IT201700092522A1 - Elemento strutturale micromeccanico - Google Patents

Elemento strutturale micromeccanico

Info

Publication number
IT201700092522A1
IT201700092522A1 IT102017000092522A IT201700092522A IT201700092522A1 IT 201700092522 A1 IT201700092522 A1 IT 201700092522A1 IT 102017000092522 A IT102017000092522 A IT 102017000092522A IT 201700092522 A IT201700092522 A IT 201700092522A IT 201700092522 A1 IT201700092522 A1 IT 201700092522A1
Authority
IT
Italy
Prior art keywords
structural element
micromechanical structural
micromechanical
structural
Prior art date
Application number
IT102017000092522A
Other languages
English (en)
Inventor
Odd-Axel Pruetz
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of IT201700092522A1 publication Critical patent/IT201700092522A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/025—Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Micromachines (AREA)
IT102017000092522A 2016-08-23 2017-08-09 Elemento strutturale micromeccanico IT201700092522A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102016215829.5A DE102016215829A1 (de) 2016-08-23 2016-08-23 Mikromechanisches Bauelement

Publications (1)

Publication Number Publication Date
IT201700092522A1 true IT201700092522A1 (it) 2019-02-09

Family

ID=61166945

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000092522A IT201700092522A1 (it) 2016-08-23 2017-08-09 Elemento strutturale micromeccanico

Country Status (3)

Country Link
US (1) US10519029B2 (it)
DE (1) DE102016215829A1 (it)
IT (1) IT201700092522A1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020215238A1 (de) 2020-12-02 2022-06-02 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Sensorstruktur mit Dämpfungsstruktur

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3952980A (en) * 1974-10-29 1976-04-27 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Translatory shock absorber for attitude sensors
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
US4778028A (en) * 1986-11-03 1988-10-18 General Electric Company Light viscoelastic damping structure
US5286013A (en) * 1990-11-13 1994-02-15 General Electric Company Vibration damper assembly
EP0583405A1 (en) * 1991-04-29 1994-02-23 H. Neil Paton Composite elastomeric spring and mounting apparatus
US6199874B1 (en) * 1993-05-26 2001-03-13 Cornell Research Foundation Inc. Microelectromechanical accelerometer for automotive applications
JPH095464A (ja) * 1995-06-19 1997-01-10 Nikon Corp 支持機構
US5738330A (en) * 1995-12-11 1998-04-14 Vibro/Dynamics Corp. Machinery mount with damping means
US6057618A (en) * 1998-04-01 2000-05-02 Bell Helicopter Textron, Inc. Support assembly for a rotating shaft
US5971347A (en) * 1998-06-24 1999-10-26 Tsai; Chong-Shien Vibration damper
US7451966B1 (en) * 2001-07-02 2008-11-18 Knowles Gareth J Isolator mount for shock and vibration
US7290759B1 (en) * 2004-10-15 2007-11-06 Joe Lavrencik Vibration isolation damper for electronic equipment
US7441731B2 (en) * 2004-10-28 2008-10-28 Smart Kenneth L Support block system
US8132771B2 (en) * 2005-08-17 2012-03-13 Anheuser-Busch Companies, Inc. Portable spacing member
DE102012208117B4 (de) * 2012-05-15 2023-10-05 Robert Bosch Gmbh Mikromechanisches Bauteil
DE102014202819A1 (de) * 2014-02-17 2015-08-20 Robert Bosch Gmbh Mikromechanische Struktur für einen Beschleunigungssensor
US9528271B2 (en) * 2015-04-23 2016-12-27 PHD Manufacturing, Inc. Rooftop support base

Also Published As

Publication number Publication date
DE102016215829A1 (de) 2018-03-01
US20180057352A1 (en) 2018-03-01
US10519029B2 (en) 2019-12-31

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