CN105044387A - Inertia measuring device and inertia measuring system - Google Patents
Inertia measuring device and inertia measuring system Download PDFInfo
- Publication number
- CN105044387A CN105044387A CN201510549169.7A CN201510549169A CN105044387A CN 105044387 A CN105044387 A CN 105044387A CN 201510549169 A CN201510549169 A CN 201510549169A CN 105044387 A CN105044387 A CN 105044387A
- Authority
- CN
- China
- Prior art keywords
- axis
- detector switch
- detection capacitance
- axis detector
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 196
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 238000005259 measurement Methods 0.000 claims description 51
- 238000012545 processing Methods 0.000 claims description 24
- 101100112673 Rattus norvegicus Ccnd2 gene Proteins 0.000 claims description 11
- 230000008859 change Effects 0.000 claims description 10
- 230000013011 mating Effects 0.000 claims description 9
- 238000013519 translation Methods 0.000 claims description 8
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 239000003990 capacitor Substances 0.000 abstract description 8
- 238000004873 anchoring Methods 0.000 abstract 1
- 230000001133 acceleration Effects 0.000 description 16
- 238000013461 design Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000005669 field effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical group 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Abstract
The invention discloses an inertia measuring device and an inertia measuring system. The mass block (1) of the inertia measuring device is connected on an anchoring part (3) via two elastic torsion beams (4) which extend along an X-axis, and mass of the part, which is arranged at the two sides of the X-axis, of the mass block (1) is unequal. The substrate of the inertia measuring device is provided with a fixed electrode group which is provided with four fixed electrodes (2) so that first to fourth detection capacitors are formed by the four fixed electrodes (2) and the mass block (1), wherein differential capacitors for X-axis inertial signal detection are formed by the first and second detection capacitors, and the third and fourth detection capacitors, and differential capacitors for Y-axis inertial signal detection are formed by the first and fourth detection capacitors, and the second and third detection capacitors. X-axis and Y-axis inertial signal detection can be realized by the device via a mode of sharing the fixed electrode group so that sensitivity can be enhanced under the condition of the same chip area, and chip area can be saved under the condition of the same sensitivity.
Description
Technical field
The invention belongs to micro electronmechanical (MEMS) field, more precisely, the present invention relates to micro electronmechanical inertia measurement device and adopt the inertial measurement system of this kind of inertia measurement device.
Background technology
At present, inertial measurement system generally adopts differential capacitance principle to carry out the detection of inertial signal, differential capacitance specifically by the electrode pair formation that is relatively fixed in the X-axis direction of inertia measurement device carries out the detection of the inertial signal of X-direction, and carries out the detection of the inertial signal of Y direction by the differential capacitance that the electrode pair that is relatively fixed in the Y-axis direction of inertia measurement device is formed.The inertial measurement system of this kind of inertial signal detection mode is adopted to make inertia measurement device that independently fixed electorde pair is set separately in X-direction and Y direction due to needs, therefore, to obtain higher sensitivity, then fixed electorde consumes larger on chip area, is unfavorable for the control of chip size.
Summary of the invention
An object of the present invention is to provide the new solution of the inertial measurement system of a kind of inertia measurement device and correspondence.
According to a first aspect of the invention, provide a kind of inertia measurement device, it comprises substrate, is positioned at the mass of types of flexure and fixing anchor portion over the substrate, described anchor site is in the structure centre of described mass, described mass is turned round beam by two elasticity extended along X-axis and is connected in described anchor portion, and described two elasticity turn round beam about Y-axis symmetry, wherein, described X-axis is mutually vertical in the plane in described mass institute with described Y-axis, and all through described structure centre; The quality being positioned at the part of Y-axis both sides of described mass is equal, and the quality being positioned at the part of X-axis both sides is unequal;
Described inertia measurement device also comprises setting at least one fixed electorde group over the substrate, described fixed electorde group has four fixed electordes, described mass forms the first Detection capacitance respectively as four fixed electordes of movable electrode and described fixed electorde group, second Detection capacitance, 3rd Detection capacitance and the 4th Detection capacitance, wherein, described first Detection capacitance and described second Detection capacitance, and described 3rd Detection capacitance and described 4th Detection capacitance all form the differential capacitance that X-axis inertial signal detects, and described first Detection capacitance and described 4th Detection capacitance, and described second Detection capacitance and described 3rd Detection capacitance all form the differential capacitance that Y-axis inertial signal detects.
Preferably, the part being positioned at X-axis side of described mass is provided with lightening hole, to make the quality being positioned at the part of X-axis both sides of described mass unequal.
Preferably, described mass is provided with mating holes on the position of the described fixed electorde of correspondence, and described fixed electorde extends upwardly in corresponding mating holes.
Preferably, four fixed electordes of described fixed electorde group are arranged symmetrically with about described X-axis and described Y-axis.
Preferably, described substrate is provided with a described fixed electorde group.
