車之電池監視器、車體姿勢控制系統等之電子控制單元，且可應用於廣泛之領域。Hereinafter, a physical quantity detector of the present invention, a physical quantity detecting device including the physical quantity detector, an electronic device, and a moving body will be described as a preferred configuration example based on an additional drawing. [Physical Quantity Detector] (First Embodiment) First, the physical quantity detector 1 according to the first embodiment of the present invention will be described with reference to Figs. 1 to 3 . 1 is a perspective view showing a configuration of a physical detector 1 according to a first embodiment of the present invention, FIG. 2 is a plan view showing a configuration of a physical quantity detector 1 according to the first embodiment, and FIG. 3 is a line P1-P1 of FIG. Cutaway view. In the following drawings, for convenience of explanation, the X-axis, the Y-axis, and the Z-axis are illustrated as three axes orthogonal to each other. In the following description, for the sake of convenience of explanation, the plan view when viewed from the thickness direction of the extension portions 38a and 38b, that is, the Z-axis direction, is simply referred to as "top view". As shown in FIGS. 1 to 3, the physical quantity detector 1 includes a substrate portion 5 and four hammers 50, 52, 54, and 56. The substrate portion 5 includes a plate-like base portion 10 having main surfaces 10a, 10b extending in the X-axis direction and opposite to each other, a joint portion 12 extending from the base portion 10 in the Y-axis direction, and a movable portion 13 self-joining The portion 12 extends in a rectangular shape in a direction opposite to the base portion 10; two support portions 30a and 30b extending from both ends of the base portion 10 in the X-axis direction along the outer edge of the movable portion 13, and a physical quantity detecting element 40 The base portion 10 is mounted on the movable portion 13 and is fixed to the base portion 10 and the movable portion 13. In the two support portions 30a and 30b, the support portion 30a is extended from the movable portion 13 by a gap 32a and extends along the Y-axis, and is provided with a fixing portion 36a of the fixed support portion 30a and separated from the movable portion 13. The gap 32c is opened and extends along the X-axis. In other words, the support portion 30a extends away from the movable portion 13 by a gap 32a and extends along the Y-axis, and is provided with an extending portion 38a extending from the movable portion 13 by a gap 32c and extending along the X-axis, and is supported by the support portion 30a. A fixing portion 36a is provided to the extension portion 38a. Further, the support portion 30b extends along the Y-axis with a gap 32b from the movable portion 13, and is provided with a fixing portion 36b for fixing the support portion 30b and a gap 32c with the movable portion 13 along the X-axis. Extended extension 38b. In other words, the support portion 30b extends away from the movable portion 13 by a gap 32b and extends along the Y-axis, and is provided with an extending portion 38b that is spaced apart from the movable portion 13 by a gap 32c and extends along the X-axis, and is supported by the support portion 30b. A fixing portion 36b is provided to the extension portion 38b. Further, the fixing portions 36a and 36b provided in the support portions 30a and 30b are for attaching the substrate portion 5 of the physical quantity detector 1 to an external member such as a package. Further, the base portion 10, the joint portion 12, the movable portion 13, the support portions 30a and 30b, and the extending portions 38a and 38b are integrally formed. The movable portion 13 is surrounded by the support portions 30a and 30b and the base portion 10, and is connected to the base portion 10 via the joint portion 12, and is supported by one side. Further, the movable portion 13 has main surfaces 13a and 13b which are opposite to each other, and side surfaces of the main surfaces 13a and 13b which are formed in plan view, that is, the side surface 13c along the support portion 30a and the side surface 13d along the support portion 30b. The main surface 13a faces the same side as the main surface 10a of the base 10, and the main surface 13b faces the same side as the main surface 10b of the base 10. The joint portion 12 is provided between the base portion 10 and the movable portion 13, and connects the base portion 10 and the movable portion 13. The thickness of the joint portion 12 is formed to be thinner than the thickness of the base portion 10 or the movable portion 13. In this case, the base portion 10, the support portions 30a and 30b, and the movable portion 13 are formed of a crystal plate, and the joint portion 12 has groove portions 12a and 12b formed by half etching from both surfaces of the crystal plate. The groove portions 12a and 12b are formed along the X-axis, and when the joint portion 12 is displaced (rotated) with respect to the base portion 10, the groove portions 12a and 12b serve as fulcrums, that is, the intermediate hinge functions. The joint portion 12 and the movable portion 13 function as a cantilever, and the cantilever includes the physical quantity detecting element 40, and can be said to be supported by the base portion 10 on one side. Further, the physical quantity detecting element 40 is fixed by the adhesive 60 on the surface of the main surface 10a of the base 10 to the main surface 13a of the movable portion 13. The fixed position