FI20145136A - Ajopiiri MEMS resonaattorin käynnistämiseksi - Google Patents

Ajopiiri MEMS resonaattorin käynnistämiseksi

Info

Publication number
FI20145136A
FI20145136A FI20145136A FI20145136A FI20145136A FI 20145136 A FI20145136 A FI 20145136A FI 20145136 A FI20145136 A FI 20145136A FI 20145136 A FI20145136 A FI 20145136A FI 20145136 A FI20145136 A FI 20145136A
Authority
FI
Finland
Prior art keywords
activating
mems resonator
traction circuit
traction
circuit
Prior art date
Application number
FI20145136A
Other languages
English (en)
Swedish (sv)
Other versions
FI125611B (fi
Inventor
Lasse Aaltonen
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to FI20145136A priority Critical patent/FI125611B/fi
Priority to TW104103858A priority patent/TWI640167B/zh
Priority to EP15708335.3A priority patent/EP3105545B1/en
Priority to PCT/IB2015/050902 priority patent/WO2015121779A2/en
Priority to US14/618,025 priority patent/US9829317B2/en
Publication of FI20145136A publication Critical patent/FI20145136A/fi
Application granted granted Critical
Publication of FI125611B publication Critical patent/FI125611B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/02—Details
    • H03B5/06—Modifications of generator to ensure starting of oscillations
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
    • H03B5/364—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device the amplifier comprising field effect transistors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03J—TUNING RESONANT CIRCUITS; SELECTING RESONANT CIRCUITS
    • H03J1/00—Details of adjusting, driving, indicating, or mechanical control arrangements for resonant circuits in general
    • H03J1/06—Driving or adjusting arrangements; combined with other driving or adjusting arrangements, e.g. of gain control

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Acoustics & Sound (AREA)
  • Gyroscopes (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
FI20145136A 2014-02-12 2014-02-12 Ajopiiri MEMS resonaattorin käynnistämiseksi FI125611B (fi)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI20145136A FI125611B (fi) 2014-02-12 2014-02-12 Ajopiiri MEMS resonaattorin käynnistämiseksi
TW104103858A TWI640167B (zh) 2014-02-12 2015-02-05 用於微機電系統諧振器啟動的驅動電路
EP15708335.3A EP3105545B1 (en) 2014-02-12 2015-02-06 A drive circuitry for mems resonator startup
PCT/IB2015/050902 WO2015121779A2 (en) 2014-02-12 2015-02-06 A drive circuitry for MEMS resonator startup
US14/618,025 US9829317B2 (en) 2014-02-12 2015-02-10 Drive circuit for MEMS resonator startup

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20145136A FI125611B (fi) 2014-02-12 2014-02-12 Ajopiiri MEMS resonaattorin käynnistämiseksi
FI20145136 2014-02-12

Publications (2)

Publication Number Publication Date
FI20145136A true FI20145136A (fi) 2015-08-13
FI125611B FI125611B (fi) 2015-12-15

Family

ID=52629639

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20145136A FI125611B (fi) 2014-02-12 2014-02-12 Ajopiiri MEMS resonaattorin käynnistämiseksi

Country Status (5)

