CN111024057B - Three-axis MEMS gyroscope - Google Patents
Three-axis MEMS gyroscope Download PDFInfo
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- CN111024057B CN111024057B CN201911390649.8A CN201911390649A CN111024057B CN 111024057 B CN111024057 B CN 111024057B CN 201911390649 A CN201911390649 A CN 201911390649A CN 111024057 B CN111024057 B CN 111024057B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
Abstract
The invention discloses a triaxial MEMS gyroscope, which comprises a substrate, a first detection part and a second detection part, wherein the first detection part is used for detecting the angular velocity around the X direction; the second detection part and the third detection part are symmetrically arranged at two sides of the first detection part, are respectively connected with the first detection part, and are arranged to provide driving forces with opposite directions and can be used for detecting angular velocities around the Y direction and around the Z direction; wherein, the X direction is vertical to the Y direction, and the Z direction is vertical to the X direction and the Y direction; the suspension device is arranged on the outer sides of the first detection part, the second detection part and the third detection part, is connected with the second detection part and the third detection part and is connected with the supporting device to realize the suspension of the suspension device; and the supporting device is fixedly arranged on the substrate. The triaxial MEMS gyroscope has the advantages of simple and compact structure and strong output signal.
Description
Technical Field
The invention relates to the field of MEMS sensors, in particular to an MEMS gyroscope.
Background
The MEMS (Micro-Electro-Mechanical-Systems) technology is developed from the conventional semiconductor processing technology, and the fabrication of a Micro-Mechanical structure and a Micro-Mechanical system is realized by using a semiconductor processing method to realize a specific function, and the minimum typical dimension of the MEMS is generally in the micrometer range. Due to the application of the MEMS technology, related devices are easy to produce in batches, the cost is greatly reduced, market application is popularized, power consumption is reduced, reliability is improved, and further development of the MEMS technology is promoted. Unlike conventional semiconductor processing methods, deep silicon etching may be used in the MEMS processing, for example, the etching depth may reach 100-. Many MEMS devices also require vacuum bonding techniques to increase the Q and protect internal structures, such as MEMS gyroscopes and MEMS oscillators. MEMS materials are also diverse, and may cause metal ion or particle contamination, and some processes need to be isolated separately. Due to the movable structure, the stress problem is the biggest problem of the MEMS device, and the stress problem is prevented and solved through the whole process of design, processing, sealing and testing and application of the MEMS device.
The MEMS gyroscope has a wide range of applications, including inertial navigation, optical anti-shake, panoramic photography, vehicle body stabilization and safety, etc. The core of the commonly known MEMS gyroscope, which is used for detecting angular velocity, is the coriolis force principle, which converts an input angular velocity into a displacement of a specific sensing structure, and determines the magnitude of the angular velocity by detecting the displacement. The MEMS gyroscope belongs to an active device, a system does simple harmonic vibration at a resonance point after being electrified, when angular velocity is input in the direction vertical to the motion direction of the mass block, Cogowski force can be generated in the direction vertical to the motion direction of the mass block and the input angular velocity direction, and the corresponding characterization quantity of the angular velocity can be obtained through the detection structure and the peripheral processing circuit. At present, the most widely applied driving modes are static electricity and piezoelectricity, and the detection modes are capacitance and piezoelectricity. The consumer market is the largest application market of the MEMS gyroscope, the requirements on the price and the performance of the product are also strict, and the development of low-cost, high-performance and high-reliability MEMS gyroscope products, particularly three-axis MEMS gyroscopes, is continuously dedicated in the field, and further integrated with three-axis accelerometers to form a six-axis IMU.
Disclosure of Invention
In view of the market demand and some technical common problems, the invention aims to provide a three-axis MEMS gyroscope which has compact structure, low cost, reduction or elimination of double frequency and strong output signal. The present invention may also solve one or more of the above problems.
To achieve the above object, the present invention provides a three-axis MEMS gyroscope. In one embodiment, the three-axis MEMS gyroscope comprises
A substrate, a first electrode and a second electrode,
a first detection unit for detecting an angular velocity around the X direction;
the second detection part and the third detection part are symmetrically arranged at two sides of the first detection part, are respectively connected with the first detection part, and are arranged to provide driving forces with opposite directions and can be used for detecting angular velocities around the Y direction and around the Z direction; wherein, the X direction is vertical to the Y direction, and the Z direction is vertical to the X direction and the Y direction;
the suspension device is arranged on the outer sides of the first detection part, the second detection part and the third detection part, connected with the second detection part and the third detection part to realize the suspension of the second detection part and the third detection part, and connected with the supporting device to realize the suspension of the suspension device; and
and the supporting device is fixedly arranged on the substrate.
Further, the second detection portion and the third detection portion are connected to the first detection portion by a first spring and a second spring, respectively, which are capable of transmitting the driving force of the second detection portion and the third detection portion to the first detection portion.
Further, the first detection section includes:
the first mass block is connected to a group of anchor points fixed on the substrate through a group of connecting beams, the connecting beams enable the first mass block to rotate around the structural center in an XY plane and rotate close to or far away from the substrate, and the rotation takes the group of connecting beams as an axis; and
the first detection device group is a capacitor group consisting of an electrode arranged on the substrate and a first mass block.
