SG11201506305UA - Mems pressure sensors with integrated baffles - Google Patents
Mems pressure sensors with integrated bafflesInfo
- Publication number
- SG11201506305UA SG11201506305UA SG11201506305UA SG11201506305UA SG11201506305UA SG 11201506305U A SG11201506305U A SG 11201506305UA SG 11201506305U A SG11201506305U A SG 11201506305UA SG 11201506305U A SG11201506305U A SG 11201506305UA SG 11201506305U A SG11201506305U A SG 11201506305UA
- Authority
- SG
- Singapore
- Prior art keywords
- pressure sensors
- mems pressure
- integrated baffles
- baffles
- integrated
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
- F15D1/00—Influencing flow of fluids
- F15D1/0005—Baffle plates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0636—Protection against aggressive medium in general using particle filters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361817713P | 2013-04-30 | 2013-04-30 | |
| US14/101,207 US10107315B2 (en) | 2013-04-30 | 2013-12-09 | MEMS pressure sensors with integrated baffles |
| PCT/US2014/034908 WO2014179111A2 (en) | 2013-04-30 | 2014-04-22 | Mems pressure sensors with integrated baffles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201506305UA true SG11201506305UA (en) | 2015-09-29 |
Family
ID=51788228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201506305UA SG11201506305UA (en) | 2013-04-30 | 2014-04-22 | Mems pressure sensors with integrated baffles |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US10107315B2 (en) |
| EP (1) | EP3001862B1 (en) |
| JP (1) | JP6096380B2 (en) |
| KR (1) | KR101858058B1 (en) |
| CN (1) | CN105637336B (en) |
| DK (1) | DK3001862T3 (en) |
| SG (1) | SG11201506305UA (en) |
| TW (1) | TWI490462B (en) |
| WO (1) | WO2014179111A2 (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6231812B2 (en) * | 2013-08-09 | 2017-11-15 | アズビル株式会社 | Capacitive pressure sensor |
| EP3109612A1 (en) | 2015-06-26 | 2016-12-28 | Nina Wojtas | Mems deposition trap for vacuum transducer protection |
| GB2555557A (en) | 2016-05-10 | 2018-05-09 | Continental automotive systems inc | Oil separator for reducing residue deposits |
| JP6555214B2 (en) * | 2016-08-25 | 2019-08-07 | 株式会社デンソー | Pressure sensor |
| DE102016220077A1 (en) * | 2016-10-14 | 2018-04-19 | Robert Bosch Gmbh | Method for producing a micromechanical pressure sensor |
| DE102017209313B4 (en) * | 2017-06-01 | 2022-02-10 | Robert Bosch Gmbh | Device for protecting components from liquids and for their ventilation, and method for its manufacture |
| DE102017011360A1 (en) * | 2017-12-09 | 2019-06-13 | Heinz Plöchinger | Protective device for vacuum measuring cells |
| JP7085898B2 (en) * | 2018-05-25 | 2022-06-17 | 東京エレクトロン株式会社 | Radical deactivating parts and plasma processing equipment using them |
| JP2020030066A (en) | 2018-08-21 | 2020-02-27 | アズビル株式会社 | Pressure sensor |
| DE102018220542A1 (en) * | 2018-11-29 | 2020-06-04 | Robert Bosch Gmbh | Tank device for storing compressed fluids with a sensor module arrangement |
| US11193842B2 (en) * | 2019-06-06 | 2021-12-07 | Te Connectivity Solutions Gmbh | Pressure sensor assemblies with protective pressure feature of a pressure mitigation element |
| JP7372062B2 (en) * | 2019-07-02 | 2023-10-31 | アズビル株式会社 | pressure sensor |
| JP2021025957A (en) | 2019-08-08 | 2021-02-22 | アズビル株式会社 | Pressure sensor |
| CN110793708B (en) * | 2019-11-15 | 2021-12-03 | 联合微电子中心有限责任公司 | Piezoelectric type MEMS acoustic sensor |
| CN110736583A (en) * | 2019-11-22 | 2020-01-31 | 武汉飞恩微电子有限公司 | protection structure for air flow direction changing of gauge pressure sensor |
| CN110987282A (en) * | 2019-11-29 | 2020-04-10 | 中国科学院微电子研究所 | Anti-deposition air homogenizing ring |
| JP7444628B2 (en) | 2020-02-19 | 2024-03-06 | アズビル株式会社 | pressure sensor |
| TWI788671B (en) * | 2020-06-02 | 2023-01-01 | 晶極光電科技股份有限公司 | Manufacturing method and device of porous pressure sensor |
| CN114489168B (en) * | 2022-03-21 | 2023-03-28 | 上海淳禧应用技术股份有限公司 | High-precision humidity calibration device and humidity calibration method |
| KR102666912B1 (en) * | 2023-12-20 | 2024-05-17 | 주식회사 파인솔루션 | CDG device for pressure sensing |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5954577A (en) * | 1995-11-02 | 1999-09-21 | Meckler; Milton | Automotive by-pass air cleaning and particulate motor vehicle interior air quality system |
| US6386267B1 (en) | 1999-07-30 | 2002-05-14 | Hazelett Strip-Casting Corporation | Non-rotating, levitating, cylindrical air-pillow apparatus and method for supporting and guiding an endless flexible casting belt into the entrance of a continuous metal-casting machine |
