CN103389134B - 流传感器 - Google Patents

流传感器 Download PDF

Info

Publication number
CN103389134B
CN103389134B CN201310170786.7A CN201310170786A CN103389134B CN 103389134 B CN103389134 B CN 103389134B CN 201310170786 A CN201310170786 A CN 201310170786A CN 103389134 B CN103389134 B CN 103389134B
Authority
CN
China
Prior art keywords
flow sensor
flow
sensor
sensor element
encapsulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201310170786.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN103389134A (zh
Inventor
M.加尔
M.罗姆
S.波利
G.尼斯纳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Ing HCF Porsche AG
Original Assignee
Dr Ing HCF Porsche AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Ing HCF Porsche AG filed Critical Dr Ing HCF Porsche AG
Publication of CN103389134A publication Critical patent/CN103389134A/zh
Application granted granted Critical
Publication of CN103389134B publication Critical patent/CN103389134B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/74Devices for measuring flow of a fluid or flow of a fluent solid material in suspension in another fluid

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
CN201310170786.7A 2012-05-11 2013-05-10 流传感器 Active CN103389134B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012009421A DE102012009421A1 (de) 2012-05-11 2012-05-11 Strömungssensor
DE102012009421.3 2012-05-11

Publications (2)

Publication Number Publication Date
CN103389134A CN103389134A (zh) 2013-11-13
CN103389134B true CN103389134B (zh) 2017-12-29

Family

ID=48092663

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310170786.7A Active CN103389134B (zh) 2012-05-11 2013-05-10 流传感器

Country Status (6)

Country Link
US (1) US9091579B2 (enExample)
EP (1) EP2662670B1 (enExample)
JP (1) JP6100081B2 (enExample)
KR (1) KR101930937B1 (enExample)
CN (1) CN103389134B (enExample)
DE (1) DE102012009421A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3274814B2 (ja) 1996-12-27 2002-04-15 サンデン株式会社 スクロール流体機械
EP3209985B1 (en) * 2014-10-24 2020-04-29 Watlow Electric Manufacturing Company Rapid response sensor housing
DE102015219509A1 (de) * 2015-10-08 2017-04-13 Robert Bosch Gmbh Sensorvorrichtung zur Erfassung mindestens einer Strömungseigenschaft eines strömenden fluiden Mediums
DE102015118123A1 (de) * 2015-10-23 2017-04-27 Endress+Hauser Flowtec Ag Thermisches Durchflussmessgerät und Anordnung mit einem Rohr und dem thermischen Durchflussmessgerät
DE102015225358B4 (de) * 2015-12-16 2020-04-02 Continental Automotive Gmbh Luftmassenmesser
JP7112001B2 (ja) * 2020-10-15 2022-08-03 ダイキン工業株式会社 熱式流速・流量センサ、及び空気調和機

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1155653A (zh) * 1995-05-19 1997-07-30 株式会社日立制作所 质量气流传感器及其所用的测量器
US6393907B1 (en) * 1999-03-24 2002-05-28 Mitsubishi Denki Kabushiki Kaisha Thermo-sensitive flow rate sensor
CN101878412A (zh) * 2007-11-30 2010-11-03 霍尼韦尔国际公司 具有用于减少压降的皮托管的气流传感器
CN101939624A (zh) * 2007-12-21 2011-01-05 诺格伦有限责任公司 带有湍流诱发器的热流量传感器

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2751196C2 (de) * 1977-11-16 1985-06-20 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur Luftmengenmessung
JPS62123318A (ja) * 1985-08-13 1987-06-04 Nippon Soken Inc 直熱型流量センサ
DE3838466C2 (de) * 1988-01-16 1995-11-16 Bosch Gmbh Robert Luftmassenmeßvorrichtung und Verfahren zur Herstellung einer Luftmassenmeßvorrichtung
US4986122A (en) * 1989-11-08 1991-01-22 Hydro Data Inc. Fluid velocity measurement instrument
JP2784286B2 (ja) * 1991-12-09 1998-08-06 三菱電機株式会社 半導体センサー装置の製造方法
JP3331814B2 (ja) * 1995-05-18 2002-10-07 三菱電機株式会社 感熱式流量検出装置
JP3416526B2 (ja) * 1998-05-21 2003-06-16 三菱電機株式会社 感熱式流量センサ
DE10036290A1 (de) * 2000-07-26 2002-02-07 Bosch Gmbh Robert Vorrichtung zur Bestimmung zumindest eines Parameters eines strömenden Mediums
JP3671393B2 (ja) * 2001-05-24 2005-07-13 三菱電機株式会社 感熱式流量センサ
DE102005016122A1 (de) 2005-04-08 2006-10-12 Robert Bosch Gmbh Verfahren zur Herstellung eines Strömungsmessers
JP4830391B2 (ja) * 2005-07-29 2011-12-07 株式会社デンソー センサ装置の製造方法及びセンサ装置
JP2008058131A (ja) * 2006-08-31 2008-03-13 Hitachi Ltd 熱式ガス流量計
JP4882732B2 (ja) 2006-12-22 2012-02-22 株式会社デンソー 半導体装置
JP5183164B2 (ja) * 2007-11-19 2013-04-17 日立オートモティブシステムズ株式会社 流量測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1155653A (zh) * 1995-05-19 1997-07-30 株式会社日立制作所 质量气流传感器及其所用的测量器
US6393907B1 (en) * 1999-03-24 2002-05-28 Mitsubishi Denki Kabushiki Kaisha Thermo-sensitive flow rate sensor
CN101878412A (zh) * 2007-11-30 2010-11-03 霍尼韦尔国际公司 具有用于减少压降的皮托管的气流传感器
CN101939624A (zh) * 2007-12-21 2011-01-05 诺格伦有限责任公司 带有湍流诱发器的热流量传感器

Also Published As

Publication number Publication date
US20130298666A1 (en) 2013-11-14
JP2013238594A (ja) 2013-11-28
KR101930937B1 (ko) 2018-12-20
JP6100081B2 (ja) 2017-03-22
US9091579B2 (en) 2015-07-28
EP2662670A1 (de) 2013-11-13
CN103389134A (zh) 2013-11-13
KR20130126471A (ko) 2013-11-20
DE102012009421A1 (de) 2013-11-14
EP2662670B1 (de) 2016-11-09

Similar Documents

Publication Publication Date Title
CN103389134B (zh) 流传感器
US10670440B2 (en) Thermal airflow measuring device
CN107101685B (zh) 热式流量计
JP6220914B2 (ja) センサモジュール
US20120160024A1 (en) Intake temperature sensor
CN105378441A (zh) 热式流量计的制造方法
JP5456815B2 (ja) 流量センサおよびその製造方法
JP2010096614A (ja) センサ装置
CN107076593A (zh) 热式空气流量计
JP2013238594A5 (enExample)
EP2966417B1 (en) Thermal-type airflow meter
US10488270B2 (en) Platinum temperature sensor element
JP5220955B2 (ja) 流量センサ
JP6520636B2 (ja) 物理量センササブアセンブリおよび物理量測定装置
JP5081174B2 (ja) センサ及びフローセンサ
CN105203230B (zh) 用于感测流动的流体介质的温度的温度测量装置
US20160341689A1 (en) Component part having a mecs component on a mounting carrier
JP5655702B2 (ja) 温度センサ、温度センサの製造方法及び温度センサ付圧力センサ
JP5492834B2 (ja) 熱式流量計
US10490518B2 (en) Measuring device
JP2016133367A (ja) 熱式空気流量計
JP2002054961A (ja) フローセンサモジュールおよびガスメータ

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant