CN116907466B - Microelectromechanical triaxial gyroscope and electronic device - Google Patents
Microelectromechanical triaxial gyroscope and electronic device Download PDFInfo
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- CN116907466B CN116907466B CN202311182057.3A CN202311182057A CN116907466B CN 116907466 B CN116907466 B CN 116907466B CN 202311182057 A CN202311182057 A CN 202311182057A CN 116907466 B CN116907466 B CN 116907466B
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- 238000001514 detection method Methods 0.000 claims abstract description 397
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 239000003990 capacitor Substances 0.000 claims description 49
- 244000126211 Hericium coralloides Species 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 7
- 230000001133 acceleration Effects 0.000 description 5
- 238000007689 inspection Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
Abstract
The application provides a micro-electromechanical triaxial gyroscope and electronic equipment; the device comprises a substrate, a first detection assembly, a second detection assembly, a third detection assembly and a driving frame, wherein the first detection assembly and the second detection assembly are positioned on the same side of the substrate and are arranged at intervals; the first detection assembly comprises a first mass block, and the second detection assembly comprises a second mass block; the driving frame comprises a first driving frame and a second driving frame which are arranged at intervals; the first detection assembly and the second detection assembly are positioned between the first driving frame and the second driving frame; the third detection assembly comprises a first detection part and a second detection part, the first detection part is positioned in the first driving frame, and the second detection part is positioned in the second driving frame; the first mass block, the second mass block, the first detection part and the second detection part are mutually independent. The three detection shafts are independent in mass and are not directly connected with each other, so that the micro-electromechanical triaxial gyroscope and the electronic equipment provided by the application can reduce interference among detection components.
Description
Technical Field
The application relates to the field of sensors, in particular to a micro-electromechanical triaxial gyroscope and electronic equipment.
Background
The capacitive Micro-Electro-Mechanical System (MEMS) gyroscope is a Micro inertial sensor for measuring angular velocity, and the working principle of the capacitive Micro-Electro-Mechanical System gyroscope is that coriolis force is utilized to detect angular velocity, namely, when a mechanical structure in back and forth motion is subjected to external angular velocity, coriolis acceleration is generated due to the coriolis effect, the relationship between the coriolis acceleration and the angular velocity and the vibration linear velocity meets the right-hand rule, namely, the coriolis force corresponding to the coriolis acceleration causes corresponding displacement of a movable mass block, so that the distance between capacitance polar plates is changed, and a signal processing circuit senses the change of capacitance to acquire the value of the corresponding angular velocity. The device has the outstanding advantages of small volume, light weight, low power consumption, low cost, easy realization of mass production and the like.
In a conventional three-axis gyroscope, two detection axes share a movable mass block to save area, which inevitably increases interference between the detection axes.
Disclosure of Invention
The application provides a micro-electromechanical triaxial gyroscope and electronic equipment, which can reduce the quadrature error and coupling error between detection axes of the micro-electromechanical triaxial gyroscope.
The application provides a microelectromechanical triaxial gyroscope, comprising:
A substrate;
the first detection component and the second detection component are positioned on the same side of the substrate and are arranged at intervals; the first detection assembly includes a first mass and the second detection assembly includes a second mass;
the driving frame comprises a first driving frame and a second driving frame which are arranged at intervals, and the first detection assembly and the second detection assembly are positioned between the first driving frame and the second driving frame;
the third detection assembly comprises a first detection part and a second detection part, the first detection part is positioned in the first driving frame, and the second detection part is positioned in the second driving frame;
wherein the first mass, the second mass, the first detection portion and the second detection portion are independent of each other.
In some embodiments, the third detection assembly includes a first detection portion and a second detection portion, the frame including a first drive frame and a second drive frame disposed at intervals; the first detection part is positioned in the first driving frame, and the second detection part is positioned in the second driving frame.
In some implementations, the first detection component includes a first detection frame, a first anchor point, and a first detection spring; the first anchor point and the first detection spring are positioned in the first detection frame; the first anchor point is configured to secure the first detection spring; the first detection frame is connected with the first detection spring, and the first detection spring is connected with the first mass block.
In some embodiments, the first detection assembly further comprises a first connection spring and a second connection spring;
one end of the first connecting spring is connected with the first driving frame, and the other end of the first connecting spring is connected with the first detecting frame;
one end of the second connecting spring is connected with the second driving frame; the other end of the second connecting spring is connected with the first detecting frame.
In some embodiments, the first mass includes a first proof mass and a second proof mass; the first detection mass block and the second detection mass block are respectively positioned at two sides of the first detection spring;
the first detection mass block and at least part of the substrate form a first detection capacitor; the second detection mass block and at least part of the substrate are provided with second detection capacitors, and the first detection capacitors and the second detection capacitors are positioned on two sides of the first detection spring.
In some embodiments, the first anchor point is at a distance L from the first drive frame 1 The distance between the first anchor point and the second driving frame is L 2 The method comprises the following steps: l (L) 1 =L 2 。
In some implementations, the second detection component includes a second detection frame, a second anchor point, and a second detection spring; the second anchor point and the second detection spring are positioned in the second detection frame; a second anchor point configured to fix the second detection spring; the second detection spring is connected with the second detection frame and the second mass block.
In some embodiments, the second detection assembly further comprises a third connection spring and a fourth connection spring;
one end of the third connecting spring is connected with the first driving frame, and the other end of the third connecting spring is connected with the second detecting frame;
one end of the fourth connecting spring is connected with the second driving frame, and the other end of the fourth connecting spring is connected with the second detecting frame.
In some embodiments, the second mass includes a third proof mass and a fourth proof mass; the third detection mass block and the fourth detection mass block are respectively positioned at two sides of the second detection spring;
the third detection mass block and at least part of the substrate form a third detection capacitor; and a fourth detection capacitor is formed between the fourth detection mass block and at least part of the substrate, and the third detection capacitor and the fourth detection capacitor are positioned on two sides of the second detection spring.
