CN109540118A - A kind of micromechanical gyro of low-temperature coefficient - Google Patents
A kind of micromechanical gyro of low-temperature coefficient Download PDFInfo
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- CN109540118A CN109540118A CN201811581806.9A CN201811581806A CN109540118A CN 109540118 A CN109540118 A CN 109540118A CN 201811581806 A CN201811581806 A CN 201811581806A CN 109540118 A CN109540118 A CN 109540118A
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- 238000001514 detection method Methods 0.000 claims abstract description 68
- 239000000203 mixture Substances 0.000 claims abstract description 4
- 238000007689 inspection Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 5
- 239000003990 capacitor Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 210000001520 comb Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The present invention discloses a kind of micromechanical gyro of low-temperature coefficient.The present invention uses three frame full decoupling formula structures, the structure has driving frame, mass block successively nested with detection block, driving frame is coupled with extraneous anchor point by external drive folded beam, driving frame is coupled with mass block by external detection folded beam, mass block is coupled with detection block by internal drive folded beam, and detection block is coupled with internal anchor point by folded inside beam.Sliding tooth is uniformly distributed on driving frame, and driving detection tooth is distributed in the quadrangle of driving frame, symmetrical along vertical centerline and horizontal center line respectively.Detection comb is distributed in inside detection block, is divided into 2 positive integer times group, and every group identical by two pairs of quantity, contrary comb teeth composition.Detection comb is symmetrical along horizontal center line.The micromechanical gyro material temperature coefficient that can cancel out each other mismatches bring capacitance variations, reduces gyro overall performance to the sensibility of temperature change.
Description
Technical field
The invention belongs to micro-mechanical gyro structure technical fields, and in particular to a kind of micromechanical gyro of low-temperature coefficient.
Background technique
Micromechanical gyro is generally possible to measure carrier in the angular speed of inertial space, thus its inertial navigation with
And guidance field is widely used.Since micromechanical gyro is usually made of silicon and glass combination, the thermal expansion coefficient of two kinds of materials
Mismatch can bring biggish temperature coefficient, and the performance for also affecting micromechanical gyro plays, and the serious micromechanical gyro that restricts exists
The application range in Inertial Navigation and Guidance field.
Summary of the invention
In view of the above situation of the prior art, it is simple, small in size and have that the object of the present invention is to provide a kind of structures
The micromechanical gyro of lower temperature coefficient.
Above-mentioned purpose of the invention is realized using following technical scheme:
A kind of micromechanical gyro of low-temperature coefficient, the gyro include driving frame, mass block and detection block, and driving frame is logical
It crosses spring beam to be coupled with extraneous anchor point, driving frame is coupled with mass block by external detection folded beam, and mass block and detection block are logical
The connection of internal drive folded beam is crossed, detection block is coupled with internal anchor point by folded inside beam,
Wherein N group detection comb, the positive integer that N is 2 are symmetrically distributed with along gyro-level center line inside detection block
Times, every group of detection comb is identical, detection comb composition identical by two pairs of quantity, contrary.
Wherein the N group detection comb is 2 groups.
The micromechanical gyro further includes being symmetrically distributed in the driving comb of driving frame two sides along gyro vertical centerline,
Driving comb is symmetrical both with respect to gyro-level center line, drives the quadrangle of frame also respectively along gyro vertical centerline and level
Heart line is symmetrically distributed with the identical driving detection comb of quantity.
Compared with prior art, the present invention having the advantage that
1) detection comb is divided into two integral multiple group, symmetrical along horizontal center line, and every group identical by two pairs of quantity, side
It is formed to opposite detection comb, can cancel out each other because material temperature coefficient mismatches bring capacitance variations in this way, reduce top
Sensibility of the spiral shell overall performance to temperature change.
2) driving detection comb is symmetrical along vertical centerline and horizontal center line respectively, contrary up and down,
Quantity is identical, can reduce material temperature coefficient and mismatch bring change of sensitivity.
3) micro-mechanical gyro structure is to be distributed along vertical centerline and horizontal center line holohedral symmetry, can reduce technique
Manufacture difficulty.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the micromechanical gyro of the low-temperature coefficient of embodiment according to the invention.
Specific embodiment
Objects, technical solutions and advantages for a clearer understanding of the present invention, with reference to the accompanying drawings and embodiments, to this
Invention is further elaborated.
Fig. 1 is the structural schematic diagram of the micromechanical gyro of the low-temperature coefficient of embodiment according to the invention.Such as Fig. 1 institute
Show, the micromechanical gyro of low-temperature coefficient of the invention includes driving frame 1, mass block 2 and detection block 3.
Frame 1 is driven to connect by spring beam 1-1a, 1-1b, 1-1c, 1-1d and the external world anchor point 1-2a, 1-2b, 1-2c, 1-2d
It connects, driving frame 1 is connected by external detection folded beam 2-1a, 2-1b, 2-1c, 2-1d and mass block 2, and mass block 2 passes through inside
Folded beam 2-2a, 2-2b, 2-2c, 2-2d and detection block 3 is driven to connect.
