CN1648673A - Single chip double inertia parameter accelerometer gyroscope - Google Patents
Single chip double inertia parameter accelerometer gyroscope Download PDFInfo
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- CN1648673A CN1648673A CN 200510056751 CN200510056751A CN1648673A CN 1648673 A CN1648673 A CN 1648673A CN 200510056751 CN200510056751 CN 200510056751 CN 200510056751 A CN200510056751 A CN 200510056751A CN 1648673 A CN1648673 A CN 1648673A
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Abstract
The present invention relates to accelerometer gyroscope, and is an especially single chip double inertia parameter accelerometer gyroscope. The single chip double inertia parameter accelerometer gyroscope includes casing, mass block, which consists of outer frame and mass block core inside the outer frame, anchored with elastic beam to the casing bottom, comb capacitor fixed on two sides of the mass block with sensing comb teeth fixed onto the outer side walls of the outer frame, comb driver fixed in the inner side walls of the outer frame, and electrodes fixed to the top and bottom ends of the mass block core and the top and bottom of the casing. The present invention can detect two kinds of inertia parameters integrally, may sense the linear acceleration and angular acceleration in the same direction and is practical.
Description
Technical field
The present invention relates to accelerometer gyroscope, belong to the micromechanics electronic technology field, be specially single chip double inertia parameter accelerometer gyroscope.
Background technology
Micro-mechanical accelerometer and micro-mechanical gyroscope are two kinds of very important mini inertial sensors, also are the important component parts of minitype inertial navigation or guidance system.Because their volumes are little, in light weight, cost is low and the high outstanding advantage of reliability, it all is widely used in two fields of the army and the people.
It has been recognized that, along responsive to the accelerometer energy of doing vibration perpendicular to the 3rd of sensitive axes and vibrating shaft the axial rotation angle speed perpendicular to sensitive axes.Utilize the inertance element of this principle development, simultaneously sensitive line acceleration and angular speed.So so just proposed the gyrostatic notion of micro-mechanical accelerometer.Micro-mechanical accelerometer gyroscope (MAG) that adopts the development of semiconductor fine process technology and the micro-mechanical accelerometer gyroscope that utilizes differential capacitance accelerometer to make are arranged at present.
Differential capacitance accelerometer comprises a housing, by the elastic beam anchoring mass is arranged on the housing base plate, is fixed with responsive broach on the mass, is fixed with fixed fingers on the housing base plate, and responsive broach and fixed fingers constitute detection comb electric capacity.Be fixed with electrode accordingly on the top board at the upper and lower end face of mass and housing that has, the base plate, to form capacity plate antenna, capacity plate antenna is used for the acceleration of measuring vertical in the mass direction.The work ultimate principle of differential capacitance accelerometer is that mass is under the support of elastic beam, deformation takes place down in the effect that is subjected to each axial inertial force, measure the size of each axial deformation quantity by detection comb electric capacity or plates capacitance (variation), thereby record the size of each direction of principal axis acceleration.
Existing accelerometer gyroscope comprises two independently differential capacitance accelerometers, these two accelerometers only are provided with the upper and lower capacity plate antenna of mass, between two accelerometers, be provided with driving element, make the mass of two accelerometers make vibrate in opposite phase, when structure is subjected to angular velocity that the detection side makes progress and linear acceleration input, because Coriolis effect, this input angular velocity is modulated into alternation De Geshi acceleration and acts on the mass.At this moment, mass is subjected to two kinds of inertial force effects simultaneously: the one, and the inertial force that linear acceleration causes; Another is the coriolis force that Corioli's acceleration causes, these two kinds of inertial force same axially on.The voltage difference output signal of the upper and lower capacity plate antenna of two accelerometers is expressed as:
u
1＝k(a+2Ωv?sinω
1t)；
u
2＝k(a-2Ωv?sinω
1t)，
In the formula, k is the constant multiplier of accelerometer, ω
1Be the angular frequency of vibration, Ω is the angular velocity of input.Two formulas are carried out addition and subtracted each other processing, can separate two kinds of parameter components, thereby obtain acceleration and angular velocity information.
There are the following problems for above-mentioned differential capacitance accelerometer gyroscope: 1, require two accelerometers structurally to keep strict symmetry, quality as two masses needs identical, two mass positions will guarantee accurate right alignment etc., so manufacture craft accuracy requirement height.2, since inertial force that acceleration and angular velocity produced same axially on, the caused capacitance variations of two inertial force all is reflected on the capacity plate antenna, therefore need carry out later separation, handle and just can obtain required acceleration and magnitude of angular velocity to output information, therefore, the subsequent treatment program complexity of its information, loaded down with trivial details, follow-up signal treatment circuit complex structure.3, owing to comprise two accelerometers, its structure relative complex, volume and weight are big relatively.4, be applicable to sense acceleration and the orthogonal state of angular velocity direction;
Summary of the invention
The present invention solves the problems referred to above that existing accelerometer gyroscope exists, promptly be applicable to problems such as acceleration and the orthogonal state of angular velocity direction relatively greatly and only owing to comprise the subsequent treatment program complexity of manufacture craft accuracy requirement height that two accelerometers bring, information, loaded down with trivial details, structure relative complex, volume and weight, a kind of single chip double inertia parameter accelerometer gyroscope is provided, and be purpose with the perception hardware configuration that this accelerometer gyroscope is provided only, do not relate to the subsequent treatment and the corresponding treatment circuit of (known) output information.