In some embodiments, the second anchor point is at a distance L from the first drive frame 3 The distance between the second anchor point and the second driving frame is L 4 The method comprises the following steps: l (L) 3 =L 4 。
In some embodiments, the first detection portion includes a third detection frame and a third detection spring; the third detection spring is positioned in the third detection frame and is connected with the third detection frame; the third detection spring is H-shaped;
the second detection part comprises a fourth detection frame and a fourth detection spring; the fourth detection spring is positioned in the fourth detection frame and is connected with the fourth detection frame; the fourth detection spring is H-shaped.
In some embodiments, the first detection portion further includes a fifth detection capacitance and a sixth detection capacitance, the second detection portion includes a seventh detection capacitance and an eighth detection capacitance, the first anchor point and the second anchor point determine a straight line W, the fifth detection capacitance and the seventh detection capacitance are symmetrically disposed about the straight line W and connected in parallel, and the sixth detection capacitance and the eighth detection capacitance are symmetrically disposed about the straight line W and connected in parallel.
In some embodiments, the first detection part further includes a first fixed comb tooth and a second fixed comb tooth, the third detection frame and the first fixed comb tooth have the fifth detection capacitance, and the third detection frame and the second fixed comb tooth have the sixth detection capacitance;
the second detection part further comprises a third fixed comb tooth and a fourth fixed comb tooth, the fourth detection frame and the third fixed comb tooth are formed with a seventh detection capacitor, and the fourth detection frame and the fourth fixed comb tooth are formed with an eighth detection capacitor.
In some embodiments, a first drive spring and a third anchor point are disposed within the first drive frame; the third anchor point is configured to secure the first drive spring;
a second driving spring and a fourth anchor point are arranged in the second driving frame; the fourth anchor point is configured to secure the second drive spring.
In some embodiments, a first fixed electrode and a second fixed electrode are further disposed within the first driving frame; a first area S of the first fixed electrode 1 A second area S with the second fixed electrode 2 Equal; the polarity of the first fixed electrode is opposite to the polarity of the second fixed electrode;
A third fixed electrode and a fourth fixed electrode are also arranged in the second driving frame; a third area S of the third fixed electrode 3 And a fourth area S of the fourth fixed electrode 4 Equal; the polarity of the third fixed electrode is opposite to the polarity of the fourth fixed electrode.
In some embodiments, a fifth fixed electrode and a sixth fixed electrode are further disposed within the first driving frame; a fifth area S of the fifth fixed electrode 5 And a sixth area S of the sixth fixed electrode 6 Equal; the polarity of the fifth fixed electrode is opposite to the polarity of the sixth fixed electrode;
a seventh fixed electrode and an eighth fixed electrode are also arranged in the second driving frame; a seventh area S of the seventh fixed electrode 7 And an eighth area S of the eighth fixed electrode 8 Equal; the polarity of the seventh fixed electrode is opposite to the polarity of the eighth fixed electrode.
In some embodiments, a first drive detection electrode and a second drive detection electrode are further disposed within the first drive frame; the first driving detection electrodes are positioned at two sides of the fifth fixed electrode; the saidThe second driving detection electrodes are positioned at two sides of the sixth fixed electrode; a ninth area S of the first drive detection electrode 9 And a tenth area S of the second drive detection electrode 10 Equal; the polarity of the first driving detection electrode is opposite to the polarity of the second driving detection electrode;
a third driving detection electrode and a fourth driving detection electrode are also arranged in the second driving frame; the third driving detection electrodes are positioned at two sides of the seventh fixed electrode; the fourth driving detection electrode is positioned at two sides of the eighth fixed electrode; an eleventh area S of the third drive detection electrode 11 And a twelfth area S of the fourth drive detection electrode 12 Equal; the polarity of the third driving detection electrode is opposite to the polarity of the fourth driving detection electrode.
Correspondingly, the application also provides electronic equipment comprising the micro-electromechanical triaxial gyroscope.
The application provides a micro-electromechanical triaxial gyroscope and electronic equipment; a microelectromechanical tri-axis gyroscope, comprising: the device comprises a substrate, a first detection assembly, a second detection assembly, a third detection assembly and a driving frame, wherein the first detection assembly and the second detection assembly are positioned on the same side of the substrate and are arranged at intervals; the first detection assembly comprises a first mass block, and the second detection assembly comprises a second mass block; the driving frame comprises a first driving frame and a second driving frame which are arranged at intervals; the first detection assembly and the second detection assembly are positioned between the first driving frame and the second driving frame; the third detection assembly comprises a first detection part and a second detection part, the first detection part is positioned in the first driving frame, and the second detection part is positioned in the second driving frame; the first mass block, the second mass block, the first detection part and the second detection part are mutually independent. The three detection shafts are independent in mass and are not directly connected with each other, so that the micro-electromechanical triaxial gyroscope and the electronic equipment provided by the application can reduce interference among detection components.
Drawings
In order to more clearly illustrate the technical solutions of the present application, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a MEMS triaxial gyroscope according to the present application;
FIG. 2 is an enlarged schematic view of the area E in FIG. 1;
FIG. 3 is an enlarged schematic view of region F of FIG. 1;
FIG. 4 is an enlarged schematic view of region M of FIG. 1;
FIG. 5 is an enlarged schematic view of the N region in FIG. 1;
FIG. 6 is a cross-sectional view taken along line A-B in FIG. 1;
fig. 7 is a cross-sectional view taken along line C-D in fig. 1.
