ITUA20161498A1 - Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento - Google Patents

Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento

Info

Publication number
ITUA20161498A1
ITUA20161498A1 ITUA2016A001498A ITUA20161498A ITUA20161498A1 IT UA20161498 A1 ITUA20161498 A1 IT UA20161498A1 IT UA2016A001498 A ITUA2016A001498 A IT UA2016A001498A IT UA20161498 A ITUA20161498 A IT UA20161498A IT UA20161498 A1 ITUA20161498 A1 IT UA20161498A1
Authority
IT
Italy
Prior art keywords
mems
sensor device
detection structure
drive characteristics
improved drive
Prior art date
Application number
ITUA2016A001498A
Other languages
English (en)
Inventor
Gabriele Gattere
Luca Giuseppe Falorni
Carlo Valzasina
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITUA2016A001498A priority Critical patent/ITUA20161498A1/it
Priority to CN201621103727.3U priority patent/CN206440281U/zh
Priority to CN201610877204.2A priority patent/CN107179074B/zh
Priority to EP16194684.3A priority patent/EP3217147B1/en
Priority to US15/454,907 priority patent/US10458794B2/en
Publication of ITUA20161498A1 publication Critical patent/ITUA20161498A1/it
Priority to US16/664,041 priority patent/US11015933B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
ITUA2016A001498A 2016-03-09 2016-03-09 Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento ITUA20161498A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
ITUA2016A001498A ITUA20161498A1 (it) 2016-03-09 2016-03-09 Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento
CN201621103727.3U CN206440281U (zh) 2016-03-09 2016-09-30 微机械检测结构和mems传感器设备
CN201610877204.2A CN107179074B (zh) 2016-03-09 2016-09-30 用于mems传感器设备特别是mems陀螺仪的具有改进的驱动特征的微机械检测结构
EP16194684.3A EP3217147B1 (en) 2016-03-09 2016-10-19 Micromechanical detection structure for a mems sensor device, in particular a mems gyroscope, with improved driving features
US15/454,907 US10458794B2 (en) 2016-03-09 2017-03-09 Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features
US16/664,041 US11015933B2 (en) 2016-03-09 2019-10-25 Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUA2016A001498A ITUA20161498A1 (it) 2016-03-09 2016-03-09 Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento

Publications (1)

Publication Number Publication Date
ITUA20161498A1 true ITUA20161498A1 (it) 2017-09-09

Family

ID=56026951

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUA2016A001498A ITUA20161498A1 (it) 2016-03-09 2016-03-09 Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento

Country Status (4)

Country Link
US (2) US10458794B2 (it)
EP (1) EP3217147B1 (it)
CN (2) CN107179074B (it)
IT (1) ITUA20161498A1 (it)

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ITUA20162172A1 (it) 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
DE102017219933A1 (de) * 2017-11-09 2019-05-09 Robert Bosch Gmbh Drehratensensor mit einem eine Haupterstreckungsebene aufweisenden Substrat, Herstellungsverfahren für einen Drehratensensor
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
CN110926445B (zh) * 2019-12-06 2022-03-08 深迪半导体(绍兴)有限公司 一种三轴mems陀螺仪
US11614327B2 (en) * 2020-07-23 2023-03-28 Sensortek Technology Corp. Gyroscope structure
CN115493577A (zh) * 2022-08-16 2022-12-20 瑞声开泰科技(武汉)有限公司 一种三轴陀螺仪

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US20130174661A1 (en) * 2012-01-05 2013-07-11 Burkhard Kuhlmann Rotation rate sensor and method for operating a rotation rate sensor
EP2884229A1 (en) * 2013-09-30 2015-06-17 InvenSense, Inc. Micromachined gyroscope including a guided mass system

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IT1391972B1 (it) * 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche
IT1392741B1 (it) * 2008-12-23 2012-03-16 St Microelectronics Rousset Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione
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US20100024547A1 (en) * 2008-07-29 2010-02-04 Fujitsu Limited Angular speed sensor and electronic apparatus
US20110041603A1 (en) * 2009-08-18 2011-02-24 Odd-Axel Pruetz Yaw rate sensor and method for operating a yaw rate sensor
US20130174661A1 (en) * 2012-01-05 2013-07-11 Burkhard Kuhlmann Rotation rate sensor and method for operating a rotation rate sensor
EP2884229A1 (en) * 2013-09-30 2015-06-17 InvenSense, Inc. Micromachined gyroscope including a guided mass system

Also Published As

Publication number Publication date
US20170261322A1 (en) 2017-09-14
US11015933B2 (en) 2021-05-25
EP3217147A1 (en) 2017-09-13
US20200064134A1 (en) 2020-02-27
EP3217147B1 (en) 2018-12-12
US10458794B2 (en) 2019-10-29
CN107179074A (zh) 2017-09-19
CN206440281U (zh) 2017-08-25
CN107179074B (zh) 2021-06-11

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