SG11202007406UA - Mems accelerometer - Google Patents

Mems accelerometer

Info

Publication number
SG11202007406UA
SG11202007406UA SG11202007406UA SG11202007406UA SG11202007406UA SG 11202007406U A SG11202007406U A SG 11202007406UA SG 11202007406U A SG11202007406U A SG 11202007406UA SG 11202007406U A SG11202007406U A SG 11202007406UA SG 11202007406U A SG11202007406U A SG 11202007406UA
Authority
SG
Singapore
Prior art keywords
mems accelerometer
mems
accelerometer
Prior art date
Application number
SG11202007406UA
Inventor
Bo Zou
Qinglong Zheng
Original Assignee
Senodia Technologies Shanghai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Senodia Technologies Shanghai Co Ltd filed Critical Senodia Technologies Shanghai Co Ltd
Publication of SG11202007406UA publication Critical patent/SG11202007406UA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
SG11202007406UA 2018-02-06 2019-01-28 Mems accelerometer SG11202007406UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201810117097.2A CN108020687B (en) 2018-02-06 2018-02-06 MEMS accelerometer
PCT/CN2019/073334 WO2019154146A1 (en) 2018-02-06 2019-01-28 Mems accelerometer

Publications (1)

Publication Number Publication Date
SG11202007406UA true SG11202007406UA (en) 2020-09-29

Family

ID=62075251

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202007406UA SG11202007406UA (en) 2018-02-06 2019-01-28 Mems accelerometer

Country Status (5)

Country Link
US (1) US11105829B2 (en)
CN (1) CN108020687B (en)
SG (1) SG11202007406UA (en)
TW (2) TWI748157B (en)
WO (1) WO2019154146A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108020687B (en) * 2018-02-06 2024-03-19 深迪半导体(绍兴)有限公司 MEMS accelerometer
CN109270298B (en) * 2018-10-24 2020-04-07 清华大学 MEMS accelerometer
CN109540118A (en) * 2018-12-24 2019-03-29 中国航空工业集团公司西安飞行自动控制研究所 A kind of micromechanical gyro of low-temperature coefficient
CN109444467B (en) * 2018-12-29 2021-07-06 深迪半导体(绍兴)有限公司 Triaxial capacitive accelerometer sharing mass block
CN110308308B (en) * 2019-06-27 2021-07-13 深迪半导体(绍兴)有限公司 In-plane translational accelerometer with compensation electrode
EP3792637B1 (en) * 2019-09-11 2023-05-03 Murata Manufacturing Co., Ltd. Low-noise multi-axis mems accelerometer
CN111208317B (en) 2020-02-26 2021-07-02 深迪半导体(绍兴)有限公司 MEMS inertial sensor, application method and electronic equipment
JP2022014567A (en) * 2020-07-07 2022-01-20 セイコーエプソン株式会社 Inertial sensor and inertial measurement device
DE112021006521T5 (en) 2020-12-18 2023-12-07 Analog Devices, Inc. ACCELEROMETER WITH TRANSLATIONAL MOVEMENT OF MASSES
JPWO2022264816A1 (en) * 2021-06-16 2022-12-22
CN114280331B (en) * 2021-12-16 2024-05-17 绍兴圆方半导体有限公司 Z-axis accelerometer
CN114487480A (en) * 2022-01-14 2022-05-13 瑞声开泰科技(武汉)有限公司 Micro-electromechanical system accelerometer
CN114487483B (en) * 2022-04-18 2022-07-01 苏州敏芯微电子技术股份有限公司 MEMS triaxial accelerometer
CN116338246B (en) * 2023-03-16 2024-02-20 瑞声开泰科技(武汉)有限公司 Accelerometer

