CN107782297B

CN107782297B - Triaxial MEMS gyroscope

Info

Publication number: CN107782297B
Application number: CN201610744554.1A
Authority: CN
Inventors: 邹波; 王辉; 郑青龙
Original assignee: Shendi Semiconductor Shaoxing Co ltd
Current assignee: Shendi Semiconductor Shaoxing Co ltd
Priority date: 2016-08-27
Filing date: 2016-08-27
Publication date: 2023-08-18
Anticipated expiration: 2036-08-27
Also published as: CN107782297A

Abstract

The invention discloses a triaxial MEMS gyroscope which comprises YZ axis detection parts symmetrically arranged on two sides of an X axis detection part and positioned in the X axis direction, wherein the two YZ axis detection parts are connected with the X axis detection part through a plurality of connecting beams. According to the triaxial MEMS gyroscope, angular velocity detection on the X axis, the Y axis and the Z axis can be realized by using one set of driving component, so that the internal space of the gyroscope is saved, and the cost is reduced.

Description

Triaxial MEMS gyroscope

Technical Field

The invention relates to the technical field of MEMS gyroscopes, in particular to a triaxial MEMS gyroscope.

Background

With the gradual development of portability and portability of various consumer electronics, the market demands for smaller gyroscope chips are becoming more stringent.

For MEMS technology that is already known in the market today, gyroscopes, for example made of semiconductor materials, have been obtained with this technology; at present, the MEMS gyroscope facing the market in China is mainly a capacitive resonance gyroscope, namely, a capacitive mechanical structure is driven to enable a mass block to vibrate in a driving mode, and capacitance change caused by movement of the mass block in a detection direction due to Coriolis force is detected through a detection capacitor.

In the prior art, the mechanical part of the tri-axial gyroscope is composed of three independent X, Y and Z-single-axis gyroscopes, each single-axis gyroscope structure needs to include an independent mass block, a driving structure and a detecting structure, and three independent driving circuits need to be adopted in a corresponding ASIC circuit to drive respectively, so that the size of the final gyroscope chip is large.

Disclosure of Invention

The invention aims to provide a triaxial MEMS gyroscope which can solve the problems of larger volume and higher cost.

In order to achieve the above purpose, the invention provides a triaxial MEMS gyroscope, which comprises YZ axis detection parts symmetrically arranged at two sides of an X axis detection part and positioned in the X axis direction, wherein the two YZ axis detection parts are connected with the X axis detection part through a plurality of connecting beams.

Compared with the background art, the triaxial MEMS gyroscope mainly comprises an X-axis detection part and two YZ-axis detection parts; the X-axis detection parts are arranged in the center of the structure and are symmetrically distributed on the Y-axis, and the two YZ-axis detection parts are symmetrically arranged on the left side and the right side of the X-axis detection part; the core of the invention is that a plurality of connecting beams are utilized to connect one X-axis detection part with two YZ-axis detection parts; that is, the YZ axis detecting section on the left side of the X axis detecting section is connected to the X axis detecting section by the connecting beam, and the YZ axis detecting section on the right side of the X axis detecting section is connected to the X axis detecting section, so that when the gyroscope has a rotational angular velocity in the X axis, in the Y axis, or in the Z axis direction, the X axis detecting section and the two YZ axis detecting sections can generate corresponding motions so as to detect the magnitude of the X axis, the Y axis, or the Z axis angular velocity; by adopting the arrangement mode, the angular velocity detection of the X axis, the Y axis and the Z axis can be realized by using one set of driving component, so that the internal space of the gyroscope is saved, and the cost is reduced.

Preferably, the connecting beam comprises two connecting spring beams and a connecting rigid beam positioned between the two connecting spring beams; the two connecting spring beams are respectively connected with the X-axis detection part and the YZ-axis detection part.

Preferably, the connecting rigid beams are uniformly distributed on the outer side of the X-axis detection part.

Preferably, the two connecting spring beams are respectively matched with grooves of the X-axis detection part and the YZ-axis detection part.

Preferably, the X-axis detection part comprises a first mass block and a second mass block which are symmetrically arranged on a Y-axis perpendicular to the X-axis direction and are connected with each other, and the first mass block is positioned above the second mass block; the first YZ-axis detection part positioned at the left side of the X-axis detection part comprises a third mass block; the second YZ-axis detection part positioned on the right side of the X-axis detection part comprises a fourth mass block; the third mass block and the fourth mass block are respectively connected with the first mass block and the second mass block through two connecting beams.