In the drawings, the components represented by the respective reference numerals are as follows:
100. a substrate; 10. a first detection assembly; 11. a first detection frame; 12. a first anchor point; 13. a first detection spring; 14. a first mass; 141. a first proof mass; 142. a second proof mass; 151. a first connecting spring; 152. a second connecting spring; 161. a first detection capacitor; 162. a second detection capacitor; 20. a second detection assembly; 21. a second detection frame; 22. a second anchor point; 23. a second detection spring; 24. a second mass; 241. a third proof mass; 242. a fourth proof mass; 251. a third connecting spring; 252. a fourth connecting spring; 261. a third detection capacitor; 262. a fourth detection capacitor; 30. a third detection assembly; 31. a first detection unit; 311. a third detection frame; 312. a third detection spring; 313. a first fixed comb; 314. a second fixed comb; 32. a second detection unit; 321. a fourth detection frame; 322. a fourth detection spring; 323. a third fixed comb teeth; 324. fourth fixed comb teeth; 33. a fifth detection capacitance; 34. a sixth detection capacitor; 35. a seventh detection capacitance; 36. an eighth detection capacitor; 40. a driving frame; 41. a first driving frame; 4101. a first movable comb; 4102. a second movable comb tooth; 4103. fifth movable comb teeth; 4104. sixth movable comb teeth; 411. a first drive spring; 412. a third anchor point; 413. a first fixed electrode; 4131. a first comb tooth; 414. a second fixed electrode; 4141. a second comb tooth; 415. a fifth fixed electrode; 4151. fifth comb teeth; 416. a sixth fixed electrode; 4161. sixth comb teeth; 417. a first drive detection electrode; 418. a second drive detection electrode; 42. a second driving frame; 4201. a third movable comb tooth; 4202. fourth movable comb teeth; 4203. seventh movable comb teeth; 4204. eighth movable comb teeth; 421. a second drive spring; 422. a fourth anchor point; 423. a third fixed electrode; 4231. third comb teeth; 424. a fourth fixed electrode; 4241. fourth comb teeth; 425. a seventh fixed electrode; 4251. seventh comb teeth; 426. an eighth fixed electrode; 4261. eighth comb teeth; 427. a third drive detection electrode; 428. and fourth driving the detection electrode.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. It will be apparent that the described embodiments are only some, but not all, embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to fall within the scope of the application.
The terms "first," "second," "third," "fourth," and the like herein do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The terms of directions such as up, down, left, right are only referring to the directions of the attached drawings. Therefore, the use of numerical, directional and positional relationship terms is intended to illustrate and understand the present application, and is not intended to limit the present application. In the drawings, like structural elements are denoted by like reference numerals.
The embodiment of the application provides a micro-electromechanical triaxial gyroscope and electronic equipment, and the application is described in detail below with reference to specific embodiments.
Referring to fig. 1-7, a microelectromechanical tri-axis gyroscope includes: a substrate 100, a first inspection assembly 10, a second inspection assembly 20, a third inspection assembly 30, and a driving frame 40; the first detection assembly 10, the second detection assembly 20 and the third detection assembly 30 are positioned on the same side of the substrate 100, and the first detection assembly 10 and the second detection assembly 20 are arranged at intervals; the first detection assembly 10 comprises a first mass 14 and the second detection assembly 20 comprises a second mass 24; the driving frame 40 includes a first driving frame 41 and a second driving frame 42 disposed at intervals, and the first and second sensing assemblies 10 and 20 are positioned between the first and second driving frames 41 and 42; the third detecting assembly 30 includes a first detecting portion 31 and a second detecting portion 32, the first detecting portion 31 being located in the first driving frame 41, the second detecting portion 32 being located in the second driving frame 42; wherein the first mass 14, the second mass 24, the first detection portion 31 and the second detection portion 32 are independent of each other.
Specifically, the first detection component 10 is a detection structure of a micro-electromechanical triaxial gyroscope in a first direction X; the second detection component 20 is a detection structure of the micro-electromechanical triaxial gyroscope in the second direction Y; the third detecting component 30 is a detecting structure of the micro-electromechanical three-axis gyroscope in the third direction Z, and the driving frame 40 is a driving structure of the micro-electromechanical three-axis gyroscope. The first direction X, the second direction Y and the third direction Z are crossed in pairs; in one embodiment, the first direction X, the second direction Y, and the third direction Z are perpendicular to each other.
Specifically, the first driving frame 41 and the second driving frame 42 are symmetrically disposed at both sides of the first detecting assembly 10 and the second detecting assembly 20. The first detecting portion 31 and the second detecting portion 32 are symmetrically disposed within the first driving frame 41 and the second driving frame 42.
The application can reduce the quadrature error and the coupling error of the micro-electromechanical triaxial gyroscope by controlling the first mass block 14, the second mass block 24, the first detection portion 31 and the second detection portion 32 to be independent of each other.
In some implementations, the first detection assembly 10 includes a first detection frame 11, a first anchor point 12, and a first detection spring 13; the first anchor point 12 and the first detection spring 13 are positioned in the first detection frame 11; the first anchor point 12 is configured to fix the first detection spring 13; the first detection frame 11 is connected to a first detection spring 13, and the first detection spring 13 is connected to a first mass 14.
Since the first detection spring 13 is connected with the first detection frame 11 and the first mass block 14, when the first detection frame 11 rotates, the first detection spring 13 is driven to rotate, and the first mass block 14 is driven to rotate.
In some embodiments, the first detection assembly 10 further includes a first connection spring 151 and a second connection spring 152; one end of the first connection spring 151 is connected to the first driving frame 41, and the other end of the first connection spring 151 is connected to the first detection frame 11; one end of the second connection spring 152 is connected to the second driving frame 42; the other end of the second connection spring 152 is connected to the first detection frame 11.
Specifically, the first detecting unit 10 is connected to the first driving frame 41 via a first connecting spring 151, and is connected to the second driving frame 42 via a second connecting spring 152.
