JP2015122693A5 - - Google Patents
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- Publication number
- JP2015122693A5 JP2015122693A5 JP2013266617A JP2013266617A JP2015122693A5 JP 2015122693 A5 JP2015122693 A5 JP 2015122693A5 JP 2013266617 A JP2013266617 A JP 2013266617A JP 2013266617 A JP2013266617 A JP 2013266617A JP 2015122693 A5 JP2015122693 A5 JP 2015122693A5
- Authority
- JP
- Japan
- Prior art keywords
- base
- vibration
- elastic member
- substrate
- vibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 6
- 230000005284 excitation Effects 0.000 claims 2
- 238000007789 sealing Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013266617A JP6349722B2 (ja) | 2013-12-25 | 2013-12-25 | 振動デバイス、電子機器、および移動体 |
| US14/575,528 US10009006B2 (en) | 2013-12-25 | 2014-12-18 | Resonator device, electronic apparatus, and moving object |
| CN201410815268.0A CN104753490B (zh) | 2013-12-25 | 2014-12-23 | 振动器件、电子设备以及移动体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013266617A JP6349722B2 (ja) | 2013-12-25 | 2013-12-25 | 振動デバイス、電子機器、および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015122693A JP2015122693A (ja) | 2015-07-02 |
| JP2015122693A5 true JP2015122693A5 (enExample) | 2017-01-26 |
| JP6349722B2 JP6349722B2 (ja) | 2018-07-04 |
Family
ID=53401047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013266617A Expired - Fee Related JP6349722B2 (ja) | 2013-12-25 | 2013-12-25 | 振動デバイス、電子機器、および移動体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10009006B2 (enExample) |
| JP (1) | JP6349722B2 (enExample) |
| CN (1) | CN104753490B (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6442899B2 (ja) * | 2014-07-30 | 2018-12-26 | セイコーエプソン株式会社 | 振動デバイス、電子機器、および移動体 |
| US20220345104A1 (en) * | 2019-09-16 | 2022-10-27 | David Salt | Doubly Rotated Quartz Crystal Resonators With Reduced Sensitivity to Acceleration |
| JP2024030172A (ja) * | 2022-08-23 | 2024-03-07 | 株式会社村田製作所 | 弾性波装置 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3715563A (en) * | 1971-04-19 | 1973-02-06 | Frequency Electronics Inc | Contact heaters for quartz crystals in evacuated enclosures |
| US4985687A (en) * | 1990-02-27 | 1991-01-15 | Ppa Industries, Inc. | Low power temperature-controlled frequency-stabilized oscillator |
| JPH0388509A (ja) * | 1989-08-31 | 1991-04-12 | Nippon Dempa Kogyo Co Ltd | 圧電振動子 |
| JP3125732B2 (ja) | 1997-11-04 | 2001-01-22 | 日本電気株式会社 | 圧電振動子発振器 |
| US5917272A (en) * | 1998-06-11 | 1999-06-29 | Vectron, Inc. | Oven-heated crystal resonator and oscillator assembly |
| JP2002198739A (ja) | 2000-12-26 | 2002-07-12 | Toyo Commun Equip Co Ltd | 表面実装型圧電発振器 |
| US6984925B2 (en) * | 2002-05-28 | 2006-01-10 | Delaware Capital Formation, Inc | Low acceleration sensitivity mounting structures for crystal resonators |
| JP2004274263A (ja) * | 2003-03-06 | 2004-09-30 | Seiko Epson Corp | 圧電デバイスおよび圧電デバイスの製造方法 |
| JP4804813B2 (ja) | 2005-06-24 | 2011-11-02 | 日本電波工業株式会社 | 圧電発振器 |
| JP5070954B2 (ja) | 2007-06-22 | 2012-11-14 | 株式会社大真空 | 表面実装型圧電振動デバイス |
| US8384486B2 (en) * | 2007-07-18 | 2013-02-26 | Seiko Epson Corporation | Piezoelectric oscillator and transmitter |
| ATE534191T1 (de) * | 2009-03-09 | 2011-12-15 | Micro Crystal Ag | Oszillatorvorrichtung, die einen wärmegesteuerten piezoeletrischen quarz umfasst |
| EP2613440B1 (en) * | 2012-01-09 | 2019-07-10 | Micro Crystal AG | Small-sized piezoelectric tuning-fork resonator |
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2013
- 2013-12-25 JP JP2013266617A patent/JP6349722B2/ja not_active Expired - Fee Related
-
2014
- 2014-12-18 US US14/575,528 patent/US10009006B2/en not_active Expired - Fee Related
- 2014-12-23 CN CN201410815268.0A patent/CN104753490B/zh not_active Expired - Fee Related