Further, the first mass block has a hole in the middle, and the group of connecting beams are arranged in the hole of the first mass block; the set of connection beams includes: the first connecting beam is arranged along the X direction, the second connecting beam and the third connecting beam are arranged on two sides of the first connecting beam along the Y direction and are connected with the first connecting beam, and the suspension of the first mass block relative to the substrate is realized through the second connecting beam and the third connecting beam.
Further, the second detection section includes:
a first frame;
the second mass block is arranged in the first frame and is connected with the first frame through at least two groups of springs, and the at least two groups of springs have freedom degree in the Y direction;
at least one first drive device arranged inside the second mass;
the second detection device group is arranged inside the second mass block;
the third detection unit includes:
a second frame;
the third mass block is arranged in the second frame and is connected with the second frame through at least two groups of springs, and the at least two groups of springs have freedom degree in the Y direction;
at least one second driving device arranged inside the third mass;
the third detection device group is arranged inside the third mass block;
wherein the at least one first drive device and the at least one second drive device are driven in opposite directions.
Further, the first driving device includes: the first driving structure is used for driving the second detection part to move; and a first drive detection arrangement for detecting a drive amplitude of the first drive arrangement; the second driving device includes: the second driving structure is used for driving the third detection part to move; and a second drive detection arrangement for detecting a drive amplitude of the second drive arrangement; or the first driving device and the second driving device only comprise a group of movable comb tooth groups and fixed comb tooth groups, and the driving detection are realized in a time-sharing multiplexing mode;
the second detection device group and the third detection device group each include:
a Y-direction detection capacitor group for detecting angular velocity around the Y direction, which is composed of an electrode arranged on the substrate, a second mass block and a third mass block, or composed of a comb tooth group arranged on the substrate and a comb tooth group arranged on the second mass block and the third mass block; and
a Z-direction detection capacitor group for detecting angular velocity around the Z direction, which consists of a movable comb tooth group arranged on the second mass block and the third mass block and a fixed comb tooth group connected to the anchor point,
optionally, the Z-direction detection capacitor sets are disposed in the middle or substantially in the middle of the second mass block and the third mass block, and the two Y-direction detection capacitor sets are symmetrically disposed on two sides of the Z-direction detection capacitor set.
Further, the first frame is connected to the suspension means by at least two sets of springs; the second frame is connected to the suspension means by at least two sets of springs; the at least two sets of springs have a degree of freedom in the X direction.
In one embodiment, the support device is a support frame, and the support frame is fixed on the substrate through the anchor points and can not move relative to the substrate;
the suspension device comprises a first suspension arm and a second suspension arm, the first suspension arm is connected to the supporting frame through a first supporting beam, and the second suspension arm is connected to the supporting frame through a second supporting beam, so that the suspension of the suspension device is realized; optionally, the first and second support beams are connected to the middle of the first and second suspension arms, respectively.
Furthermore, two ends of the first suspension arm are respectively connected with the supporting frame through springs; and two ends of the second suspension arm are respectively connected with the supporting frame through springs. Two ends of the first suspension arm and the second suspension arm are connected with the supporting frame through springs, so that Y-direction displacement caused by twisting of the suspension device during driving can be avoided, and the problem of double frequency of the Z axis is reduced.
In one embodiment, the support structure is a first support anchor and a second support anchor affixed to the substrate;
the suspension device comprises a suspension frame, and the suspension frame is connected with the first support anchor point and the second support anchor point through a first support beam and a second support beam respectively.
Optionally, the driving and detecting means is one or more of electrostatic, piezoelectric, piezoresistive, magnetic, and thermal.
The triaxial MEMS gyroscope of the invention has the following advantages:
1) the mass blocks are shared for detecting the angular velocities around the Y direction and the Z direction, and compared with the mass block mode of separating all the axes, the mass of the mass block after sharing is increased, so that the output signal caused by the motion of the mass block is strong, the signal quality of the gyroscope is improved, and the noise can be reduced;
2) the movable comb tooth group of the driving device is connected with the second mass block and the third mass block, so that the mass of the second mass block and the mass of the third mass block are increased, the mass of an output signal is increased, and meanwhile, noise can be reduced;
3) in the case that the supporting device is a supporting frame, the first suspension arm and the second suspension arm which are positioned at the inner side of the supporting frame are connected with the supporting frame through a supporting beam connected in the middle of the suspension arm and are also connected with the supporting frame through springs connected at two ends of the suspension arm, so that the torsion of the suspension device is avoided during driving, the displacement in the Y direction is reduced or avoided, and the problem of double frequency of the Z axis is weakened or prevented;
4) in the case that the supporting device is a supporting anchor point, the number of anchor points is reduced, and the first supporting anchor point and the second supporting anchor point are concentrated on one axis, so that the stress sensitivity is reduced;
5) due to the adoption of the integral structure layout, the MEMS gyroscope has the advantages of compact structure, small integral area and lower production cost.
The conception, the specific structure and the technical effects of the present invention will be further described with reference to the accompanying drawings to fully understand the objects, the features and the effects of the present invention.
Drawings
Fig. 1 is a schematic structural view of a three-axis MEMS gyroscope in embodiment 1 of the present invention;
FIG. 2 is a schematic diagram of the structure of the three-axis MEMS gyroscope of FIG. 1;
fig. 3 is a partial structure enlarged view of a first detection section of the three-axis MEMS gyroscope of fig. 2;
FIG. 4 is an enlarged view of the Z-direction detection capacitor bank of the second detection section of the three-axis MEMS gyroscope of FIG. 2;
fig. 5 is a schematic structural view of a three-axis MEMS gyroscope according to embodiment 2 of the present invention.