When the first driving frame 41 and the second driving frame 42 vibrate along the second direction Y, the first detecting assembly 10 drives the first detecting frame 11 to rotate in the plane formed by the first direction X and the second direction Y through the first connecting spring 151 and the second connecting spring 152, and the first detecting frame 11 drives the first mass block 14 to rotate in the plane formed by the first direction X and the second direction Y through the first detecting spring 13; when there is an angular velocity input about the first direction X, the first mass 14 will twist about the second direction Y.
In some embodiments, the first mass 14 includes a first proof mass 141 and a second proof mass 142; the first detection mass block 141 and the second detection mass block 142 are respectively positioned at two sides of the first detection spring 13; the first detection mass block 141 and at least part of the substrate 100 are formed with a first detection capacitor 161, and at least part of the substrate 100 refers to a front projection area of the first detection mass block 141 corresponding to the substrate 100; the second proof mass 142 and at least a portion of the substrate 100 form a second detection capacitor 162, and at least a portion of the substrate 100 refers to a front projection area of the second proof mass 142 corresponding to the substrate 100, where the first detection capacitor 161 and the second detection capacitor 162 are located at two sides of the first detection spring 13.
When the first driving frame 41 and the second driving frame 42 vibrate along the second direction Y, the first detecting assembly 10 drives the first detecting frame 11 to rotate in the plane formed by the first direction X and the second direction Y through the first connecting spring 151 and the second connecting spring 152, and the first detecting frame 11 drives the first detecting mass block 141 and the second detecting mass block 142 to rotate in the plane formed by the first direction X and the second direction Y through the first detecting spring 13; when there is an angular velocity input in the first direction X, the first and second sensing masses 141 and 142 will twist in the second direction Y, the distance between the first sensing mass 141 and the substrate 100 and the distance between the second sensing masses 142 become larger and smaller, that is, the capacitance value of the first sensing capacitor 161 and the capacitance value of the second sensing capacitor 162 become larger and smaller, and the difference between the sensing capacitance changes may represent an angular velocity signal in the first direction X.
In some embodiments, the first anchor point 12 is a distance L from the first drive frame 41 1 The first anchor point 12 is located at a distance L from the second drive frame 42 2 The method comprises the following steps: l (L) 1 =L 2 . I.e. the distance between the first detecting member 10 and the first driving frame 41 is equal to the distance between the first detecting member 10 and the second driving frame 42.
In some implementations, the second detection component 20 includes a second detection frame 21, a second anchor point 22, and a second detection spring 23; the second anchor point 22 and the second detection spring 23 are positioned in the second detection frame 21; the second anchor point 22 is configured to fix a second detection spring 23; the second detection spring 23 is connected to the second detection frame 21 and the second mass 24.
Since the second detecting spring 23 is connected to the second detecting frame 21 and the second mass block 24, when the second detecting frame 21 rotates, the second detecting spring 23 is driven to rotate, and the second mass block 24 is driven to rotate.
In some embodiments, the second detection assembly 20 further includes a third connection spring 251 and a fourth connection spring 252; one end of the third connection spring 251 is connected to the first driving frame 41, and the other end of the third connection spring 251 is connected to the second detection frame 21; one end of the fourth connection spring 252 is connected to the second driving frame 42, and the other end of the fourth connection spring 252 is connected to the second detection frame 21.
Specifically, the second detecting unit 20 is connected to the first driving frame 41 via a third connecting spring 251, and is connected to the second driving frame 42 via a fourth connecting spring 252.
When the first driving frame 41 and the second driving frame 42 vibrate along the second direction Y, the second detecting assembly 20 drives the second detecting frame 21 to rotate in the plane formed by the first direction X and the second direction Y through the third connecting spring 251 and the fourth connecting spring 252, and the second detecting frame 21 drives the second mass block 24 to rotate in the plane formed by the first direction X and the second direction Y through the second detecting spring 23, so that the second mass block 24 will twist around the first direction X when there is an angular velocity input around the second direction Y.
In some implementations, the second mass 24 includes a third proof mass 241 and a fourth proof mass 242; the third proof mass 241 and the fourth proof mass 242 are respectively located at two sides of the second detection spring 23; the third proof mass 241 and at least a portion of the substrate 100 form a third sensing capacitor 261, and at least a portion of the substrate 100 refers to a front projection area of the third proof mass 241 corresponding to the substrate 100; the fourth proof mass 242 and at least a portion of the substrate 100 form a fourth detection capacitor 262, and at least a portion of the substrate 100 means that the fourth proof mass 242 is in a front projection area corresponding to the substrate 100, and the third detection capacitor 261 and the fourth detection capacitor 262 are located at two sides of the second detection spring 23.
When the first driving frame 41 and the second driving frame 42 vibrate along the second direction Y, the second detecting assembly 20 drives the second detecting frame 21 to rotate in the plane formed by the first direction X and the second direction Y through the third connecting spring 251 and the fourth connecting spring 252, the second detecting frame 21 drives the third detecting mass 241 and the fourth detecting mass 242 to rotate in the plane formed by the first direction X and the second direction Y through the second detecting spring 23, when the angular velocity input around the second direction Y exists, the third detecting mass 241 and the fourth detecting mass 242 will twist around the first direction X, the distance between the third detecting mass 241 and the fourth detecting mass 242 and the substrate 100 is increased by one, that is, the capacitance value of the third detecting capacitor 261 and the fourth detecting capacitor 262 is increased by one, and the difference value of the change of the detecting capacitance can reflect the angular velocity signal of the second direction Y.
In some embodiments, the second anchor point 22 is a distance L from the first drive frame 41 3 The second anchor point 22 is located at a distance L from the second drive frame 42 4 The method comprises the following steps: l (L) 3 =L 4 . I.e. the distance between the second detecting assembly 20 and the first driving frame 41 is equal to the distance between the second detecting assembly 20 and the second driving frame 42.
