DK3001862T3 - MEMS-tryksensorer med integrerede skærme - Google Patents

MEMS-tryksensorer med integrerede skærme Download PDF

Info

Publication number
DK3001862T3
DK3001862T3 DK14791513.6T DK14791513T DK3001862T3 DK 3001862 T3 DK3001862 T3 DK 3001862T3 DK 14791513 T DK14791513 T DK 14791513T DK 3001862 T3 DK3001862 T3 DK 3001862T3
Authority
DK
Denmark
Prior art keywords
pressure sensors
mems pressure
integrated screens
screens
integrated
Prior art date
Application number
DK14791513.6T
Other languages
English (en)
Inventor
Lei Gu
Stephen F Bart
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Application granted granted Critical
Publication of DK3001862T3 publication Critical patent/DK3001862T3/da

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F15D1/0005—Baffle plates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
DK14791513.6T 2013-04-30 2014-04-22 MEMS-tryksensorer med integrerede skærme DK3001862T3 (da)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361817713P 2013-04-30 2013-04-30
US14/101,207 US10107315B2 (en) 2013-04-30 2013-12-09 MEMS pressure sensors with integrated baffles
PCT/US2014/034908 WO2014179111A2 (en) 2013-04-30 2014-04-22 Mems pressure sensors with integrated baffles

Publications (1)

Publication Number Publication Date
DK3001862T3 true DK3001862T3 (da) 2021-10-11

Family

ID=51788228

Family Applications (1)

Application Number Title Priority Date Filing Date
DK14791513.6T DK3001862T3 (da) 2013-04-30 2014-04-22 MEMS-tryksensorer med integrerede skærme

Country Status (9)

Country Link
US (1) US10107315B2 (da)
EP (1) EP3001862B1 (da)
JP (1) JP6096380B2 (da)
KR (1) KR101858058B1 (da)
CN (1) CN105637336B (da)
DK (1) DK3001862T3 (da)
SG (1) SG11201506305UA (da)
TW (1) TWI490462B (da)
WO (1) WO2014179111A2 (da)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6231812B2 (ja) * 2013-08-09 2017-11-15 アズビル株式会社 静電容量型圧力センサ
EP3109612A1 (en) * 2015-06-26 2016-12-28 Nina Wojtas Mems deposition trap for vacuum transducer protection
GB2555557A (en) 2016-05-10 2018-05-09 Continental automotive systems inc Oil separator for reducing residue deposits
JP6555214B2 (ja) * 2016-08-25 2019-08-07 株式会社デンソー 圧力センサ
DE102016220077A1 (de) * 2016-10-14 2018-04-19 Robert Bosch Gmbh Verfahren zum Herstellen eines mikromechanischen Drucksensors
DE102017209313B4 (de) * 2017-06-01 2022-02-10 Robert Bosch Gmbh Vorrichtung zum Schutz von Bauteilen vor Flüssigkeiten und zu deren Belüftung sowie Verfahren zu dessen Herstellung
DE102017011360A1 (de) * 2017-12-09 2019-06-13 Heinz Plöchinger Schutzvorrichtung für Vakuum-Messzellen
JP7085898B2 (ja) * 2018-05-25 2022-06-17 東京エレクトロン株式会社 ラジカル失活部品及びこれを用いたプラズマ処理装置
JP2020030066A (ja) 2018-08-21 2020-02-27 アズビル株式会社 圧力センサ
DE102018220542A1 (de) * 2018-11-29 2020-06-04 Robert Bosch Gmbh Tankvorrichtung zur Speicherung von verdichteten Fluiden mit einer Sensormodulanordnung
US11193842B2 (en) * 2019-06-06 2021-12-07 Te Connectivity Solutions Gmbh Pressure sensor assemblies with protective pressure feature of a pressure mitigation element
JP7372062B2 (ja) * 2019-07-02 2023-10-31 アズビル株式会社 圧力センサ
JP2021025957A (ja) 2019-08-08 2021-02-22 アズビル株式会社 圧力センサ
CN110793708B (zh) * 2019-11-15 2021-12-03 联合微电子中心有限责任公司 一种压电式mems声传感器
CN110736583A (zh) * 2019-11-22 2020-01-31 武汉飞恩微电子有限公司 一种表压力传感器用气流变向的防护结构
CN110987282A (zh) * 2019-11-29 2020-04-10 中国科学院微电子研究所 一种防沉积匀气环
JP7444628B2 (ja) 2020-02-19 2024-03-06 アズビル株式会社 圧力センサ
TWI788671B (zh) * 2020-06-02 2023-01-01 晶極光電科技股份有限公司 多孔壓力感測器的製造方法及其裝置
CN114489168B (zh) * 2022-03-21 2023-03-28 上海淳禧应用技术股份有限公司 一种高精度湿度标定装置及湿度标定方法
KR102666912B1 (ko) * 2023-12-20 2024-05-17 주식회사 파인솔루션 압력 센싱을 위한 cdg 장치

