JP2016042042A5 - - Google Patents

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Publication number
JP2016042042A5
JP2016042042A5 JP2014165431A JP2014165431A JP2016042042A5 JP 2016042042 A5 JP2016042042 A5 JP 2016042042A5 JP 2014165431 A JP2014165431 A JP 2014165431A JP 2014165431 A JP2014165431 A JP 2014165431A JP 2016042042 A5 JP2016042042 A5 JP 2016042042A5
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JP
Japan
Prior art keywords
movable part
physical quantity
quantity sensor
fixed electrode
support portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014165431A
Other languages
English (en)
Japanese (ja)
Other versions
JP6413463B2 (ja
JP2016042042A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014165431A priority Critical patent/JP6413463B2/ja
Priority claimed from JP2014165431A external-priority patent/JP6413463B2/ja
Priority to US14/822,041 priority patent/US9810712B2/en
Priority to CN201510494373.3A priority patent/CN105372451B/zh
Publication of JP2016042042A publication Critical patent/JP2016042042A/ja
Publication of JP2016042042A5 publication Critical patent/JP2016042042A5/ja
Priority to US15/723,726 priority patent/US10641789B2/en
Application granted granted Critical
Publication of JP6413463B2 publication Critical patent/JP6413463B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014165431A 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体 Expired - Fee Related JP6413463B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014165431A JP6413463B2 (ja) 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体
US14/822,041 US9810712B2 (en) 2014-08-15 2015-08-10 Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body
CN201510494373.3A CN105372451B (zh) 2014-08-15 2015-08-12 物理量传感器、物理量传感器装置、电子设备以及移动体
US15/723,726 US10641789B2 (en) 2014-08-15 2017-10-03 Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014165431A JP6413463B2 (ja) 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2016042042A JP2016042042A (ja) 2016-03-31
JP2016042042A5 true JP2016042042A5 (enExample) 2017-09-28
JP6413463B2 JP6413463B2 (ja) 2018-10-31

Family

ID=55591858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014165431A Expired - Fee Related JP6413463B2 (ja) 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体

Country Status (1)

Country Link
JP (1) JP6413463B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019007855A (ja) * 2017-06-26 2019-01-17 セイコーエプソン株式会社 振動デバイス、振動デバイスモジュール、電子機器および移動体
JP7331498B2 (ja) * 2019-06-27 2023-08-23 セイコーエプソン株式会社 慣性センサー、電子機器および移動体

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7610809B2 (en) * 2007-01-18 2009-11-03 Freescale Semiconductor, Inc. Differential capacitive sensor and method of making same
DE102009029095B4 (de) * 2009-09-02 2017-05-18 Robert Bosch Gmbh Mikromechanisches Bauelement
JP5700652B2 (ja) * 2011-02-28 2015-04-15 旭化成エレクトロニクス株式会社 静電容量型加速度センサ
JP5979344B2 (ja) * 2012-01-30 2016-08-24 セイコーエプソン株式会社 物理量センサーおよび電子機器

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