FI20155094A - Mikromekaaninen kulmanopeusanturi - Google Patents

Mikromekaaninen kulmanopeusanturi

Info

Publication number
FI20155094A
FI20155094A FI20155094A FI20155094A FI20155094A FI 20155094 A FI20155094 A FI 20155094A FI 20155094 A FI20155094 A FI 20155094A FI 20155094 A FI20155094 A FI 20155094A FI 20155094 A FI20155094 A FI 20155094A
Authority
FI
Finland
Prior art keywords
angular velocity
velocity sensor
micromechanical angular
micromechanical
sensor
Prior art date
Application number
FI20155094A
Other languages
English (en)
Swedish (sv)
Inventor
Tommi Piirainen
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to FI20155094A priority Critical patent/FI20155094A/fi
Priority to TW105103459A priority patent/TWI583922B/zh
Priority to US15/016,805 priority patent/US9927241B2/en
Priority to PCT/IB2016/050632 priority patent/WO2016128871A1/en
Priority to EP16704706.7A priority patent/EP3256813B1/en
Priority to JP2017542126A priority patent/JP6471806B2/ja
Publication of FI20155094A publication Critical patent/FI20155094A/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
FI20155094A 2015-02-11 2015-02-11 Mikromekaaninen kulmanopeusanturi FI20155094A (fi)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20155094A FI20155094A (fi) 2015-02-11 2015-02-11 Mikromekaaninen kulmanopeusanturi
TW105103459A TWI583922B (zh) 2015-02-11 2016-02-03 偵測角速度的微機械感測器
US15/016,805 US9927241B2 (en) 2015-02-11 2016-02-05 Micromechanical sensor of angular velocity
PCT/IB2016/050632 WO2016128871A1 (en) 2015-02-11 2016-02-08 Micromechanical sensor of angular velocity
EP16704706.7A EP3256813B1 (en) 2015-02-11 2016-02-08 Micromechanical sensor of angular velocity
JP2017542126A JP6471806B2 (ja) 2015-02-11 2016-02-08 マイクロメカニカル角速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20155094A FI20155094A (fi) 2015-02-11 2015-02-11 Mikromekaaninen kulmanopeusanturi

Publications (1)

Publication Number Publication Date
FI20155094A true FI20155094A (fi) 2016-08-12

Family

ID=55359557

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20155094A FI20155094A (fi) 2015-02-11 2015-02-11 Mikromekaaninen kulmanopeusanturi

Country Status (6)

Country Link
US (1) US9927241B2 (fi)
EP (1) EP3256813B1 (fi)
JP (1) JP6471806B2 (fi)
FI (1) FI20155094A (fi)
TW (1) TWI583922B (fi)
WO (1) WO2016128871A1 (fi)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10126129B2 (en) * 2016-07-11 2018-11-13 Nxp Usa, Inc. Vibration and shock robust gyroscope
US10466053B2 (en) * 2017-04-04 2019-11-05 Invensense, Inc. Out-of-plane sensing gyroscope robust to external acceleration and rotation
CN106940182B (zh) * 2017-05-04 2023-05-23 成都振芯科技股份有限公司 一种四质量块耦合微机电陀螺仪
JP6897806B2 (ja) * 2019-02-15 2021-07-07 株式会社村田製作所 バランス型多軸ジャイロスコープ
EP3696503B1 (en) 2019-02-15 2022-10-26 Murata Manufacturing Co., Ltd. Vibration-robust multiaxis gyroscope
TWI770605B (zh) * 2019-09-10 2022-07-11 昇佳電子股份有限公司 微機電陀螺儀
RU197326U1 (ru) * 2019-09-26 2020-04-21 Акционерное общество "ГИРООПТИКА" Чувствительный элемент микромеханического гироскопа двухосевого
DE102020202158A1 (de) * 2020-02-19 2021-08-19 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren
US11525680B2 (en) 2021-02-17 2022-12-13 Nxp Usa, Inc. Angular rate sensor with centrally positioned coupling structures