Detection block 3 and internal anchor point are coupled by folded inside beam 3-1a, 3-1b, 3-1c, 3-1d, the inside packet of detection block
Containing along gyro-level center line (X-direction in figure), 2 groups of symmetrical detection comb 3-2a and 3-2b and 3-2c and 3-
2d, every group of detection comb is identical, identical by two pairs of quantity, contrary detection comb composition, that is, in detection comb 3-
In the group that 2a and 3-2b is constituted, detection comb 3-2a and 3-2b is contrary, in the group that detection comb 3-2c and 3-2d are constituted,
Detection comb 3-2c and 3-2d is contrary.In this way, detection comb 3-2a and 3-2c is also contrary, detection comb 3-2b and 3-
2d is also contrary.In addition, detection comb 3-2a, 3-2b, 3-2c, 3-2d are also along gyro vertical centerline (Y-direction in figure)
It is symmetrical.
Micromechanical gyro of the invention may also include along gyro vertical centerline, in the symmetrical drive in driving 1 two sides of frame
Dynamic comb teeth 1-4a and 1-4b.It drives on the outside of the quadrangle of frame 1 also respectively along gyro vertical centerline and horizontal center line, it is symmetrical
There is identical driving detection comb 1-3a, 1-3b, 1-3c and the 1-3d of quantity.Driving detection comb 1-3a and 1-3b are distributed in driving
The two sides comb teeth 1-4a, driving detection comb 1-3c and 1-3d are distributed in the two sides driving comb 1-4b.In this way, material temperature can be reduced
Coefficient mismatches bring change of sensitivity.
When the angular speed input along gyroscopic plane normal direction, the shape of the low-temperature coefficient micromechanical gyro detection loop
State is as follows: detection block can generate the resonance along detection direction due to coriolis effect.By taking a cycle as an example, illustrate in detection block
Detection comb signal intensity, detection comb 3-2a and 3-2c quantity is identical, contrary, and with detection comb 3-2b and 3-
2d is contrary, and when detection block moves up, detection comb 3-2a and 3-2c comb teeth gap becomes larger, and capacitor becomes smaller, and detects simultaneously
Comb teeth 3-2b and 3-2d comb teeth gap becomes smaller, and capacitor becomes larger, detection comb 3-2a and the 3-2c comb teeth when detection block moves down
Gap becomes smaller, and capacitor becomes larger, while the gap detection comb 3-2b and 3-2d becomes larger, and capacitor becomes smaller.
The angle rate signal of the final low-temperature coefficient micromechanical gyro output is detection comb 3-2a and 3-2c
Detect the detection signal subtraction of signal and detection comb 3-2b and 3-2d.When the variation of ambient temperature locating for the micromechanical gyro,
Detection comb 3-2a and the gap 3-2b, 3-2c variation tendency will test comb teeth 3-2a on the contrary, identical as detection comb 3-2d
Signal be added with 3-2c, the signal that will test comb teeth 3-2b is added with 3-2d, and subtract each other can will be outer for the result that will add up
Influence of boundary's temperature change to the low-temperature coefficient micromechanical gyro is largely offset.
Above by taking 2 groups of detection combs as an example, the structure of low-temperature coefficient micromechanical gyro of the invention is illustrated.But,
Two integral multiple that the group number of comb teeth continues to increase under its area allowed band from two groups, increased detection comb can be will test
Tooth group is symmetrical continuously along Y-direction.Detection comb group number is more, and gyro temperature coefficient is lower, and performance is better, but gyro needs
Area it is bigger, technique require it is higher, it is generally preferable to organize number be 2 groups or 4 groups.
Claims (3)
1. a kind of micromechanical gyro of low-temperature coefficient, the gyro includes to drive frame (1), mass block (2) and detection block (3),
Driving frame (1) is coupled by spring beam (1-1a, 1-1b, 1-1c, 1-1d) with extraneous anchor point (1-2a, 1-2b, 1-2c, 1-2d),
Driving frame (1) is coupled with mass block (2) by external detection folded beam (2-1a, 2-1b, 2-1c, 2-1d), mass block (2) and inspection
It surveys frame (3) to be coupled by internal drive folded beam (2-2a, 2-2b, 2-2c, 2-2d), detection block (3) passes through interior with internal anchor point
Portion's folded beam (3-1a, 3-1b, 3-1c, 3-1d) is coupled,
Wherein inside detection block along gyro-level center line, it is symmetrically distributed with N group detection comb, the positive integer times that N is 2, often
Group detection comb is identical, identical by two pairs of quantity, contrary detection comb composition.
2. micromechanical gyro as described in claim 1, wherein the N group detection comb is 2 groups.
3. micromechanical gyro as described in claim 1 further includes being symmetrically distributed in driving frame (1) along gyro vertical centerline
The driving comb (1-4a) of two sides and (1-4b), driving comb (1-4a) and (1-4b) are both with respect to gyro-level center line pair
Claim, drives the quadrangle of frame (1) also respectively along gyro vertical centerline and horizontal center line, be symmetrically distributed with the identical driving of quantity
Detection comb (1-3a), (1-3b), (1-3c) and (1-3d).
