ITUA20162160A1 - Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche - Google Patents

Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche

Info

Publication number
ITUA20162160A1
ITUA20162160A1 ITUA2016A002160A ITUA20162160A ITUA20162160A1 IT UA20162160 A1 ITUA20162160 A1 IT UA20162160A1 IT UA2016A002160 A ITUA2016A002160 A IT UA2016A002160A IT UA20162160 A ITUA20162160 A IT UA20162160A IT UA20162160 A1 ITUA20162160 A1 IT UA20162160A1
Authority
IT
Italy
Prior art keywords
gyroscope
factory
detection
electrical characteristics
micromechanical structure
Prior art date
Application number
ITUA2016A002160A
Other languages
English (en)
Inventor
Gabriele Gattere
Carlo Valzasina
Luca Giuseppe Falorni
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITUA2016A002160A priority Critical patent/ITUA20162160A1/it
Priority to US15/273,312 priority patent/US10480942B2/en
Priority to CN201621101959.5U priority patent/CN206514863U/zh
Priority to CN201610875869.XA priority patent/CN107270883B/zh
Priority to EP16194685.0A priority patent/EP3225953B1/en
Publication of ITUA20162160A1 publication Critical patent/ITUA20162160A1/it
Priority to US16/655,096 priority patent/US11313681B2/en
Priority to US17/700,275 priority patent/US11808574B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58—Turn-sensitive devices without moving masses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/01—Details
    • H01G5/011—Electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49169—Assembling electrical component directly to terminal or elongated conductor
ITUA2016A002160A 2016-03-31 2016-03-31 Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche ITUA20162160A1 (it)

Priority Applications (7)

Application Number Priority Date Filing Date Title
ITUA2016A002160A ITUA20162160A1 (it) 2016-03-31 2016-03-31 Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche
US15/273,312 US10480942B2 (en) 2016-03-31 2016-09-22 Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
CN201621101959.5U CN206514863U (zh) 2016-03-31 2016-09-30 Mems多轴陀螺仪和电子设备
CN201610875869.XA CN107270883B (zh) 2016-03-31 2016-09-30 具有对应的电气参数的降低的漂移的mems多轴陀螺仪的微机械检测结构
EP16194685.0A EP3225953B1 (en) 2016-03-31 2016-10-19 Micromechanical detection structure of a mems multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
US16/655,096 US11313681B2 (en) 2016-03-31 2019-10-16 Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
US17/700,275 US11808574B2 (en) 2016-03-31 2022-03-21 Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUA2016A002160A ITUA20162160A1 (it) 2016-03-31 2016-03-31 Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche

Publications (1)

Publication Number Publication Date
ITUA20162160A1 true ITUA20162160A1 (it) 2017-10-01

Family

ID=56235938

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUA2016A002160A ITUA20162160A1 (it) 2016-03-31 2016-03-31 Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche

Country Status (4)

Country Link
US (3) US10480942B2 (it)
EP (1) EP3225953B1 (it)
CN (2) CN107270883B (it)
IT (1) ITUA20162160A1 (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115164861A (zh) * 2022-08-26 2022-10-11 南京高华科技股份有限公司 Mems陀螺仪及其制备方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITUA20161498A1 (it) * 2016-03-09 2017-09-09 St Microelectronics Srl Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento
ITUA20162172A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
ITUA20162160A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche
CN107192384B (zh) * 2017-07-24 2022-04-05 深迪半导体(绍兴)有限公司 一种mems三轴陀螺仪
US10571268B2 (en) * 2017-11-30 2020-02-25 Invensense, Inc. MEMS sensor with offset anchor load rejection
US11009350B2 (en) * 2018-01-11 2021-05-18 Invensense, Inc. Proof mass offset compensation
US20200141732A1 (en) * 2018-11-02 2020-05-07 Semiconductor Components Industries, Llc Multi-axis gyroscope with reduced bias drift
CN111288982B (zh) * 2018-12-07 2022-07-05 国宏中晶集团有限公司 双激光陀螺高精度单轴旋转测量系统
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
CN110926445B (zh) * 2019-12-06 2022-03-08 深迪半导体(绍兴)有限公司 一种三轴mems陀螺仪
US11614327B2 (en) * 2020-07-23 2023-03-28 Sensortek Technology Corp. Gyroscope structure
CN111998840B (zh) * 2020-08-28 2022-08-12 中电科技集团重庆声光电有限公司 一种mems多轴振动传感器结构
IT202100020504A1 (it) * 2021-07-30 2023-01-30 St Microelectronics Srl Giroscopio mems avente una migliorata reiezione all'errore di quadratura
IT202200000524A1 (it) * 2022-01-14 2023-07-14 St Microelectronics Srl Giroscopio microelettromeccanico con movimento di rilevamento fuori dal piano avente migliorate caratteristiche elettriche
CN114526718B (zh) * 2022-02-11 2023-04-11 绍兴圆方半导体有限公司 陀螺仪
CN116660570A (zh) * 2022-02-18 2023-08-29 华为技术有限公司 角速度传感器、惯性传感器和电子设备
CN115420907B (zh) * 2022-11-02 2023-03-21 杭州麦新敏微科技有限责任公司 一种mems加速度计及其形成方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130239686A1 (en) * 2009-07-31 2013-09-19 Stmicroelectronics S.R.I. Microelectromechanical z-axis detection structure with low thermal drifts
US20140000367A1 (en) * 2010-10-25 2014-01-02 Rosemount Aerospace Inc. Mems gyros with quadrature reducing springs
EP2884229A1 (en) * 2013-09-30 2015-06-17 InvenSense, Inc. Micromachined gyroscope including a guided mass system