Preferably, the two YZ axis detecting units, the X axis detecting unit, and the plurality of connecting beams are vertically and laterally symmetrical with respect to a horizontal center line and a vertical center line of the X axis detecting unit, respectively.

Preferably, the method further comprises:

a drive capacitor for providing an alternating voltage to effect movement of the four masses;

an X-axis detection capacitor for detecting the X-axis angular velocity,

y-axis detection capacitor and Y-axis detection capacitor for detecting the Y-axis angular velocity

And the Z-axis detection capacitor is used for detecting the Z-axis angular speed.

Preferably, the method further comprises:

and the driving detection capacitor is used for calibrating the driving amplitude of the driving capacitor.

Preferably, the driving capacitor and the X-axis detection capacitor are vertically symmetrically arranged on the X-axis detection part; the Y-axis detection capacitor and the Z-axis detection capacitor are arranged on the two YZ-axis detection parts.

Preferably, the driving detection capacitor is provided in the YZ axis detection unit in bilateral symmetry.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a triaxial MEMS gyroscope according to an embodiment of the present invention;

FIG. 2 is a schematic diagram of the tri-axis MEMS gyroscope of FIG. 1 under the action of a drive capacitance;

FIG. 3 is a schematic diagram of the three-axis MEMS gyroscope of FIG. 1 for detecting the X-axis;

FIG. 4 is a schematic diagram of the three-axis MEMS gyroscope of FIG. 1 for detecting the Y-axis;

fig. 5 is a schematic diagram of the three-axis MEMS gyroscope of fig. 1 when detecting the Z-axis.

Wherein:

1-X axis detection part, 21-first YZ axis detection part, 22-second YZ axis detection part, 3-connecting spring beam, 31-328-first spring Liangdi twenty-eight spring beam, 4-connecting rigid beam, 41-middle rigid beam, 42-outer rigid beam, 10-first mass block, 20-second mass block, 30-third mass block, 40-fourth mass block, 91-first anchor point, 92-second anchor point, 93-third anchor point, 94-fourth anchor point, 95-fifth anchor point, 96-sixth anchor point, 97-seventh anchor point, 98-eighth anchor point, and 51-514-first electrode to fourteenth electrode.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

The present invention will be further described in detail below with reference to the drawings and detailed description for the purpose of enabling those skilled in the art to better understand the aspects of the present invention.

Referring to fig. 1 to 5, fig. 1 is a schematic structural diagram of a tri-axial MEMS gyroscope according to an embodiment of the present invention; FIG. 2 is a schematic diagram of the tri-axis MEMS gyroscope of FIG. 1 under the action of a drive capacitance; FIG. 3 is a schematic diagram of the three-axis MEMS gyroscope of FIG. 1 for detecting the X-axis; FIG. 4 is a schematic diagram of the three-axis MEMS gyroscope of FIG. 1 for detecting the Y-axis; fig. 5 is a schematic diagram of the three-axis MEMS gyroscope of fig. 1 when detecting the Z-axis.

The triaxial MEMS gyroscope provided by the invention comprises an X-axis detection part 1 and two YZ-axis detection parts; the present invention defines directions along the left and right sides of the X-axis detection unit 1 as X-axis directions, and two YZ-axis detection units are located in the X-axis directions, and the two YZ-axis detection units are located on the left and right sides of the X-axis detection unit 1, respectively.

As shown in fig. 1 of the specification, a YZ axis detecting unit on the left side of the X axis detecting unit 1 may be defined as a first YZ axis detecting unit 21, and a second YZ axis detecting unit 22 is located on the right side of the X axis detecting unit 1; the first YZ axis detector 21 and the second YZ axis detector 22 are symmetrically disposed on both sides of the X axis detector 1.

The first YZ axis detecting unit 21 and the second YZ axis detecting unit 22 have the same shape and structure, and the first YZ axis detecting unit 21 and the X axis detecting unit 1 and the second YZ axis detecting unit 22 and the X axis detecting unit 1 are connected by a plurality of connecting beams.

Under the action of the connecting beam, the first YZ axis detecting unit 21, the second YZ axis detecting unit 22 and the X axis detecting unit 1 are connected with each other, and if any one of the three gyroscopes is disturbed, the other two gyroscopes can move along with the disturbance, so as to realize the function of detecting the angular velocities of the X axis, the Y axis and the Z axis.

