JP6413463B2 - 物理量センサー、物理量センサー装置、電子機器および移動体 - Google Patents

物理量センサー、物理量センサー装置、電子機器および移動体 Download PDF

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Publication number
JP6413463B2
JP6413463B2 JP2014165431A JP2014165431A JP6413463B2 JP 6413463 B2 JP6413463 B2 JP 6413463B2 JP 2014165431 A JP2014165431 A JP 2014165431A JP 2014165431 A JP2014165431 A JP 2014165431A JP 6413463 B2 JP6413463 B2 JP 6413463B2
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physical quantity
quantity sensor
movable part
fixed electrode
movable
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JP2014165431A
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Japanese (ja)
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JP2016042042A5 (enExample
JP2016042042A (ja
Inventor
田中　悟
悟 田中
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2014165431A priority Critical patent/JP6413463B2/ja
Priority to US14/822,041 priority patent/US9810712B2/en
Priority to CN201510494373.3A priority patent/CN105372451B/zh
Publication of JP2016042042A publication Critical patent/JP2016042042A/ja
Publication of JP2016042042A5 publication Critical patent/JP2016042042A5/ja
Priority to US15/723,726 priority patent/US10641789B2/en
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Publication of JP6413463B2 publication Critical patent/JP6413463B2/ja
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JP2014165431A 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体 Expired - Fee Related JP6413463B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014165431A JP6413463B2 (ja) 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体
US14/822,041 US9810712B2 (en) 2014-08-15 2015-08-10 Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body
CN201510494373.3A CN105372451B (zh) 2014-08-15 2015-08-12 物理量传感器、物理量传感器装置、电子设备以及移动体
US15/723,726 US10641789B2 (en) 2014-08-15 2017-10-03 Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body

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JP2014165431A JP6413463B2 (ja) 2014-08-15 2014-08-15 物理量センサー、物理量センサー装置、電子機器および移動体

Publications (3)

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JP2016042042A JP2016042042A (ja) 2016-03-31
JP2016042042A5 JP2016042042A5 (enExample) 2017-09-28
JP6413463B2 true JP6413463B2 (ja) 2018-10-31

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019007855A (ja) * 2017-06-26 2019-01-17 セイコーエプソン株式会社 振動デバイス、振動デバイスモジュール、電子機器および移動体
JP7331498B2 (ja) * 2019-06-27 2023-08-23 セイコーエプソン株式会社 慣性センサー、電子機器および移動体

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7610809B2 (en) * 2007-01-18 2009-11-03 Freescale Semiconductor, Inc. Differential capacitive sensor and method of making same
DE102009029095B4 (de) * 2009-09-02 2017-05-18 Robert Bosch Gmbh Mikromechanisches Bauelement
JP5700652B2 (ja) * 2011-02-28 2015-04-15 旭化成エレクトロニクス株式会社 静電容量型加速度センサ
JP5979344B2 (ja) * 2012-01-30 2016-08-24 セイコーエプソン株式会社 物理量センサーおよび電子機器

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