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5060039A (en) * 1988-01-13 1991-10-22 The Charles Stark Draper Laboratory, Inc. Permanent magnet force rebalance micro accelerometer
DE69626972T2 (en) * 1996-07-31 2004-01-08 Stmicroelectronics S.R.L., Agrate Brianza Integrated capacitive semiconductor acceleration sensor and method for its production
EP0895090B1 (en) * 1997-07-31 2003-12-10 STMicroelectronics S.r.l. Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced
US6393913B1 (en) * 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure
DE10148858A1 (en) * 2001-10-04 2003-04-10 Bosch Gmbh Robert Micro-mechanical sensor, e.g. for measurement of acceleration, has a seismic mass with measurement and self-test drive electrodes arranged perpendicularly to each other so that the effects of edge loss on self-testing are reduced
US6701786B2 (en) * 2002-04-29 2004-03-09 L-3 Communications Corporation Closed loop analog gyro rate sensor
US6938483B1 (en) * 2004-03-28 2005-09-06 Hai Yan Phase-locked mechanical resonator pair and its application in micromachined vibration gyroscope
US7640803B1 (en) * 2004-05-26 2010-01-05 Siimpel Corporation Micro-electromechanical system inertial sensor
US7617729B2 (en) * 2006-02-21 2009-11-17 Physical Logic Ag Accelerometer
US7814794B2 (en) * 2007-09-07 2010-10-19 Pixart Imaging Inc. Micromachined sensors
US20090183570A1 (en) * 2008-01-18 2009-07-23 Custom Sensors & Technologies, Inc. Micromachined cross-differential dual-axis accelerometer
TW201020548A (en) * 2008-11-18 2010-06-01 Ind Tech Res Inst Multi-axis capacitive accelerometer
JP5243988B2 (en) * 2009-02-10 2013-07-24 本田技研工業株式会社 Multi-axis force sensor and acceleration sensor
KR101352827B1 (en) * 2010-09-18 2014-01-17 페어차일드 세미컨덕터 코포레이션 Micromachined 3-axis accelerometer with a single proof-mass
JP2012183612A (en) * 2011-03-07 2012-09-27 Toyota Central R&D Labs Inc Mems device
US8689631B1 (en) * 2011-06-23 2014-04-08 The United States Of America As Represented By Secretary Of The Navy High sensitivity mechanical gyro with reduced quadrature error
CN102435777B (en) 2011-11-02 2012-10-31 重庆理工大学 Silicon microcapacitor type two-dimensional integrated acceleration sensor
JP6206650B2 (en) * 2013-07-17 2017-10-04 セイコーエプソン株式会社 Functional element, electronic device, and moving object
CN103645343B (en) * 2013-12-06 2016-07-13 杭州士兰微电子股份有限公司 multi-axis capacitive accelerometer
US8973439B1 (en) * 2013-12-23 2015-03-10 Invensense, Inc. MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate
CN110058051B (en) * 2014-12-11 2021-08-06 意法半导体股份有限公司 Z-axis micro-electromechanical detection structure with drift reduction function
US9840409B2 (en) 2015-01-28 2017-12-12 Invensense, Inc. Translating Z axis accelerometer
EP3298414A1 (en) * 2015-05-20 2018-03-28 Lumedyne Technologies Incorporated Extracting inertial information from nonlinear periodic signals
CN105158511B (en) * 2015-06-29 2018-11-30 歌尔股份有限公司 A kind of MEMS triaxial accelerometer
US10352960B1 (en) * 2015-10-30 2019-07-16 Garmin International, Inc. Free mass MEMS accelerometer
TWI570054B (en) 2015-12-28 2017-02-11 財團法人工業技術研究院 Micro-electromechanical apparatus having central anchor
US10393770B2 (en) * 2016-04-28 2019-08-27 Semiconductor Components Industries, Llc Multi-axis accelerometer with reduced stress sensitivity
KR101915954B1 (en) 2016-06-29 2018-11-08 주식회사 신성씨앤티 MEMS based 3-axis accelerometer
US11119117B2 (en) * 2016-09-23 2021-09-14 Sumitomo Precision Products Co., Ltd. Sensor
JP6816603B2 (en) * 2017-03-27 2021-01-20 セイコーエプソン株式会社 Physical quantity sensors, electronics, and mobiles
CN107271722B (en) * 2017-07-19 2022-06-24 深迪半导体(绍兴)有限公司 Triaxial capacitive accelerometer
CN208314017U (en) * 2018-02-06 2019-01-01 深迪半导体(上海)有限公司 A kind of mems accelerometer
CN108020687B (en) * 2018-02-06 2024-03-19 深迪半导体(绍兴)有限公司 MEMS accelerometer
JP7415444B2 (en) * 2019-10-30 2024-01-17 セイコーエプソン株式会社 Vibration devices, electronic equipment and moving objects

Also Published As

Publication number Publication date
TW201940886A (en) 2019-10-16
CN108020687B (en) 2024-03-19
US20200355722A1 (en) 2020-11-12
WO2019154146A1 (en) 2019-08-15
TWM585900U (en) 2019-11-01
CN108020687A (en) 2018-05-11
TWI748157B (en) 2021-12-01
US11105829B2 (en) 2021-08-31

Similar Documents

Publication Publication Date Title
SG11202007406UA (en) Mems accelerometer
GB2561886B (en) High performance micro-electro-mechanical systems accelerometer
EP3518558A4 (en) Mems microphone
EP3432605A4 (en) Mems microphone
GB201712661D0 (en) Accelerometer
GB2546830B (en) Integrated MEMS transducers
SG10201607048YA (en) Mems loudspeaker with position sensor
GB201602331D0 (en) Inertial sensors
EP3598147C0 (en) Mechanical shock resistant mems accelerometer arrangement and associated method
EP3297294A4 (en) Mems microphone
GB201706641D0 (en) MEMS Device
GB201705755D0 (en) Nanostructure
GB2555804B (en) Accelerometer control
GB201609427D0 (en) Accelerometers
EP3730453A4 (en) Mems device
GB2573963B (en) MEMS transducer package
GB201818712D0 (en) Accelerometer
GB201704396D0 (en) MEMS sensors
GB201514319D0 (en) Accelerometers
SG11202000536WA (en) Three-axis mems gyroscope
EP3559411A4 (en) Extending the range of a mems gyroscope using eccentric accelerometers
GB201706637D0 (en) MEMS Device
EP3500397A4 (en) Sacrificial mechanical link
GB2561887B (en) High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
DE102018203100B8 (en) MEMS COMPONENT