IT201600106928A1 - Giroscopio triassiale mems a modulazione di frequenza - Google Patents

Giroscopio triassiale mems a modulazione di frequenza

Info

Publication number
IT201600106928A1
IT201600106928A1 IT102016000106928A IT201600106928A IT201600106928A1 IT 201600106928 A1 IT201600106928 A1 IT 201600106928A1 IT 102016000106928 A IT102016000106928 A IT 102016000106928A IT 201600106928 A IT201600106928 A IT 201600106928A IT 201600106928 A1 IT201600106928 A1 IT 201600106928A1
Authority
IT
Italy
Prior art keywords
triassial
giroscope
mems
frequency modulation
modulation
Prior art date
Application number
IT102016000106928A
Other languages
English (en)
Inventor
Alessandro Tocchio
Luca Giuseppe Falorni
Claudia Comi
Valentina Zega
Original Assignee
St Microelectronics Srl
Milano Politecnico
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl, Milano Politecnico filed Critical St Microelectronics Srl
Priority to IT102016000106928A priority Critical patent/IT201600106928A1/it
Priority to CN201710443570.1A priority patent/CN107976180B/zh
Priority to CN201720686289.6U priority patent/CN207816283U/zh
Priority to EP17177405.2A priority patent/EP3312559B1/en
Priority to US15/639,608 priority patent/US10520315B2/en
Publication of IT201600106928A1 publication Critical patent/IT201600106928A1/it
Priority to US16/697,092 priority patent/US11448507B2/en
Priority to US17/821,724 priority patent/US20220404150A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5649—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5769—Manufacturing; Mounting; Housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
IT102016000106928A 2016-10-24 2016-10-24 Giroscopio triassiale mems a modulazione di frequenza IT201600106928A1 (it)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IT102016000106928A IT201600106928A1 (it) 2016-10-24 2016-10-24 Giroscopio triassiale mems a modulazione di frequenza
CN201710443570.1A CN107976180B (zh) 2016-10-24 2017-06-13 频率调制mems三轴陀螺仪
CN201720686289.6U CN207816283U (zh) 2016-10-24 2017-06-13 频率调制mems三轴陀螺仪及电子系统
EP17177405.2A EP3312559B1 (en) 2016-10-24 2017-06-22 Frequency modulation mems triaxial gyroscope
US15/639,608 US10520315B2 (en) 2016-10-24 2017-06-30 Frequency modulation MEMS triaxial gyroscope
US16/697,092 US11448507B2 (en) 2016-10-24 2019-11-26 Frequency modulation MEMS triaxial gyroscope
US17/821,724 US20220404150A1 (en) 2016-10-24 2022-08-23 Frequency modulation mems triaxial gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102016000106928A IT201600106928A1 (it) 2016-10-24 2016-10-24 Giroscopio triassiale mems a modulazione di frequenza

Publications (1)

Publication Number Publication Date
IT201600106928A1 true IT201600106928A1 (it) 2018-04-24

Family

ID=57960762

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102016000106928A IT201600106928A1 (it) 2016-10-24 2016-10-24 Giroscopio triassiale mems a modulazione di frequenza

Country Status (4)

Country Link
US (3) US10520315B2 (it)
EP (1) EP3312559B1 (it)
CN (2) CN107976180B (it)
IT (1) IT201600106928A1 (it)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201600106928A1 (it) * 2016-10-24 2018-04-24 St Microelectronics Srl Giroscopio triassiale mems a modulazione di frequenza
IT201600110354A1 (it) 2016-11-03 2018-05-03 St Microelectronics Srl Accelerometro triassiale mems con configurazione perfezionata
US10551191B2 (en) 2017-02-17 2020-02-04 Invensense, Inc. Deformation rejection mechanism for offset minimization of out-of-plane sensing MEMS device
CN110637208B (zh) 2017-02-17 2022-04-05 应美盛股份有限公司 用于对锚定件移动不敏感的传感器的锚定结构
WO2019209659A1 (en) * 2018-04-26 2019-10-31 Invensense, Inc. Deformation rejection mechanism for offset minimization of out-of-plane sensing mems device
US10760909B2 (en) * 2018-06-18 2020-09-01 Nxp Usa, Inc. Angular rate sensor with in-phase drive and sense motion suppression
DE102018210491A1 (de) * 2018-06-27 2020-01-02 Robert Bosch Gmbh Mikroelektromechanischer Sensor
IT201900017546A1 (it) * 2019-09-30 2021-03-30 St Microelectronics Srl Dispositivo a pulsante mems resistente all'acqua, dispositivo di ingresso comprendente il dispositivo a pulsante mems e apparecchio elettronico
US11519726B2 (en) 2020-06-19 2022-12-06 Analog Devices, Inc. Mechanism for selective coupling in microelectromechanical systems inertial sensors
US11460301B2 (en) * 2021-03-02 2022-10-04 Nxp Usa, Inc. Angular rate sensor based on frequency modulation and drive strategy for same
US20230400303A1 (en) * 2022-06-13 2023-12-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Inertial navigation sensor with reduced footprint