The invention gives a preferred way to the specific shape of the connecting beam; the connecting beam mainly comprises two connecting spring beams 3 and a connecting rigid beam 4, wherein the connecting rigid beam 4 is positioned between the two connecting spring beams 3, and the two connecting spring beams 3 are respectively connected with an X-axis detection part and a YZ-axis detection part, as shown in the attached figure 1 of the specification.

In the connection mode of the first YZ axis detecting unit 21 and the X axis detecting unit 1, the first YZ axis detecting unit 21 and the X axis detecting unit 1 are connected by a connecting beam, and two connecting spring beams 3 of the connecting beam are respectively fixed on the first YZ axis detecting unit 21 and the X axis detecting unit 1, and the connecting rigid beam 4 is in a suspended state. Similarly, the second YZ axis detecting unit 22 and the X axis detecting unit 1 are connected by a connecting beam, and will not be described here.

As shown in fig. 1 of the specification, the present invention preferably distributes the connecting rigid beams 4 uniformly on the outer side of the X-axis detecting section 1; the connecting rigid beam 4 is vertically and laterally symmetrical by taking the horizontal central line and the vertical central line of the X-axis detection part 1 as axes; that is, when the horizontal center line of the X-axis detecting section 1 is taken as the axis, the twenty-first spring beam 321 and the twenty-third spring beam 323 are located above the horizontal center line, the twenty-second spring beam 322 and the twenty-fourth spring beam 324 are located below the horizontal center line, and when the vertical center line of the X-axis detecting section 1 is taken as the axis, the 321 and 322 are located on the left of the vertical center line, and the 323 and 324 are located on the right of the vertical center line, the arrangement is such that the plurality of connection rigid beams 4 are symmetrically distributed in the X-axis detecting section 1, which contributes to the improvement of the detection accuracy of the triaxial MEMS gyroscope.

In the invention, as for the arrangement mode of the connecting spring beam 3 and the X-axis detection part 1 and the YZ-axis detection part, grooves are arranged in the X-axis detection part 1 and the YZ-axis detection part, the grooves can be used for the connecting spring beam 3 to extend into and be connected with the grooves, and the grooves and the connecting spring beam 3 matched with the grooves are also vertically and horizontally symmetrical by taking the horizontal central line and the vertical central line of the X-axis detection part 1 as axes, so that the vertical and horizontal symmetry of the triaxial MEMS gyroscope is realized.

The present invention gives the following examples for the mass blocks of the two YZ axis detecting sections 21 and the X axis detecting section 1; the X-axis detection part 1 comprises a first mass block 10 and a second mass block 20 which are positioned on the Y-axis, the first mass block 10 and the second mass block 20 are connected with each other, and the first mass block 10 is positioned above the second mass block 20; the first YZ axis detecting section 21 located on the left side of the X axis detecting section 1 includes a third mass 30; the second YZ axis detector 22, which is located on the right side of the X axis detector 1, includes a fourth mass 40; and the third mass 30 and the fourth mass 40 are respectively connected with the first mass 10 and the second mass 20 through two connecting beams, as shown in fig. 1 of the specification.

Gaps are provided between the first YZ axis detection unit 21 and the X axis detection unit 1 and between the second YZ axis detection unit 22 and the X axis detection unit 1; a first anchor point 91 is arranged in the gap between the third mass 30 and the first mass 10, and the first anchor point 91 is connected with a ninth spring beam 309, the ninth spring beam 309 is also connected with the connecting rigid beam 4 on that side; similarly, a second anchor 92 is provided in the gap between the third mass 30 and the second mass 20, and the second anchor 92 is connected to a tenth spring beam 310, the tenth spring beam 310 also being connected to the connecting rigid beam 4 of that side. A third anchor point 93 is arranged in the gap between the fourth mass 40 and the first mass 10, and the third anchor point 93 is connected with an eleventh spring beam 311, and the eleventh spring beam 311 is also connected with the connecting rigid beam 4 at the side; a fourth anchor 94 is provided in the gap between the fourth mass 40 and the second mass 20, and the fourth anchor 94 is connected to the twelfth spring beam 312, the twelfth spring beam 312 being further connected to the connecting rigid beam 4 of that side.

