FR3027448B1 - Commutateur microelectromecanique robuste - Google Patents

Commutateur microelectromecanique robuste

Info

Publication number
FR3027448B1
FR3027448B1 FR1460104A FR1460104A FR3027448B1 FR 3027448 B1 FR3027448 B1 FR 3027448B1 FR 1460104 A FR1460104 A FR 1460104A FR 1460104 A FR1460104 A FR 1460104A FR 3027448 B1 FR3027448 B1 FR 3027448B1
Authority
FR
France
Prior art keywords
microelectromechanical switch
robust
robust microelectromechanical
switch
microelectromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1460104A
Other languages
English (en)
Other versions
FR3027448A1 (fr
Inventor
Pierre Blondy
Romain Stefanini
ling yan Zhang
Abedel Halim Zahr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airmems
Original Assignee
Airmems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1460104A priority Critical patent/FR3027448B1/fr
Application filed by Airmems filed Critical Airmems
Priority to ES15805568T priority patent/ES2863098T3/es
Priority to PCT/FR2015/052802 priority patent/WO2016062956A1/fr
Priority to US15/520,667 priority patent/US10121623B2/en
Priority to CN201580057186.7A priority patent/CN107078000B/zh
Priority to EP15805568.1A priority patent/EP3210230B1/fr
Publication of FR3027448A1 publication Critical patent/FR3027448A1/fr
Application granted granted Critical
Publication of FR3027448B1 publication Critical patent/FR3027448B1/fr
Priority to IL251793A priority patent/IL251793B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H51/00—Electromagnetic relays
    • H01H51/22—Polarised relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
FR1460104A 2014-10-21 2014-10-21 Commutateur microelectromecanique robuste Active FR3027448B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR1460104A FR3027448B1 (fr) 2014-10-21 2014-10-21 Commutateur microelectromecanique robuste
PCT/FR2015/052802 WO2016062956A1 (fr) 2014-10-21 2015-10-19 Commutateur microelectromecanique robuste
US15/520,667 US10121623B2 (en) 2014-10-21 2015-10-19 Robust microelectromechanical switch
CN201580057186.7A CN107078000B (zh) 2014-10-21 2015-10-19 坚固的微机电开关
ES15805568T ES2863098T3 (es) 2014-10-21 2015-10-19 Conmutador microelectromecánico robusto
EP15805568.1A EP3210230B1 (fr) 2014-10-21 2015-10-19 Commutateur microelectromecanique robuste
IL251793A IL251793B (en) 2014-10-21 2017-04-19 Impermeable microelectromechanical switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1460104A FR3027448B1 (fr) 2014-10-21 2014-10-21 Commutateur microelectromecanique robuste

Publications (2)

Publication Number Publication Date
FR3027448A1 FR3027448A1 (fr) 2016-04-22
FR3027448B1 true FR3027448B1 (fr) 2016-10-28

Family

ID=52627301

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1460104A Active FR3027448B1 (fr) 2014-10-21 2014-10-21 Commutateur microelectromecanique robuste

Country Status (7)

Country Link
US (1) US10121623B2 (fr)
EP (1) EP3210230B1 (fr)
CN (1) CN107078000B (fr)
ES (1) ES2863098T3 (fr)
FR (1) FR3027448B1 (fr)
IL (1) IL251793B (fr)
WO (1) WO2016062956A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3051784B1 (fr) 2016-05-24 2018-05-25 Airmems Membrane mems a ligne de transmission integree
FR3074793B1 (fr) * 2017-12-12 2021-07-16 Commissariat Energie Atomique Dispositif microelectromecanique et/ou nanoelectromecanique offrant une robustesse augmentee
FR3098340B1 (fr) 2019-07-03 2022-03-25 Airmems Commutateur de puissance, large bande hautes frequences et dispositif integrant des commutateurs de puissance

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US6707355B1 (en) * 2001-06-29 2004-03-16 Teravicta Technologies, Inc. Gradually-actuating micromechanical device
WO2003028059A1 (fr) * 2001-09-21 2003-04-03 Hrl Laboratories, Llc Commutateurs mems et leurs procedes de fabrication
US6717496B2 (en) * 2001-11-13 2004-04-06 The Board Of Trustees Of The University Of Illinois Electromagnetic energy controlled low actuation voltage microelectromechanical switch
US6876282B2 (en) * 2002-05-17 2005-04-05 International Business Machines Corporation Micro-electro-mechanical RF switch
US6639494B1 (en) * 2002-12-18 2003-10-28 Northrop Grumman Corporation Microelectromechanical RF switch
KR100554468B1 (ko) * 2003-12-26 2006-03-03 한국전자통신연구원 자기유지 중앙지지대를 갖는 미세 전자기계적 스위치 및그의 제조방법
US7373717B2 (en) * 2004-03-16 2008-05-20 Electronics And Telecommunications Research Institute Method of manufacturing a self-sustaining center-anchor microelectromechanical switch
US20050225412A1 (en) * 2004-03-31 2005-10-13 Limcangco Naomi O Microelectromechanical switch with an arc reduction environment
US20050248424A1 (en) * 2004-05-07 2005-11-10 Tsung-Kuan Chou Composite beam microelectromechanical system switch
FR2871950B1 (fr) * 2004-06-22 2006-08-11 Commissariat Energie Atomique Filtre frequentiel et son procede de realisation.
US7310033B2 (en) 2004-08-19 2007-12-18 Teravicta Technologies, Inc. MEMS switch electrode configuration to increase signal isolation
US7119943B2 (en) 2004-08-19 2006-10-10 Teravicta Technologies, Inc. Plate-based microelectromechanical switch having a three-fold relative arrangement of contact structures and support arms
US20070040637A1 (en) 2005-08-19 2007-02-22 Yee Ian Y K Microelectromechanical switches having mechanically active components which are electrically isolated from components of the switch used for the transmission of signals
US7528691B2 (en) * 2005-08-26 2009-05-05 Innovative Micro Technology Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture
KR100837741B1 (ko) * 2006-12-29 2008-06-13 삼성전자주식회사 미세 스위치 소자 및 미세 스위치 소자의 제조방법
US8093971B2 (en) * 2008-12-22 2012-01-10 General Electric Company Micro-electromechanical system switch
US8957485B2 (en) * 2009-01-21 2015-02-17 Cavendish Kinetics, Ltd. Fabrication of MEMS based cantilever switches by employing a split layer cantilever deposition scheme
US7928333B2 (en) * 2009-08-14 2011-04-19 General Electric Company Switch structures
JP4887466B2 (ja) * 2009-09-17 2012-02-29 パナソニック株式会社 Ｍｅｍｓスイッチおよびそれを用いた通信装置
US8354899B2 (en) * 2009-09-23 2013-01-15 General Electric Company Switch structure and method
FR2963784B1 (fr) * 2010-08-11 2012-08-31 Univ Limoges Microsystemes electromecaniques a gaps d'air.

Also Published As

Publication number Publication date
IL251793B (en) 2021-02-28
CN107078000A (zh) 2017-08-18
EP3210230B1 (fr) 2020-12-30
FR3027448A1 (fr) 2016-04-22
IL251793A0 (en) 2017-06-29
WO2016062956A1 (fr) 2016-04-28
CN107078000B (zh) 2019-06-18
EP3210230A1 (fr) 2017-08-30
US10121623B2 (en) 2018-11-06
ES2863098T3 (es) 2021-10-08
US20170316907A1 (en) 2017-11-02

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