According to a second aspect of the invention, provide a kind of inertial measurement system, it comprises detecting unit and above-mentioned inertia measurement device described in any one, wherein, described first Detection capacitance is consistent along change direction during Y direction translation at described mass with described second Detection capacitance, and described first Detection capacitance is consistent with the change direction of described 4th Detection capacitance when described mass rotates around described anchor portion; Described mass is connected with modulation signal input end as movable electrode;
Described detecting unit comprises each four Y-axis detector switches of difference processing circuit, control circuit and corresponding each fixed electorde group and each four X-axis detector switches of correspondence each fixed electorde group; Fixed electorde one branch road of described first Detection capacitance is connected with the first input end of described difference processing circuit by the first Y-axis detector switch, and another branch road is connected with the second input end of described difference processing circuit by the first X-axis detector switch; Fixed electorde one branch road of described second Detection capacitance is connected with described first input end by the second Y-axis detector switch, and another branch road is connected with described first input end by the second X-axis detector switch; Fixed electorde one branch road of described 3rd Detection capacitance is connected with described second input end by the 3rd Y-axis detector switch, and another branch road is connected with described first input end by the 3rd X-axis detector switch; Fixed electorde one branch road of described 4th Detection capacitance is connected with described second input end by the 4th Y-axis detector switch, and another branch road is connected with described second input end by the 4th X-axis detector switch;
Described control circuit is set to for exporting Y-axis detector switch signal to all Y-axis detector switches and for exporting X-axis detector switch signal to all X-axis detector switches, and described Y-axis detector switch signal and described X-axis detector switch signal make described Y-axis detector switch and the timesharing of described X-axis detector switch closed.
Preferably, described Y-axis detector switch and described X-axis detector switch are identical switch.
Preferably, described Y-axis detector switch signal and described X-axis detector switch signal are pwm signal.
Preferably, having regular time between the significant level of described Y-axis detector switch signal and the adjacent significant level of described X-axis detector switch signal postpones, wherein, the significant level of described Y-axis detector switch signal is the level making described Y-axis detector switch closed, and the significant level of described X-axis detector switch signal is the level making described X-axis detector switch closed.
Preferably, described Y-axis detector switch signal is identical with the cycle of described X-axis detector switch signal and dutycycle is also identical.
Inertia measurement device of the present invention and inertial measurement system, the detection of X-axis, Y-axis inertial signal can be realized by the mode of four fixed electordes sharing each fixed electorde group, when Y direction has acceleration to input, mass can in Y direction generation translation motion, therefore, first Detection capacitance is in parallel with the second Detection capacitance, and the 3rd Detection capacitance is in parallel with the 3rd Detection capacitance, just can realize the detection of Y direction acceleration; And when X-direction has acceleration to input, mass can rotate around anchor portion, therefore, the first Detection capacitance is in parallel with the 4th Detection capacitance, and the second Detection capacitance is in parallel with the 3rd Detection capacitance, just can realize the detection of X-direction acceleration.Because inertia measurement device of the present invention can realize the detection of X-axis, Y-axis inertial signal by the mode of four fixed electordes sharing each fixed electorde group, therefore it can improve sensitivity when equal chip area, then can saving chip area when equal sensitivity, be conducive to the Miniaturization Design of chip.
The present inventor finds, in the prior art, because needs arrange separately independently fixed electorde pair in X-direction and Y direction, so to obtain higher sensitivity, then there is fixed electorde on chip area, consume larger problem, be unfavorable for the control of chip size.Therefore, the technical assignment that the present invention will realize or technical matters to be solved are that those skilled in the art never expect or do not anticipate, therefore the present invention is a kind of new technical scheme.
By referring to the detailed description of accompanying drawing to exemplary embodiment of the present invention, further feature of the present invention and advantage thereof will become clear.
Accompanying drawing explanation
In the description combined and the accompanying drawing forming a part for instructions shows embodiments of the invention, and illustrate that one is used from and explains principle of the present invention together with it.
Fig. 1 is the structural representation of a kind of embodiment according to inertia measurement device of the present invention;
Fig. 2 is the structural representation of the another kind of embodiment according to inertia measurement device of the present invention;
Fig. 3 is the circuit theory diagrams of a kind of embodiment carrying out inertial signal detection according to inertial measurement system of the present invention;
Fig. 4 is the schematic equivalent circuit utilizing circuit structure shown in Fig. 3 to carry out the detection of Y-axis inertial signal;
Fig. 5 is the schematic equivalent circuit utilizing circuit structure shown in Fig. 3 to carry out the detection of X-axis inertial signal;
Fig. 6 is the sequential chart of the Y-axis detector switch signal of circuit structure shown in corresponding diagram 3 and a kind of embodiment of X-axis detector switch signal.
Description of reference numerals:
1-mass; 101-lightening hole;
102-mating holes; 2,2a, 2b, 2c, 2d-fixed electorde;
C12a-first Detection capacitance; C12b-second Detection capacitance;
C12c-the 3rd Detection capacitance; C12d-the 4th Detection capacitance;
3-anchor portion; M0-structure centre;
4-elasticity turns round beam; Second input end of Vin2-difference processing circuit;
U1-difference processing circuit; The first input end of Vin1-difference processing circuit;
K1a-first Y-axis detector switch; The output terminal of Vout-difference processing circuit;
K1b-second Y-axis detector switch; K1c-the 3rd Y-axis detector switch;
K1d-the 4th Y-axis detector switch; K2a-first X-axis detector switch;
K2b-second X-axis detector switch; K2c-the 3rd X-axis detector switch;
K2d-the 4th X-axis detector switch; Vm-modulation signal;
Pk1-Y shaft detection switching signal; Pk2-X shaft detection switching signal.