As shown in fig. 1 of the specification, the triaxial MEMS gyroscope of the present invention includes 4 masses in total, and two YZ axis detecting portions are symmetrically disposed in a left-right direction and a top-bottom direction with respect to the X axis detecting portion 1. The three-axis MEMS gyroscope is provided with 6 rigid beams, namely a middle rigid beam 41, an outer rigid beam 42 and four connecting rigid beams 4. The middle rigid beam 41 is positioned at the center of the triaxial MEMS gyroscope, can be H-shaped as shown in the attached figure 1 of the specification, and is symmetrically arranged up and down and left and right; the four ends of the middle rigid beam 41 are respectively connected with a thirteenth spring beam 313, a fourteenth spring beam 314, a fifteenth spring beam 315 and a sixteenth spring beam 316, and the thirteenth spring beam 313 and the fifteenth spring beam 315 are connected with the first mass block 10, and the fourteenth spring beam 314 and the sixteenth spring beam 316 are connected with the second mass block 20, so that the connection between the first mass block 10 and the second mass block 20 is realized; in addition, twenty-first, twenty-second, twenty-third, and twenty-fourth spring beams 321, 322, 323, and 324 are provided between the first and second masses 10 and 20.

The outer rigid beams 42 are disposed at the outermost sides, and may be configured in a rectangular shape, which are connected to the first, second, third, fourth, twenty-seventh, and twenty-eighth spring beams 31, 32, 33, 34, 327, and 328, respectively, thereby forming an outer frame of the tri-axis MEMS gyroscope.

Fifth anchor points 95 and sixth anchor points 96 can also be arranged on the left and right sides of the horizontal center line of the H-shaped middle rigid beam 41, the fifth anchor points 95 are connected with the middle rigid beam 41 through twenty-fifth spring beams 325, and the sixth anchor points 96 are connected with the middle rigid beam 41 through twenty-sixth spring beams 326. And the seventh anchor point 97 and the eighth anchor point 98 are symmetrically arranged on the upper side and the lower side of the H-shaped middle rigid beam 41, the seventh anchor point 97 is connected with the outer rigid beam 42 through a twenty-seventh spring beam 327, and the eighth anchor point 98 is connected with the outer rigid beam 42 through a twenty-eighth spring beam 328.

The first, second, third and fourth spring beams 31, 32, 33 and 34 shown in fig. 1 are respectively disposed in the left and right side frames of the outer rigid beam 42; wherein, the first spring beam 31 and the second spring beam 32 are respectively connected to the upper and lower sides of the third mass block 30; the third spring beam 33 and the fourth spring beam 34 are connected to the upper and lower sides of the fourth mass 40, respectively, and the outer rigid beams 42 are spaced apart from the first mass 10, the second mass 20, the third mass 30 and the fourth mass 40.

The triaxial MEMS gyroscope of the present invention is provided with twenty spring beams, namely, a first spring beam 31, a second spring beam 32, a third spring beam 33, a fourth spring beam 34, a ninth spring beam 39, a tenth spring beam 310, an eleventh spring beam 311, a twelfth spring beam 312, a thirteenth spring beam 313, a fourteenth spring beam 314, a fifteenth spring beam 315, a sixteenth spring beam 316, a twenty-first spring beam 321, a twenty-second spring beam 322, a twenty-third spring beam 323, a twenty-fourth spring beam 324, a twenty-fifth spring beam 325, a twenty-sixth spring beam 326, a twenty-seventh spring beam 327, a twenty-eighth spring beam 328, and 8 connecting spring beams 3.

The triaxial MEMS gyroscope is also provided with 8 anchor points; a first anchor 91, a second anchor 92, a third anchor 93, a fourth anchor 94, a fifth anchor 95, a sixth anchor 96, a seventh anchor 97, and an eighth anchor 98.

It should be noted that, through the arrangement shown in fig. 1 of the specification, a person skilled in the art can know the shape and configuration of the triaxial MEMS gyroscope according to the present invention, so the arrangement of the twenty-eight spring beams and the 8 anchor points is not repeated herein. Of course, to ensure proper operation of the tri-axis MEMS gyroscope of the present invention, the components described above may be arranged in other ways than that shown in fig. 1.

The triaxial MEMS gyroscope shown in the attached figure 1 of the specification is preferably adopted, and as can be seen, the YZ axis detection part, the X axis detection part 1 and the connecting beams are respectively symmetrical up and down and left and right by taking the horizontal central line and the vertical central line of the X axis detection part 1 as axes, so that structural symmetry of the triaxial MEMS gyroscope is realized, and the service performance of the triaxial MEMS gyroscope is improved.