Detailed Description
The technical contents of the preferred embodiments of the present invention will be more clearly and easily understood by referring to the drawings attached to the specification. The present invention may be embodied in many different forms of embodiments and the scope of the invention is not limited to the embodiments set forth herein.
The size and thickness of each component shown in the drawings are arbitrarily illustrated, and the present invention is not limited to the size and thickness of each component. The thickness of the components may be exaggerated where appropriate in the figures to improve clarity.
It should be understood that, herein, "connected" may mean that two elements are directly connected or that two elements are indirectly connected through a third element.
Furthermore, the word "comprising" or "comprises" does not exclude the presence of elements or steps not listed. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
As used herein, the terms "first," "second," "third," and the like, are used to modify a corresponding element, and do not by themselves connote any of the ordinal number of the element, nor are they meant to imply any order of departure from one element or method of manufacture, but are used merely to distinguish one element having a certain name from another element having a same name.
Herein, the first detection device group is also referred to as an X-direction detection capacitance group. Z + is the direction facing out of the paper surface, and Z-is the direction facing in the paper surface; y + is up and Y-is down.
Example 1
As shown in fig. 1 to 4, the three-axis MEMS gyroscope of the present embodiment has a centrosymmetric structure, and includes a substrate (not shown), a first detecting portion 10, a second detecting portion 11, a third detecting portion 12, a suspension device 13, and a supporting device 14.
The first detection portion 10 includes a first mass 101 and a first detection device group. Therein, a first detecting device group can be used for detecting angular velocity around the X direction, which includes two X-direction capacitor groups composed of a first electrode 105 and a second electrode 106 disposed on the substrate and the first proof mass 101. The first mass 101 has an oblong configuration, the long side of which extends in the X direction. The first electrode 105 and the second electrode 106 are disposed on the substrate corresponding to both ends of the first proof mass 101 in the length direction.
In other embodiments, the first mass 101 may have other configurations, such as a square.
As shown in fig. 3, a hole is formed in the middle of the first proof mass 101, a set of connecting beams is disposed in the hole, and the first anchor point set and the second anchor point set fixed on the substrate also correspond to the hole. The first proof-mass 101 is fixed to the first and second anchor point groups by the set of connecting beams so that the first proof-mass 101 is suspended and movable with respect to the substrate. The set of connecting beams includes a first connecting beam 102 disposed along the X direction, a second connecting beam 103 and a third connecting beam 104 disposed along the Y direction and orthogonal to the first connecting beam 102. The second connection beam 103 and the third connection beam 104 are located on both sides of the first connection beam 103, the second connection beam 103 is connected to the first anchor point group (specifically, to the connection beam between the first anchor point 161 and the second anchor point 162), and the third connection beam 104 is connected to the second anchor point group (specifically, to the connection beam between the third anchor point 163 and the fourth anchor point 164).
With continued reference to fig. 1 and 2, the second detecting portion 11 and the third detecting portion 12 are symmetrically disposed on both sides of the first detecting portion 10 in the Y direction, and are respectively connected to the first detecting portion 10.
The second detection part 11 includes a first frame 112 disposed at the periphery, a second mass block 111 disposed inside the first frame 112, two first driving devices 113 and 114 disposed inside the second mass block 111, and a second detection device group. The second mass 111 is connected to the first frame 112 by springs connected at or near four corners, which have a degree of freedom in the Y direction, and in this embodiment, are U-shaped springs.
Two first driving devices 113 and 114 are symmetrically arranged on the second mass 111 along the X-direction for driving the second mass to move along the X-direction. Each first drive arrangement comprises a first drive arrangement for providing the drive force and a first drive detection arrangement for detecting the drive amplitude of the first drive arrangement. First drive structure includes the movable broach group of first drive and the fixed broach group of first drive, and first drive detection structure includes that first drive detects movable broach group and the fixed broach group of first drive detection, and fixed broach group is fixed on the anchor point, and movable broach group is fixed to be set up on second quality piece 111. The first drive fixed comb tooth group and the first drive detection fixed comb tooth group are arranged back to back. In some embodiments, each first driving device comprises only one fixed comb-tooth group and only one movable comb-tooth group, and the driving and driving detection functions are realized in a time-sharing multiplexing mode.
In some embodiments, two first driving structures of the two first driving devices may be located at one end of the second mass 111, and two first driving detection devices may be located at the other end of the second mass 111. In some embodiments, the second detection portion may further include only one first driving device, which includes only one first driving structure and one first driving detection structure, the first driving structure is located at one end of the second mass block 111, and the first driving detection structure is symmetrically disposed at the other end of the second mass block 111.