of the physical quantity detecting element 40 is two parts of the central position of the main surface 10a and the main surface 13a in the X-axis direction. The physical quantity detecting element 40 has a base portion 42a fixed to the main surface 10a of the base portion 10 with an adhesive 60, a base portion 42b fixed to the main surface 13a of the movable portion 13 with an adhesive 60, and vibration beam portions 41a, 41b. It is located between the base portion 42a and the base portion 42b for detecting physical quantities. In this case, the shape of the vibration beam portions 41a and 41b is a prismatic shape, and when a drive signal (AC voltage) is applied to the excitation electrodes (not shown) provided on the vibration beam portions 41a and 41b, they are separated from each other along the X-axis. Or bend the vibration in a close proximity. That is, the physical quantity detecting element 40 is a tuning fork type vibrating piece. Further, as the adhesive 60, for example, a low-melting glass, a eutectic Au/Sn alloy film, or the like is used, and a low-melting glass is used here. The extraction electrodes 44a and 44b are provided on the base portion 42a of the physical quantity detecting element 40. The extraction electrodes 44a and 44b are electrically connected to excitation electrodes (not shown) provided on the vibration beam portions 41a and 41b. The extraction electrodes 44a, 44b are electrically connected to the connection terminals 46a, 46b provided on the main surface 10a of the base 10 by the metal wires 48. The connection terminals 46a and 46b are electrically connected to the external connection terminals 49a and 49b by wires (not shown). The external connection terminals 49a and 49b are provided on the surface of the physical quantity detector 1 on the side of the package or the like (on the main surface 10b side of the base portion 10), and are provided so as to overlap the package fixing portion 34 in plan view. The package fixing portion 34 is for attaching the substrate portion 5 of the physical quantity detector 1 to an external member such as a package, and two portions are provided at the end portions of the base portion 10 on both end sides in the X-axis direction. The physical quantity detecting element 40 is formed by patterning a crystal substrate cut out at a specific angle from a crystal or the like by a photolithography technique and an etching technique. In this case, in consideration of the difference between the linear expansion coefficients of the physical quantity detecting element 40 and the base portion 10 and the movable portion 13, it is desirable to use the same material as that of the base portion 10 and the movable portion 13. The hammers 50, 52, 54, and 56 have a rectangular shape in plan view and are provided in the movable portion 13. The hammers 50, 52 are fixed to the main surface 13a of the movable portion 13 by the joint member 62, and the hammers 54, 56 are fixed to the main surface 13b of the movable portion 13 by the joint member 62. Here, the hammer 50 fixed to the main surface 13a is in a plan view, one side of the rim of the rectangle coincides with the direction of the side surface 13c of the movable portion 13, and the other side coincides with the direction of the side surface 31d of the extending portion 38a. The direction is superposed on each other and is disposed on the side of the side surface 13c of the movable portion 13, and is disposed such that the hammer 50 and the extending portion 38a overlap each other in plan view. Similarly, the hammer 52 fixed to the main surface 13a is in a plan view, one side of the rim of the rectangle coincides with the direction of the side surface 13d of the movable portion 13, and the other side coincides with the direction of the side surface 31e of the extending portion 38b. It is disposed on the side of the side surface 13d of the movable portion 13, and is disposed such that the hammer 52 and the extending portion 38b overlap each other in plan view. The hammer 54 fixed to the main surface 13b is placed in the movable portion by superimposing one side of the rectangle and the side surface 13c of the movable portion 13 in a plan view, and the other side is overlapped with the side surface 31d of the extending portion 38a. The side of the side surface 13c of the 13 is disposed so as to overlap the extension portion 38a in a plan view. Similarly, the hammer 56 fixed to the main surface 13b is placed in a plan view, and one side of the rectangle is overlapped with the side surface 13d of the movable portion 13, and the other side is overlapped with the side surface 31e of the extending portion 38b. The side of the side surface 13d of the movable portion 13 is disposed such that the hammer 56 and the extending portion 38b overlap each other in plan view. The hammers 50, 52, 54, and 56 are arranged in such a manner that the hammers 50 and 52 are disposed symmetrically about the physical quantity detecting element 40, and the hammers 54 and 56 are disposed so as to overlap the hammers 50 and 52 in plan view. The hammers 50, 52, 54, 56 are fixed to the movable portion 13 by the joint members 62 provided at the centers of gravity of the hammers 50, 52, 54, 56, respectively. Further, since the hammers 50 and 54 and the extending portions 38a and the weights 52 and 56 and the extending portion 38b overlap each other in a plan view, the hammers 50, 52, 54, 56 abut against the extending portion 38a when an excessive physical quantity is applied. 