JP2010203990A5 - - Google Patents
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- Publication number
- JP2010203990A5 JP2010203990A5 JP2009051616A JP2009051616A JP2010203990A5 JP 2010203990 A5 JP2010203990 A5 JP 2010203990A5 JP 2009051616 A JP2009051616 A JP 2009051616A JP 2009051616 A JP2009051616 A JP 2009051616A JP 2010203990 A5 JP2010203990 A5 JP 2010203990A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- movable
- composite sensor
- damping structure
- sensor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000013016 damping Methods 0.000 claims description 35
- 239000002131 composite material Substances 0.000 claims description 29
- 230000001133 acceleration Effects 0.000 claims description 20
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 4
- 230000005484 gravity Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 230000006378 damage Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009051616A JP5321150B2 (ja) | 2009-03-05 | 2009-03-05 | 複合センサー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009051616A JP5321150B2 (ja) | 2009-03-05 | 2009-03-05 | 複合センサー |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010203990A JP2010203990A (ja) | 2010-09-16 |
| JP2010203990A5 true JP2010203990A5 (enExample) | 2012-03-22 |
| JP5321150B2 JP5321150B2 (ja) | 2013-10-23 |
Family
ID=42965609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009051616A Expired - Fee Related JP5321150B2 (ja) | 2009-03-05 | 2009-03-05 | 複合センサー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5321150B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5772873B2 (ja) | 2012-06-13 | 2015-09-02 | 株式会社デンソー | 静電容量式物理量センサ |
| JP6409351B2 (ja) | 2014-06-12 | 2018-10-24 | 株式会社デンソー | 物理量センサ |
| JP6149910B2 (ja) * | 2015-10-08 | 2017-06-21 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
| JP6693214B2 (ja) * | 2016-03-25 | 2020-05-13 | セイコーエプソン株式会社 | 物理量検出装置、電子機器及び移動体 |
| JP2023152416A (ja) | 2022-04-04 | 2023-10-17 | セイコーエプソン株式会社 | 慣性センサーおよび慣性計測モジュール |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06163936A (ja) * | 1992-11-19 | 1994-06-10 | Hitachi Ltd | 半導体式力学量センサ |
| JPH10239064A (ja) * | 1997-02-27 | 1998-09-11 | Matsushita Electric Ind Co Ltd | 角速度と加速度の複合センサ |
| GB0000619D0 (en) * | 2000-01-13 | 2000-03-01 | British Aerospace | Accelerometer |
| JP3435665B2 (ja) * | 2000-06-23 | 2003-08-11 | 株式会社村田製作所 | 複合センサ素子およびその製造方法 |
| JP3346379B2 (ja) * | 2000-09-21 | 2002-11-18 | 三菱電機株式会社 | 角速度センサおよびその製造方法 |
| JP2003344445A (ja) * | 2002-05-24 | 2003-12-03 | Mitsubishi Electric Corp | 慣性力センサ |
| JP5319122B2 (ja) * | 2008-01-21 | 2013-10-16 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
-
2009
- 2009-03-05 JP JP2009051616A patent/JP5321150B2/ja not_active Expired - Fee Related
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