The second detection device group comprises a Z-direction detection capacitor group 115 arranged in the middle of the second mass block 111, and two Y-direction detection capacitor groups formed by a third electrode 116 and a fourth electrode 117 arranged on the substrate and the second mass block 111, wherein the two Y-direction detection capacitor groups are symmetrically arranged relative to the Z-direction detection capacitor group. In this embodiment, the third electrode 116 and the fourth electrode 117 correspond to the middle position of the two long sides of the second mass block 111. In some embodiments, two Y-direction detection capacitor sets may be disposed at other positions of the second mass block 111, or only one Y-direction detection capacitor is disposed. In this embodiment, the Z-direction detection capacitor bank 115 includes a first Z-direction detection capacitor 115a and a second Z-direction detection capacitor 115b that are symmetrically disposed with respect to the X-direction symmetry axis of the first proof mass. The fixed comb teeth group of the Z-direction detection capacitor is fixed on the anchor point, and the movable comb teeth group is fixedly connected to the second mass block 111. The two Z-direction detection capacitors are arranged such that when the second mass block 111 moves upward in the Y-direction, the capacitance value of the first Z-direction detection capacitor 115a becomes large, and the capacitance value of the second Z-direction detection capacitor 115b becomes small. In some embodiments, the capacitance values of the first Z-direction detection capacitor 115a and the second Z-direction detection capacitor 115b may be simultaneously increased or decreased when the first mass moves along the Y-axis direction, or in some embodiments, the Z-direction detection capacitor set 115 includes only one detection capacitor.
The third sensing part 12 has a structure similar to that of the second sensing part 11, and includes a second frame 122 disposed at the periphery, a third mass 121 disposed inside the second frame 122, two second driving devices 123 and 124 disposed inside the third mass 121, and a third sensing device group. The third mass 121 is connected to the second frame 122 by springs connected at or near four corners, which have a degree of freedom in the Y direction, and in some embodiments, may be U-shaped springs. The two second driving devices 123 and 124 are arranged in a similar manner and may be modified in a similar manner to the two first driving devices, and are not described in detail herein.
The third detection device group comprises a Z-direction detection capacitor group 125, and two Y-direction detection capacitor groups consisting of a fifth electrode 126 and a sixth electrode 127 disposed on the substrate, and a third proof mass 121. The two Y-direction detection capacitor groups and the Z-direction detection capacitor group 125 are arranged in a similar manner to the second detection device group, and are not described herein again. In this embodiment, the Z-direction detection capacitor bank 125 includes a third Z-direction detection capacitor 125a and a fourth Z-direction detection capacitor 125b, and the two Z-direction detection capacitors are configured such that when the third mass block 121 moves downward along the Y-direction, the capacitance value of the third Z-direction detection capacitor 125a becomes smaller and the capacitance value of the fourth Z-direction detection capacitor 125b becomes larger.
The first mass 101 is connected to the first frame 111 by a first spring 151 and to the second frame 121 by a second spring 152. And, the connection points of both ends of the first and second springs 151 and 152 to the first mass 101, the first frame 111, and the second frame 121 are all at the middle or substantially the middle of the respective sides. The first spring 151 and the second spring 152 are shaped like an "S", when the first frame 112 and the second frame 122 are driven by the driving device to move, the movement thereof can be transmitted to the first mass 101 through the first spring 151 and the second spring 152, and the first mass 101 is driven to rotate in the XY plane due to the opposite driving directions of the first frame 112 and the second frame 122. In some embodiments, the first spring 151 and the second spring 152 may also have other shapes.
The suspension device 13 includes a first suspension arm 131 and a second suspension arm 132 provided outside the first detecting portion 10, the second detecting portion 11, and the third detecting portion 12. One end of the first frame 112 is connected to the first suspension arm 131 through a seventh spring 157 and an eighth spring 158, and the other end is connected to the second suspension arm 132 through a ninth spring 159 and a tenth spring 1510, the seventh spring 157, the eighth spring 158, the ninth spring 159, and the tenth spring 1510 having a degree of freedom in the X direction. One end of the second frame 122 is connected to the first suspension arm 131 by an eleventh spring 1511 and a twelfth spring 1512, and is connected to the second suspension arm 132 by a thirteenth spring 1513 and a fourteenth spring 1514, and the eleventh spring 1511, the twelfth spring 1512, the thirteenth spring 1513, and the fourteenth spring 1514 have a degree of freedom in the X direction. A first support beam 142 is connected to the middle of the first suspension arm 131, and a second support beam 143 is connected to the middle of the second suspension arm 132.
Under the driving of the two first driving devices 113 and 114 and the two second driving devices 123 and 124, the second mass 111 and the third mass 121 reciprocate in opposite directions along the X direction, and the first frame 112 and the second frame 122 connected to the first mass 111 and the second mass 121 are also driven to reciprocate in opposite directions along the X direction. Meanwhile, the first frame 112 and the second frame 122 respectively drive the first mass block 101 to perform reciprocating rotational motion in the XY plane through the first spring 151 and the second spring 152.
When the three-axis MEMS gyroscope receives an angular velocity in the X direction, the first mass 101, which is originally driven by the driving device to rotate in the XY plane, receives a coriolis force in the Z direction, and a displacement in the Z direction occurs. Specifically, displacement directions of two ends of the first proof mass 101 are opposite, a capacitance formed by the first electrode 105 and one end of the first proof mass 101 and a capacitance formed by the second electrode 106 and the other end of the first proof mass 101 form differential detection, if one end of the first proof mass 101 corresponding to the first electrode 105 moves in a direction away from the first electrode 105, a capacitance value at the first electrode 105 is reduced, and at this time, one end of the first proof mass 101 corresponding to the second electrode 106 moves in a direction approaching the second electrode 106, and a capacitance value at the second electrode 106 is increased. Thereby, the angular velocity around the X direction is detected by the X direction detection capacitor bank.