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5954577A (en) * 1995-11-02 1999-09-21 Meckler; Milton Automotive by-pass air cleaning and particulate motor vehicle interior air quality system
US6386267B1 (en) 1999-07-30 2002-05-14 Hazelett Strip-Casting Corporation Non-rotating, levitating, cylindrical air-pillow apparatus and method for supporting and guiding an endless flexible casting belt into the entrance of a continuous metal-casting machine
US6443015B1 (en) 1999-09-10 2002-09-03 Mks Instruments, Inc. Baffle for a capacitive pressure sensor
US7252011B2 (en) * 2002-03-11 2007-08-07 Mks Instruments, Inc. Surface area deposition trap
US20040185323A1 (en) * 2003-01-31 2004-09-23 Fowler Burt W. Monolithic fuel cell structure and method of manufacture
JP2004270850A (ja) * 2003-03-11 2004-09-30 Matsushita Electric Ind Co Ltd 動圧気体軸受モータ
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7021149B2 (en) * 2003-11-28 2006-04-04 Endress & Hauser Gmbh & Co. Kg Differential pressure sensor with overload damping
US20050194303A1 (en) 2004-03-02 2005-09-08 Sniegowski Jeffry J. MEMS flow module with filtration and pressure regulation capabilities
US7194901B2 (en) * 2004-10-18 2007-03-27 Silverbrook Research Pty Ltd Pressure sensor with apertured membrane guard
US7884432B2 (en) * 2005-03-22 2011-02-08 Ametek, Inc. Apparatus and methods for shielding integrated circuitry
US7228744B2 (en) * 2005-05-09 2007-06-12 Delphi Technologies, Inc. Pressure transducer for gaseous hydrogen environment
US7214908B2 (en) 2005-07-28 2007-05-08 Wlodarczyk Marek T Glow plug integrated pressure sensor with filter trap
CH697766B1 (de) 2005-11-25 2009-02-13 Inficon Gmbh Blendenanordnung für eine Vakuummesszelle.
EP1979730B1 (de) 2006-01-18 2011-06-01 Inficon GmbH Vakuummesszelle mit membran
US7748275B2 (en) 2006-04-19 2010-07-06 Asahi Kasei Kuraray Medical Co., Ltd. Pressure sensor for extracorporeal circulating circuit
US7892332B2 (en) 2007-10-01 2011-02-22 Baxter International Inc. Dialysis systems having air traps with internal structures to enhance air removal
DE102009058930B4 (de) 2009-12-17 2011-11-10 Pierburg Gmbh Ventilvorrichtung für Verbrennungskraftmaschinen
US20130001550A1 (en) 2011-06-29 2013-01-03 Invensense, Inc. Hermetically sealed mems device with a portion exposed to the environment with vertically integrated electronics
CN202598113U (zh) 2012-05-29 2012-12-12 潍坊明硕环保设备有限公司 双膜气柜系统压力调节装置
JP6002016B2 (ja) 2012-11-30 2016-10-05 アズビル株式会社 静電容量型圧力センサ

Also Published As

Publication number Publication date
KR20160003139A (ko) 2016-01-08
JP2016526153A (ja) 2016-09-01
CN105637336A (zh) 2016-06-01
CN105637336B (zh) 2020-07-31
EP3001862A2 (en) 2016-04-06
JP6096380B2 (ja) 2017-03-15
TW201512637A (zh) 2015-04-01
WO2014179111A2 (en) 2014-11-06
KR101858058B1 (ko) 2018-05-15
US10107315B2 (en) 2018-10-23
TWI490462B (zh) 2015-07-01
WO2014179111A3 (en) 2016-03-10
EP3001862B1 (en) 2021-08-25
US20140318656A1 (en) 2014-10-30
SG11201506305UA (en) 2015-09-29
EP3001862A4 (en) 2017-04-12

Similar Documents

Publication Publication Date Title
DK3001862T3 (da) MEMS-tryksensorer med integrerede skærme
GB201307773D0 (en) MEMS sensors
GB2521416B (en) Biasing circuitry for MEMS transducers
EP2989433A4 (en) CAPACITIVE MEMS SENSOR DEVICES
EP2967367A4 (en) OPTICAL PRESSURE SENSOR ASSEMBLY
DE112014005095A5 (de) Fluidanordnung
DE112014005966A5 (de) Fluidanordnung
FI20135618A (fi) Parannettu paineanturi
DE112014002686A5 (de) Messgerät
FI20145894A (fi) Itsetestausominaisuudella varustettu kapasitiivinen mikroelektromekaaninen anturi
FI20135714L (fi) Kapasitiivinen mikromekaaninen kiihtyvyysanturi
DK3000133T3 (da) Piezoelektrisk føler
DK2984463T3 (da) Lydsensor
SG10201404634WA (en) Piezoelectric accelerometer
FI20155508A (fi) MEMS anturi
FI20135487A (fi) Parannettu paineanturi
DK3019894T3 (da) In situ accelerometer-kalibrering
GB201313725D0 (en) Fluid sensor
GB201311755D0 (en) Fluid sensor
HK1209825A1 (en) Pressure sensor
DK2936102T3 (da) Tryksensor
DE102015104640A8 (de) MEMS-Drucksensor mit verbesserter Unempfindlichkeit gegen thermomechanische Beanspruchung
DE112014003738A5 (de) Fluidanordnung
GB201318243D0 (en) Pressure Sensor
GB2535069B (en) Microelectromechanical pressure sensors