In some embodiments, the first detection portion 31 includes a third detection frame 311 and a third detection spring 312; the third detection spring 312 is positioned in the third detection frame 311, and the third detection spring 312 is H-shaped; the second detecting portion 32 includes a fourth detecting frame 321 and a fourth detecting spring 322; the fourth detecting spring 322 is located in the fourth detecting frame 321, and the fourth detecting spring 322 is H-shaped.
Specifically, the third detection frame 311 serves as a detection mass of the first detection portion 31, and the fourth detection frame 321 serves as a detection mass of the second detection portion 32.
With the first detection portion 31, when the first driving frame 41 vibrates in the second direction Y, since the third detection spring 312 is H-shaped, the third detection frame 311 and the first driving frame 41 are hard-coupled in the Y direction, and the third detection frame 311 will vibrate with the first driving frame 41 in the second direction Y.
With the second detecting portion 32, when the second driving frame 42 vibrates in the second direction Y, since the fourth detecting spring 322 is H-shaped, the fourth detecting frame 321 and the second driving frame 42 are hard-coupled in the Y direction, and the fourth detecting frame 321 will vibrate with the second driving frame 42 in the second direction Y.
In some embodiments, the first detection portion 31 further includes a fifth detection capacitance 33 and a sixth detection capacitance 34; the second detection section 32 includes a seventh detection capacitance 35 and an eighth detection capacitance 36, the first anchor point 12 and the second anchor point 22 define a straight line W, the fifth detection capacitance 33 and the seventh detection capacitance 35 are symmetrically disposed about the straight line W and connected in parallel, and the sixth detection capacitance 34 and the eighth detection capacitance 36 are symmetrically disposed about the straight line W and connected in parallel.
In some embodiments, the first detecting part 31 further includes a first fixed comb 313 and a second fixed comb 314; the third detecting frame 311 and the first fixed comb teeth 313 form a fifth detecting capacitor 33, and the third detecting frame 311 and the second fixed comb teeth 314 form a sixth detecting capacitor 34.
The second detecting part 32 further includes a third fixed comb 323 and a fourth fixed comb 324; the fourth detection frame 321 and the third fixed comb 323 form a seventh detection capacitor 35, and the fourth detection frame 321 and the fourth fixed comb 324 form an eighth detection capacitor 36.
When the first driving frame 41 vibrates along the second direction Y and the second driving frame 42 vibrates reversely along the second direction Y, the third detecting frame 311 and the first driving frame 41, the fourth detecting frame 321 and the second driving frame 42 are hard-connected in the Y direction because the third detecting spring 312 and the fourth detecting spring 322 are in the H shape, and therefore the third detecting frame 311 and the fourth detecting frame 321 vibrate reversely along the second direction Y synchronously along with the first driving frame 41 and the second driving frame 42 respectively. And the third detecting frame is in flexible connection with the first driving frame 41, the fourth detecting frame 321 and the second driving frame 42 in the X direction, when the angular velocity around the third direction Z is input, the third detecting frame 311 and the fourth detecting frame 321 will vibrate reversely in synchronization with the first direction X. At this time, if there is an acceleration disturbance signal in the X direction, the distance between the third detection frame 311 and the first fixed comb teeth 313 and the third fixed comb teeth 323 becomes larger and smaller, that is, the capacitance values of the fifth detection capacitor 33 and the seventh detection capacitor 35 become larger and smaller, and the first fixed comb teeth 313 and the third fixed comb teeth 323 are symmetrically arranged and connected in parallel, and the increase value and the decrease value of the two capacitors cancel each other, so that the disturbance of the X acceleration in the first direction can be eliminated.
In some embodiments, a first drive spring 411 and a third anchor point 412 are disposed within the first drive frame 41; the third anchor point 412 is configured to fix the first drive spring 411; a second driving spring 421 and a fourth anchor point 422 are arranged in the second driving frame 42; the fourth anchor point 422 is configured to secure the second drive spring 421.
In some embodiments, a first fixed electrode 413 and a second fixed electrode 414 are further disposed within the first driving frame 41; first area S of first fixed electrode 413 1 Second area S with second fixed electrode 414 2 Equal; the polarity of the first fixed electrode 413 is opposite to the polarity of the second fixed electrode 414; the second driving frame 42 is also provided with a third fixed electrode 423 and a fourth fixed electrode 424; third area S of third fixed electrode 423 3 And a fourth area S of the fourth fixed electrode 424 4 Equal; the polarity of the third fixed electrode 423 is opposite to the polarity of the fourth fixed electrode 424.
For the first driving frame 41, the first fixed electrode 413 and the second fixed electrode 414 are used as the first driving electrode of the first driving frame 41, the first fixed electrode 413 has the first comb teeth 4131, the second fixed electrode 414 has the second comb teeth 4141, the first driving frame 41 has the first movable comb teeth 4101 and the second movable comb teeth 4102, the first area S of the first fixed electrode 413 1 Second area S with second fixed electrode 414 2 Equal; that is, the number of the first comb teeth 4131 is the same as the number of the second comb teeth 4141, and by controlling the polarity of the first fixed electrode 413 to be opposite to the polarity of the second fixed electrode 414, the first comb teeth 4131 and the first movable comb teeth 4101 have electrostatic attraction, and the second comb teeth 4141 and the second movable comb teeth 4102 have electrostatic attraction, thereby controlling the first driving frame 41 to reciprocate in the second direction Y.
The third and fourth fixed electrodes 423 and 424 are made for the second driving frame 42A first drive electrode which is a second drive frame 42; the third fixed electrode 423 has third comb teeth 4231, the fourth fixed electrode 424 has fourth comb teeth 4241, the second driving frame 42 has third movable comb teeth 4201 and fourth movable comb teeth 4202, and a third area S of the third fixed electrode 423 3 And a fourth area S of the fourth fixed electrode 424 4 Equal; that is, the number of the third comb teeth 4231 is the same as the number of the fourth comb teeth 4241, the third comb teeth 4231 and the third movable comb teeth 4201 have electrostatic attraction, the fourth comb teeth 4241 and the fourth movable comb teeth 4202 have electrostatic attraction, and the second driving frame 42 can be controlled to reciprocate in the second direction Y by controlling the polarity of the third fixed electrode 423 to be opposite to the polarity of the fourth fixed electrode 424.