Country Link
US (1) US9829317B2 (fi)
EP (1) EP3105545B1 (fi)
FI (1) FI125611B (fi)
TW (1) TWI640167B (fi)
WO (1) WO2015121779A2 (fi)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI126019B (fi) * 2014-02-12 2016-05-31 Murata Manufacturing Co MEMS resonaattorin ajovirtapiiristö
US10267636B1 (en) * 2015-01-02 2019-04-23 Mcube, Inc. Method to test the quality factor of a MEMS gyroscope at chip probe
WO2016164543A1 (en) 2015-04-07 2016-10-13 Analog Devices, Inc. Quality factor estimation for resonators
US10080084B2 (en) * 2015-12-18 2018-09-18 Cirrus Logic, Inc. Digital correcting network for microelectromechanical systems microphone
WO2017201409A1 (en) * 2016-05-20 2017-11-23 The Regents Of The University Of Michigan Protecting motion sensors from acoustic injection attack
US10466067B2 (en) 2017-01-19 2019-11-05 The Boeing Company System and method for gyro rate computation for a Coriolis Vibrating Gyroscope
US10903791B2 (en) 2017-02-11 2021-01-26 Mumec, Inc. Super-regenerative transceiver with improved frequency discrimination
US10578435B2 (en) 2018-01-12 2020-03-03 Analog Devices, Inc. Quality factor compensation in microelectromechanical system (MEMS) gyroscopes
CN110230605A (zh) * 2018-03-05 2019-09-13 迎广科技股份有限公司 多风扇依温度调整转速的控制方法
JP6801684B2 (ja) * 2018-03-29 2020-12-16 株式会社デンソー 振動型ジャイロスコープ
US11041722B2 (en) 2018-07-23 2021-06-22 Analog Devices, Inc. Systems and methods for sensing angular motion in the presence of low-frequency noise
EP3699610B1 (en) * 2019-02-22 2023-04-19 NXP USA, Inc. Capacitance-to-voltage interface circuit
CN109945849B (zh) * 2019-04-02 2023-09-26 四川知微传感技术有限公司 一种基于mems陀螺仪的闭环锁相驱动电路结构
DE102019210305A1 (de) * 2019-07-11 2021-01-14 Infineon Technologies Ag Steuern eines Oszillationssystems
EP3985352B1 (en) * 2020-10-16 2023-12-27 Atlantic Inertial Systems Limited Gyroscope
DE102022213104A1 (de) 2022-12-06 2024-06-06 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Sensorsystem mit einem Drehratensensor und Verfahren zum Betrieb eines mikromechanischen Sensorsystems mit einem Drehratensensor

Family Cites Families (18)

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EP0643890A1 (en) 1992-06-02 1995-03-22 Telefonaktiebolaget Lm Ericsson Clock extraction circuit for fiber optical receivers
US5327302A (en) 1992-09-16 1994-07-05 At&T Bell Laboratories Data filter tuning for constant density recording applications
US7352249B2 (en) * 2003-10-03 2008-04-01 Analog Devices, Inc. Phase-locked loop bandwidth calibration circuit and method thereof
US20110050214A1 (en) 2006-05-10 2011-03-03 The University Of Manitoba System and method for measuring magnetic field strength using a mechanical resonator
US7941723B1 (en) * 2007-09-26 2011-05-10 Integrated Device Technology, Inc. Clock generator and method for providing reliable clock signal using array of MEMS resonators
EP2282404A1 (en) 2009-08-03 2011-02-09 Nxp B.V. Frequency selection and amplifying device
EP2336717B1 (en) 2009-12-21 2012-09-19 STMicroelectronics Srl Microelectromechanical device having an oscillating mass, and method for controlling a microelectromechanical device having an oscillating mass
US8004354B1 (en) * 2010-02-12 2011-08-23 Taiwan Semiconductor Manufacturing Company, Ltd. Automatic level control
US8539834B2 (en) 2010-02-15 2013-09-24 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope
JP5975601B2 (ja) * 2011-02-25 2016-08-23 セイコーエプソン株式会社 検出回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
US8816790B2 (en) * 2011-07-01 2014-08-26 Nabil Mohamed Sinoussi Self-biased amplitude-controlled oscillator with constant harmonic content
ITTO20110979A1 (it) * 2011-10-27 2013-04-28 St Microelectronics Srl Circuito di pilotaggio per un giroscopio microelettromeccanico e relativo giroscopio microelettromeccanico
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Also Published As

Publication number Publication date
TW201547208A (zh) 2015-12-16
US20150226557A1 (en) 2015-08-13
TWI640167B (zh) 2018-11-01
FI125611B (fi) 2015-12-15
WO2015121779A3 (en) 2015-12-10
EP3105545A2 (en) 2016-12-21
WO2015121779A2 (en) 2015-08-20
US9829317B2 (en) 2017-11-28
EP3105545B1 (en) 2018-07-11

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