JP2014130164A5 - - Google Patents

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Publication number
JP2014130164A5
JP2014130164A5 JP2014077263A JP2014077263A JP2014130164A5 JP 2014130164 A5 JP2014130164 A5 JP 2014130164A5 JP 2014077263 A JP2014077263 A JP 2014077263A JP 2014077263 A JP2014077263 A JP 2014077263A JP 2014130164 A5 JP2014130164 A5 JP 2014130164A5
Authority
JP
Japan
Prior art keywords
sensor according
flexible
mass body
axis direction
flexible portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014077263A
Other languages
English (en)
Japanese (ja)
Other versions
JP5816322B2 (ja
JP2014130164A (ja
Filing date
Publication date
Priority claimed from KR1020120056903A external-priority patent/KR101299729B1/ko
Application filed filed Critical
Publication of JP2014130164A publication Critical patent/JP2014130164A/ja
Publication of JP2014130164A5 publication Critical patent/JP2014130164A5/ja
Application granted granted Critical
Publication of JP5816322B2 publication Critical patent/JP5816322B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014077263A 2012-05-29 2014-04-03 センサ Expired - Fee Related JP5816322B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120056903A KR101299729B1 (ko) 2012-05-29 2012-05-29 센서
KR10-2012-0056903 2012-05-29

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2013113520A Division JP5519833B2 (ja) 2012-05-29 2013-05-29 センサ

Publications (3)

Publication Number Publication Date
JP2014130164A JP2014130164A (ja) 2014-07-10
JP2014130164A5 true JP2014130164A5 (enExample) 2014-08-21
JP5816322B2 JP5816322B2 (ja) 2015-11-18

Family

ID=49221175

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2013113520A Active JP5519833B2 (ja) 2012-05-29 2013-05-29 センサ
JP2014077263A Expired - Fee Related JP5816322B2 (ja) 2012-05-29 2014-04-03 センサ

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2013113520A Active JP5519833B2 (ja) 2012-05-29 2013-05-29 センサ

Country Status (3)

Country Link
US (1) US20130327144A1 (enExample)
JP (2) JP5519833B2 (enExample)
KR (1) KR101299729B1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016070739A (ja) * 2014-09-29 2016-05-09 京セラ株式会社 センサ
CN104316862B (zh) * 2014-10-17 2017-10-13 中国兵器工业集团第二一四研究所苏州研发中心 三轴mems加速度计信号处理电路的串扰评价方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6314823B1 (en) * 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US5962788A (en) * 1994-08-18 1999-10-05 Btg International Limited Transducer
JPH08178952A (ja) * 1994-12-20 1996-07-12 Zexel Corp 加速度センサ
US6763719B2 (en) * 2002-03-25 2004-07-20 Hitachi Metals, Ltd. Acceleration sensor
GB0305857D0 (en) * 2003-03-14 2003-04-16 Europ Technology For Business Accelerometers
US20040226373A1 (en) * 2003-05-12 2004-11-18 Hitachi Metals, Ltd. Acceleration sensor device
US7516659B2 (en) * 2006-05-11 2009-04-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Inertial force sensor
JP2008170203A (ja) * 2007-01-10 2008-07-24 Epson Toyocom Corp 加速度検知ユニット、及び加速度センサ
JP5108617B2 (ja) * 2008-05-13 2012-12-26 大日本印刷株式会社 加速度センサ
JP5093070B2 (ja) * 2008-11-21 2012-12-05 大日本印刷株式会社 加速度センサ及びそれを用いた半導体装置
JP2010190706A (ja) * 2009-02-18 2010-09-02 Panasonic Corp 慣性力センサ
DE102009046807B4 (de) * 2009-11-18 2023-01-05 Robert Bosch Gmbh Verfahren zur Empfindlichkeitsbestimmung eines Beschleunigungs- oder Magnetfeldsensors
KR101208278B1 (ko) * 2011-05-20 2012-12-05 삼성전기주식회사 각속도 센서
US8689632B2 (en) * 2012-01-17 2014-04-08 Freescale Semiconductor, Inc. Fully decoupled lateral axis gyroscope with thickness-insensitive Z-axis spring and symmetric teeter totter sensing element

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