FI20135618A - Parannettu paineanturi - Google Patents

Parannettu paineanturi Download PDF

Info

Publication number
FI20135618A
FI20135618A FI20135618A FI20135618A FI20135618A FI 20135618 A FI20135618 A FI 20135618A FI 20135618 A FI20135618 A FI 20135618A FI 20135618 A FI20135618 A FI 20135618A FI 20135618 A FI20135618 A FI 20135618A
Authority
FI
Finland
Prior art keywords
pressure sensor
improved pressure
improved
sensor
pressure
Prior art date
Application number
FI20135618A
Other languages
English (en)
Swedish (sv)
Other versions
FI125447B (fi
Inventor
Heikki Kuisma
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to FI20135618A priority Critical patent/FI125447B/fi
Priority to US14/293,317 priority patent/US9541464B2/en
Priority to EP18151612.1A priority patent/EP3346248B1/en
Priority to PCT/IB2014/061939 priority patent/WO2014195878A1/en
Priority to CN201710873107.0A priority patent/CN107655619B/zh
Priority to EP14731387.8A priority patent/EP3004830B1/en
Priority to TW103119339A priority patent/TWI600887B/zh
Priority to CN201480031498.6A priority patent/CN105283745B/zh
Priority to JP2016517718A priority patent/JP6065159B2/ja
Priority to KR1020187002819A priority patent/KR101946234B1/ko
Priority to KR1020157034469A priority patent/KR101825903B1/ko
Publication of FI20135618A publication Critical patent/FI20135618A/fi
Application granted granted Critical
Publication of FI125447B publication Critical patent/FI125447B/fi
Priority to JP2016247759A priority patent/JP6195011B2/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • G01L7/082—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type construction or mounting of diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0672—Leakage or rupture protection or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0027—Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0654—Protection against aggressive medium in general against moisture or humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0264—Pressure sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
FI20135618A 2013-06-04 2013-06-04 Parannettu paineanturi FI125447B (fi)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FI20135618A FI125447B (fi) 2013-06-04 2013-06-04 Parannettu paineanturi
US14/293,317 US9541464B2 (en) 2013-06-04 2014-06-02 Pressure sensor structure
PCT/IB2014/061939 WO2014195878A1 (en) 2013-06-04 2014-06-04 An improved pressure sensor structure
CN201710873107.0A CN107655619B (zh) 2013-06-04 2014-06-04 微机电压力传感器结构以及压力传感器
EP14731387.8A EP3004830B1 (en) 2013-06-04 2014-06-04 An improved pressure sensor structure
TW103119339A TWI600887B (zh) 2013-06-04 2014-06-04 一種改良的壓力感測器結構
EP18151612.1A EP3346248B1 (en) 2013-06-04 2014-06-04 An improved pressure sensor structure
CN201480031498.6A CN105283745B (zh) 2013-06-04 2014-06-04 一种改进的压力传感器结构
JP2016517718A JP6065159B2 (ja) 2013-06-04 2014-06-04 改良された圧力センサー構造
KR1020187002819A KR101946234B1 (ko) 2013-06-04 2014-06-04 개선된 압력 센서 구조
KR1020157034469A KR101825903B1 (ko) 2013-06-04 2014-06-04 개선된 압력 센서 구조
JP2016247759A JP6195011B2 (ja) 2013-06-04 2016-12-21 改良された圧力センサー構造

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20135618 2013-06-04
FI20135618A FI125447B (fi) 2013-06-04 2013-06-04 Parannettu paineanturi

Publications (2)

Publication Number Publication Date
FI20135618A true FI20135618A (fi) 2015-01-23
FI125447B FI125447B (fi) 2015-10-15

Family

ID=50977016

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20135618A FI125447B (fi) 2013-06-04 2013-06-04 Parannettu paineanturi

Country Status (8)