The triaxial MEMS gyroscope also comprises a driving capacitor, an X-axis detection capacitor, a Y-axis detection capacitor and a Z-axis detection capacitor, which are shown in the attached figure 1 of the specification.

In the invention, all the capacitors are composed of a movable part and a detection part; the driving capacitor (including the first driving capacitor and the second driving capacitor), the driving detection capacitor (including the first driving detection capacitor and the second driving detection capacitor), the movable part and the detection part of the Z-axis detection capacitor (including the first Z-axis detection capacitor and the second Z-axis detection capacitor), and the four mass blocks are located on the same plane and are made of the same layer of material.

The movable part of the X-axis detection capacitor (comprising a first X-axis detection capacitor and a second X-axis detection capacitor) and the movable part of the Y-axis detection capacitor (comprising a first Y-axis detection capacitor and a second Y-axis detection capacitor) are formed by the four mass blocks, and the detection part is formed by patterning another layer of material which is positioned at a distance of 1-3um from the material layer where the four mass blocks are positioned.

The three-axis MEMS gyroscope comprises 14 electrodes, which are respectively 51-514; all electrodes are stationary and form 14 capacitances with the movable parts of the gyroscope. The 14 capacitors can be divided into 10 groups, namely a first driving capacitor and a second driving capacitor, a first driving detection capacitor and a second driving detection capacitor, a first X-axis detection capacitor and a second X-axis detection capacitor, a first Y-axis detection capacitor, a second Y-axis detection capacitor, a first Z-axis detection capacitor and a second Z-axis detection capacitor. The above mentioned 4 masses, all connected stiff beams, middle stiff beam 41, outer stiff beams 42, all connected spring beams, all spring beams and all anchor points, form the movable part of the tri-axial MEMS gyroscope as a whole.

Wherein a first driving capacitance is formed between the seventh electrode 57, the eighth electrode 58, and the movable member; the second driving capacitance is formed between the ninth electrode 59, the tenth electrode 510, and the movable member.

The first drive detection capacitance is formed between the fifth electrode 55 and the movable member; the second drive detection capacitance is formed between the sixth electrode 56 and the movable member.

The first X-axis detection capacitance is formed between the eleventh electrode 511 and the movable member; the second X-axis detection capacitance is formed between the twelfth electrode 512 and the movable member.

The first Y-axis detection capacitance is formed between the thirteenth electrode 513 and the movable member; the first Y-axis detection capacitance is formed between the fourteenth electrode 514 and the movable member.

The first Z-axis detection capacitance is formed between the first electrode 51, the fourth electrode 54, and the movable member; the first Z-axis detection capacitance is formed between the second electrode 52, the third electrode 53, and the movable member.

As shown in fig. 1 of the specification, the driving capacitor and the X-axis detection capacitor are vertically symmetrically arranged on the X-axis detection part; the Y-axis detection capacitor and the Z-axis detection capacitor are arranged on the two YZ-axis detection parts. The drive detection capacitor may be provided in the YZ axis detection unit in bilateral symmetry.

As shown in fig. 2 of the specification, when the triaxial MEMS gyroscope is driven by the driving capacitor, an alternating electrostatic force is generated when alternating voltages with opposite directions are applied to two ends of the first driving capacitor and the second driving capacitor, so that the first mass block 10 and the second mass block 20 can reciprocate along the Y axis. Meanwhile, since the third and fourth masses 30 and 40 are connected to the first and second masses 10 and 20, respectively, through connection beams, they transmit their motion to the past, resulting in the reciprocating motion of the third and fourth masses 30 and 40 along the X-axis. In order to accurately control the driving amplitude, the invention structurally needs a first driving detection capacitor and a second driving detection capacitor to calibrate the driving amplitude.

When the triaxial MEMS gyroscope detects the X axis, the X axis is shown in the figure 3 of the specification; when the angular velocity of the X axis is input, the first mass block 10 and the second mass block 20 which do reciprocating motion along the Y axis can receive the Coriolis force along the Z axis direction; therefore, the first mass block 10 and the second mass block 20 do reciprocating motion along the Z axis, the periodic variation of the first X axis detection capacitance and the second X axis detection capacitance is realized, the variation of the two capacitances can be detected through a subsequent circuit, and the magnitude of the input X axis angular velocity can be obtained.

