JP2013253958A5 - - Google Patents

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Publication number
JP2013253958A5
JP2013253958A5 JP2012205750A JP2012205750A JP2013253958A5 JP 2013253958 A5 JP2013253958 A5 JP 2013253958A5 JP 2012205750 A JP2012205750 A JP 2012205750A JP 2012205750 A JP2012205750 A JP 2012205750A JP 2013253958 A5 JP2013253958 A5 JP 2013253958A5
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JP
Japan
Prior art keywords
vibrating gyroscope
driving
vibration
drive
mass bodies
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JP2012205750A
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English (en)
Japanese (ja)
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JP6143430B2 (ja
JP2013253958A (ja
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Priority to JP2012205750A priority Critical patent/JP6143430B2/ja
Priority claimed from JP2012205750A external-priority patent/JP6143430B2/ja
Priority to US13/759,929 priority patent/US9074889B2/en
Publication of JP2013253958A publication Critical patent/JP2013253958A/ja
Publication of JP2013253958A5 publication Critical patent/JP2013253958A5/ja
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Publication of JP6143430B2 publication Critical patent/JP6143430B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012205750A 2012-05-08 2012-09-19 バイアス補正機能を備えた振動型ジャイロ Expired - Fee Related JP6143430B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012205750A JP6143430B2 (ja) 2012-05-08 2012-09-19 バイアス補正機能を備えた振動型ジャイロ
US13/759,929 US9074889B2 (en) 2012-05-08 2013-02-05 Vibration gyro having bias correcting function

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012106638 2012-05-08
JP2012106638 2012-05-08
JP2012205750A JP6143430B2 (ja) 2012-05-08 2012-09-19 バイアス補正機能を備えた振動型ジャイロ

Publications (3)

Publication Number Publication Date
JP2013253958A JP2013253958A (ja) 2013-12-19
JP2013253958A5 true JP2013253958A5 (enExample) 2015-04-30
JP6143430B2 JP6143430B2 (ja) 2017-06-07

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Family Applications (1)

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JP2012205750A Expired - Fee Related JP6143430B2 (ja) 2012-05-08 2012-09-19 バイアス補正機能を備えた振動型ジャイロ