Specifically, since the first comb teeth 4131 and the first movable comb teeth 4101 have electrostatic attractive force, the second comb teeth 4141 and the second movable comb teeth 4102 have electrostatic attractive force, the third comb teeth 4231 and the third movable comb teeth 4201 have electrostatic attractive force, and the fourth comb teeth 4241 and the fourth movable comb teeth 4202 have electrostatic attractive force, the first driving frame 41 moves in the positive direction of the second direction Y while the second driving frame 42 moves in the negative direction of the second direction Y, and thus the first driving frame 41 and the second driving frame 42 reciprocate in the second direction Y under the action of the electrostatic attractive force.
In some embodiments, a fifth fixed electrode 415 and a sixth fixed electrode 416 are also provided within the first driving frame 41; fifth area S of fifth fixed electrode 415 5 And a sixth area S of a sixth fixed electrode 416 6 Equal; the polarity of the fifth fixed electrode 415 is opposite to the polarity of the sixth fixed electrode 416;
a seventh fixed electrode 425 and an eighth fixed electrode 426 are also provided in the second driving frame 42; seventh area S of seventh fixed electrode 425 7 And an eighth area S of eighth fixed electrode 426 8 Equal; the polarity of the seventh fixed electrode 425 is opposite to the polarity of the eighth fixed electrode 426.
For the first driving frame 41, a fifth fixed electrode 415 and a sixth fixed electrode 416 are used as the second driving electrodes of the first driving frame 41, the fifth fixed electrode 415 has fifth comb teeth 4151, the fifth The sixth stationary electrode 416 has sixth comb teeth 4161, the first driving frame 41 has fifth movable comb teeth 4103 and sixth movable comb teeth 4104, and a fifth area S of the fifth stationary electrode 415 5 And a sixth area S of a sixth fixed electrode 416 6 The number of the fifth comb teeth 4151 is equal to that of the sixth comb teeth 4161, and by controlling the polarity of the fifth fixed electrode 415 to be opposite to that of the sixth fixed electrode 416, the electrostatic attractive force exists between the fifth comb teeth 4151 and the fifth movable comb teeth 4103, and the electrostatic attractive force exists between the sixth comb teeth 4161 and the sixth movable comb teeth 4104, so that the first driving frame 41 can be controlled to reciprocate in the second direction Y.
For the second driving frame 42, a seventh fixed electrode 425 and an eighth fixed electrode 426 are used as the second driving electrode of the second driving frame 42, the seventh fixed electrode 425 has seventh comb teeth 4251, the eighth fixed electrode 426 has eighth comb teeth 4261, the second driving frame 42 has seventh movable comb teeth 4203 and eighth movable comb teeth 4204, and a seventh area S of the seventh fixed electrode 425 7 And an eighth area S of eighth fixed electrode 426 8 Equal; that is, the number of seventh comb teeth 4251 is the same as the number of eighth comb teeth 4261, and by controlling the polarity of seventh fixed electrode 425 and the polarity of eighth fixed electrode 426 to be opposite, electrostatic attraction exists between seventh comb teeth 4251 and seventh movable comb teeth 4203, and electrostatic attraction exists between eighth comb teeth 4261 and eighth movable comb teeth 4204, so that the second driving frame 42 can be controlled to reciprocate in the second direction Y.
In some embodiments, the first area S of the first fixed electrode 413 1 A fifth area S greater than or equal to the fifth fixed electrode 415 5 The method comprises the steps of carrying out a first treatment on the surface of the Second area S of second fixed electrode 414 2 A sixth area S greater than or equal to the sixth fixed electrode 416 6 。
In some embodiments, a first drive detection electrode 417 and a second drive detection electrode 418 are also disposed within the first drive frame 41; the first driving detection electrodes 417 are located at both sides of the fifth fixed electrode 415; the second driving detection electrodes 418 are positioned at both sides of the sixth fixed electrode 416; ninth area S of first drive detection electrode 417 9 And a second drive detection electrode 418Ten area S 10 Equal; the polarity of the first driving detection electrode 417 is opposite to the polarity of the second driving detection electrode 418; the second driving frame 42 is further provided therein with a third driving detection electrode 427 and a fourth driving detection electrode 428; the third driving detection electrodes 427 are located at both sides of the seventh fixed electrode 425; the fourth driving detection electrodes 428 are located at both sides of the eighth fixed electrode 426; eleventh area S of the third driving detection electrode 427 11 And a twelfth area S of the fourth drive detection electrode 428 12 Equal; the polarity of the third drive detection electrode 427 is opposite to the polarity of the fourth drive detection electrode 428.
For the first driving frame 41, specifically, the first driving detecting electrode 417 and the second driving detecting electrode 418 may be used as electrodes for adjusting the frequency of the first driving frame 41, and appropriate voltages are applied to the two electrodes respectively to adjust the rigidity of the first driving spring 411, so that the frequency of the first driving frame 41 is similar to the frequencies of the first detecting component 10, the second detecting component 20 and the third detecting component 30, thereby improving the capacitance output signal of the microelectromechanical triaxial gyroscope; by disposing the first driving detection electrodes 417 on both sides of the fifth fixed electrode 415; the second driving detection electrodes 418 are disposed at both sides of the sixth fixed electrode 416; the layout of the micro-electromechanical triaxial gyroscope can be more compact, so that the micro-electromechanical triaxial gyroscope with small size can be realized.