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014093727A1 (en) * 2012-12-12 2014-06-19 The Regents Of The University Of California Frequency readout gyroscope
US20150330783A1 (en) * 2014-05-15 2015-11-19 Maxim Integrated Products, Inc. Systems and methods for mems gyroscope shock robustness

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69413792T2 (de) * 1994-01-25 1999-03-04 Draper Lab Charles S Mikromechanischer Stimmgabelumdrehungsmesser mit kammförmigen Antriebselemente
CN100487376C (zh) * 2007-10-15 2009-05-13 北京航空航天大学 一种双质量块调谐输出式硅mems陀螺仪
DE102008054749A1 (de) * 2008-12-16 2010-06-17 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
DE102009046506B4 (de) * 2009-11-06 2024-01-18 Robert Bosch Gmbh Drehratensensor
ITTO20091042A1 (it) * 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
KR101352827B1 (ko) * 2010-09-18 2014-01-17 페어차일드 세미컨덕터 코포레이션 단일 프루프 매스를 가진 미세기계화 3축 가속도계
US9759563B2 (en) * 2012-01-31 2017-09-12 Nxp Usa, Inc. Vibration robust x-axis ring gyro transducer
DE102013212112A1 (de) * 2013-06-25 2015-01-08 Robert Bosch Gmbh Drehratensensor mit drei sensitiven Achsen und Verfahren zur Herstellung eines Drehratensensors
FR3022996B1 (fr) * 2014-06-27 2017-12-01 Thales Sa Capteur inertiel angulaire mems fonctionnant en mode diapason
JP6481293B2 (ja) * 2014-09-05 2019-03-13 セイコーエプソン株式会社 物理量センサー素子、物理量センサー、電子機器および移動体
CN204679079U (zh) * 2015-06-29 2015-09-30 歌尔声学股份有限公司 一种mems三轴陀螺仪
IT201600106928A1 (it) * 2016-10-24 2018-04-24 St Microelectronics Srl Giroscopio triassiale mems a modulazione di frequenza

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014093727A1 (en) * 2012-12-12 2014-06-19 The Regents Of The University Of California Frequency readout gyroscope
US20150330783A1 (en) * 2014-05-15 2015-11-19 Maxim Integrated Products, Inc. Systems and methods for mems gyroscope shock robustness

Also Published As

Publication number Publication date
EP3312559B1 (en) 2021-08-18
CN207816283U (zh) 2018-09-04
US20220404150A1 (en) 2022-12-22
US11448507B2 (en) 2022-09-20
CN107976180B (zh) 2022-06-07
US10520315B2 (en) 2019-12-31
EP3312559A1 (en) 2018-04-25
CN107976180A (zh) 2018-05-01
US20200096339A1 (en) 2020-03-26
US20180112981A1 (en) 2018-04-26

Similar Documents

Publication Publication Date Title
IT201600106928A1 (it) Giroscopio triassiale mems a modulazione di frequenza
MA55328A (fr) Modulateurs de ror-gamma
DK3132517T3 (da) Frekvenssvar
FI20145136A (fi) Ajopiiri MEMS resonaattorin käynnistämiseksi
DK3307436T3 (da) Mikrofluidanordning
DK3479159T3 (da) Moduleret fabry-pérot
BR112017006123A2 (pt) emulsões o/a
DK3164367T3 (da) Udglatning af en coating
DK3365629T3 (da) H-formet vaterpas
DK3526300T3 (da) Hæfteklæbestof
DK3016414T3 (da) Konfiguration af en indretning
DK3700644T3 (da) Kørende forlystelse
DE102018203100B8 (de) Mems-bauteil
BR112017005751A2 (pt) emulsões o/a
FR3027448B1 (fr) Commutateur microelectromecanique robuste
ITUA20162072A1 (it) Dropper a volume controllato
FR3021937B1 (fr) Servofrein a depression
DK3621950T3 (da) Trpv1-modulatorforbindelser
DK3546874T3 (da) Trykbeholder
IT201700092522A1 (it) Elemento strutturale micromeccanico
DK3332879T3 (da) Vibrationssigte
DE102016000849B8 (de) Schwingungsdämpfer
BR112017010697A2 (pt) aumento da micro robustez
DK3439329T3 (da) I-øret-hørehjælpemiddel
FR3056974B1 (fr) Devidoir a gommettes-2