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW498169B (en) * 2000-11-29 2002-08-11 American Gnc Corp Interruption-free hand-held positioning method and system thereof
TW594016B (en) * 2003-04-29 2004-06-21 Chung Shan Inst Of Science Z-axis solid state gyroscope and three-axis inertial measurement apparatus
US7421897B2 (en) 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
JP4887034B2 (ja) 2005-12-05 2012-02-29 日立オートモティブシステムズ株式会社 慣性センサ
EP1996899B1 (de) 2006-03-10 2014-09-17 Continental Teves AG & Co. oHG Drehratensensor mit kopplungsbalken
DE102007030119A1 (de) * 2007-06-29 2009-01-02 Litef Gmbh Corioliskreisel
CN101363731B (zh) * 2008-09-25 2011-01-26 中国人民解放军国防科学技术大学 基于剪应力检测的石英微机械陀螺及其制作方法
US9074890B2 (en) 2009-09-09 2015-07-07 Continental Teves Ag & Co Ohg Double-axle, shock-resistant rotation rate sensor with linear and rotary seismic elements
ITTO20091042A1 (it) 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
CN102510995B (zh) 2010-06-16 2015-03-04 丰田自动车株式会社 复合传感器
DE102010061755A1 (de) 2010-11-23 2012-05-24 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
FR2974896B1 (fr) 2011-05-02 2013-11-22 Commissariat Energie Atomique Centrale inertielle a plusieurs axes de detection
TWI453371B (zh) * 2011-12-30 2014-09-21 Ind Tech Res Inst 一種具振盪模組的微機電系統裝置

Also Published As

Publication number Publication date
JP6471806B2 (ja) 2019-02-20
US9927241B2 (en) 2018-03-27
JP2018508017A (ja) 2018-03-22
US20160231116A1 (en) 2016-08-11
EP3256813B1 (en) 2019-04-10
TW201631296A (zh) 2016-09-01
WO2016128871A1 (en) 2016-08-18
TWI583922B (zh) 2017-05-21
EP3256813A1 (en) 2017-12-20

Similar Documents

Publication Publication Date Title
DK3338105T3 (da) Fremgangsmåde til accelerometerunderstøttet navigation
FI20155095A (fi) Mikromekaaninen kulmanopeusanturi
FI20155354A (fi) Värähtelevä mikromekaaninen sensori kulmanopeudelle
DK3349000T3 (da) Sensorindretning
FI20155094A (fi) Mikromekaaninen kulmanopeusanturi
FR3022996B1 (fr) Capteur inertiel angulaire mems fonctionnant en mode diapason
FI20155508A (fi) MEMS anturi
GB201602331D0 (en) Inertial sensors
DK3380822T3 (da) Optisk tryksensor
DE112016004840A5 (de) Optischer sensor
EP3332227A4 (en) ELECTROMECHANICAL MICROSYSTEM FLOW SENSOR (MEMS)
IT201700091680A1 (it) Nucleo sensore micromeccanico per sensore inerziale
GB201601031D0 (en) Velocity based pedestrian sensing
HK1255451A1 (zh) 小孔徑聲波速度傳感器
EP3296691A4 (en) Mems gyroscope having 2-degree-of-freedom sensing mode
DK3117245T3 (da) Seismisk sensor
EP3112804A4 (en) Vibration-type angular velocity sensor
DK3329265T3 (da) Sensoranordning
DE112018005261T8 (de) Gassensor
GB201514114D0 (en) Angular velocity sensors
DE112017005112A5 (de) Sensor
DK3367886T3 (da) Sensoranordning
DK3124938T3 (da) Tryksensor
DE112016002985A5 (de) Atemstromsensor
DE112016004588T8 (de) Gassensor

Legal Events

Date Code Title Description
FD Application lapsed