JP5519833B2 - センサ - Google Patents

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Publication number
JP5519833B2
JP5519833B2 JP2013113520A JP2013113520A JP5519833B2 JP 5519833 B2 JP5519833 B2 JP 5519833B2 JP 2013113520 A JP2013113520 A JP 2013113520A JP 2013113520 A JP2013113520 A JP 2013113520A JP 5519833 B2 JP5519833 B2 JP 5519833B2
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JP
Japan
Prior art keywords
mass body
axis direction
axis
flexible
flexible portion
Prior art date
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JP2013113520A
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English (en)
Japanese (ja)
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JP2013246179A (ja
Inventor
ウン キム，ジョン
サン リ，ゼ
キュ ジョン，ウォン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electro Mechanics Co Ltd
Original Assignee
Samsung Electro Mechanics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Samsung Electro Mechanics Co Ltd filed Critical Samsung Electro Mechanics Co Ltd
Publication of JP2013246179A publication Critical patent/JP2013246179A/ja
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Publication of JP5519833B2 publication Critical patent/JP5519833B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP2013113520A 2012-05-29 2013-05-29 センサ Active JP5519833B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120056903A KR101299729B1 (ko) 2012-05-29 2012-05-29 센서
KR10-2012-0056903 2012-05-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014077263A Division JP5816322B2 (ja) 2012-05-29 2014-04-03 センサ

Publications (2)

Publication Number Publication Date
JP2013246179A JP2013246179A (ja) 2013-12-09
JP5519833B2 true JP5519833B2 (ja) 2014-06-11

Family

ID=49221175

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2013113520A Active JP5519833B2 (ja) 2012-05-29 2013-05-29 センサ
JP2014077263A Expired - Fee Related JP5816322B2 (ja) 2012-05-29 2014-04-03 センサ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014077263A Expired - Fee Related JP5816322B2 (ja) 2012-05-29 2014-04-03 センサ

Country Status (3)

Country Link
US (1) US20130327144A1 (enExample)
JP (2) JP5519833B2 (enExample)
KR (1) KR101299729B1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016070739A (ja) * 2014-09-29 2016-05-09 京セラ株式会社 センサ
CN104316862B (zh) * 2014-10-17 2017-10-13 中国兵器工业集团第二一四研究所苏州研发中心 三轴mems加速度计信号处理电路的串扰评价方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6314823B1 (en) * 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US5962788A (en) * 1994-08-18 1999-10-05 Btg International Limited Transducer
JPH08178952A (ja) * 1994-12-20 1996-07-12 Zexel Corp 加速度センサ
US6763719B2 (en) * 2002-03-25 2004-07-20 Hitachi Metals, Ltd. Acceleration sensor
GB0305857D0 (en) * 2003-03-14 2003-04-16 Europ Technology For Business Accelerometers
US20040226373A1 (en) * 2003-05-12 2004-11-18 Hitachi Metals, Ltd. Acceleration sensor device
US7516659B2 (en) * 2006-05-11 2009-04-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Inertial force sensor
JP2008170203A (ja) * 2007-01-10 2008-07-24 Epson Toyocom Corp 加速度検知ユニット、及び加速度センサ
JP5108617B2 (ja) * 2008-05-13 2012-12-26 大日本印刷株式会社 加速度センサ
JP5093070B2 (ja) * 2008-11-21 2012-12-05 大日本印刷株式会社 加速度センサ及びそれを用いた半導体装置
JP2010190706A (ja) * 2009-02-18 2010-09-02 Panasonic Corp 慣性力センサ
DE102009046807B4 (de) * 2009-11-18 2023-01-05 Robert Bosch Gmbh Verfahren zur Empfindlichkeitsbestimmung eines Beschleunigungs- oder Magnetfeldsensors
KR101208278B1 (ko) * 2011-05-20 2012-12-05 삼성전기주식회사 각속도 센서
US8689632B2 (en) * 2012-01-17 2014-04-08 Freescale Semiconductor, Inc. Fully decoupled lateral axis gyroscope with thickness-insensitive Z-axis spring and symmetric teeter totter sensing element

Also Published As

Publication number Publication date
JP2013246179A (ja) 2013-12-09
US20130327144A1 (en) 2013-12-12
KR101299729B1 (ko) 2013-08-22
JP5816322B2 (ja) 2015-11-18
JP2014130164A (ja) 2014-07-10

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