The present invention adopts following technical scheme to realize: single chip double inertia parameter accelerometer gyroscope, comprise housing, on the housing base plate, mass is arranged by the elastic beam anchoring, the mass both sides are fixed with responsive broach, be fixed with fixed fingers on the housing base plate, mass is made of outside framework and the quality pellet that is fixed in the outside framework, responsive broach is fixed in the both sides outer wall of the outside framework of mass, the both sides inwall of the outside framework of mass is fixed with pectination activity-driven electrode, and the pectination fixed drive electrode that cooperates with pectination activity-driven electrode is fixed on the housing base plate; On the upper and lower end face of quality pellet and housing top board, base plate, be fixed with electrode accordingly.
This accelerometer gyroscope has sensitization to the linear acceleration of z direction of principal axis input.Its measuring principle is similar to traditional combed capacitance type acceleration transducer, according to Newton second law F=ma, the acceleration of z direction makes mass produce the displacement on the z direction, thereby makes the capacitance of the broach electric capacity that is made of responsive broach and fixed fingers change.This accelerometer gyroscope can also responsive angular velocity omega around the input of z axle
zOn pectination fixed drive electrode, apply the driving voltage U of alternation
D, the comb drive that is made of pectination fixed drive electrode and pectination activity-driven electrode produces vibration, and mass is laterally being formed a static driven power.Under the effect of this static driven power, mass will be done simple harmonic oscillation along driving direction, make mass produce linear velocity v
x(is horizontal direction along the x direction).When gyroscope when rotate with angular velocity Ω in z axle relative inertness space, mass will be subjected to along the effect of y direction of principal axis alternation De Geshi inertial force, make mass produce the displacement on the y direction, thereby make the capacitance of the formed capacity plate antenna of counter electrode on the upper and lower end face of quality pellet and housing top board, the base plate change.The variation of the capacitance by broach electric capacity and capacity plate antenna handles to draw acceleration and magnitude of angular velocity by follow-up signal.Aspect input, the present invention adopts the differential capacitance signal detecting mode.The differential capacitance detection mode is comparatively ripe at present a kind of signal detecting mode; Can finely restrain the common-mode noise interference by adopting differential capacitance to detect, improve the signal to noise ratio (S/N ratio) of detected signal greatly; Angular velocity signal of the present invention separates output, detects with acceleration signal, has avoided two kinds of interference between signals, has reduced the difficulty of follow-up signal treatment circuit.
The elastic beam of anchoring quality piece of the present invention adopts folding spring beam, and its end is fixed with anchor block, the anchor block and the base plate anchoring of the folding spring beam in four bights of mass.The elastic beam of this structure makes that the mechanical cross-couplings of all directions is less relatively, and has certain stress relief effect, and very high combination property is arranged.Consider that from the another one angle this kind girder construction is in very big deformation range, all retention wire sexual intercourse of displacement and acting force are considered from improving range and linearity aspect, adopt this structure more desirable.Described folding spring girder construction is existing the application on the micro-mechanical inertia device.
What the present invention adopted is that electrostatic comb drives, simple in structure.Its major advantage is that driving force and displacement are irrelevant, and in conjunction with the folded beam structure, driving amplitude is big, helps improving gyrostatic sensitivity.The present invention is compared with prior art: the integrated detection of monolithic (single mass) of (1) two class inertia parameter.By real-time responsive equidirectional acceleration of same mass and angular velocity, this altitude information fusion has guaranteed high alignment precision.Simultaneously, manufacture craft realizes easily; Simple in structure, volume and weight reduces relatively.(2) two kinds of signals of acceleration and angular velocity are exported separately, are detected, and have reduced the difficulty of the separation of two kinds of signals, have simplified the follow-up signal processing circuits.(3) acceleration and magnitude of angular velocity on can be responsive equidirectional have higher utility.