When the three-axis MEMS gyroscope detects the Y axis, the Y axis is shown in figure 4 of the specification; when the Y-axis angular velocity is input, the third mass block 30 and the fourth mass block 40 of the mass block which do reciprocating motion along the X-axis can receive the Coriolis force along the Z-axis direction, so that the third mass block 30 and the fourth mass block 40 of the mass block do reciprocating motion along the Z-axis, the first Y-axis detection capacitor and the second Y-axis detection capacitor corresponding to the first mass block 30 and the fourth mass block can generate periodic variation, and the subsequent circuit can detect the variation of the two capacitors, so that the magnitude of the input Y-axis angular velocity can be known.

When the triaxial MEMS gyroscope detects the Z axis, the Z axis is detected as shown in the figure 5 of the specification; when the angular velocity of the Z axis is input, the third mass block 30 and the fourth mass block 40 of the mass block which do reciprocating motion along the X axis can receive the Coriolis force along the Y axis direction, so that the third mass block 30 and the fourth mass block 40 of the mass block do reciprocating motion along the Y axis, the first Z axis detection capacitance and the second Z axis detection capacitance corresponding to the first mass block 30 and the fourth mass block can generate periodic variation, and the subsequent circuit can detect the variation of the two capacitances to know the magnitude of the angular velocity of the input Z axis.

According to the triaxial MEMS gyroscope provided by the invention, the mass blocks of the two shafts are connected, so that the driving of the two shafts can be realized only by one set of driving capacitor (the first driving capacitor and the second driving capacitor) and one set of driving detection capacitor (the first driving detection capacitor and the second driving detection capacitor). This saves two sets of drive capacitors and two sets of drive sense capacitors compared to a conventional discrete mass tri-axis gyroscope. The triaxial MEMS gyroscope shares the detection mass blocks of the X axis and the Z axis, improves the utilization efficiency of the mass and improves the sensitivity, thereby saving the area of the gyroscope and reducing the cost.

It should be noted that in this specification relational terms such as first and second are used solely to distinguish one entity from another entity without necessarily requiring or implying any actual such relationship or order between such entities.

The triaxial MEMS gyroscope provided by the invention is described in detail above. The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the method of the present invention and its core ideas. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the invention can be made without departing from the principles of the invention and these modifications and adaptations are intended to be within the scope of the invention as defined in the following claims.

Claims

1. The triaxial MEMS gyroscope is characterized by comprising YZ axis detection parts which are symmetrically arranged at two sides of an X axis detection part and positioned in the X axis direction, wherein the two YZ axis detection parts are connected with the X axis detection part through a plurality of connecting beams;

the connecting beam comprises two connecting spring beams and a connecting rigid beam positioned between the two connecting spring beams; the two connecting spring beams are respectively connected with the X-axis detection part and the YZ-axis detection part;

the X-axis detection part comprises a first mass block and a second mass block which are symmetrically arranged on a Y-axis perpendicular to the X-axis direction and are mutually connected, and the first mass block is positioned above the second mass block; the first YZ-axis detection part positioned at the left side of the X-axis detection part comprises a third mass block; the second YZ-axis detection part positioned on the right side of the X-axis detection part comprises a fourth mass block; the third mass block and the fourth mass block are respectively connected with the first mass block and the second mass block through two connecting beams;

further comprises:

an X-axis detection capacitor for detecting an angular velocity of an X-axis,

y-axis detection capacitor and Y-axis detection capacitor for detecting Y-axis angular velocity

A Z-axis detection capacitor for detecting the Z-axis angular velocity;

the driving detection capacitor is used for calibrating the driving amplitude of the driving capacitor, and the driving capacitor and the X-axis detection capacitor are arranged on the X-axis detection part in an up-down symmetrical way; the Y-axis detection capacitor and the Z-axis detection capacitor are arranged on the two YZ-axis detection parts, and the driving detection capacitors are arranged on the YZ-axis detection parts in a bilateral symmetry mode.

2. The tri-axial MEMS gyroscope of claim 1, wherein the connecting rigid beams are evenly distributed outside the X-axis detection portion.

3. The tri-axial MEMS gyroscope of claim 1, wherein two of the connecting spring beams mate with grooves of the X-axis detection portion and the YZ-axis detection portion, respectively.

4. The triaxial MEMS gyroscope according to claim 1, wherein the two YZ axis detecting units, the X axis detecting unit, and the plurality of connecting beams are vertically and laterally symmetrical with respect to a horizontal center line and a vertical center line of the X axis detecting unit, respectively.