When the three-axis MEMS gyroscope is subjected to an angular velocity in the Y direction, the second detection unit 11 (the second mass block 111 and the first frame 112) and the third detection unit 12 (the third mass block 121 and the second frame 122) that originally move in the X axis under the drive of the drive device are subjected to a coriolis force in the Z direction, and a displacement in the Z direction occurs. Specifically, the displacement directions of the second detection part 11 and the third detection part 12 in the Z direction are opposite, and the capacitance group formed by the third electrode 116 and the fourth electrode 117 and the second mass block 111 and the capacitance group formed by the fifth electrode 126 and the sixth electrode 127 and the third mass block 121 form differential detection. When the second detection unit 11 moves to Z-, the capacitance values of the third electrode 116 and the fourth electrode 117 increase, and when the third detection unit 12 moves to Z +, the capacitance values of the fifth electrode 126 and the sixth electrode 127 decrease. Thereby, the angular velocity around the Y direction is detected by the Y direction detection capacitance group.
When the three-axis MEMS gyroscope is subjected to an angular velocity in the Z direction, the second detection unit 11 (the second mass block 111 and the first frame 112) and the third detection unit 12 (the third mass block 121 and the second frame 122) that originally move along the X axis under the drive of the drive device are subjected to the coriolis force in the Y direction, and a displacement in the Y direction occurs. Specifically, the displacement directions of the second detection portion 11 and the third detection portion 12 in the Y direction are opposite, and the first Z-direction detection capacitance 115a and the fourth Z-direction detection capacitance 125b form differential detection with the second Z-direction detection capacitance 115b and the third Z-direction detection capacitance 125 a. When the second detection unit 11 moves in the Y + direction and the third detection unit 12 moves in the Y-direction, the capacitance values of the first Z-direction detection capacitor 115a and the fourth Z-direction detection capacitor 125b decrease, and the capacitance values of the second Z-direction detection capacitor 115b and the third Z-direction detection capacitor 125a increase. Thereby, the angular velocity around the X direction is detected by the Z direction detection capacitance.
Example 2
As shown in fig. 5, the three-axis MEMS gyroscope of the present embodiment has a centrosymmetric structure, and includes a substrate (not shown), a first detection unit 20, a second detection unit 21, a third detection unit 22, a suspension device 23, and a support device 24.
The first detection part 20 includes a first mass block 201 and a first detection device group. Among them, the first detecting device group (X-direction capacitor group) can be used to detect the angular velocity around the X-direction, and includes two X-direction capacitor groups composed of the first electrode 205 and the second electrode 206 disposed on the substrate and the first proof mass 201. The first mass 101 has an oblong configuration, the long side of which extends in the X direction. The first electrode 205 and the second electrode 206 are disposed on the substrate corresponding to both ends of the first proof mass 201 in the length direction.
In other embodiments, the first mass 201 may have other configurations, such as a square.
A hole is formed in the middle of the first mass block 201, a group of connecting beams are arranged in the hole, and the first anchor point group and the second anchor point group fixed on the substrate correspond to the hole. The first mass 201 is fixed to the first and second anchor groups through the set of connecting beams so that the first mass 201 is suspended and movable relative to the substrate. The set of connecting beams includes a first connecting beam 202 disposed along the X-direction, a second connecting beam 203 and a third connecting beam 204 disposed along the Y-direction and orthogonal to the first connecting beam 202. The second connection beam 203 and the third connection beam 204 are located on both sides of the first connection beam 203, the second connection beam 203 is connected to the first anchor point group (specifically, to the connection beam between the first anchor point 261 and the second anchor point 262), and the third connection beam 204 is connected to the second anchor point group (specifically, to the connection beam between the third anchor point 263 and the fourth anchor point 264).
The second detecting portion 21 and the third detecting portion 22 are symmetrically disposed on both sides of the first detecting portion 20 in the Y direction, and are connected to the first detecting portion 20, respectively.
The second detection part 21 includes a first frame 212 disposed at the periphery, a second mass 211 disposed inside the first frame 212, two first driving devices 213 and 214 disposed inside the second mass 211, and a second detection device group. The second mass 211 is connected to the first frame 212 by springs connected at or near the four corners, which have a degree of freedom in the Y direction, and in this embodiment, are U-shaped springs.
Two first driving devices 213 and 214 are symmetrically disposed on the second mass 211 along the X direction for driving the movement of the second mass 211 along the X direction. Each first drive arrangement comprises a first drive arrangement for providing the drive force and a first drive detection arrangement for detecting the drive amplitude of the first drive arrangement. First drive structure includes the movable broach group of first drive and the fixed broach group of first drive, and first drive detection structure includes that first drive detects movable broach group and the fixed broach group of first drive detection, and fixed broach group is fixed on the anchor point, and movable broach group is fixed to be set up on second quality piece 211. The first drive fixed comb tooth group and the first drive detection fixed comb tooth group are arranged back to back. In some embodiments, each first driving device only comprises a group of fixed comb teeth groups and a group of movable comb teeth groups, and the driving and driving detection functions are realized in a time-sharing multiplexing mode
In some embodiments, two first driving structures may be located at one end of the second mass 211, and two first driving detection devices may be symmetrically disposed at the other end of the second mass 211. In some embodiments, the second detection portion may further include only one first driving device, which includes only one first driving structure and one first driving detection structure, the first driving structure is located at one end of the second mass 211, and the first driving detection structure is symmetrically disposed at the other end of the second mass 211.