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7478557B2 (en) * 2004-10-01 2009-01-20 Analog Devices, Inc. Common centroid micromachine driver
US8109149B2 (en) * 2004-11-17 2012-02-07 Lawrence Livermore National Security, Llc Contact stress sensor
JP2009164214A (ja) * 2007-12-28 2009-07-23 Toshiba Corp 微細構造体の処理方法、微細構造体の処理システムおよび電子デバイスの製造方法
ITTO20090489A1 (it) * 2008-11-26 2010-12-27 St Microelectronics Srl Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse
IT1392741B1 (it) * 2008-12-23 2012-03-16 St Microelectronics Rousset Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione
JP2010161112A (ja) * 2009-01-06 2010-07-22 Nikon Corp 露光装置の管理方法及びデバイス製造方法
IT1394007B1 (it) * 2009-05-11 2012-05-17 St Microelectronics Rousset Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione
ITTO20091042A1 (it) * 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
CN102893128B (zh) * 2010-03-17 2016-02-17 大陆-特韦斯贸易合伙股份公司及两合公司 微机械陀螺仪的正交和共振频率的解耦控制方法
FR2969278B1 (fr) * 2010-12-20 2013-07-05 Onera (Off Nat Aerospatiale) Structure planaire pour gyrometre tri-axe
EP2607849A1 (en) * 2011-12-22 2013-06-26 Tronics Microsystems S.A. Multiaxial micro-electronic inertial sensor
US8978475B2 (en) * 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
ITUA20162160A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130239686A1 (en) * 2009-07-31 2013-09-19 Stmicroelectronics S.R.I. Microelectromechanical z-axis detection structure with low thermal drifts
US20140000367A1 (en) * 2010-10-25 2014-01-02 Rosemount Aerospace Inc. Mems gyros with quadrature reducing springs
EP2884229A1 (en) * 2013-09-30 2015-06-17 InvenSense, Inc. Micromachined gyroscope including a guided mass system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115164861A (zh) * 2022-08-26 2022-10-11 南京高华科技股份有限公司 Mems陀螺仪及其制备方法
CN115164861B (zh) * 2022-08-26 2024-03-08 南京高华科技股份有限公司 Mems陀螺仪及其制备方法

Also Published As

Publication number Publication date
CN206514863U (zh) 2017-09-22
US20200049505A1 (en) 2020-02-13
US20170284804A1 (en) 2017-10-05
CN107270883A (zh) 2017-10-20
US11808574B2 (en) 2023-11-07
CN107270883B (zh) 2021-03-30
US20220205784A1 (en) 2022-06-30
EP3225953A1 (en) 2017-10-04
US10480942B2 (en) 2019-11-19
EP3225953B1 (en) 2019-03-06
US11313681B2 (en) 2022-04-26

Similar Documents

Publication Publication Date Title
ITUA20162160A1 (it) Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche
DK3338105T3 (da) Fremgangsmåde til accelerometerunderstøttet navigation
GB2561886B (en) High performance micro-electro-mechanical systems accelerometer
SG11202007406UA (en) Mems accelerometer
GB201610747D0 (en) Inertial Navigation System
DK3311160T3 (da) En plasmaseparerende mikrofluidindretning
FI20155095A (fi) Mikromekaaninen kulmanopeusanturi
IT201600106928A1 (it) Giroscopio triassiale mems a modulazione di frequenza
IT201700091680A1 (it) Nucleo sensore micromeccanico per sensore inerziale
FI20155094A (fi) Mikromekaaninen kulmanopeusanturi
FI20155508A (fi) MEMS anturi
FR3046436B1 (fr) Convertisseur electrostatique.
DK3529498T3 (da) Diafragma til en centrifugalkompressor
DK3571394T3 (da) Inertireaktion for netstabilitet
EP3559411A4 (en) EXPANSION OF THE AREA OF A MEMS GYROSCOPE BY MEANS OF Eccentric Accelerometers
DE112016003176A5 (de) Fliehkraftpendel
IT201700103058A1 (it) Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems
DE112017003568A5 (de) Fliehkraftpendel
DK3458467T3 (da) Fremgangsmåde til 6,7-alfa-epoxidering af steroid-4,6-diener
DK3679461T3 (da) Bestemmelse af skriveretning ved hjælp af inertisensorer
DE112016001746A5 (de) Fliehkraftpendel
GB2548030B (en) Subterranean formation characterization using microelectromechanical system (MEMS) devices
EP3427296A4 (en) DEVICES WITH MICROELECTROMECHANICAL SYSTEM (MEMS)
DK3456402T3 (da) Gasseparationsfremgangsmåde
DE112017004199A5 (de) Fliehkraftpendel