38b, the displacement of the hammers 50, 52, 54, 56 can be suppressed. The joining member 62 is made of a resin-based thermosetting type adhesive or the like. The main surface 13a and the main surface 13b of the movable portion 13 are respectively applied to two positions, and after the hammers 50, 52, 54, and 56 are placed, the hammers 50, 52, 54, and 56 are fixed to the movable body by heat curing. Part 13. Further, the joint faces of the hammers 50, 52, 54, and 56 opposed to the main surface 13a and the main surface 13b of the movable portion 13 are rough. Thereby, when the weights 50, 52, 54, and 56 are fixed to the movable portion 13, the joint area in the joint surface is increased, and the joint strength can be improved. Next, the operation of the physical quantity detector 1 will be described with reference to Figs. 4 and 5 . 4 and 5 are cross-sectional views showing the operation of the physical quantity detector 1. As shown in FIG. 4, when the acceleration amount of the arrow α1 direction (in the +Z direction) is applied to the physical quantity detector 1, the movable portion 13 is biased in the -Z direction, and the movable portion 13 is supported by the joint portion 12 as a fulcrum. -Z direction displacement. Thereby, the force of the physical quantity detecting element 40 in the direction in which the base portion 42a and the base portion 42b are separated from each other is applied along the Y-axis, and tensile stress is generated in the vibration beam portions 41a and 41b. Therefore, the frequency of the vibration of the vibration beam portions 41a and 41b, that is, the resonance frequency becomes high. On the other hand, when the acceleration amount in the direction of the arrow α2 (in the -Z direction) is applied to the physical quantity detector 1, the force is applied to the movable portion 13 in the +Z direction, and the movable portion 13 is joined by the joint portion. 12 is the fulcrum and is displaced in the +Z direction. Thereby, the physical quantity detector 40 applies a force in a direction in which the base portion 42a and the base portion 42b approach each other along the Y-axis, and compressive stress is generated in the vibration beam portions 41a and 41b. Therefore, the resonance frequencies of the vibration beam portions 41a and 41b become low. The change in the resonance frequency of the physical quantity detecting element 40 is detected by the physical quantity detector 1. That is, the acceleration applied to the physical quantity detector 1 is derived based on the ratio of the change in the detected resonance frequency, converted to a set value by a look-up table or the like. In addition, the physical quantity detector 1 can also be used as an inclinometer. The physical quantity detector 1 as the inclinometer changes the direction in which the gravity acceleration is applied to the physical quantity detector 1 in accordance with the change in the posture caused by the inclination, and generates tensile stress or compressive stress in the vibration beam portions 41a and 41b. Further, the resonance frequencies of the vibration beam portions 41a and 41b change, and the change in the posture caused by the inclination is derived. As described above, according to the physical quantity detector 1 of the first embodiment, the following effects can be obtained. Since the extending portions 38a and 38b overlap the hammers 50, 52, 54, and 56 in plan view, the hammers 50, 52, 54, and 56 are largely displaced to abut against the extending portions 38a and 38b when an excessive physical quantity is applied. However, since the extending portions 38a and 38b have a one-sided structure, even if the hammers 50, 52, 54, 56 abut, the extending portions 38a and 38b can be bent in the displacement direction of the hammers 50, 52, 54, and 56, and the hammer 50 can be suppressed. The displacement of 52, 54, 56 and the impact of hammers 50, 52, 54, 56. Therefore, it is possible to suppress breakage of the extending portions 38a and 38b (support portions 30a and 30b) provided around the cantilever. Thereby, the physical quantity detector 1 having high sensitivity can be provided. Further, since the joint faces of the hammers 50, 52, 54, and 56 are rough, when the hammers 50, 52, 54, and 56 are fixed to the movable portion 13, the joint area in the joint surface is increased, and the joint strength can be improved. Therefore, the hammers 50, 52, 54, 56 are less likely to fall off from the movable portion 13, and the physical quantity detector 1 having high sensitivity can be provided. Further, in the present embodiment, the material of the base portion 10, the joint portion 12, the movable portion 13, the support portions 30a and 30b, and the physical quantity detecting element 40 is not limited to a crystal, and may be lithium tantalate (LiTaO 3 ) or tetraboric acid. A piezoelectric material such as lithium (Li 2 B 4 O 7 ), lithium niobate (LiNbO 3 ), lead zirconate titanate (PZT), zinc oxide (ZnO), or aluminum nitride (AlN). Further, the base portion 10, the joint portion 12, the movable portion 13, and the support portions 30a and 30b may be non-piezoelectric materials such as tantalum or niobium. In the present embodiment, an example in which the tuning-fork vibrating piece is used as the physical quantity detector 40 will be described. However, the form of the physical quantity detecting element 40 is not particularly limited to the tuning fork as long as the frequency changes according to the displacement of the