For the second driving frame 42, specifically, the third driving detecting electrode 427 and the fourth driving detecting electrode 428 may be used as electrodes for adjusting the frequency of the second driving frame 42, and appropriate voltages are applied to the two electrodes respectively to adjust the rigidity of the second driving spring 421, so that the frequency of the second driving frame 42 is similar to the frequencies of the first detecting component 10, the second detecting component 20 and the third detecting component 30, thereby improving the capacitance output signal of the microelectromechanical triaxial gyroscope; by disposing the third driving detection electrodes 427 on both sides of the seventh fixed electrode 425; fourth drive detection electrodes 428 are disposed on both sides of the eighth fixed electrode 426; the layout of the micro-electromechanical triaxial gyroscope can be more compact, so that the micro-electromechanical triaxial gyroscope with small size can be realized.
Correspondingly, the application also provides electronic equipment comprising the micro-electromechanical triaxial gyroscope.
The application provides an electronic device comprising a microelectromechanical triaxial gyroscope as described above, the microelectromechanical triaxial gyroscope comprising: the substrate 100, the first detection assembly 10, the second detection assembly 20, the third detection assembly 30 and the driving frame 40, wherein the first detection assembly 10 and the second detection assembly 20 are positioned on the same side of the substrate 100 and are arranged at intervals; the first detection assembly 10 comprises a first mass 14 and the second detection assembly 20 comprises a second mass 24; the driving frame 40 includes a first driving frame 41 and a second driving frame 42 disposed at intervals, and the first and second sensing assemblies 10 and 20 are positioned between the first and second driving frames 41 and 42; the third detecting assembly 30 includes a first detecting portion 31 and a second detecting portion 32, the first detecting portion 31 being located in the first driving frame 41, the second detecting portion 32 being located in the second driving frame 42; wherein the first mass 14, the second mass 24, the first detection portion 31 and the second detection portion 32 are independent of each other. The quality of the three detection shafts are mutually independent and are not directly connected with each other, so that the electronic equipment provided by the application can reduce interference among all detection components.
In summary, although the detailed description of the embodiments of the present application is given above, the above embodiments are not intended to limit the present application, and those skilled in the art will understand that: the technical scheme described in the foregoing embodiments can be modified or some of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the technical solutions according to the embodiments of the present application.
Claims (17)
1. A microelectromechanical tri-axial gyroscope, comprising:
a substrate (100);
a first detection assembly (10) for detecting an angular velocity in a first direction (X);
a second detection assembly (20) for detecting an angular velocity in a second direction (Y);
the first detection component (10) and the second detection component (20) are positioned on the same side of the substrate (100) and are arranged at intervals; -the first detection assembly (10) comprises a first mass (14), and-the second detection assembly (20) comprises a second mass (24);
a drive frame (40) comprising a first drive frame (41) and a second drive frame (42) arranged at intervals, the first detection assembly (10) and the second detection assembly (20) being located between the first drive frame (41) and the second drive frame (42);
A third detection assembly (30) for detecting an angular velocity in a third direction (Z), comprising a first detection portion (31) and a second detection portion (32), the first detection portion (31) being located within the first drive frame (41), the second detection portion (32) being located within the second drive frame (42);
wherein the first detection assembly (10), the second detection assembly (20), the first detection part (31) and the second detection part (32) are respectively and directly connected with the driving frame (40) and are directly driven by the driving frame (40);
the first mass (14), the second mass (24), the first detection portion (31) and the second detection portion (32) are independent of each other.
2. The microelectromechanical triaxial gyroscope of claim 1, characterized in that the first detection assembly (10) comprises a first detection frame (11), a first anchor point (12) and a first detection spring (13); the first anchor point (12) and the first detection spring (13) are positioned in the first detection frame (11); -the first anchor point (12) is configured to fix the first detection spring (13); the first detection frame (11) is connected with the first detection spring (13), and the first detection spring (13) is connected with the first mass block (14).
3. The microelectromechanical triaxial gyroscope of claim 2, characterized in that the first detection assembly (10) further comprises a first connection spring (151) and a second connection spring (152);
one end of the first connecting spring (151) is connected with the first driving frame (41), and the other end of the first connecting spring (151) is connected with the first detecting frame (11);
one end of the second connecting spring (152) is connected with the second driving frame (42); the other end of the second connecting spring (152) is connected with the first detecting frame (11).
4. The microelectromechanical triaxial gyroscope of claim 2, characterized in that the first proof mass (14) comprises a first proof mass (141) and a second proof mass (142); the first detection mass block (141) and the second detection mass block (142) are respectively positioned at two sides of the first detection spring (13);
-said first proof mass (141) and at least part of said substrate (100) are formed with a first detection capacitance (161); the second detection mass block (142) and at least part of the substrate (100) are provided with second detection capacitors (162), and the first detection capacitors (161) and the second detection capacitors (162) are positioned on two sides of the first detection spring (13).
5. The microelectromechanical triaxial gyroscope of claim 2, characterized in that the first anchor point (12) is at a distance L from the first drive frame (41) 1 The first anchor point (12) is at a distance L from the second driving frame (42) 2 The method comprises the following steps: l (L) 1 =L 2 。
6. The microelectromechanical triaxial gyroscope of claim 2, characterized in that the second detection assembly (20) comprises a second detection frame (21), a second anchor point (22) and a second detection spring (23); the second anchor point (22) and the second detection spring (23) are positioned in the second detection frame (21); -a second anchor point (22) is configured to fix the second detection spring (23); the second detection spring (23) is connected with the second detection frame (21) and the second mass block (24).
7. The microelectromechanical triaxial gyroscope of claim 6, characterized in that the second detection assembly (20) further comprises a third connection spring (251) and a fourth connection spring (252);
one end of the third connecting spring (251) is connected with the first driving frame (41), and the other end of the third connecting spring (251) is connected with the second detecting frame (21);
One end of the fourth connecting spring (252) is connected with the second driving frame (42), and the other end of the fourth connecting spring (252) is connected with the second detecting frame (21).