Description of drawings
Fig. 1 is the inner structure synoptic diagram of single chip double inertia parameter accelerometer gyroscope of the present invention;
Fig. 2 is the A-A sectional view of Fig. 1;
Fig. 3 is for being fixed with the structural upright synoptic diagram of the mass of broach electric capacity and comb drive on it;
Embodiment
Single chip double inertia parameter accelerometer gyroscope, comprise housing 1, on the housing base plate, mass is arranged by elastic beam 2 anchorings, the mass both sides are fixed with responsive broach 3, be fixed with fixed fingers 4 on the housing base plate, mass is made of outside framework 5 and the quality pellet 6 that is fixed in the outside framework, responsive broach 3 is fixed in the both sides outer wall of the outside framework 5 of mass, the both sides inwall of the outside framework 5 of mass is fixed with pectination activity-driven electrode 7, and the pectination fixed drive electrode 8 that cooperates with pectination activity-driven electrode is fixed on the housing base plate; On the upper and lower end face of quality pellet and housing top board, base plate, be fixed with electrode 9,10 accordingly.
Elastic beam 2 is folding spring beam, and its end is fixed with anchor block 11.Folding spring beam is fixed on four bights of mass outside framework, by anchor block and the anchoring of housing base plate.
Quality pellet 6 is fixed by connecting column 12 and outside framework.Like this, electrode can with the shape of quality pellet upper and lower end face, measure-alike, be convenient to electrode shape, determining dimensions.Be the structural symmetry of the piece of ensuring the quality of products, the quality pellet is fixed on the center of outside framework.
The mass both sides are fixed broach electric capacity identical under two static state respectively, and piece is ensured the quality of products when producing displacement in the fixed position, and the capacitance of a broach electric capacity increases, and another reduces, and the difference by two broach electric capacity draws broach changes in capacitance amount.These structures all are the known configurations that is adopted in traditional micro-mechanical inertia device.
For the structure of this accelerometer gyroscope, mainly responsive is the acceleration and the angular velocity of Z direction.So the input of other non-sensitive direction is undesirable to the influence of output.But because the cross-couplings of structure, the input of some non-sensitive directions still exists, and mainly shows:
(1) rotation of mass (housing relatively)
Mass mainly is because the angular acceleration of three directions causes in the rotation of three directions, because mass and driving comb and fixed fingers structurally are symmetrical fully, so situation for these three kinds of rotations, the electric capacity recruitment of every pair of detection comb is identical with its antimeric electric capacity decrease, the capacity plate antenna recruitment on mass top is also identical with mass lower flat plate electric capacity decrease, so mass can not change the value of output differential capacitor amount around three axial rotations.
(2) translation of mass
The mass that causes owing to linear acceleration laterally or vertically is moved along the parallel surface of fixed fingers and movable broach.These two kinds of athletic meeting make reducing over against area of movable pole plate and fixed polar plate, but because the symmetry of structure, the capacitance change of the pole plate of two differential outputs is 0 up and down, promptly the output capacitance variable quantity is unaffected.
As can be seen, cross-linked existence mainly is because the existence of too high cross sensitivity.The main cause that cross sensitivity produces has: 1. the lateral stiffness of elastic beam (as the spring beam etc.) is not enough; 2. mass and spring beam barycenter be not on same plane; 3. the mass displacement is excessive.Want to reduce cross sensitivity, suppress the error that cross-couplings is brought to measurement result, when actual design and making, can adopt: 1. improve the precision of processing technology, make the barycenter of mass and elastic beam be in the same plane as far as possible by structural design; 2. adopt electrostatic force balanced type working method, prevent the over-large displacement of responsive mass; 3. adopt the bigger microstructure of lateral stiffness; 4. on fixed electorde, apply higher DC voltage, improve the electric rigidity of microstructure.These are the principal elements that will consider except that the structure feature when actual design is made.
Claims (3)
1, a kind of single chip double inertia parameter accelerometer gyroscope, comprise housing (1), on the housing base plate, mass is arranged by elastic beam (2) anchoring, the mass both sides are fixed with responsive broach (3), be fixed with fixed fingers (4) on the housing base plate, it is characterized by: mass is by outside framework (5) and be fixed in interior quality pellet (6) formation of outside framework, responsive broach (3) is fixed in the both sides outer wall of the outside framework (5) of mass, the both sides inwall of the outside framework of mass (5) is fixed with pectination activity-driven electrode (7), and the pectination fixed drive electrode (8) that cooperates with pectination activity-driven electrode is fixed on the housing base plate; On the upper and lower end face of quality pellet and housing top board, base plate, be fixed with electrode (9), (10) accordingly.
2, single chip double inertia parameter accelerometer gyroscope as claimed in claim 1 is characterized by: quality pellet (6) is fixed by connecting column (12) and outside framework.