Embodiment
Various exemplary embodiment of the present invention is described in detail now with reference to accompanying drawing.It should be noted that: unless specifically stated otherwise, otherwise positioned opposite, the numerical expression of the parts of setting forth in these embodiments and step and numerical value do not limit the scope of the invention.
Illustrative to the description only actually of at least one exemplary embodiment below, never as any restriction to the present invention and application or use.
May not discuss in detail for the known technology of person of ordinary skill in the relevant, method and apparatus, but in the appropriate case, described technology, method and apparatus should be regarded as a part for instructions.
In all examples with discussing shown here, any occurrence should be construed as merely exemplary, instead of as restriction.Therefore, other example of exemplary embodiment can have different values.
It should be noted that: represent similar terms in similar label and letter accompanying drawing below, therefore, once be defined in an a certain Xiang Yi accompanying drawing, then do not need to be further discussed it in accompanying drawing subsequently.
The fixed electorde that the present invention exists in order to the inertial measurement system solving existing inertia measurement device and correspondence consumes larger problem on chip area, provide a kind of new inertia measurement device, as shown in Figure 1, inertia measurement device of the present invention comprises substrate (not shown), the mass 1 being positioned at types of flexure and the anchor portion 3 be fixed on substrate, this anchor portion 3 is positioned at the structure centre M0 of mass 1, this mass 1 is turned round beam 4 by two elasticity extended along X-axis and is connected in anchor portion 3, be specially mass 1 to turn round beam 4 by two elasticity and be connected on the sidewall of anchor portion 3, and two elasticity turn round beam 4 about Y-axis symmetry, elasticity is herein turned round beam 4 and is extended along X-axis and be interpreted as being that the center line that elasticity turns round beam 4 overlaps with X-axis, wherein, this X-axis is mutually vertical in the plane in mass 1 institute with Y-axis, and all through structure centre M0, namely X-axis and Y-axis intersect at structure centre MO, the quality being positioned at the part of Y-axis both sides of this mass 1 is equal, and the quality being positioned at the part of X-axis both sides is unequal.Above structure makes the sensitive fashion of mass 1 to be: when there is the acceleration input along X-direction in the external world, because anchor portion 3 is positioned at the structure centre M0 of mass 1, elasticity is turned round beam 4 and is extended along X-direction, and the quality being positioned at the part of X-axis both sides of mass 1 is unequal, whole mass 1 is made with anchor portion 2 for fulcrum rotates, thus to make its acceleration signal to X-direction responsive; When there is the acceleration input along Y direction in the external world, because anchor portion 3 is positioned at the structure centre M0 of mass 1, elasticity is turned round beam 4 and is extended along X-direction, makes whole mass 1 in the Y-axis direction translation motion can occur, thus makes its acceleration signal to Y direction responsive.
On said structure basis, inertia measurement device of the present invention also comprises at least one the fixed electorde group be arranged on substrate, this fixed electorde group has four fixed electordes 2, be respectively fixed electorde 2a, fixed electorde 2b, fixed electorde 2c and fixed electorde 2d, this mass 1 forms the first Detection capacitance C12a as public movable electrode and fixed electorde 2a, forms the second Detection capacitance C12b with fixed electorde 2b, forms the 3rd Detection capacitance C12c with fixed electorde 2c and form the 4th Detection capacitance C12d with fixed electorde 2d; Wherein, for four Detection capacitances C12a, C12b, C12c, C12d being formed by same fixed electorde group, this the first Detection capacitance C12a and the second Detection capacitance C12b and the 3rd Detection capacitance C12c and the 4th Detection capacitance C12d all forms the differential capacitance that X-axis inertial signal detects, namely the first Detection capacitance C12a is equal with the variable quantity of the 4th Detection capacitance C12d when mass 1 rotates around anchor portion 3 with the second Detection capacitance C12b and the 3rd Detection capacitance C12c, and changes in the opposite direction; First Detection capacitance C12a and the 4th Detection capacitance C12d and the second Detection capacitance C12b and the 3rd Detection capacitance C12c all forms the differential capacitance that Y-axis inertial signal detects, namely the first Detection capacitance C12a is equal along variable quantity during Y direction translation at mass 1 with the 3rd Detection capacitance C12c with the 4th Detection capacitance C12d and the second Detection capacitance C12b, and changes in the opposite direction.Fig. 1 shows the alternative embodiment of the one arranging a fixed electorde group on substrate, when arranging two or more fixed electorde group, only need configure according to above-mentioned requirements.