8. The microelectromechanical triaxial gyroscope of claim 6, characterized in that the second proof mass (24) comprises a third proof mass (241) and a fourth proof mass (242); the third detection mass block (241) and the fourth detection mass block (242) are respectively positioned at two sides of the second detection spring (23);
-said third proof mass (241) and at least part of said substrate (100) are formed with a third detection capacitance (261); the fourth detection mass block (242) and at least part of the substrate (100) are formed with a fourth detection capacitor (262), and the third detection capacitor (261) and the fourth detection capacitor (262) are located at two sides of the second detection spring (23).
9. The microelectromechanical triaxial gyroscope of claim 6, characterized in that the second anchor point (22) is at a distance L from the first drive frame (41) 3 The second anchor point (22) is at a distance L from the second driving frame (42) 4 The method comprises the following steps: l (L) 3 =L 4 。
10. The microelectromechanical triaxial gyroscope of claim 6, characterized in that the first detection portion (31) comprises a third detection frame (311) and a third detection spring (312); the third detection spring (312) is positioned in the third detection frame (311), and the third detection spring (312) is connected with the third detection frame (311); the third detection spring (312) is H-shaped;
the second detection part (32) comprises a fourth detection frame (321) and a fourth detection spring (322); the fourth detection spring (322) is positioned in the fourth detection frame (321), and the fourth detection spring (322) is connected with the fourth detection frame (321); the fourth detection spring (322) is H-shaped.
11. The microelectromechanical triaxial gyroscope of claim 10, characterized in that the first sensing portion (31) further includes a fifth sensing capacitance (33) and a sixth sensing capacitance (34),
the second detection unit (32) includes a seventh detection capacitor (35) and an eighth detection capacitor (36), the first anchor point (12) and the second anchor point (22) define a straight line W, the fifth detection capacitor (33) and the seventh detection capacitor (35) are symmetrically arranged and connected in parallel with respect to the straight line W, and the sixth detection capacitor (34) and the eighth detection capacitor (36) are symmetrically arranged and connected in parallel with respect to the straight line W.
12. The microelectromechanical triaxial gyroscope of claim 11, characterized in that the first detection portion (31) further comprises a first fixed comb (313) and a second fixed comb (314), the third detection frame (311) and the first fixed comb (313) forming the fifth detection capacitance (33), the third detection frame (311) and the second fixed comb (314) forming the sixth detection capacitance (34);
the second detection part (32) further comprises a third fixed comb tooth (323) and a fourth fixed comb tooth (324), the fourth detection frame (321) and the third fixed comb tooth (323) are formed with the seventh detection capacitor (35), and the fourth detection frame (321) and the fourth fixed comb tooth (324) are formed with the eighth detection capacitor (36).
13. The microelectromechanical triaxial gyroscope of claim 1, characterized in that a first drive spring (411) and a third anchor point (412) are provided in the first drive frame (41); -the third anchor point (412) is configured to fix the first drive spring (411);
a second driving spring (421) and a fourth anchor point (422) are arranged in the second driving frame (42); the fourth anchor point (422) is configured to fix the second drive spring (421).
14. The microelectromechanical triaxial gyroscope of claim 13, characterized in that the first driving frame (41) is further provided with a first fixed electrode (413) and a second fixed electrode (414); a first area S of the first fixed electrode (413) 1 A second area S with the second fixed electrode (414) 2 Equal; -the polarity of the first fixed electrode (413) is opposite to the polarity of the second fixed electrode (414);
a third fixed electrode (423) and a fourth fixed electrode (424) are also arranged in the second driving frame (42); a third area S of the third fixed electrode (423) 3 And a fourth area S of the fourth stationary electrode (424) 4 Equal; the polarity of the third fixed electrode (423) is opposite to the polarity of the fourth fixed electrode (424).
15. The microelectromechanical triaxial gyroscope of claim 13, characterized in that a fifth fixed electrode (415) and a sixth fixed electrode (416) are also provided in the first drive frame (41); a fifth area S of the fifth fixed electrode (415) 5 And a sixth area S of the sixth stationary electrode (416) 6 Equal; said firstThe polarity of the fifth fixed electrode (415) is opposite to the polarity of the sixth fixed electrode (416);
A seventh fixed electrode (425) and an eighth fixed electrode (426) are also arranged in the second driving frame (42); a seventh area S of the seventh stationary electrode (425) 7 And an eighth area S of the eighth fixed electrode (426) 8 Equal; the polarity of the seventh fixed electrode (425) is opposite to the polarity of the eighth fixed electrode (426).
16. The microelectromechanical triaxial gyroscope of claim 15, characterized in that the first drive frame (41) is further provided with a first drive detection electrode (417) and a second drive detection electrode (418); the first driving detection electrodes (417) are positioned at two sides of the fifth fixed electrode (415); the second driving detection electrodes (418) are positioned at two sides of the sixth fixed electrode (416); a ninth area S of the first drive detection electrode (417) 9 And a tenth area S of the second drive detection electrode (418) 10 Equal; the polarity of the first drive detection electrode (417) is opposite to the polarity of the second drive detection electrode (418);
a third drive detection electrode (427) and a fourth drive detection electrode (428) are also arranged in the second drive frame (42); the third driving detection electrodes (427) are positioned at both sides of the seventh fixed electrode (425); the fourth driving detection electrode (428) is positioned at two sides of the eighth fixed electrode (426); an eleventh area S of the third drive detection electrode (427) 11 And a twelfth area S of the fourth drive detection electrode (428) 12 Equal; the polarity of the third drive detection electrode (427) is opposite to the polarity of the fourth drive detection electrode (428).
17. An electronic device comprising the microelectromechanical tri-axial gyroscope of any of claims 1-16.
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