The second detection device group comprises a Z-direction detection capacitor group 215 arranged in the middle of the second mass block 211, and two Y-direction detection capacitor groups formed by a third electrode 216 and a fourth electrode 217 arranged on the substrate and the second mass block 211, wherein the two Y-direction detection capacitor groups are symmetrically arranged relative to the Z-direction detection capacitor group. In this embodiment, the third electrode 216 and the fourth electrode 217 correspond to the middle position of the two long sides of the second proof mass 211. In some embodiments, two Y-direction detection capacitor sets may be disposed at other positions of the second mass block 211, or only one Y-direction detection capacitor is disposed. In this embodiment, the Z-direction detection capacitor bank 215 includes a first Z-direction detection capacitor 215a and a second Z-direction detection capacitor 215b that are symmetrically disposed with respect to the X-direction symmetry axis of the first proof mass. The fixed comb teeth group of the Z-direction detection capacitor is fixed on the anchor point, and the movable comb teeth group is fixedly connected to the second mass block 211. The two Z-direction detection capacitors are arranged such that when the second mass block 211 moves upward in the Y-direction, the capacitance value of the first Z-direction detection capacitor 215a becomes larger, and the capacitance value of the second Z-direction detection capacitor 215b becomes smaller. In some embodiments, the capacitance values of the first Z-direction sensing capacitor 215a and the second Z-direction sensing capacitor 215b may be simultaneously increased or decreased when the first proof mass moves along the Y-axis direction, or in some embodiments, the Z-direction sensing capacitor set 115 includes only one sensing capacitor.
The third detection part 22 has a structure similar to that of the second detection part 21, and includes a second frame 222 disposed at the periphery, a third proof mass 221 disposed inside the second frame 222, two second driving devices 223 and 224 disposed inside the third proof mass 221, and a third detection device group. The third mass 221 is connected to the second frame 222 by springs connected at or near four corners, which have a degree of freedom in the Y-direction, which in some embodiments may be U-shaped springs. The two second driving devices 223 and 224 are arranged in a similar manner and may be modified in a similar manner to the two first driving devices, and are not described in detail here.
The third detection device group includes a Z-direction detection capacitance group 225, and two Y-direction detection capacitance groups composed of fifth and sixth electrodes 226 and 227 provided on the substrate and the third proof mass 221. The arrangement of the two Y-direction detection capacitor sets and the Z-direction detection capacitor set 225 is similar to that of the second detection device set, and is not repeated here. In this embodiment, the Z-direction detection capacitor bank 225 includes a third Z-direction detection capacitor 225a and a fourth Z-direction detection capacitor 225b, and the two Z-direction detection capacitors are configured such that when the third proof mass 221 moves downward along the Y-direction, the capacitance value of the third Z-direction detection capacitor 225a becomes smaller and the capacitance value of the fourth Z-direction detection capacitor 225b becomes larger.
The first mass 201 is connected to the first frame 211 by a first spring 251 and to the second frame 221 by a second spring 252. And, the connection points of both ends of the first and second springs 251 and 252 to the first mass 201, the first frame 211, and the second frame 221 are at the middle or approximately the middle of the respective sides. The first spring 251 and the second spring 252 are shaped like an "S", when the first frame 212 and the second frame 222 are driven by the driving device to move, the movement can be transmitted to the first mass 201 through the first spring 251 and the second spring 252, and the first mass 201 is driven to rotate in the XY plane due to the opposite driving directions of the first frame 212 and the second frame 222. In some embodiments, the first spring 251 and the second spring 252 may have other shapes.
The suspension device 23 includes a suspension frame 231 provided outside the first, second, and third detection portions 20, 21, and 22. One end of the first frame 212 is connected to one side of the suspension frame 231 by a seventh spring 257 and an eighth spring 258, and the other end is connected to one side of the suspension frame 231 by a ninth spring 259 and a tenth spring 2510, and the seventh spring 257, the eighth spring 258, the ninth spring 259, and the tenth spring 2510 have a degree of freedom in the X direction. One end of the second frame 222 is connected to one side of the suspension frame 231 by eleventh and twelfth springs 2511 and 2512, and connected to the other side of the suspension frame 231 by thirteenth and fourteenth springs 2513 and 2514, and the eleventh, twelfth, thirteenth and fourteenth springs 2511, 2512, 2513 and 2514 have a degree of freedom in the X direction. A first support beam 242 and a second support beam 243 are connected to the middle of the two long sides of the suspension frame 231.
The support device 24 is a first support anchor 265 and a second support anchor 266, which are disposed outside the suspension frame 231. The first support anchor 265 is correspondingly disposed outside the middle position of one side of the suspension frame 231 in the Y direction, the first support beam 242 is connected to the first support anchor 265, the second support anchor 266 is correspondingly disposed outside the middle position of the other side of the suspension frame 231 in the Y direction, and the second support beam 243 is connected to the second support anchor 266, whereby the suspension frame is supported and suspended, and the second detection portion 21 and the third detection portion 22 connected to the support frame 231 are also suspended.
Under the driving of the two first driving devices 213 and 214 and the two second driving devices 223 and 224, the second mass 211 and the third mass 221 reciprocate along the X direction in opposite directions, and the first frame 212 and the second frame 222 connected to the first mass 211 and the second mass 221 are also driven to reciprocate along the X direction in opposite directions. Meanwhile, the first frame 212 and the second frame 222 respectively drive the first mass block 201 to perform reciprocating rotation motion in the XY plane through the first spring 251 and the second spring 252.