Inertia device of the present invention is utilized to need timesharing to carry out the detection of X-axis, Y-axis inertial signal, consistent along change direction during Y direction translation at mass 1 with the second Detection capacitance C12b with the first Detection capacitance C12a shown in Fig. 1, and the first Detection capacitance C12a is consistent with the change direction of the 4th Detection capacitance C12d when mass 1 rotates around anchor portion 3 example, this timesharing Cleaning Principle is:
When carrying out the detection of Y-axis inertial signal, by in parallel for all first Detection capacitance C12a and all second Detection capacitance C12b, obtain equivalent Detection capacitance CY1, and by parallel for all 3rd Detection capacitance C12c and all 4th Detection capacitance C12d, obtain equivalent Detection capacitance CY2, be about to be connected in parallel along the Detection capacitance that change direction during Y direction translation is consistent at mass 1; Because the first Detection capacitance C12a and the 4th Detection capacitance C12d and the second Detection capacitance C12b and the 3rd Detection capacitance C12c all forms the differential capacitance that Y-axis inertial signal detects, therefore, equivalent Detection capacitance CY1 and the equivalent Detection capacitance CY2 differential capacitance that will form Y-axis inertial signal and detect.At this, due to the first Detection capacitance C12a and the second Detection capacitance C12b, and the 3rd Detection capacitance C12c and the 4th Detection capacitance C12d all form the differential capacitance that X-axis inertial signal detects, therefore, after the first Detection capacitance C12a is in parallel with the second Detection capacitance C12b, the capacitance variations that first Detection capacitance C12a and the second Detection capacitance C12b produces because of X-direction acceleration will be cancelled out each other, equivalent Detection capacitance CY1 is remained unchanged, in like manner, after the 3rd Detection capacitance C12c is in parallel with the 4th Detection capacitance C12d, the capacitance variations that 3rd Detection capacitance C12c and the 4th Detection capacitance C12d produces because of X-direction acceleration will be cancelled out each other, equivalent Detection capacitance CY2 is remained unchanged, all these can ensure when carrying out Y-axis inertial signal and detecting insensitive to X-direction acceleration.
When carrying out the detection of X-axis inertial signal, by in parallel for all first Detection capacitance C12a and all 4th Detection capacitance C12d, obtain equivalent Detection capacitance CX1, and by parallel for all second Detection capacitance C12b and all 3rd Detection capacitance C12c, obtain equivalent Detection capacitance CX2, be about to the Detection capacitance that change direction is consistent when mass 1 rotates around anchor portion 3 and be connected in parallel; Because the first Detection capacitance C12a and the second Detection capacitance C12b and the 3rd Detection capacitance C12c and the 4th Detection capacitance C12d all forms the differential capacitance that X-axis inertial signal detects, therefore, equivalent Detection capacitance CX1 and the equivalent Detection capacitance CX2 differential capacitance that will form X-axis inertial signal and detect.At this, due to the first Detection capacitance C12a and the 4th Detection capacitance C12d, and the 3rd Detection capacitance C12c and the second Detection capacitance C12b all form the differential capacitance that Y-axis inertial signal detects, therefore, after the first Detection capacitance C12a is in parallel with the 4th Detection capacitance C12d, the capacitance variations that first Detection capacitance C12a and the 4th Detection capacitance C12d produces because of Y direction acceleration will be cancelled out each other, equivalent Detection capacitance CX1 is remained unchanged, in like manner, after the 3rd Detection capacitance C12c is in parallel with the second Detection capacitance C12b, the capacitance variations that 3rd Detection capacitance C12c and the second Detection capacitance C12b produces because of Y direction acceleration will be cancelled out each other, equivalent Detection capacitance CX2 is remained unchanged, all these can ensure when carrying out X-axis inertial signal and detecting insensitive to Y direction acceleration.
As can be seen here, utilize inertia measurement device of the present invention can be realized the detection of X-axis, Y-axis inertial signal by the mode of four fixed electordes sharing each fixed electorde group, therefore, it can improve sensitivity when equal chip area, then can saving chip area when equal sensitivity, be conducive to the Miniaturization Design of chip.
In a specific embodiment of the present invention, in order to make the quality being positioned at the part of X-axis both sides of mass 1 unequal, lightening hole 101 can be set in the part being positioned at X-axis side of mass 1.This lightening hole 101 can be multiple, in matrix distribution.This lightening hole 101 can be through hole, and when making, the method by etching is formed; Also can be blind hole, etch by the mode increasing one deck mask.In another specific embodiment of the present invention, also can by increasing balancing weight to make the quality being positioned at the part of X-axis both sides of mass 1 unequal.
The unequal embodiment of the quality being arranged in the part of X-axis both sides of mass 1 is made by arranging lightening hole 101, in order to make the quality being positioned at the part of Y-axis both sides of mass 1 equal, lightening hole 101 is preferably made to be arranged symmetrically with about Y-axis, this can make the barycenter being positioned at the part of Y-axis both sides of mass 1 symmetrical about Y-axis, and then improves the measurement accuracy of inertia measurement device further.In like manner, making the unequal embodiment of the quality being arranged in the part of X-axis both sides of mass 1 by increasing balancing weight, in order to make the quality being positioned at the part of Y-axis both sides of mass 1 equal, balancing weight is preferably made to be arranged symmetrically with about Y-axis.
Inertia measurement device of the present invention, above-mentioned fixed polar plate 2 can adopt capacitor plate mechanism well-known to those skilled in the art.In one particular embodiment of the present invention, each fixed polar plate 2 can be distributed in the periphery of mass 1, to form Detection capacitance with the sidewall of mass 1 respectively.In another specific embodiment of the present invention, mass 1 is provided with the mating holes 102 of hollow out for the position of fixed electorde 2, fixed electorde 2 extends upwardly in corresponding mating holes 102, Detection capacitance is formed with the sidewall of mating holes 102 to make fixed electorde 2, at this, the structure that mating holes 102 as shown in Figure 1 can be adopted to configure with fixed electorde 2 one_to_one corresponding, also can adopt the structure of corresponding two fixed electordes 2 of a mating holes 102 as shown in Figure 2.