movable portion 13. Type vibrating piece. Further, the physical quantity detecting element 40 is provided only on the main surface 13a side of the movable portion 13, and may be provided only on the main surface 13b side of the movable portion 13, or on both sides of the main surface 13a side and the main surface 13b side. Composition. (Second Embodiment) Next, a physical quantity detector 1a according to a second embodiment of the present invention will be described with reference to Figs. 6 and 7 . Fig. 6 is a plan view showing the configuration of the physical quantity detector 1a of the second embodiment, and Fig. 7 is a cross-sectional view taken along line P2-P2 of Fig. 6. It is to be noted that the same reference numerals are given to the same components as those in the first embodiment, and the description of the same matters will be omitted. The physical quantity detector 1a of the second embodiment differs from the physical quantity detector 1 of the first embodiment only in the configuration of the extending portions 38aa and 38ab of the substrate portion 5a. As shown in FIGS. 6 and 7, the physical quantity detector 1a is configured such that the thickness of the extending portions 38aa and 38ab is thicker than the thickness of the supporting portions 30a and 30b in plan view. According to the physical quantity detector 1a of the second embodiment, since the thickness of the extending portions 38aa and 38ab is thicker than the thickness of the supporting portions 30a and 30b, the strength of the extending portions 38aa and 38ab is increased, even if the hammers 50, 52, and 54 are abutted. 56, the displacement of the hammers 50, 52, 54, 56 and the impact of the hammers 50, 52, 54, 56 can be further suppressed, and the extensions 38aa, 38ab (support portions 30a, 30b) provided around the periphery of the cantilever can be suppressed. damage. In addition, since the two main surfaces of the extending portions 38aa and 38ab protrude, the thickness of the extending portions 38aa and 38ab is thicker than the thickness of the supporting portions 30a and 30b, and only one of the two main surfaces of the extending portions 38aa and 38ab may be used. The main surface of the person protrudes without being thicker than the thickness of the support portions 30a, 30b. (Third Embodiment) Next, a physical quantity detector 1b according to a third embodiment of the present invention will be described with reference to Figs. 8 and 9 . Fig. 8 is a plan view showing a configuration of a physical quantity detector 1b according to a third embodiment, and Fig. 9 is a cross-sectional view taken along line P3-P3 of Fig. 8. It is to be noted that the same reference numerals are given to the same components, and the same reference numerals are given to the same components, and the description thereof will be omitted. The physical quantity detector 1b of the third embodiment differs from the physical quantity detector 1 of the first embodiment only in the configuration of the extending portions 38ba and 38bb of the substrate portion 5b. As shown in FIGS. 8 and 9, the physical quantity detector 1b is provided with recesses 70a and 70c between the front end portion of the extending portion 38ba and the fixed portion 36a, and recessed portions 70b and 70d are provided between the front end portion of the extending portion 38bb and the fixing portion 36b. . According to the physical quantity detector 1b of the third embodiment, since the extending portions 38ba and 38bb are provided with the concave portions 70a, 70b, 70c, and 70d, when the hammers 50, 52, 54, and 56 abut against the extending portions 38ba and 38bb, The recesses 70a, 70b, 70c, and 70d are starting points, and the front end sides of the extending portions 38ba and 38bb are easily bent, so that the displacement amounts of the hammers 50, 52, 54, and 56 and the impact of the hammers 50, 52, 54, and 56 can be suppressed, and The destruction of the extending portions 38ba and 38bb (support portions 30a and 30b) provided around the cantilever is suppressed. Further, the recessed portions 70a, 70b, 70c, and 70d are provided on both main surfaces of the extending portions 38ba and 38bb, and may be provided only on either of the main surfaces of the extending portions 38ba and 38bb. (Fourth Embodiment) Next, a physical quantity detector 1c according to a fourth embodiment of the present invention will be described with reference to Figs. 10 and 11 . Fig. 10 is a plan view showing a configuration of a physical quantity detector 1c according to a fourth embodiment, and Fig. 11 is a cross-sectional view taken along line P4-P4 of Fig. 10. In the following description, the same components are denoted by the same reference numerals, and the description of the same matters will be omitted. The physical quantity detector 1c of the fourth embodiment differs from the physical quantity detector 1 of the first embodiment in that the hammers 50c, 52c, 54c, and 56c are fixed only to the movable portion 13. As shown in FIGS. 10 and 11, the physical quantity detector 1c has hammers 50c, 52c, 54c, and 56c that overlap the support portions 30a and 30b in plan view, and the hammers 50c, 52c, 54c, and 56c that overlap the movable portion 13. The thickness is made thinner. That is, the thin portions 72a, 72b, 72c, and 72d are provided in the regions where the hammers 50c, 52c, 54c, and 56c overlap the support portions 30a and 30b. According to the physical quantity detector 1c of the fourth embodiment, the thickness of