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| CN201811581806.9A CN109540118A (en) | 2018-12-24 | 2018-12-24 | A kind of micromechanical gyro of low-temperature coefficient |
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| CN201811581806.9A CN109540118A (en) | 2018-12-24 | 2018-12-24 | A kind of micromechanical gyro of low-temperature coefficient |
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Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101666813A (en) * | 2008-09-05 | 2010-03-10 | 财团法人工业技术研究院 | Multi-axis capacitive accelerometer |
| CN101876547A (en) * | 2009-12-08 | 2010-11-03 | 北京大学 | Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver |
| CN201852851U (en) * | 2010-05-28 | 2011-06-01 | 南京理工大学 | Framework type capacitance silicon micromechanical accelerometer |
| CN102435185A (en) * | 2011-09-01 | 2012-05-02 | 中国航空工业第六一八研究所 | Internal and external truss type three-frame micro-mechanical gyro structure |
| CN102645211A (en) * | 2012-04-25 | 2012-08-22 | 哈尔滨工程大学 | Four-degree-of-freedom micromechanical gyroscope |
| CN106342180B (en) * | 2007-12-25 | 2013-01-16 | 西北工业大学 | Full slide-film damping capacitive micro mechinery gyroscope |
| US20130256814A1 (en) * | 2012-04-02 | 2013-10-03 | Seiko Epson Corporation | Physical quantity sensor and electronic apparatus |
| CN103954795A (en) * | 2014-04-30 | 2014-07-30 | 中国科学院地质与地球物理研究所 | MEMS accelerometer capable of being engineered |
| CN103954793A (en) * | 2014-04-30 | 2014-07-30 | 中国科学院地质与地球物理研究所 | MEMS accelerometer |
| CN105466406A (en) * | 2015-12-28 | 2016-04-06 | 南京理工大学 | Silicon micromechanical vibrating gyroscope of I-shaped structure |
| CN106030314A (en) * | 2014-02-19 | 2016-10-12 | 大西洋惯性系统有限公司 | Accelerometers |
| CN107271722A (en) * | 2017-07-19 | 2017-10-20 | 深迪半导体(上海)有限公司 | A kind of three axle capacitive accelerometers |
| CN107289920A (en) * | 2017-05-10 | 2017-10-24 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of direct-coupled four masses micromechanical gyro of angular speed sensitive direction |
| CN108020687A (en) * | 2018-02-06 | 2018-05-11 | 深迪半导体(上海)有限公司 | A kind of mems accelerometer |
-
2018
- 2018-12-24 CN CN201811581806.9A patent/CN109540118A/en active Pending
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106342180B (en) * | 2007-12-25 | 2013-01-16 | 西北工业大学 | Full slide-film damping capacitive micro mechinery gyroscope |
| CN101666813A (en) * | 2008-09-05 | 2010-03-10 | 财团法人工业技术研究院 | Multi-axis capacitive accelerometer |
| CN101876547A (en) * | 2009-12-08 | 2010-11-03 | 北京大学 | Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver |
| CN201852851U (en) * | 2010-05-28 | 2011-06-01 | 南京理工大学 | Framework type capacitance silicon micromechanical accelerometer |
| CN102435185A (en) * | 2011-09-01 | 2012-05-02 | 中国航空工业第六一八研究所 | Internal and external truss type three-frame micro-mechanical gyro structure |
| US20130256814A1 (en) * | 2012-04-02 | 2013-10-03 | Seiko Epson Corporation | Physical quantity sensor and electronic apparatus |
| CN102645211A (en) * | 2012-04-25 | 2012-08-22 | 哈尔滨工程大学 | Four-degree-of-freedom micromechanical gyroscope |
| CN106030314A (en) * | 2014-02-19 | 2016-10-12 | 大西洋惯性系统有限公司 | Accelerometers |
| CN103954795A (en) * | 2014-04-30 | 2014-07-30 | 中国科学院地质与地球物理研究所 | MEMS accelerometer capable of being engineered |
| CN103954793A (en) * | 2014-04-30 | 2014-07-30 | 中国科学院地质与地球物理研究所 | MEMS accelerometer |
| CN105466406A (en) * | 2015-12-28 | 2016-04-06 | 南京理工大学 | Silicon micromechanical vibrating gyroscope of I-shaped structure |
| CN107289920A (en) * | 2017-05-10 | 2017-10-24 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of direct-coupled four masses micromechanical gyro of angular speed sensitive direction |
| CN107271722A (en) * | 2017-07-19 | 2017-10-20 | 深迪半导体(上海)有限公司 | A kind of three axle capacitive accelerometers |
| CN108020687A (en) * | 2018-02-06 | 2018-05-11 | 深迪半导体(上海)有限公司 | A kind of mems accelerometer |
Non-Patent Citations (1)
| Title |
|---|
| 李青松: "单片三轴微加速度计结构设计与加工工艺优化", 《中国优秀博硕士学位论文全文数据库(硕士) 工程科技Ⅱ辑》 * |
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Application publication date: 20190329 |