In one particular embodiment of the present invention, meet the fixed electorde group of above-mentioned condition for the ease of design, its four fixed electordes 2 can be made to be arranged symmetrically with about X-axis and Y-axis.To this, can at the first Detection capacitance C12a and the second Detection capacitance C12b, and the 3rd Detection capacitance C12c and the 4th Detection capacitance C12d all form the differential capacitance that X-axis inertial signal detects, first Detection capacitance C12a and the 4th Detection capacitance C12d, and second Detection capacitance C12b and the 3rd Detection capacitance C12c all form on the basis of the differential capacitance that Y-axis inertial signal detects, realization makes the first Detection capacitance C12a and the 3rd Detection capacitance C12c, and second Detection capacitance C12b and the 4th Detection capacitance C12d all form X-axis, the design of the differential capacitance that Y-axis inertial signal detects.
In another specific embodiment of the present invention, if arrange even number fixed electorde group, then all fixed electorde groups are made to be arranged symmetrically with about X-axis; If arrange odd number fixed electorde group, then make four of one of them fixed electorde group fixed electordes 2 be arranged symmetrically with about X-axis and Y-axis, and remaining even number fixed electorde group is arranged symmetrically with about X-axis.
Because inertia measurement device of the present invention is when carrying out X-axis, the detection of Y-axis inertial signal, all that the differential capacitance formed by two fixed polar plate parallel connections is detected, therefore, inertia device of the present invention can obtain higher measurement sensistivity when arranging a fixed electorde group, it is compared with the existing inertia device that can obtain same sensitivity, less size can be had, be conducive to the miniaturization of inertia device.
Because inertia measurement device of the present invention only relates to the improvement detected X-axis, Y-axis inertial signal, therefore the setting of the Z axis Detection capacitance vertical with X-axis, Y-axis and detection mode are not described.But, it is clear to the skilled person that, if need to carry out the detection of Z axis inertial signal, then can form Z axis Detection capacitance on the basis of inertia measurement device of the present invention, to carry out separately the detection of Z axis inertial signal, this can arrange Z axis fixed electorde on substrate, itself and mass 1 is made to form Z axis Detection capacitance, like this, when there is the acceleration input along Z-direction in the external world, because anchor portion 3 is positioned at the structure centre M0 of mass 1, elasticity is turned round beam 4 and is extended along X-direction, and the quality being positioned at the part of X-axis both sides of mass 1 is unequal, whole mass 1 can be swung around X-axis for fulcrum with anchor portion 2, form seesaw swinging structure, thus make its acceleration signal to Z-direction responsive, in addition, also by the mode configuring separately a single-axis accelerometer, Z axis inertial signal can be detected.
The present invention is on the basis of above-mentioned inertia measurement device, in order to X-axis, Y-axis inertial signal directly can be exported, and the interlock circuit of X-axis, Y-axis inertial signal is obtained without the need to additional configuration in use, present invention also offers a kind of inertial measurement system as shown in Figure 3, it comprises detecting unit and inertia measurement device of the present invention, the mass 1 of this inertia measurement device is connected with modulation signal input end as movable electrode, to receive the modulation signal Vm through the input of modulation signal input end; This detecting unit comprises each four Y-axis detector switches of difference processing circuit U 1, control circuit and corresponding fixed electorde group and each four X-axis detector switches of corresponding fixed electorde group, and namely each fixed electorde group all has four corresponding Y-axis detector switches and four X-axis detector switches.As shown in Figure 3, consistent along change direction during Y direction translation at mass 1 with the second Detection capacitance C12b according to the first Detection capacitance C12a in fixed electorde group, and the first Detection capacitance C12a is consistent with the change direction of the 4th Detection capacitance C12d when mass 1 rotates around anchor portion 3 when arranging, fixed electorde 2a mono-branch road of this first Detection capacitance C12a is connected with the first input end Vin1 of difference processing circuit U 1 by the first Y-axis detector switch K1a, and another branch road is connected with the second input end Vin2 of difference processing circuit U 1 by the first X-axis detector switch K2a; Fixed electorde 2b mono-branch road of the second Detection capacitance C12b is connected with first input end Vin1 by the second Y-axis detector switch K1b, and another branch road is connected with first input end Vin2 by the second X-axis detector switch K2b; Fixed electorde 2c mono-branch road of the 3rd Detection capacitance C12c is connected with the second input end Vin2 by the 3rd Y-axis detector switch K1c, and another branch road is connected with first input end Vin1 by the 3rd X-axis detector switch K2c; Fixed electorde 2d mono-branch road of the 4th Detection capacitance C12d is connected with the second input end Vin2 by the 4th Y-axis detector switch K1d, and another branch road is connected with the second input end Vin2 by the 4th X-axis detector switch K2d; Wherein, first input end Vin1 and the second input end Vin2 is the positive and negative input end of difference processing circuit, and first input end Vin1 can be positive input terminal, also can be negative output terminal.This control circuit is set to for exporting Y-axis detector switch signal Pk1 to all Y-axis detector switches and for exporting X-axis detector switch signal Pk2 to all X-axis detector switches, and Y-axis detector switch signal Pk1 and X-axis detector switch signal Pk2 make Y-axis detector switch and the timesharing of X-axis detector switch closed.