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Country Link
US (1) US9074889B2 (enExample)
JP (1) JP6143430B2 (enExample)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2953589B1 (fr) * 2009-12-07 2011-12-23 Sagem Defense Securite Procede de determination d'un cap par rotation d'un dispositif inertiel
US9128496B2 (en) * 2011-10-26 2015-09-08 The United States Of America As Represented By Secretary Of The Navy Auto-ranging for time domain extraction of perturbations to sinusoidal oscillation
DE102012219511A1 (de) * 2012-10-25 2014-04-30 Robert Bosch Gmbh Mikromechanische Struktur
US9335170B2 (en) * 2012-11-28 2016-05-10 Freescale Semiconductor, Inc. Inertial sensor and method of levitation effect compensation
JP2015203604A (ja) * 2014-04-11 2015-11-16 三菱プレシジョン株式会社 高性能化が図られた振動型ジャイロ
EP3161416A2 (en) 2014-06-26 2017-05-03 Lumedyne Technologies Incorporated Systems and methods for extracting system parameters from nonlinear periodic signals from sensors
US20160102978A1 (en) * 2014-10-14 2016-04-14 Richtek Technology Corporation Rotation velocity sensor and method for sensing rotation velocity
US10234476B2 (en) 2015-05-20 2019-03-19 Google Llc Extracting inertial information from nonlinear periodic signals
KR101776583B1 (ko) * 2015-07-01 2017-09-11 주식회사 신성씨앤티 멤스 자이로스코프에 사용되는 멤스 링크 기구
JP6419170B2 (ja) 2016-02-17 2018-11-07 テレフオンアクチーボラゲット エルエム エリクソン（パブル） ビデオピクチャを符号化および復号する方法および装置
ITUA20161498A1 (it) * 2016-03-09 2017-09-09 St Microelectronics Srl Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento
JP6370832B2 (ja) * 2016-05-06 2018-08-08 矢崎総業株式会社 電圧センサ
US10234477B2 (en) 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
JP6660849B2 (ja) 2016-08-04 2020-03-11 三菱プレシジョン株式会社 バイアス補正機能を有する振動型ジャイロ、及び振動型ジャイロの使用方法
JP6546576B2 (ja) * 2016-10-11 2019-07-17 矢崎総業株式会社 電圧センサ
JP6819216B2 (ja) 2016-10-26 2021-01-27 セイコーエプソン株式会社 ジャイロセンサー、ジャイロセンサーの製造方法、電子機器および移動体
CN106595712A (zh) * 2016-12-22 2017-04-26 四川纳杰微电子技术有限公司 一种新型微机械陀螺仪正交误差补偿结构
CN106500732A (zh) * 2016-12-22 2017-03-15 四川纳杰微电子技术有限公司 一种微机械陀螺仪正交误差补偿结构
GB2561889B (en) * 2017-04-27 2022-10-12 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with electrostatic control of proof mass
GB2561886B (en) * 2017-04-27 2022-10-19 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer
IT201700099412A1 (it) * 2017-09-05 2019-03-05 St Microelectronics Srl Giroscopio mems con regolazione del mismatch fra la frequenza di pilotaggio e la frequenza di rilevamento
GB2567479B (en) * 2017-10-13 2022-04-06 Atlantic Inertial Systems Ltd Angular rate sensors
CN107796383B (zh) * 2017-10-17 2021-03-23 西北工业大学 芯片级旋转调制式mems硅微机械陀螺
CN109931959B (zh) * 2019-03-27 2023-03-31 河海大学常州校区 硅微陀螺仪正交误差校正方法
KR102438344B1 (ko) * 2019-10-14 2022-09-01 세메스 주식회사 웨이퍼형 센서 유닛 및 웨이퍼형 센서 유닛의 제조 방법
US12160084B2 (en) 2019-10-15 2024-12-03 Texas Instruments Incorporated MEMS-based phase spatial light modulating architecture
US12339437B2 (en) * 2019-12-12 2025-06-24 Texas Instruments Incorporated Bias voltage adjustment for a phase light modulator
US12012327B2 (en) 2020-03-12 2024-06-18 Honeywell International Inc. Methods for vibration immunity to suppress bias errors in sensor devices
CN111536993B (zh) * 2020-04-29 2022-01-07 中国人民解放军国防科技大学 一种振动陀螺电极角度误差的辨识与补偿方法及系统
CN111879303B (zh) * 2020-06-16 2022-04-05 深迪半导体(绍兴)有限公司 电容式mems陀螺仪及其加快起振速度的方法
CN114076593B (zh) * 2020-08-19 2025-06-27 塔莱斯公司 改进的惯性传感器
CN112097751B (zh) * 2020-09-02 2025-04-04 美新半导体(天津)有限公司 一种解耦式双框架微陀螺
CN113607153B (zh) * 2021-08-30 2022-11-01 武汉大学 一种两轴mems圆环陀螺仪及其制备封装方法
EP4467928A1 (en) * 2023-05-22 2024-11-27 Murata Manufacturing Co., Ltd. Symmetric differential transducer
CN117146791B (zh) * 2023-10-30 2024-02-23 北京晨晶电子有限公司 一种微机械石英音叉陀螺及电子设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
JP3882973B2 (ja) * 1998-06-22 2007-02-21 アイシン精機株式会社 角速度センサ
JP2000258162A (ja) * 1999-03-04 2000-09-22 Alps Electric Co Ltd 圧電振動子の温度補償装置
US6257059B1 (en) * 1999-09-24 2001-07-10 The Charles Stark Draper Laboratory, Inc. Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
JP2001264068A (ja) * 2000-03-16 2001-09-26 Aisin Seiki Co Ltd 角速度センサ
JP2002031533A (ja) * 2000-07-13 2002-01-31 Microstone Corp ジャイロセンサ
DE10360962B4 (de) * 2003-12-23 2007-05-31 Litef Gmbh Verfahren zur Quadraturbias-Kompensation in einem Corioliskreisel sowie dafür geeigneter Corioliskreisel
US7444869B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing and parametric amplification of MEMS inertial sensors
US8459111B1 (en) * 2010-01-23 2013-06-11 Minyao Mao Angular rate sensor with suppressed linear acceleration response
JP5552976B2 (ja) * 2010-09-07 2014-07-16 セイコーエプソン株式会社 角速度検出装置及び電子機器

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