the hammers 50c, 52c, 54c, and 56c overlapping the support portions 30a and 30b is thinner than the thickness of the hammers 50c, 52c, 54c, and 56c overlapping the movable portion 13. Therefore, the hammers 50c, 52c, 54c, and 56c in the region overlapping the support portions 30a and 30b are easily bent. Therefore, when the hammers 50c, 52c, 54c, and 56c abut against the support portions 30a and 30b, the displacement of the hammers 50c, 52c, 54c, and 56c and the hammer 50c can be suppressed by bending the thin portions 72a, 72b, 72c, and 72d. The impact of 52c, 54c, 56c, and the destruction of the support portions 30a, 30b provided around the cantilever. Further, by recessing the surfaces of the hammers 50c, 52c, 54c, and 56c opposite to the main surfaces facing the support portions 30a and 30b, the hammers 50c, 52c, and 54c overlapping the support portions 30a and 30b, The thickness of 56c is thinner than the thickness of the hammers 50c, 52c, 54c, 56c overlapping the movable portion 13, and may be recessed and thinned by the main surface opposite to the support portions 30a, 30b, and the hammers 50c, 52c may be used. The two main surfaces of 54c and 56c are recessed and thinned. Further, the thickness of the region where the extending portions 38a and 38b of the hammers 50c, 52c, 54c, and 56c face each other is thinner than the thickness of the hammers 50c, 52c, 54c, and 56c which are overlapped with the movable portion 13. (Fifth Embodiment) Next, a physical quantity detector 1d according to a fifth embodiment of the present invention will be described with reference to Figs. 12 and 13 . Fig. 12 is a plan view showing a configuration of a physical quantity detector 1d according to a fifth embodiment, and Fig. 13 is a cross-sectional view taken along line P5-P5 of Fig. 12. In the following description, the differences from the above-described embodiments will be mainly described, and the same reference numerals will be given to the same components, and the description of the same matters will be omitted. The physical quantity detector 1d of the fifth embodiment differs from the physical quantity detector 1 of the first embodiment in that the hammers 50d, 52d, 54d, and 56d are fixed only to the movable portion 13. As shown in FIGS. 12 and 13, the physical quantity detector 1d is fixed to the region of the movable portion 13 and the region where the hammers 50d, 52d, 54d, and 56d overlap the extending portions 38a and 38b in plan view. One of the portions is provided with recesses 74a, 74b, 74c, 74d. According to the physical quantity detector 1d of the fifth embodiment, the hammers 50d, 52d, 54d, and 56d are fixed between the movable portion 13 and the region where the hammers 50d, 52d, 54d, and 56d overlap the extending portions 38a and 38b. In some cases, the recesses 74a, 74b, 74c, and 74d are provided. Therefore, when the hammers 50d, 52d, 54d, and 56d abut against the extending portion, the hammers 50d, 52d, 54d, and 56d are easily bent by using the recesses 74a, 74b, 74c, and 74d as starting points. Therefore, the displacement of the hammers 50d, 52d, 54d, and 56d and the impact of the hammers 50d, 52d, 54d, and 56d can be suppressed, and the damage of the extending portions 38a and 38b (the supporting portions 30a and 30b) provided around the cantilever can be suppressed. Further, the concave portions 74a, 74b, 74c, 74d are provided on the main surface opposite to the extending portions 38a, 38b of the hammers 50d, 52d, 54d, 56d, and may be disposed opposite to the main surfaces opposed to the extending portions 38a, 38b. The side faces may be disposed on the two main surfaces of the hammers 50d, 52d, 54d, and 56d. [Physical Quantity Detection Device] Next, the physical quantity detection device 100 including the physical quantity detectors 1 to 1d will be described with reference to Figs. 14 and 15 . Fig. 14 is a perspective view showing the physical quantity detecting device 100 including the physical quantity detector 1, and Fig. 15 is a cross-sectional view taken along line P6-P6 of Fig. 14. In the physical quantity detecting device 100, the physical quantity detectors 1 to 1d of the present invention can be used. In this case, as shown in FIGS. 14 and 15, the physical quantity detector 1 is provided. Further, the physical quantity detecting device 100 may include an electric circuit or the like that controls the physical quantity detector 1. The physical quantity detecting device 100 includes a base portion 5 that fixes the hammers 50, 52, 54, and 56 and a package 410. The package body 410 is composed of a package substrate 420 and a cover 430. In addition, in FIG. 14, the cover 430 is abbreviate|omitted. A recess 421 is formed in the package base 420, and the physical quantity detector 1 is housed in the recess 421. The package substrate 420 is formed of a laminated ceramic green sheet and a calcined alumina sintered body, and materials such as crystal, glass, and tantalum may also be used. The package base 420 has pedestal portions 426 and 427 and a step portion 423 that protrude from the inner bottom surface (the bottom surface of the inner side of the concave portion 421) 422 toward the cover 430, and the pedestal portion 426 and the pedestal portion 427, and the fixing portion 36a of the support portion 30a. The fixing portion 36b of the support portion 30b is fixed via the adhesive 462, respectively. Further, internal steps 440 and 442 are provided in the step portion 423. The internal terminals 440 and 442 are