This difference processing circuit can adopt the existing difference processing circuit utilizing differential capacitance principle to carry out inertial signal detection, this difference processing circuit generally includes differential amplifier circuit, demodulator circuit and filtering circuit, at this, because difference processing circuit itself is not improvement of the present invention, therefore no longer its concrete structure is repeated.
Fig. 4 shows and controls all Y-axis detector switch K1a at Y-axis detector switch signal Pk1, K1b, K1c, K1d closes, and X-axis detector switch signal PK2 controls all X-axis detector switch K2a, K2b, K2c, equivalent circuit diagram when K2d disconnects, this kind of structure achieves the first input end Vin1 that the first Detection capacitance C12a and the second Detection capacitance C12b is connected in parallel to difference processing circuit U 1, 3rd Detection capacitance C12c and the 4th Detection capacitance C12d is connected in parallel to the difference output mode of the second input end Vin2 of difference processing circuit U 1, therefore, known with reference to above-mentioned explanation, this kind of structure can carry out the detection of Y direction inertial signal, this illustrates when movable electrode receives modulation signal Vm, the output end vo ut of difference processing circuit U 1 will export Y direction inertial signal.
Fig. 5 shows and controls all Y-axis detector switch K1a at Y-axis detector switch signal Pk1, K1b, K1c, K1d disconnects, and X-axis detector switch signal PK2 controls all X-axis detector switch K2a, K2b, K2c, equivalent circuit diagram when K2d closes, this kind of structure achieves the second input end Vin2 that the first Detection capacitance C12a and the 4th Detection capacitance C12d is connected in parallel to difference processing circuit U 1, 3rd Detection capacitance C12c and the second Detection capacitance C12b is connected in parallel to the difference output mode of the first input end Vin1 of difference processing circuit U 1, therefore, known with reference to above-mentioned explanation, this kind of structure can carry out the detection of X-direction inertial signal, this illustrates when movable electrode receives modulation signal Vm, the output end vo ut of difference processing circuit U 1 will export X-direction inertial signal.
Above-mentioned Y-axis detector switch and X-axis detector switch can adopt field effect transistor or triode, so that integrated on chip of detecting unit, this field effect transistor is preferably Metal-Oxide Semiconductor field effect transistor (MOSFET).For field effect transistor, Y-axis detector switch signal Pk1 and X-axis detector switch signal Pk2 controls the on off operating mode of Y-axis detector switch and X-axis detector switch by its grid correspondence; For triode, Y-axis detector switch signal Pk1 and X-axis detector switch signal Pk2 controls the on off operating mode of Y-axis detector switch and X-axis detector switch by its base stage correspondence.
As shown in Figure 6, above-mentioned Y-axis detector switch signal Pk1 and X-axis detector switch signal Pk2 can be pwm signal, such control circuit just can utilize the realization such as single-chip microcomputer or FPGA, specifically frequency division is carried out to the clock signal of access chip, and the mode utilizing timer to adjust dutycycle obtains corresponding Y-axis detector switch signal Pk1 and X-axis detector switch signal Pk2.
When the significant level of Y-axis detector switch signal is consistent with the significant level of X-axis detector switch signal, can inversion operation be carried out by phase inverter to Y-axis detector switch signal and obtain X-axis detector switch signal, wherein, the significant level of Y-axis detector switch signal is the level making Y-axis detector switch closed, the significant level of X-axis detector switch signal is the level making described X-axis detector switch closed, therefore, significant level specifically depends on the selection of X-axis detector switch and Y-axis detector switch.
In order to avoid there is the problem that X-axis detector switch and Y-axis detector switch are simultaneously closed because of parameter differences, as shown in Figure 6, between the significant level and the adjacent significant level of X-axis detector switch signal of Y-axis detector switch signal, preferably arrange regular time postpones Δ T.This time delay Δ T is generally Microsecond grade, even nanosecond can play the effect preventing X-axis detector switch and Y-axis detector switch from simultaneously closing, therefore, this time delay Δ T can be obtained, namely by obtaining this time delay Δ T the action time of multiple cmos device by the mode of setting up even number of inverters.If need to obtain longer time delays, also realize by phase shifter.
For the ease of forming the Y-axis detector switch signal and the X-axis detector switch signal that meet timesharing testing conditions, in one particular embodiment of the present invention, this Y-axis detector switch and X-axis detector switch are identical switch, here it is all identical with parameter that identical comprises type, this can make Y-axis detector switch in the scope that error allows, have substantially identical switching characteristic with X-axis detector switch, and then is down to minimum by required time delay Δ T.
For the ease of subsequent conditioning circuit Analysis of X axle, Y-axis inertial signal, as shown in Figure 6, this Y-axis detector switch signal Pk1 is preferably the cycle identical (cycle is T) with X-axis detector switch signal Pk2 and the also identical pwm signal of dutycycle.Further, the significant level of Y-axis detector switch signal Pk1 is preferably consistent with the significant level of X-axis detector switch signal Pk2, such as, be high level.
The various embodiments described above primary focus describes the difference with other embodiments, but it will be clear for those skilled in the art that the various embodiments described above can be used alone as required or be combined with each other.