3, single chip double inertia parameter accelerometer gyroscope as claimed in claim 1 or 2 is characterized by: elastic beam (2) is folding spring beam, and its end is fixed with anchor block (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100567516A CN100338470C (en) | 2005-03-25 | 2005-03-25 | Single chip double inertia parameter accelerometer gyroscope |
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|---|---|---|---|
| CNB2005100567516A CN100338470C (en) | 2005-03-25 | 2005-03-25 | Single chip double inertia parameter accelerometer gyroscope |
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| CN1648673A true CN1648673A (en) | 2005-08-03 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100425993C (en) * | 2006-01-25 | 2008-10-15 | 哈尔滨工业大学 | Differential capacitance type acceleration transducer with frame structure |
| CN100437117C (en) * | 2007-04-19 | 2008-11-26 | 中北大学 | Composite beam piezoresistive accelerometer |
| CN1948906B (en) * | 2006-11-10 | 2011-03-23 | 北京大学 | Capacitive type complete decoupling horizontal axis miniature mechanical gyro |
| CN102798733A (en) * | 2011-05-26 | 2012-11-28 | 罗伯特·博世有限公司 | Inertial sensor |
| CN102101635B (en) * | 2009-12-17 | 2013-06-05 | 原相科技股份有限公司 | Mass body applicable to micro-electromechanical sensor and three-axis micro-electromechanical sensor using same |
| CN103712612A (en) * | 2012-09-28 | 2014-04-09 | 意法半导体股份有限公司 | Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device |
| CN104215236A (en) * | 2013-06-05 | 2014-12-17 | 中国科学院地质与地球物理研究所 | MEMS reverse vibratory gyroscope and manufacturing process thereof |
| CN105044387A (en) * | 2015-08-31 | 2015-11-11 | 歌尔声学股份有限公司 | Inertia measuring device and inertia measuring system |
| CN107063223A (en) * | 2017-04-17 | 2017-08-18 | 东南大学 | One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000055670A (en) * | 1998-08-07 | 2000-02-25 | Toyota Central Res & Dev Lab Inc | Oscillating type detector |
| US6257059B1 (en) * | 1999-09-24 | 2001-07-10 | The Charles Stark Draper Laboratory, Inc. | Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation |
| CN2397473Y (en) * | 1999-09-29 | 2000-09-20 | 中国科学院上海冶金研究所 | Capacitive micromechanical resonant gyroscope with grating structure |
| JP4126826B2 (en) * | 1999-11-05 | 2008-07-30 | 株式会社デンソー | Angular velocity sensor |
| CN2424450Y (en) * | 2000-06-02 | 2001-03-21 | 中国科学院上海冶金研究所 | Micromechanical comb capacity type acceleration transducer |
| KR100418624B1 (en) * | 2001-02-12 | 2004-02-11 | (주) 인텔리마이크론즈 | a gyroscope and a manufacturing method of the same |
| US20040231420A1 (en) * | 2003-02-24 | 2004-11-25 | Huikai Xie | Integrated monolithic tri-axial micromachined accelerometer |
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2005
- 2005-03-25 CN CNB2005100567516A patent/CN100338470C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100425993C (en) * | 2006-01-25 | 2008-10-15 | 哈尔滨工业大学 | Differential capacitance type acceleration transducer with frame structure |
| CN1948906B (en) * | 2006-11-10 | 2011-03-23 | 北京大学 | Capacitive type complete decoupling horizontal axis miniature mechanical gyro |
| CN100437117C (en) * | 2007-04-19 | 2008-11-26 | 中北大学 | Composite beam piezoresistive accelerometer |
| CN102101635B (en) * | 2009-12-17 | 2013-06-05 | 原相科技股份有限公司 | Mass body applicable to micro-electromechanical sensor and three-axis micro-electromechanical sensor using same |
| CN102798733A (en) * | 2011-05-26 | 2012-11-28 | 罗伯特·博世有限公司 | Inertial sensor |
| CN102798733B (en) * | 2011-05-26 | 2018-10-19 | 罗伯特·博世有限公司 | Inertial sensor |
| US9989364B2 (en) | 2012-09-28 | 2018-06-05 | Stmicroelectronics S.R.L. | Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device |
| CN103712612A (en) * | 2012-09-28 | 2014-04-09 | 意法半导体股份有限公司 | Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device |
| CN104215236A (en) * | 2013-06-05 | 2014-12-17 | 中国科学院地质与地球物理研究所 | MEMS reverse vibratory gyroscope and manufacturing process thereof |
| CN104215236B (en) * | 2013-06-05 | 2016-12-28 | 中国科学院地质与地球物理研究所 | A kind of anti-phase vibratory gyroscope of MEMS and manufacturing process thereof |
| CN105044387A (en) * | 2015-08-31 | 2015-11-11 | 歌尔声学股份有限公司 | Inertia measuring device and inertia measuring system |
| CN107063223A (en) * | 2017-04-17 | 2017-08-18 | 东南大学 | One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement |
| CN107063223B (en) * | 2017-04-17 | 2019-04-30 | 东南大学 | One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement |
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| CN100338470C (en) | 2007-09-19 |
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