disposed at positions opposed to the external connection terminals 49a and 49b provided on the base portion 10 of the physical quantity detector 1. The outer bottom surface (surface opposite to the inner bottom surface 422) 424 of the package base 420 is provided with external terminals 444 and 446 which are used when mounted on an external member such as an electronic device, and the external terminals 444 and 446 are connected via internal wiring (not shown). It is electrically connected to the internal terminals 440, 442. The package base 420 is provided with a through hole 425 disposed at the bottom of the recess 421 and extending from the outer bottom surface 424 to the inner bottom surface 422, and a sealing through hole 425 for sealing the inside of the package 410 to an airtight state. Department 450. In addition, the inside of the package 410 may be a substantially vacuum or a reduced pressure gas environment or a gas atmosphere filled with an inert gas such as nitrogen, helium or argon. The physical quantity detector 1 is fixed to the step portion 423 of the package base 420 via the package fixing portion 460 of the base 10 via the conductive adhesive 460, and is housed inside the package 410. Thereby, the external connection terminals 49a and 49b provided in the package fixing portion 34 and the internal terminals 440 and 442 provided in the step portion 423 are electrically connected by the conductive adhesive 460. The cover 430 is formed in a plate shape and covers the recess 421 of the package base 420. The cover 430 can be made of the same material as the package base 420, or a metal such as Kovar, stainless steel, or the like. In this case, Kovar is used. Cover 430 is bonded to package base 420 via weld ring 432. When the physical quantity detecting device 100 configured as described above applies a driving signal to the excitation electrode of the physical quantity detecting element 40 via the external terminals 444 and 446, the internal terminals 440 and 442, the external connection terminals 49a and 49b, the connection terminals 46a and 46b, etc., the physical quantity The vibration beam portions 41a, 41b of the detecting element 40 vibrate at a specific frequency. The physical quantity detecting device 100 can output the resonance frequency of the vibration as an output signal by using an acceleration or tilt applied by the physical quantity detecting element 40, and can be used as an acceleration sensor or a tilt sensor having a high detection sensitivity. . [Electronic Device] Next, an electronic device including the physical quantity detectors 1 to 1d will be described with reference to Figs. 16 and 17 . Fig. 16 is a perspective view showing a video camera which is an electronic device including the physical quantity detector 1, and Fig. 17 is a perspective view showing a mobile phone which is an electronic device including the physical quantity detector 1. These electronic devices are equipped with the physical quantity detector 1 of the physical quantity detectors 1 to 1d of the present invention. First, the video camera 500 shown in FIG. 16 includes a developing unit 501, an operation unit 502, an audio input unit 503, and a display unit 504. The video camera 500 includes a physical quantity detector 1 and detects acceleration or tilt of at least one axis around the X-axis, the Y-axis, and the Z-axis (not shown) that are orthogonal to each other based on the number of the physical quantity detectors 1 mounted. The hand brake correction function can be used. Thereby, the camcorder 500 can record a vivid animated image. Further, the mobile phone 600 shown in FIG. 17 includes a plurality of operation buttons 601, a display unit 602, a camera mechanism 603, and a shutter button 604. The mobile phone 600 includes a physical quantity detector 1 and detects acceleration or tilt of at least one of the X-axis, the Y-axis, and the Z-axis (not shown) orthogonal to each other based on the number of the physical quantity detectors 1 mounted thereon, and the camera mechanism 603 can play the hand brake correction function. Thereby, the mobile phone 600 can record a vivid portrait by the camera mechanism 603. [Moving body] Next, a moving body including the physical quantity detectors 1 to 1d will be described with reference to Fig. 18 . Fig. 18 is a perspective view showing a vehicle which is a moving body including the physical quantity detector 1. As shown in FIG. 18, the vehicle (moving body) 700 uses the physical quantity detector 1 as an example. In the automobile 700, the physical quantity detector 1 is built in an electronic control unit (ECU: Electronic Control Unit) 703 mounted on the vehicle body 701. The electronic control unit 703 detects the acceleration or tilt of the vehicle body 701 by the physical quantity detector 1, and can grasp the movement state or posture of the automobile 700, and accurately control the tire 702 or the like. Thereby, the car 700 can travel safely and stably. The physical quantity detectors 1 to 1d described above may be mounted on a keyless activation system, an immobilizer, a car navigation system, an automobile air conditioner, an anti-lock brake, a system, etc., in addition to the electronic device or the mobile body described above. ABS: Antilock Brake System), airbag, tire, pressure, monitoring system (TPMS: Tire Pressure Monitoring System), engine control, battery monitor for hybrid car or electric car, electronic control unit for vehicle body attitude control system, etc. And can be applied to a wide range of fields.