Country Link
US (1) US9541464B2 (fi)
EP (2) EP3004830B1 (fi)
JP (2) JP6065159B2 (fi)
KR (2) KR101946234B1 (fi)
CN (2) CN105283745B (fi)
FI (1) FI125447B (fi)
TW (1) TWI600887B (fi)
WO (1) WO2014195878A1 (fi)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI125958B (fi) * 2013-05-10 2016-04-29 Murata Manufacturing Co Parannettu paineanturi
FI125960B (fi) * 2013-05-28 2016-04-29 Murata Manufacturing Co Parannettu paineanturi
FI125447B (fi) * 2013-06-04 2015-10-15 Murata Manufacturing Co Parannettu paineanturi
US9671421B2 (en) * 2015-04-24 2017-06-06 Horiba Stec, Co., Ltd. Micro-position gap sensor assembly
WO2018235415A1 (ja) * 2017-06-21 2018-12-27 パナソニックＩｐマネジメント株式会社 物理量センサ
JP6696552B2 (ja) 2017-11-13 2020-05-20 株式会社村田製作所 配線容量キャンセル方法および配線容量キャンセル装置
IT201800001092A1 (it) 2018-01-16 2019-07-16 St Microelectronics Srl Sensore di pressione piezoresistivo microelettromeccanico con capacita' di auto-diagnosi e relativo procedimento di fabbricazione
JP7122686B2 (ja) * 2018-03-30 2022-08-22 パナソニックＩｐマネジメント株式会社 静電容量検出装置
CN111771109B (zh) * 2018-03-30 2022-03-25 松下知识产权经营株式会社 静电电容检测装置
CN113557419A (zh) * 2019-03-13 2021-10-26 株式会社村田制作所 压力传感器
KR102288972B1 (ko) * 2020-03-19 2021-08-13 성균관대학교산학협력단 정전용량형 힘센서
CA194626S (en) * 2020-04-15 2022-08-04 5121175 Manitoba Ltd Dcc Hail Drive-through vehicle-scanning archway
US11940336B2 (en) * 2021-03-26 2024-03-26 Sporian Microsystems, Inc. Driven-shield capacitive pressure sensor
USD1017076S1 (en) * 2021-07-21 2024-03-05 Lg Display Co., Ltd. Gate with displays

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
SE459887B (sv) * 1987-02-12 1989-08-14 Hydrolab Ab Tryckgivare
JP2813721B2 (ja) * 1990-02-16 1998-10-22 豊田工機株式会社 容量型圧力センサ
JP2724419B2 (ja) * 1990-08-28 1998-03-09 日本特殊陶業株式会社 圧力センサ
JP3189987B2 (ja) * 1992-05-29 2001-07-16 豊田工機株式会社 容量型センサ
JP3114816B2 (ja) * 1991-06-22 2000-12-04 豊田工機株式会社 デジタル出力を有する容量形センサ
JP2838049B2 (ja) * 1993-12-07 1998-12-16 松下電器産業株式会社 静電容量型センサ及びその製造方法
DE69412769T2 (de) 1993-12-07 1999-01-14 Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka Kapazitiver Sensor und Verfahren zur Herstellung
DE69922727T2 (de) * 1998-03-31 2005-12-15 Hitachi, Ltd. Kapazitiver Druckwandler
AU5489799A (en) * 1998-08-19 2000-03-14 Wisconsin Alumni Research Foundation Sealed capacitive pressure sensors
JP3567089B2 (ja) 1998-10-12 2004-09-15 株式会社日立製作所 静電容量式圧力センサ
US6295875B1 (en) * 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
JP4342122B2 (ja) * 2001-06-01 2009-10-14 株式会社豊田中央研究所 静電容量型物理量センサと検出装置
US6732590B1 (en) * 2002-11-20 2004-05-11 Infineon Technologies Ag Pressure sensor and process for producing the pressure sensor
CN1751232A (zh) 2003-03-10 2006-03-22 丹佛斯公司 在所测量的压力和参考室之间的压力均衡减少的硅压力传感器
US7114397B2 (en) * 2004-03-12 2006-10-03 General Electric Company Microelectromechanical system pressure sensor and method for making and using
JP2005283355A (ja) * 2004-03-30 2005-10-13 Alps Electric Co Ltd 静電容量型圧力センサおよびその製造方法
US7313965B2 (en) 2004-12-27 2008-01-01 General Electric Company High-temperature pressure sensor
US7527742B2 (en) * 2005-06-27 2009-05-05 Momentive Performance Materials Inc. Etchant, method of etching, laminate formed thereby, and device
US20090116675A1 (en) * 2005-12-14 2009-05-07 Yuichi Miyoshi Mems diaphragm structure and method for forming the same
WO2011084229A2 (en) * 2009-12-17 2011-07-14 Arizona Board Of Regents, For And On Behalf Of Arizona State University Embedded mems sensors and related methods
JP2010187303A (ja) 2009-02-13 2010-08-26 Yamaha Corp 圧力センサ
US8216882B2 (en) 2010-08-23 2012-07-10 Freescale Semiconductor, Inc. Method of producing a microelectromechanical (MEMS) sensor device
EP2492240A1 (en) 2011-02-23 2012-08-29 Nxp B.V. IC with pressure sensor and manufacturing method thereof
WO2012164975A1 (ja) * 2011-06-03 2012-12-06 アルプス電気株式会社 静電容量型圧力センサ及びその製造方法
KR101646999B1 (ko) 2011-06-29 2016-08-09 인벤센스, 인크. 수직으로 집적된 전자장치를 갖는 환경에 노출된 부분을 구비한 기밀하게 밀봉된 mems 디바이스
US20130152694A1 (en) 2011-11-01 2013-06-20 Ilkka Urvas Sensor with vacuum cavity and method of fabrication
JP5737148B2 (ja) * 2011-11-14 2015-06-17 オムロン株式会社 静電容量型圧力センサとその製造方法及び入力装置
TWM449262U (zh) * 2012-11-23 2013-03-21 Yao-Song Hou 壓力計
JP6002016B2 (ja) * 2012-11-30 2016-10-05 アズビル株式会社 静電容量型圧力センサ
FI125958B (fi) * 2013-05-10 2016-04-29 Murata Manufacturing Co Parannettu paineanturi
FI125447B (fi) * 2013-06-04 2015-10-15 Murata Manufacturing Co Parannettu paineanturi
DE102013213717A1 (de) * 2013-07-12 2015-01-15 Robert Bosch Gmbh MEMS-Bauelement mit einer Mikrofonstruktur und Verfahren zu dessen Herstellung
FI126999B (fi) * 2014-01-17 2017-09-15 Murata Manufacturing Co Parannettu paineanturi

