JP2013238594A5 - - Google Patents

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Publication number
JP2013238594A5
JP2013238594A5 JP2013099176A JP2013099176A JP2013238594A5 JP 2013238594 A5 JP2013238594 A5 JP 2013238594A5 JP 2013099176 A JP2013099176 A JP 2013099176A JP 2013099176 A JP2013099176 A JP 2013099176A JP 2013238594 A5 JP2013238594 A5 JP 2013238594A5
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JP
Japan
Prior art keywords
flow
flow sensor
sensor
sensor element
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013099176A
Other languages
English (en)
Japanese (ja)
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JP2013238594A (ja
JP6100081B2 (ja
Filing date
Publication date
Priority claimed from DE102012009421A external-priority patent/DE102012009421A1/de
Application filed filed Critical
Publication of JP2013238594A publication Critical patent/JP2013238594A/ja
Publication of JP2013238594A5 publication Critical patent/JP2013238594A5/ja
Application granted granted Critical
Publication of JP6100081B2 publication Critical patent/JP6100081B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013099176A 2012-05-11 2013-05-09 流量センサ Expired - Fee Related JP6100081B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012009421.3 2012-05-11
DE102012009421A DE102012009421A1 (de) 2012-05-11 2012-05-11 Strömungssensor

Publications (3)

Publication Number Publication Date
JP2013238594A JP2013238594A (ja) 2013-11-28
JP2013238594A5 true JP2013238594A5 (enExample) 2016-06-02
JP6100081B2 JP6100081B2 (ja) 2017-03-22

Family

ID=48092663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013099176A Expired - Fee Related JP6100081B2 (ja) 2012-05-11 2013-05-09 流量センサ

Country Status (6)

Country Link
US (1) US9091579B2 (enExample)
EP (1) EP2662670B1 (enExample)
JP (1) JP6100081B2 (enExample)
KR (1) KR101930937B1 (enExample)
CN (1) CN103389134B (enExample)
DE (1) DE102012009421A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3274814B2 (ja) 1996-12-27 2002-04-15 サンデン株式会社 スクロール流体機械
JP6804439B2 (ja) 2014-10-24 2020-12-23 ワットロー・エレクトリック・マニュファクチャリング・カンパニー 迅速応答センサ筐体
DE102015219509A1 (de) * 2015-10-08 2017-04-13 Robert Bosch Gmbh Sensorvorrichtung zur Erfassung mindestens einer Strömungseigenschaft eines strömenden fluiden Mediums
DE102015118123A1 (de) 2015-10-23 2017-04-27 Endress+Hauser Flowtec Ag Thermisches Durchflussmessgerät und Anordnung mit einem Rohr und dem thermischen Durchflussmessgerät
DE102015225358B4 (de) 2015-12-16 2020-04-02 Continental Automotive Gmbh Luftmassenmesser
JP7112001B2 (ja) * 2020-10-15 2022-08-03 ダイキン工業株式会社 熱式流速・流量センサ、及び空気調和機

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2751196C2 (de) * 1977-11-16 1985-06-20 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur Luftmengenmessung
JPS62123318A (ja) * 1985-08-13 1987-06-04 Nippon Soken Inc 直熱型流量センサ
DE3838466C2 (de) * 1988-01-16 1995-11-16 Bosch Gmbh Robert Luftmassenmeßvorrichtung und Verfahren zur Herstellung einer Luftmassenmeßvorrichtung
US4986122A (en) * 1989-11-08 1991-01-22 Hydro Data Inc. Fluid velocity measurement instrument
JP2784286B2 (ja) * 1991-12-09 1998-08-06 三菱電機株式会社 半導体センサー装置の製造方法
JP3331814B2 (ja) * 1995-05-18 2002-10-07 三菱電機株式会社 感熱式流量検出装置
CN1155653A (zh) * 1995-05-19 1997-07-30 株式会社日立制作所 质量气流传感器及其所用的测量器
JP3416526B2 (ja) * 1998-05-21 2003-06-16 三菱電機株式会社 感熱式流量センサ
JP3545637B2 (ja) 1999-03-24 2004-07-21 三菱電機株式会社 感熱式流量センサ
DE10036290A1 (de) * 2000-07-26 2002-02-07 Bosch Gmbh Robert Vorrichtung zur Bestimmung zumindest eines Parameters eines strömenden Mediums
JP3671393B2 (ja) * 2001-05-24 2005-07-13 三菱電機株式会社 感熱式流量センサ
DE102005016122A1 (de) 2005-04-08 2006-10-12 Robert Bosch Gmbh Verfahren zur Herstellung eines Strömungsmessers
JP4830391B2 (ja) * 2005-07-29 2011-12-07 株式会社デンソー センサ装置の製造方法及びセンサ装置
JP2008058131A (ja) * 2006-08-31 2008-03-13 Hitachi Ltd 熱式ガス流量計
JP4882732B2 (ja) * 2006-12-22 2012-02-22 株式会社デンソー 半導体装置
JP5183164B2 (ja) * 2007-11-19 2013-04-17 日立オートモティブシステムズ株式会社 流量測定装置
US7654157B2 (en) * 2007-11-30 2010-02-02 Honeywell International Inc. Airflow sensor with pitot tube for pressure drop reduction
EP2245431A1 (en) * 2007-12-21 2010-11-03 Norgren GmbH Thermal flow sensor with turbulence inducers

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