Although be described in detail specific embodiments more of the present invention by example, it should be appreciated by those skilled in the art, above example is only to be described, instead of in order to limit the scope of the invention.It should be appreciated by those skilled in the art, can without departing from the scope and spirit of the present invention, above embodiment be modified.Scope of the present invention is limited by claims.
Claims (10)
1. an inertia measurement device, it is characterized in that: comprise substrate, be positioned at the mass (1) of types of flexure and fixing anchor portion (3) over the substrate, described anchor portion (3) is positioned at the structure centre (M0) of described mass (1), described mass (1) is turned round beam (4) by two elasticity extended along X-axis and is connected in described anchor portion (3), and described two elasticity turn round beam (4) about Y-axis symmetry, wherein, described X-axis is mutually vertical in the plane in described mass (1) institute with described Y-axis, and all through described structure centre (M0), the quality being positioned at the part of Y-axis both sides of described mass (1) is equal, and the quality being positioned at the part of X-axis both sides is unequal,
Described inertia measurement device also comprises setting at least one fixed electorde group over the substrate, described fixed electorde group has four fixed electordes (2), described mass (1) forms the first Detection capacitance (C12a) respectively as four fixed electordes (2) of movable electrode and described fixed electorde group, second Detection capacitance (C12b), 3rd Detection capacitance (C12c) and the 4th Detection capacitance (C12d), wherein, first Detection capacitance (C12a) and described second Detection capacitance (C12b), and described 3rd Detection capacitance (C12c) and described 4th Detection capacitance (C12d) all form the differential capacitance that X-axis inertial signal detects, and described first Detection capacitance (C12a) and described 4th Detection capacitance (C12d), and described second Detection capacitance (C12b) and described 3rd Detection capacitance (C12c) all form the differential capacitance that Y-axis inertial signal detects.
2. inertia measurement device according to claim 1, it is characterized in that: the part being positioned at X-axis side of described mass (1) is provided with lightening hole (101), to make the quality being positioned at the part of X-axis both sides of described mass (1) unequal.
3. inertia measurement device according to claim 1, it is characterized in that, described mass (1) is provided with mating holes (102) on the position of the described fixed electorde of correspondence (2), and described fixed electorde (2) extends upwardly in corresponding mating holes (102).
4. inertia measurement device according to claim 1, is characterized in that, four fixed electordes (2) of described fixed electorde group are arranged symmetrically with about described X-axis and described Y-axis.
5. inertia measurement device according to any one of claim 1 to 4, is characterized in that, described substrate is provided with a described fixed electorde group.
6. an inertial measurement system, it is characterized in that, comprise the inertia measurement device according to any one of detecting unit and claim 1 to 5, wherein, described first Detection capacitance (C12a) is consistent along change direction during Y direction translation at described mass (1) with described second Detection capacitance (C12b), and described first Detection capacitance (C12a) is consistent with the change direction of described 4th Detection capacitance (C12d) when described mass (1) rotates around described anchor portion (3); Described mass (1) is connected with modulation signal input end as movable electrode;
Described detecting unit comprises each four Y-axis detector switches of difference processing circuit (U1), control circuit and corresponding described fixed electorde group and each four X-axis detector switches of correspondence described fixed electorde group; Fixed electorde (2a) one branch road of described first Detection capacitance (C12a) is connected with the first input end (Vin1) of described difference processing circuit (U1) by the first Y-axis detector switch (K1a), and another branch road is connected with second input end (Vin2) of described difference processing circuit (U1) by the first X-axis detector switch (K2a); Fixed electorde (2b) one branch road of described second Detection capacitance (C12b) is connected with described first input end (Vin1) by the second Y-axis detector switch (K1b), and another branch road is connected with described first input end (Vin1) by the second X-axis detector switch (K2b); Fixed electorde (2c) one branch road of described 3rd Detection capacitance (C12c) is connected with described second input end (Vin2) by the 3rd Y-axis detector switch (K1c), and another branch road is connected with described first input end (Vin1) by the 3rd X-axis detector switch (K2c); Fixed electorde (2d) one branch road of described 4th Detection capacitance (C12d) is connected with described second input end (Vin2) by the 4th Y-axis detector switch (K1d), and another branch road is connected with described second input end (Vin2) by the 4th X-axis detector switch (K2d);
Described control circuit is set to for exporting Y-axis detector switch signal (Pk1) to all Y-axis detector switches (K1a, K1b, K1c, K1d) and for exporting X-axis detector switch signal (Pk2) to all X-axis detector switches (K2a, K2b, K2c, K2d), and described Y-axis detector switch signal (Pk1) and described X-axis detector switch signal (Pk2) make described Y-axis detector switch (K1a, K1b, K1c, K1d) and described X-axis detector switch (K2a, K2b, K2c, K2d) timesharing closed.
7. inertial measurement system according to claim 6, is characterized in that, described Y-axis detector switch (K1a, K1b, K1c, K1d) and described X-axis detector switch (K2a, K2b, K2c, K2d) are identical switch.
8. inertial measurement system according to claim 6, is characterized in that, described Y-axis detector switch signal (Pk1) and described X-axis detector switch signal (Pk2) are pwm signal.