| US6443015B1 (en) | 1999-09-10 | 2002-09-03 | Mks Instruments, Inc. | Baffle for a capacitive pressure sensor |
| US7252011B2 (en) * | 2002-03-11 | 2007-08-07 | Mks Instruments, Inc. | Surface area deposition trap |
| US20040185323A1 (en) * | 2003-01-31 | 2004-09-23 | Fowler Burt W. | Monolithic fuel cell structure and method of manufacture |
| JP2004270850A (en) * | 2003-03-11 | 2004-09-30 | Matsushita Electric Ind Co Ltd | Dynamic pressure gas bearing motor |
| US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
| US7021149B2 (en) * | 2003-11-28 | 2006-04-04 | Endress & Hauser Gmbh & Co. Kg | Differential pressure sensor with overload damping |
| US20050194303A1 (en) | 2004-03-02 | 2005-09-08 | Sniegowski Jeffry J. | MEMS flow module with filtration and pressure regulation capabilities |
| US7194901B2 (en) * | 2004-10-18 | 2007-03-27 | Silverbrook Research Pty Ltd | Pressure sensor with apertured membrane guard |
| US7884432B2 (en) * | 2005-03-22 | 2011-02-08 | Ametek, Inc. | Apparatus and methods for shielding integrated circuitry |
| US7228744B2 (en) * | 2005-05-09 | 2007-06-12 | Delphi Technologies, Inc. | Pressure transducer for gaseous hydrogen environment |
| US7214908B2 (en) | 2005-07-28 | 2007-05-08 | Wlodarczyk Marek T | Glow plug integrated pressure sensor with filter trap |
| CH697766B1 (en) | 2005-11-25 | 2009-02-13 | Inficon Gmbh | Diaphragm arrangement for a vacuum measuring cell. |
| US7765874B2 (en) | 2006-01-18 | 2010-08-03 | Inficon Gmbh | Vacuum measuring cell with membrane |
| CN101421602B (en) | 2006-04-19 | 2011-02-09 | 旭化成可乐丽医疗株式会社 | Pressure sensor for extracorporeal circulating circuit |
| US7892332B2 (en) | 2007-10-01 | 2011-02-22 | Baxter International Inc. | Dialysis systems having air traps with internal structures to enhance air removal |
| DE102009058930B4 (en) | 2009-12-17 | 2011-11-10 | Pierburg Gmbh | Valve device for internal combustion engines |
| US20130001550A1 (en) | 2011-06-29 | 2013-01-03 | Invensense, Inc. | Hermetically sealed mems device with a portion exposed to the environment with vertically integrated electronics |
| CN202598113U (en) | 2012-05-29 | 2012-12-12 | 潍坊明硕环保设备有限公司 | System pressure adjusting device of double-membrane gas holder |
| JP6002016B2 (en) | 2012-11-30 | 2016-10-05 | アズビル株式会社 | Capacitive pressure sensor |
-
2013
- 2013-12-09 US US14/101,207 patent/US10107315B2/en active Active
-
2014
- 2014-04-22 KR KR1020157033753A patent/KR101858058B1/en active IP Right Grant
- 2014-04-22 WO PCT/US2014/034908 patent/WO2014179111A2/en active Application Filing
- 2014-04-22 CN CN201480016452.7A patent/CN105637336B/en active Active
- 2014-04-22 JP JP2016511763A patent/JP6096380B2/en active Active
- 2014-04-22 SG SG11201506305UA patent/SG11201506305UA/en unknown
- 2014-04-22 EP EP14791513.6A patent/EP3001862B1/en active Active
- 2014-04-22 DK DK14791513.6T patent/DK3001862T3/en active
- 2014-04-30 TW TW103115693A patent/TWI490462B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3001862B1 (en) | 2021-08-25 |
| DK3001862T3 (en) | 2021-10-11 |
| EP3001862A2 (en) | 2016-04-06 |
| WO2014179111A3 (en) | 2016-03-10 |
| CN105637336A (en) | 2016-06-01 |
| KR101858058B1 (en) | 2018-05-15 |
| KR20160003139A (en) | 2016-01-08 |
| JP6096380B2 (en) | 2017-03-15 |
| JP2016526153A (en) | 2016-09-01 |
| CN105637336B (en) | 2020-07-31 |
| US10107315B2 (en) | 2018-10-23 |
| WO2014179111A2 (en) | 2014-11-06 |
| TW201512637A (en) | 2015-04-01 |
| EP3001862A4 (en) | 2017-04-12 |
| US20140318656A1 (en) | 2014-10-30 |
| TWI490462B (en) | 2015-07-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| SG11201506305UA (en) | Mems pressure sensors with integrated baffles | |
| GB201307773D0 (en) | MEMS sensors | |
| EP2967367A4 (en) | Optical pressure sensor assembly | |
| EP2846143A4 (en) | Pressure sensor | |
| EP2989433A4 (en) | Capacitive mems sensor devices | |
| GB2542284B (en) | Optical pressure sensor | |
| GB201321429D0 (en) | Sensor | |
| EP2924408A4 (en) | Pressure sensor | |
| EP3073237A4 (en) | Pressure sensor | |
| EP2706337C0 (en) | Capacitive pressure sensor | |
| HK1209825A1 (en) | Pressure sensor | |
| GB201313725D0 (en) | Fluid sensor | |
| GB201311755D0 (en) | Fluid sensor | |
| HUE048605T2 (en) | Pressure sensor | |
| GB201218956D0 (en) | Fluid sensor | |
| GB201322491D0 (en) | Sensor | |
| GB201316159D0 (en) | Gas Sensors | |
| GB201301543D0 (en) | Sensor | |
| EP2818841A4 (en) | Pressure sensor | |
| GB201306097D0 (en) | Sensor | |
| GB2535033B (en) | Integral sensor | |
| GB201318243D0 (en) | Pressure Sensor | |
| PL3014234T3 (en) | Sensor | |
| GB2535069B (en) | Microelectromechanical pressure sensors | |
| GB2514825B (en) | Sensors |