When the three-axis MEMS gyroscope receives an angular velocity around the X direction, the first mass block 201 originally rotated in the XY plane by the driving device receives a coriolis force along the Z direction, and a displacement occurs in the Z direction. Specifically, displacement directions of two ends of the first proof mass 201 are opposite, a capacitance formed by the first electrode 205 and one end of the first proof mass 201 and a capacitance formed by the second electrode 206 and the other end of the first proof mass 201 form differential detection, if one end of the first proof mass 201 corresponding to the first electrode 205 moves in a direction away from the first electrode 205, a capacitance value at the first electrode 205 is reduced, and at this time, one end of the first proof mass 201 corresponding to the second electrode 206 moves in a direction approaching the second electrode 206, and a capacitance value at the second electrode 206 is increased. Thereby, the angular velocity around the X direction is detected by the X direction detection capacitor bank.
When the three-axis MEMS gyroscope is subjected to an angular velocity in the Y direction, the second detection portion 21 (the second mass 211 and the first frame 212) and the third detection portion 22 (the third mass 221 and the second frame 222) that originally move along the X axis under the drive of the drive device are subjected to the coriolis force in the Z direction, and a displacement in the Z direction occurs. Specifically, the displacement directions of the second detection part 21 and the third detection part 22 in the Z direction are opposite, and the capacitance group formed by the third electrode 216 and the fourth electrode 217 and the second proof mass 211 and the capacitance group formed by the fifth electrode 226 and the sixth electrode 227 and the third proof mass 221 form differential detection. When the second detection unit 21 moves to Z-, the capacitance values of the third electrode 216 and the fourth electrode 217 increase, and when the third detection unit 22 moves to Z +, the capacitance values of the fifth electrode 226 and the sixth electrode 227 decrease. Thereby, the angular velocity around the Y direction is detected by the Y direction detection capacitance group.
When the three-axis MEMS gyroscope is subjected to an angular velocity in the Z direction, the second detection portion 21 (the second mass 211 and the first frame 212) and the third detection portion 22 (the third mass 221 and the second frame 222) that originally move along the X axis under the drive of the drive device are subjected to the coriolis force in the Y direction, and displacement in the Y direction occurs. Specifically, the displacement directions of the second detection portion 21 and the third detection portion 22 in the Y direction are opposite, and the first Z-direction detection capacitance 215a and the fourth Z-direction detection capacitance 225b form differential detection with the second Z-direction detection capacitance 215b and the third Z-direction detection capacitance 225 a. When the second detection unit 21 moves in the Y + direction and the third detection unit 22 moves in the Y-direction, the capacitance values of the first Z-direction detection capacitor 215a and the fourth Z-direction detection capacitor 225b decrease, and the capacitance values of the second Z-direction detection capacitor 215b and the third Z-direction detection capacitor 225a increase. Thereby, the angular velocity around the X direction is detected by the Z direction detection capacitance.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.
Claims (9)
1. A three-axis MEMS gyroscope, comprising:
a substrate, a first electrode and a second electrode,
a first detection unit for detecting an angular velocity around the X direction; the first detection unit includes: a first mass connected to a set of anchor points fixed to a substrate by a set of connecting beams that allow rotation of the first mass in the XY plane about a structural center and rotation toward or away from the substrate; the first detection device group is a capacitor group consisting of an electrode arranged on the substrate and a first mass block;
a second detecting portion and a third detecting portion symmetrically disposed at both sides of the first detecting portion, the second detecting portion and the third detecting portion being connected to the first detecting portion by a first spring and a second spring, respectively, the first spring and the second spring being capable of transmitting driving forces of the second detecting portion and the third detecting portion to the first detecting portion, being disposed so as to be capable of providing driving forces in opposite directions, and being capable of detecting angular velocities around a Y direction and around a Z direction; wherein, the X direction is vertical to the Y direction, and the Z direction is vertical to the X direction and the Y direction;
the second detection unit includes: a first frame; the second mass block is arranged in the first frame and is connected with the first frame through at least two groups of springs, and the at least two groups of springs have freedom degrees in the Y direction; at least one first drive device disposed inside the second mass; and a second detection device group arranged inside the second mass block;
the third detection unit includes: a second frame; the third mass block is arranged inside the second frame and is connected with the second frame through at least two groups of springs, and the at least two groups of springs have freedom degrees in the Y direction; at least one second driving device disposed inside the third mass; and a third detection device group arranged inside the third mass block; wherein the driving directions of the at least one first driving device and the at least one second driving device are opposite;
the suspension device is arranged on the outer sides of the first detection part, the second detection part and the third detection part, is connected with the second detection part and the third detection part and is connected with the supporting device to realize the suspension of the suspension device; and
the supporting device is fixedly arranged on the substrate; the supporting device is a supporting frame, and the supporting frame is fixed on the substrate through an anchor point and cannot move relative to the substrate; the suspension device comprises a first suspension arm connected to the support frame by a first support beam and a second suspension arm connected to the support frame by a second support beam.
2. The triaxial MEMS gyroscope of claim 1, wherein the first proof mass has an aperture in the middle thereof, the set of connecting beams being disposed in the aperture of the first proof mass; the set of connection beams includes: the first connecting beam that sets up along the X direction, and set up along the Y direction first connecting beam both sides, and with second connecting beam and third connecting beam that first connecting beam links to each other, through second connecting beam and third connecting beam realize the suspension of the relative basement of first quality piece.