9. inertial measurement system according to claim 8, it is characterized in that, having regular time between the significant level of described Y-axis detector switch signal (Pk1) and the adjacent significant level of described X-axis detector switch signal (Pk2) postpones (Δ T), wherein, the significant level of described Y-axis detector switch signal (Pk1) is for making described Y-axis detector switch (K1a, K1b, K1c, K1d) closed level, the significant level of described X-axis detector switch signal (Pk2) is for making described X-axis detector switch (K2a, K2b, K2c, K2d) closed level.
10. inertial measurement system according to claim 8, is characterized in that, described Y-axis detector switch signal (Pk1) is identical with the cycle of described X-axis detector switch signal (Pk2) and dutycycle is also identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510549169.7A CN105044387B (en) | 2015-08-31 | 2015-08-31 | A kind of inertia measurement device and inertial measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510549169.7A CN105044387B (en) | 2015-08-31 | 2015-08-31 | A kind of inertia measurement device and inertial measurement system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105044387A true CN105044387A (en) | 2015-11-11 |
| CN105044387B CN105044387B (en) | 2018-09-11 |
Family
ID=54451085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510549169.7A Active CN105044387B (en) | 2015-08-31 | 2015-08-31 | A kind of inertia measurement device and inertial measurement system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105044387B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1648673A (en) * | 2005-03-25 | 2005-08-03 | 中北大学 | Single chip double inertia parameter accelerometer gyroscope |
| US20060272414A1 (en) * | 2005-06-03 | 2006-12-07 | Farrokh Ayazi | Capacitive microaccelerometers and fabrication methods |
| CN102016603A (en) * | 2008-04-29 | 2011-04-13 | 罗伯特·博世有限公司 | Micromechanical component and method for operating a micromechanical component |
| CN103837705A (en) * | 2012-11-27 | 2014-06-04 | 雅马哈株式会社 | Acceleration sensor |
| CN204255977U (en) * | 2014-12-11 | 2015-04-08 | 歌尔声学股份有限公司 | A kind of Z axis structure of novel accelerometer |
| CN204964548U (en) * | 2015-08-31 | 2016-01-13 | 歌尔声学股份有限公司 | Inertia measuring element and inertial surveying system |
-
2015
- 2015-08-31 CN CN201510549169.7A patent/CN105044387B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1648673A (en) * | 2005-03-25 | 2005-08-03 | 中北大学 | Single chip double inertia parameter accelerometer gyroscope |
| US20060272414A1 (en) * | 2005-06-03 | 2006-12-07 | Farrokh Ayazi | Capacitive microaccelerometers and fabrication methods |
| CN102016603A (en) * | 2008-04-29 | 2011-04-13 | 罗伯特·博世有限公司 | Micromechanical component and method for operating a micromechanical component |
| CN103837705A (en) * | 2012-11-27 | 2014-06-04 | 雅马哈株式会社 | Acceleration sensor |
| CN204255977U (en) * | 2014-12-11 | 2015-04-08 | 歌尔声学股份有限公司 | A kind of Z axis structure of novel accelerometer |
| CN204964548U (en) * | 2015-08-31 | 2016-01-13 | 歌尔声学股份有限公司 | Inertia measuring element and inertial surveying system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105044387B (en) | 2018-09-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI748157B (en) | A MEMS accelerometer | |
| JP2003121457A (en) | Capacitance type physical quantity sensor | |
| JP6448793B2 (en) | 3-axis MEMS gyro | |
| US20170363656A1 (en) | Z-axis structure in accelerometer | |
| CN104185792A (en) | Accelerator sensor structure and use thereof | |
| CN105158511A (en) | MEMS triaxial accelerometer | |
| CN204964548U (en) | Inertia measuring element and inertial surveying system | |
| JP2008196865A (en) | Capacitance type physical quantity detection system | |
| JP2012137368A (en) | Acceleration sensor | |
| CN102012434B (en) | Capacitive angular speed sensor of micro electro mechanical system and manufacturing method thereof | |
| CN104374953A (en) | Split type differential silicon micro resonant accelerometer | |
| CN109387191B (en) | High-temperature adaptive MEMS planar resonant gyroscope structure | |
| CN107271722A (en) | A kind of three axle capacitive accelerometers | |
| WO2021109378A1 (en) | Three-axis mems gyroscope | |
| JP2004069562A (en) | Capacitance type mechanical quantity sensor | |
| CN105044387A (en) | Inertia measuring device and inertia measuring system | |
| CN208314017U (en) | A kind of mems accelerometer | |
| CN204255978U (en) | A kind of split type difference silicon micro-resonance type accelerometer | |
| JP2002098712A (en) | Capacitive type physical quantity detection device | |
| CN204679079U (en) | A kind of MEMS three-axis gyroscope | |
| CN107532903B (en) | Rotational rate sensor and method | |
| CN104459200A (en) | Three-axis accelerometer | |
| Mohammed et al. | Optimization of finger spacing and spring constant in comb type capacitive accelerometer | |
| CN103647528B (en) | Non-overlapping clock generation circuit | |
| CN204758028U (en) | MEMS inertial sensor , humidity transducer integrated device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Applicant after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Applicant before: Goertek Inc. |
|
| COR | Change of bibliographic data | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200608 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
| TR01 | Transfer of patent right |