IT201700043012A1 - Giroscopio mems con migliorata reiezione di un errore di quadratura - Google Patents
Giroscopio mems con migliorata reiezione di un errore di quadraturaInfo
- Publication number
- IT201700043012A1 IT201700043012A1 IT102017000043012A IT201700043012A IT201700043012A1 IT 201700043012 A1 IT201700043012 A1 IT 201700043012A1 IT 102017000043012 A IT102017000043012 A IT 102017000043012A IT 201700043012 A IT201700043012 A IT 201700043012A IT 201700043012 A1 IT201700043012 A1 IT 201700043012A1
- Authority
- IT
- Italy
- Prior art keywords
- square error
- mems gyroscope
- improved rejection
- rejection
- improved
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0242—Gyroscopes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102017000043012A IT201700043012A1 (it) | 2017-04-19 | 2017-04-19 | Giroscopio mems con migliorata reiezione di un errore di quadratura |
US15/956,446 US10775171B2 (en) | 2017-04-19 | 2018-04-18 | MEMS gyroscope with improved rejection of a quadrature error |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102017000043012A IT201700043012A1 (it) | 2017-04-19 | 2017-04-19 | Giroscopio mems con migliorata reiezione di un errore di quadratura |
Publications (1)
Publication Number | Publication Date |
---|---|
IT201700043012A1 true IT201700043012A1 (it) | 2018-10-19 |
Family
ID=59683982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT102017000043012A IT201700043012A1 (it) | 2017-04-19 | 2017-04-19 | Giroscopio mems con migliorata reiezione di un errore di quadratura |
Country Status (2)
Country | Link |
---|---|
US (1) | US10775171B2 (it) |
IT (1) | IT201700043012A1 (it) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITUA20161498A1 (it) * | 2016-03-09 | 2017-09-09 | St Microelectronics Srl | Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento |
CN117146789A (zh) * | 2022-05-23 | 2023-12-01 | 华为技术有限公司 | 一种用于检测角速度的装置、方法和系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090165553A1 (en) * | 2007-10-05 | 2009-07-02 | Vti Technologies Oy | Vibrating micromechanical sensor of angular velocity |
US20090223277A1 (en) * | 2008-03-05 | 2009-09-10 | Colibrys Sa | Vibrating gyroscope with quadrature signals reduction |
US20100186507A1 (en) * | 2007-09-10 | 2010-07-29 | Guenthner Stefan | Micromechanical rotation rate sensor with a coupling bar and suspension spring elements for quadrature suppression |
EP2444775A2 (en) * | 2010-10-25 | 2012-04-25 | Rosemount Aerospace Inc. | MEMs gyros with quadrature reducing springs |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6230563B1 (en) * | 1998-06-09 | 2001-05-15 | Integrated Micro Instruments, Inc. | Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability |
US6426538B1 (en) * | 2001-01-16 | 2002-07-30 | Honeywell International Inc. | Suspended micromachined structure |
US8256290B2 (en) * | 2009-03-17 | 2012-09-04 | Minyao Mao | Tri-axis angular rate sensor |
DE102010000811A1 (de) * | 2010-01-12 | 2011-07-14 | Robert Bosch GmbH, 70469 | Mikromechanischer Drehratensensor mit zwei sensitiven Achsen und gekoppelten Detektionsmoden |
US8453504B1 (en) * | 2010-01-23 | 2013-06-04 | Minyao Mao | Angular rate sensor with suppressed linear acceleration response |
US9278845B2 (en) * | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
US20140144232A1 (en) * | 2012-11-28 | 2014-05-29 | Yizhen Lin | Spring for microelectromechanical systems (mems) device |
EP2746724B1 (en) * | 2012-12-20 | 2017-02-22 | Tronics Microsystems S.A. | Micromechanical gyroscope |
EP2963387B1 (en) * | 2014-06-30 | 2019-07-31 | STMicroelectronics Srl | Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components |
DE102014223329A1 (de) * | 2014-11-14 | 2016-05-19 | Robert Bosch Gmbh | Mikromechanische Feder für Inertialsensor |
US10415968B2 (en) * | 2016-12-19 | 2019-09-17 | Analog Devices, Inc. | Synchronized mass gyroscope |
US10948294B2 (en) * | 2018-04-05 | 2021-03-16 | Analog Devices, Inc. | MEMS gyroscopes with in-line springs and related systems and methods |
-
2017
- 2017-04-19 IT IT102017000043012A patent/IT201700043012A1/it unknown
-
2018
- 2018-04-18 US US15/956,446 patent/US10775171B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100186507A1 (en) * | 2007-09-10 | 2010-07-29 | Guenthner Stefan | Micromechanical rotation rate sensor with a coupling bar and suspension spring elements for quadrature suppression |
US20090165553A1 (en) * | 2007-10-05 | 2009-07-02 | Vti Technologies Oy | Vibrating micromechanical sensor of angular velocity |
US20090223277A1 (en) * | 2008-03-05 | 2009-09-10 | Colibrys Sa | Vibrating gyroscope with quadrature signals reduction |
EP2444775A2 (en) * | 2010-10-25 | 2012-04-25 | Rosemount Aerospace Inc. | MEMs gyros with quadrature reducing springs |
Non-Patent Citations (1)
Title |
---|
ACAR CENK: "High-performance 6-Axis MEMS inertial sensor based on Through-Silicon Via technology", 2016 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, IEEE, 22 February 2016 (2016-02-22), pages 62 - 65, XP032883686, DOI: 10.1109/ISISS.2016.7435545 * |
Also Published As
Publication number | Publication date |
---|---|
US20180306580A1 (en) | 2018-10-25 |
US10775171B2 (en) | 2020-09-15 |
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