IT201700091680A1 - Nucleo sensore micromeccanico per sensore inerziale - Google Patents

Nucleo sensore micromeccanico per sensore inerziale

Info

Publication number
IT201700091680A1
IT201700091680A1 IT102017000091680A IT201700091680A IT201700091680A1 IT 201700091680 A1 IT201700091680 A1 IT 201700091680A1 IT 102017000091680 A IT102017000091680 A IT 102017000091680A IT 201700091680 A IT201700091680 A IT 201700091680A IT 201700091680 A1 IT201700091680 A1 IT 201700091680A1
Authority
IT
Italy
Prior art keywords
sensor
micromechanical
core
inertial
inertial sensor
Prior art date
Application number
IT102017000091680A
Other languages
English (en)
Inventor
Barbara Simoni
Christian Hoeppner
Denis Gugel
Guenther-Nino-Carlo Ullrich
Sebastian Guenther
Timm Hoehr
Johannes Seelhorst
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of IT201700091680A1 publication Critical patent/IT201700091680A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/14—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of gyroscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/055—Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0871—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass
IT102017000091680A 2016-08-11 2017-08-08 Nucleo sensore micromeccanico per sensore inerziale IT201700091680A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102016214962.8A DE102016214962A1 (de) 2016-08-11 2016-08-11 Mikromechanischer Sensorkern für Inertialsensor

Publications (1)

Publication Number Publication Date
IT201700091680A1 true IT201700091680A1 (it) 2019-02-08

Family

ID=61018722

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000091680A IT201700091680A1 (it) 2016-08-11 2017-08-08 Nucleo sensore micromeccanico per sensore inerziale

Country Status (5)

Country Link
US (1) US20180045515A1 (it)
DE (1) DE102016214962A1 (it)
FR (1) FR3055047B1 (it)
IT (1) IT201700091680A1 (it)
TW (1) TWI752993B (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018217804A1 (de) * 2018-10-18 2020-04-23 Robert Bosch Gmbh Verfahren zum Strukturieren einer mikromechanischen Funktionsschicht
JP7003076B2 (ja) 2019-03-08 2022-01-20 株式会社東芝 センサ
JP7404649B2 (ja) * 2019-04-26 2023-12-26 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
IT201900009651A1 (it) * 2019-06-20 2020-12-20 St Microelectronics Srl Sensore inerziale mems con elevata resistenza al fenomeno di adesione
IT201900024475A1 (it) * 2019-12-18 2021-06-18 St Microelectronics Srl Dispositivo micromeccanico con gruppo elastico a costante elastica variabile
DE102020203425A1 (de) 2020-03-17 2021-09-23 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für eine Sensorvorrichtung
DE102020209539A1 (de) 2020-07-29 2022-02-03 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanischer Beschleunigungssensor
DE102020211922A1 (de) 2020-09-23 2022-03-24 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Struktur und mikromechanischer Sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10116931A1 (de) * 2001-04-05 2002-10-17 Bosch Gmbh Robert Sensor
US8011247B2 (en) * 2008-06-26 2011-09-06 Honeywell International Inc. Multistage proof-mass movement deceleration within MEMS structures
US9276080B2 (en) * 2012-03-09 2016-03-01 Mcube, Inc. Methods and structures of integrated MEMS-CMOS devices
US10132630B2 (en) * 2013-01-25 2018-11-20 MCube Inc. Multi-axis integrated MEMS inertial sensing device on single packaged chip
DE102013222747A1 (de) 2013-11-08 2015-05-13 Robert Bosch Gmbh Mikromechanischer Z-Sensor

Also Published As

Publication number Publication date
FR3055047B1 (fr) 2021-03-12
DE102016214962A1 (de) 2018-02-15
TW201809675A (zh) 2018-03-16
TWI752993B (zh) 2022-01-21
US20180045515A1 (en) 2018-02-15
FR3055047A1 (fr) 2018-02-16

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