Also Published As

Publication number Publication date
FI125447B (fi) 2015-10-15
US20140352446A1 (en) 2014-12-04
KR20160003861A (ko) 2016-01-11
KR101825903B1 (ko) 2018-03-22
EP3346248B1 (en) 2020-08-19
JP2016526170A (ja) 2016-09-01
CN107655619B (zh) 2020-10-27
US9541464B2 (en) 2017-01-10
EP3346248A1 (en) 2018-07-11
EP3004830A1 (en) 2016-04-13
JP2017122722A (ja) 2017-07-13
TW201504608A (zh) 2015-02-01
WO2014195878A1 (en) 2014-12-11
CN107655619A (zh) 2018-02-02
CN105283745A (zh) 2016-01-27
JP6065159B2 (ja) 2017-01-25
TWI600887B (zh) 2017-10-01
CN105283745B (zh) 2017-10-27
EP3004830B1 (en) 2018-02-28
KR20180014853A (ko) 2018-02-09
KR101946234B1 (ko) 2019-05-21
JP6195011B2 (ja) 2017-09-13

Similar Documents

Publication Publication Date Title
DE112014005095A5 (de) Fluidanordnung
DE112014005966A5 (de) Fluidanordnung
FI20135618A (fi) Parannettu paineanturi
DE112014002686A5 (de) Messgerät
FI20136139A (fi) Sadeanturi
GB201321429D0 (en) Sensor
FI20145044A (fi) Parannettu paineanturi
DK2984463T3 (da) Lydsensor
DK3000133T3 (da) Piezoelektrisk føler
FI20135487A (fi) Parannettu paineanturi
HK1209825A1 (en) Pressure sensor
GB201313725D0 (en) Fluid sensor
GB201311755D0 (en) Fluid sensor
DK2936102T3 (da) Tryksensor
GB201322491D0 (en) Sensor
DE112014003738A5 (de) Fluidanordnung
GB201301543D0 (en) Sensor
GB201317540D0 (en) Sensing
GB201306097D0 (en) Sensor
GB2535033B (en) Integral sensor
PL3014234T3 (pl) Czujnik
GB201318243D0 (en) Pressure Sensor
GB201315249D0 (en) Sensing
DE112014003851A5 (de) Sensorbaueinheit
FI20145723A (fi) Paineanturi

Legal Events

Date Code Title Description
PC Transfer of assignment of patent

Owner name: MURATA MANUFACTURING CO., LTD.

FG Patent granted

Ref document number: 125447

Country of ref document: FI

Kind code of ref document: B