1‧‧‧物理量檢測器1‧‧‧ physical quantity detector
1a‧‧‧物理量檢測器1a‧‧‧Physical Detector
1b‧‧‧物理量檢測器1b‧‧‧ physical quantity detector
1c‧‧‧物理量檢測器1c‧‧‧ physical quantity detector
1d‧‧‧物理量檢測器1d‧‧‧ physical quantity detector
5‧‧‧基板部5‧‧‧Parts Department
5a‧‧‧基板部5a‧‧‧Substrate Department
5b‧‧‧基板部5b‧‧‧Substrate Department
10‧‧‧基部10‧‧‧ base
10a‧‧‧主表面10a‧‧‧Main surface
10b‧‧‧主表面10b‧‧‧Main surface
12‧‧‧接合部12‧‧‧ joints
12a‧‧‧槽部12a‧‧‧Slots
12b‧‧‧槽部12b‧‧‧ slot department
13‧‧‧可動部13‧‧‧movable department
13a‧‧‧主表面13a‧‧‧Main surface
13b‧‧‧主表面13b‧‧‧Main surface
13c‧‧‧側面13c‧‧‧ side
13d‧‧‧側面13d‧‧‧ side
30a‧‧‧支持部30a‧‧‧Support Department
30b‧‧‧支持部30b‧‧‧Support Department
31d‧‧‧側面31d‧‧‧ side
31e‧‧‧側面31e‧‧‧ side
32a‧‧‧間隙32a‧‧‧ gap
32b‧‧‧間隙32b‧‧‧ gap
32c‧‧‧間隙32c‧‧‧ gap
34‧‧‧封裝體固定部34‧‧‧Package fixing department
36a‧‧‧固定部36a‧‧‧Fixed Department
36b‧‧‧固定部36b‧‧‧Fixed Department
38a‧‧‧延伸部38a‧‧‧Extension
38aa‧‧‧延伸部38aa‧‧‧Extension
38ab‧‧‧延伸部38ab‧‧‧Extension
38b‧‧‧延伸部38b‧‧‧Extension
38ba‧‧‧延伸部38ba‧‧‧Extension
38bb‧‧‧延伸部38bb‧‧‧Extension
40‧‧‧物理量檢測元件40‧‧‧Physical quantity detection elements
41a‧‧‧振動樑部41a‧‧‧Vibration beam
41b‧‧‧振動樑部41b‧‧‧Vibration beam
42a‧‧‧基底部42a‧‧‧ base
42b‧‧‧基底部42b‧‧‧Base
44a‧‧‧引出電極44a‧‧‧ lead electrode
44b‧‧‧引出電極44b‧‧‧ lead electrode
46a‧‧‧連接端子46a‧‧‧Connecting terminal
46b‧‧‧連接端子46b‧‧‧Connecting terminal
48‧‧‧金屬線48‧‧‧Metal wire
49a‧‧‧外部連接端子49a‧‧‧External connection terminal
49b‧‧‧外部連接端子49b‧‧‧External connection terminal
50‧‧‧錘50‧‧‧ hammer
50c‧‧‧錘50c‧‧‧ hammer
50d‧‧‧錘50d‧‧‧ hammer
52‧‧‧錘52‧‧‧ Hammer
52c‧‧‧錘52c‧‧‧ hammer
52d‧‧‧錘52d‧‧‧ hammer
54‧‧‧錘54‧‧‧ hammer
54c‧‧‧錘54c‧‧‧ hammer
56‧‧‧錘56‧‧‧ Hammer
56c‧‧‧錘56c‧‧‧ hammer
56d‧‧‧錘56d‧‧‧ hammer
60‧‧‧接著劑60‧‧‧Adhesive
62‧‧‧接合構件62‧‧‧Connected components
70a‧‧‧凹部70a‧‧‧ recess
70b‧‧‧凹部70b‧‧‧ recess
70c‧‧‧凹部70c‧‧‧ recess
70d‧‧‧凹部70d‧‧‧ recess
72a‧‧‧薄壁部72a‧‧‧ Thin wall
72b‧‧‧薄壁部72b‧‧‧thin wall
72c‧‧‧薄壁部72c‧‧‧thin wall
72d‧‧‧薄壁部72d‧‧‧ Thin wall
74a‧‧‧凹部74a‧‧‧ recess
74b‧‧‧凹部74b‧‧‧ recess
74c‧‧‧凹部74c‧‧‧ recess
74d‧‧‧凹部74d‧‧‧ recess
100‧‧‧物理量檢測裝置100‧‧‧Physical quantity detecting device
410‧‧‧封裝體410‧‧‧Package
420‧‧‧封裝體基底420‧‧‧Package base
421‧‧‧凹部421‧‧‧ recess
422‧‧‧內底面422‧‧‧ inside bottom
423‧‧‧階差部423‧‧ ‧ step department
424‧‧‧外底面424‧‧‧Outer bottom
425‧‧‧貫通孔425‧‧‧through hole
426‧‧‧台座部426‧‧‧Deputy Department
427‧‧‧台座部427‧‧‧Deputy Department
430‧‧‧蓋430‧‧‧ Cover
432‧‧‧焊縫環432‧‧‧weld ring
440‧‧‧內部端子440‧‧‧Internal terminals
442‧‧‧內部端子442‧‧‧Internal terminals
444‧‧‧外部端子444‧‧‧External terminals
446‧‧‧外部端子446‧‧‧External terminals
450‧‧‧密封部450‧‧‧ Sealing Department
460‧‧‧導電性接著劑460‧‧‧ Conductive adhesive
462‧‧‧接著劑462‧‧‧Adhesive
500‧‧‧作為電子機器之攝錄影機500‧‧‧Video recorder as an electronic machine
501‧‧‧顯像部501‧‧‧Development Department
502‧‧‧操作部502‧‧‧Operation Department
503‧‧‧聲音輸入部503‧‧‧Sound Input Department
504‧‧‧顯示單元504‧‧‧Display unit
600‧‧‧作為電子機器之行動電話600‧‧‧Mobile phone as an electronic machine
601‧‧‧操作按鈕601‧‧‧ operation button
602‧‧‧顯示單元602‧‧‧ display unit
603‧‧‧攝像機機構603‧‧‧ camera organization
604‧‧‧快門按鍵604‧‧‧Shutter button
700‧‧‧作為移動體之汽車700‧‧‧Car as a moving body
701‧‧‧車體701‧‧‧ body
702‧‧‧輪胎702‧‧‧ tires
703‧‧‧電子控制單元703‧‧‧Electronic Control Unit
P1‧‧‧線P1‧‧‧ line
P2‧‧‧線P2‧‧‧ line
P3‧‧‧線P3‧‧‧ line
P4‧‧‧線P4‧‧‧ line
P5‧‧‧線P5‧‧‧ line
P6‧‧‧線P6‧‧‧ line
X‧‧‧軸方向X‧‧‧axis direction
Y‧‧‧軸方向Y‧‧‧ axis direction
Z‧‧‧軸方向Z‧‧‧Axis direction
α1‧‧‧箭頭11‧‧‧ arrow
α2‧‧‧箭頭22‧‧‧ arrow
圖1係顯示第1實施形態之物理量檢測器之構成之立體圖。 圖2係顯示第1實施形態之物理量檢測器之構成之俯視圖。 圖3係圖2之P1-P1線之剖視圖。 圖4係顯示物理量檢測器之動作之剖視圖。 圖5係顯示物理量檢測器之動作之剖視圖。 圖6係顯示第2實施形態之物理量檢測器之構成之俯視圖。 圖7係圖6之P2-P2線之剖視圖。 圖8係顯示第3實施形態之物理量檢測器之構成之俯視圖。 圖9係圖8之P3-P3線之剖視圖。 圖10係顯示第4實施形態之物理量檢測器之構成之俯視圖。 圖11係圖10之P4-P4線之剖視圖。 圖12係顯示第5實施形態之物理量檢測器之構成之俯視圖。 圖13係圖12之P5-P5線之剖視圖。 圖14係顯示具備了物理量檢測器之物理量檢測裝置之俯視圖。 圖15係圖14之P6-P6線之剖視圖。 圖16係顯示具備了物理量檢測器之電子機器即攝錄影機之立體圖。 圖17係顯示具備了物理量檢測器之電子機器即行動電話之立體圖。 圖18係顯示具備了物理量檢測器之移動體即汽車之立體圖。Fig. 1 is a perspective view showing the configuration of a physical quantity detector according to the first embodiment. Fig. 2 is a plan view showing the configuration of a physical quantity detector according to the first embodiment. Figure 3 is a cross-sectional view taken along line P1-P1 of Figure 2. Figure 4 is a cross-sectional view showing the action of the physical quantity detector. Figure 5 is a cross-sectional view showing the action of the physical quantity detector. Fig. 6 is a plan view showing the configuration of a physical quantity detector according to a second embodiment. Figure 7 is a cross-sectional view taken along line P2-P2 of Figure 6. Fig. 8 is a plan view showing the configuration of a physical quantity detector according to a third embodiment. Figure 9 is a cross-sectional view taken along line P3-P3 of Figure 8. Fig. 10 is a plan view showing the configuration of a physical quantity detector according to a fourth embodiment. Figure 11 is a cross-sectional view taken along line P4-P4 of Figure 10. Fig. 12 is a plan view showing the configuration of a physical quantity detector of a fifth embodiment. Figure 13 is a cross-sectional view taken along line P5-P5 of Figure 12. Fig. 14 is a plan view showing a physical quantity detecting device including a physical quantity detector. Figure 15 is a cross-sectional view taken along line P6-P6 of Figure 14. Fig. 16 is a perspective view showing a video camera which is an electronic device having a physical quantity detector. Fig. 17 is a perspective view showing a mobile phone which is an electronic device having a physical quantity detector. Fig. 18 is a perspective view showing a vehicle which is a moving body having a physical quantity detector.