3. The tri-axial MEMS gyroscope of claim 1 wherein the first frame is connected to the suspension device by at least two sets of springs; said second frame being connected to said suspension means by at least two sets of springs; the at least two sets of springs have a degree of freedom in the X direction.
4. The tri-axial MEMS gyroscope of claim 1 wherein both ends of the first suspension arm are connected to the support frame by springs, respectively; and two ends of the second suspension arm are respectively connected with the supporting frame through springs.
5. The tri-axial MEMS gyroscope of claim 1,
the first driving device includes: the first driving structure is used for driving the second detection part to move; and a first drive detection arrangement for detecting a drive amplitude of the first drive arrangement;
the second driving device includes: the second driving structure is used for driving the third detection part to move; and a second drive detection arrangement for detecting a drive amplitude of the second drive arrangement;
or the first driving device and the second driving device only comprise a group of movable comb tooth groups and a group of fixed comb tooth groups, and the driving detection are realized in a time-sharing multiplexing mode;
the second detection device group and the third detection device group each include:
a Y-direction detection capacitor group for detecting angular velocity around the Y direction, which is composed of an electrode arranged on the substrate, a second mass block and a third mass block, or composed of a comb tooth group arranged on the substrate and a comb tooth group arranged on the second mass block and the third mass block; and
the Z-direction detection capacitor group for detecting the angular velocity around the Z direction consists of movable comb teeth groups arranged on the second mass block and the third mass block and fixed comb teeth groups connected to the anchor points.
6. A three-axis MEMS gyroscope, comprising:
a substrate, a first electrode and a second electrode,
a first detection unit for detecting an angular velocity around the X direction; the first detection unit includes: a first mass connected to a set of anchor points fixed to a substrate by a set of connecting beams that allow rotation of the first mass in the XY plane about a structural center and rotation toward or away from the substrate; the first detection device group is a capacitor group consisting of an electrode arranged on the substrate and a first mass block;
the second detection part and the third detection part are symmetrically arranged at two sides of the first detection part, the second detection part and the third detection part are respectively connected with the first detection part through a first spring and a second spring, the first spring and the second spring can transmit the driving force of the second detection part and the third detection part to the first detection part, and are arranged to provide the driving force with opposite directions and can be used for detecting the angular velocity around the Y direction and around the Z direction; wherein, the X direction is vertical to the Y direction, and the Z direction is vertical to the X direction and the Y direction;
the second detection unit includes: a first frame; the second mass block is arranged in the first frame and is connected with the first frame through at least two groups of springs, and the at least two groups of springs have freedom degrees in the Y direction; at least one first drive device disposed inside the second mass; and a second detection device group arranged inside the second mass block;
the third detection unit includes: a second frame; the third mass block is arranged inside the second frame and is connected with the second frame through at least two groups of springs, and the at least two groups of springs have freedom degrees in the Y direction; at least one second driving device disposed inside the third mass; and a third detection device group arranged inside the third mass block; wherein the driving directions of the at least one first driving device and the at least one second driving device are opposite;
the suspension device is arranged on the outer sides of the first detection part, the second detection part and the third detection part, is connected with the second detection part and the third detection part and is connected with the supporting device to realize the suspension of the suspension device; and
the supporting device is fixedly arranged on the substrate; the supporting device is a first supporting anchor point and a second supporting anchor point which are fixed on the substrate; the suspension device comprises a suspension frame, and the suspension frame is respectively connected with the first support anchor point and the second support anchor point through a first support beam and a second support beam.
7. The triaxial MEMS gyroscope of claim 6, wherein the first proof mass has an aperture in the middle thereof, the set of connecting beams being disposed in the aperture of the first proof mass; the set of connection beams includes: the first connecting beam that sets up along the X direction, and set up along the Y direction first connecting beam both sides, and with second connecting beam and third connecting beam that first connecting beam links to each other, through second connecting beam and third connecting beam realize the suspension of the relative basement of first quality piece.
8. The tri-axial MEMS gyroscope of claim 6 wherein the first frame is connected to the suspension device by at least two sets of springs; said second frame being connected to said suspension means by at least two sets of springs; the at least two sets of springs have a degree of freedom in the X direction.
9. The tri-axial MEMS gyroscope of claim 6,
the first driving device includes: the first driving structure is used for driving the second detection part to move; and a first drive detection arrangement for detecting a drive amplitude of the first drive arrangement;
the second driving device includes: the second driving structure is used for driving the third detection part to move; and a second drive detection arrangement for detecting a drive amplitude of the second drive arrangement;
or the first driving device and the second driving device only comprise a group of movable comb tooth groups and a group of fixed comb tooth groups, and the driving detection are realized in a time-sharing multiplexing mode;
the second detection device group and the third detection device group each include:
a Y-direction detection capacitor group for detecting angular velocity around the Y direction, which is composed of an electrode arranged on the substrate, a second mass block and a third mass block, or composed of a comb tooth group arranged on the substrate and a comb tooth group arranged on the second mass block and the third mass block; and
the Z-direction detection capacitor group for detecting the angular velocity around the Z direction consists of movable comb teeth groups arranged on the second mass block and the third mass block and fixed comb teeth groups connected to the anchor points.
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