Claims (9)
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| Application Number | Priority Date | Filing Date | Title |
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| JP2017-050920 | 2017-03-16 | ||
| JP2017050920A JP6897187B2 (en) | 2017-03-16 | 2017-03-16 | Physical quantity detectors, physical quantity detection devices, electronic devices and mobiles |
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| TW201835574A true TW201835574A (en) | 2018-10-01 |
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| TW107103774A TW201835574A (en) | 2017-03-16 | 2018-02-02 | Physical quantity detector, physical quantity detection device, electronic apparatus, and vehicle |
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| US (1) | US10677813B2 (en) |
| JP (1) | JP6897187B2 (en) |
| CN (1) | CN108627675B (en) |
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| JP7087479B2 (en) * | 2018-03-09 | 2022-06-21 | セイコーエプソン株式会社 | Physical quantity sensor, physical quantity sensor device, tilt meter using physical quantity sensor device, inertial measurement unit, structure monitoring device, and moving object |
| JP2020134391A (en) * | 2019-02-22 | 2020-08-31 | セイコーエプソン株式会社 | Sensor module, sensor system and abnormality determination method of inertia sensor |
| US11119116B2 (en) | 2019-04-01 | 2021-09-14 | Honeywell International Inc. | Accelerometer for determining an acceleration based on modulated optical signals |
| US11079227B2 (en) * | 2019-04-01 | 2021-08-03 | Honeywell International Inc. | Accelerometer system enclosing gas |
| US10956768B2 (en) | 2019-04-22 | 2021-03-23 | Honeywell International Inc. | Feedback cooling and detection for optomechanical devices |
| US10705112B1 (en) | 2019-04-22 | 2020-07-07 | Honeywell International Inc. | Noise rejection for optomechanical devices |
| US11119114B2 (en) | 2019-07-17 | 2021-09-14 | Honeywell International Inc. | Anchor structure for securing optomechanical structure |
| US11408911B2 (en) | 2019-07-17 | 2022-08-09 | Honeywell International Inc. | Optomechanical structure with corrugated edge |
| US11408912B2 (en) | 2019-08-13 | 2022-08-09 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices |
| US11150264B2 (en) | 2019-08-13 | 2021-10-19 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices using elements |
| US11372019B2 (en) | 2019-08-13 | 2022-06-28 | Honeywell International Inc. | Optomechanical resonator stabilization for optomechanical devices |
| JP2023018834A (en) * | 2021-07-28 | 2023-02-09 | セイコーエプソン株式会社 | Physical quantity sensor, physical quantity sensor device, and method for manufacturing physical quantity sensor device |
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| JPH09318650A (en) * | 1996-05-27 | 1997-12-12 | Matsushita Electric Works Ltd | Sensor device and its manufacture |
| JP5678741B2 (en) * | 2011-03-11 | 2015-03-04 | セイコーエプソン株式会社 | Acceleration detector, acceleration detection device, and electronic apparatus |
| JP5712755B2 (en) * | 2011-04-14 | 2015-05-07 | セイコーエプソン株式会社 | Acceleration detector, acceleration detection device, and electronic apparatus |
| JP5838694B2 (en) * | 2011-09-29 | 2016-01-06 | セイコーエプソン株式会社 | Physical quantity detector, physical quantity detection device, and electronic apparatus |
| JP5896114B2 (en) * | 2011-10-31 | 2016-03-30 | セイコーエプソン株式会社 | Physical quantity detection device, physical quantity detector, and electronic device |
| JP2013122375A (en) * | 2011-11-07 | 2013-06-20 | Seiko Epson Corp | Physical quantity detection device, physical quantity detector and electronic apparatus |
| JP2013217667A (en) * | 2012-04-04 | 2013-10-24 | Seiko Epson Corp | Physical quantity detection device, physical quantity detector, electronic apparatus, and method for manufacturing the physical quantity detection device |
| JP5983142B2 (en) * | 2012-07-24 | 2016-08-31 | セイコーエプソン株式会社 | Manufacturing method of physical quantity detector, physical quantity detector, electronic apparatus and moving body |
| WO2015186728A1 (en) * | 2014-06-05 | 2015-12-10 | 株式会社村田製作所 | Mems device |
| JP6705168B2 (en) * | 2015-12-28 | 2020-06-03 | セイコーエプソン株式会社 | Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic device, and moving body |
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2017
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| CN108627675A (en) | 2018-10-09 |
| JP6897187B2 (en) | 2021-06-30 |
| US10677813B2 (en) | 2020-06-09 |
| CN108627675B (en) | 2022-02-08 |
| US20180267078A1 (en) | 2018-09-20 |
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