CN204679079U - A kind of MEMS three-axis gyroscope - Google Patents
A kind of MEMS three-axis gyroscope Download PDFInfo
- Publication number
- CN204679079U CN204679079U CN201520455400.1U CN201520455400U CN204679079U CN 204679079 U CN204679079 U CN 204679079U CN 201520455400 U CN201520455400 U CN 201520455400U CN 204679079 U CN204679079 U CN 204679079U
- Authority
- CN
- China
- Prior art keywords
- axis
- block
- axis detection
- detection job
- servo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Abstract
The utility model discloses a kind of MEMS three-axis gyroscope, the sidewall of servo-actuated mass is connected with parenchyma gauge block by driving elastic beam; Servo-actuated mass is also provided with X, Y-axis Detection job block, and X-axis Detection job block is positioned in servo-actuated mass Y direction, and is connected with servo-actuated mass by the first tie-beam along Y direction; Y-axis Detection job block is positioned in servo-actuated mass X-direction, and is connected with servo-actuated mass by the second tie-beam along X-direction; Comprise the Z axis decoupling zero mass be connected with parenchyma gauge block by the 3rd tie-beam, Z axis Detection job block is connected with Z axis decoupling zero mass by the 4th tie-beam; Z axis Detection job block is connected on the anchor point of substrate by the 5th tie-beam.MEMS three-axis gyroscope of the present utility model, by above-mentioned structural design, by a single chip integrated for the detection of three-axis gyroscope, can improve the utilization factor of chip, also improves the precision that angular velocity signal detects simultaneously.
Description
Technical field
The utility model relates to field of inertia measurement, more specifically, relates to a kind of three-axis gyroscope manufactured based on MEMS (micro electro mechanical system).
Background technology
MEMS gyro instrument is the inertia device manufactured based on microelectromechanical processes, for measuring the angular velocity of object of which movement.It is little that it has volume, and reliability is high, with low cost, is applicable to the feature produced in enormous quantities, therefore has wide market outlook, can be applicable to the wide spectrum comprising consumer electronics, Aero-Space, automobile, Medical Devices and weapon.
MEMS gyro instrument system generally includes drive part and detecting portion, it adopts the principle of Coriolis (hereinafter referred to as coriolis force) to carry out the detection of angular velocity, and the fictitious force that coriolis force is arteface to be gone out, particularly, need to drive structure at first direction, when second direction has turning rate input, just can produce coriolis force on third direction, causing the displacement of mass, by detecting the change of this displacement, realizing the detection to angular velocity.Therefore, the complicated structure of MEMS gyro instrument, in general, on single structure, integrated XYZ three-axis gyroscope has very large difficulty.
Utility model content
An object of the present utility model is to provide a kind of new solution of MEMS three-axis gyroscope.
According to first aspect of the present utility model, provide a kind of MEMS three-axis gyroscope, comprise substrate, and by anchor point resiliency supported at the parenchyma gauge block of types of flexure, described substrate is provided with to form with parenchyma gauge block and drives electric capacity and drive the drive electrode that parenchyma gauge block rotates; With the horizontal direction of parenchyma gauge block for X-direction, with the vertical direction of parenchyma gauge block for Y direction, with the direction perpendicular to parenchyma gauge block place plane for Z-direction;
Also comprise XY shaft detection structure, described XY shaft detection structure comprises by anchor point resiliency supported servo-actuated mass square over the substrate, and wherein, the sidewall of described servo-actuated mass is connected with parenchyma gauge block by driving elastic beam; Described servo-actuated mass is also provided with X-axis Detection job block, Y-axis Detection job block, and wherein X-axis Detection job block is positioned in the Y direction of servo-actuated mass, and is connected with servo-actuated mass by the first tie-beam along Y direction; Described Y-axis Detection job block is positioned in the X-direction of servo-actuated mass, and is connected with servo-actuated mass by the second tie-beam along X-direction; The two ends of described X-axis Detection job block, Y-axis Detection job block have respectively along corresponding the first tie-beam, the first movable electrode of the second tie-beam symmetry, the second movable electrode; Described substrate is provided with the corresponding fixed electorde forming Differential Detection electric capacity to the first movable electrode, the second movable electrode;
Also comprise Z axis detection architecture, described Z axis detection architecture comprises the Z axis decoupling zero mass be connected with parenchyma gauge block by the 3rd tie-beam, also comprise the Z axis Detection job block arranged with Z axis decoupling zero masses parallel, wherein said Z axis Detection job block is connected with Z axis decoupling zero mass by the 4th tie-beam being positioned at its both sides; Described Z axis Detection job block is connected to by the 5th tie-beam and is fixed on the anchor point of substrate, and the 4th tie-beam is vertical with the 5th tie-beam; Described Z axis Detection job block is provided with the 3rd movable electrode, the 4th movable electrode, described substrate is provided with the fixed electorde forming differential capacitance with the 3rd movable electrode, the 4th movable electrode.
Preferably, described XY shaft detection structure is provided with two, is distributed on the center line of parenchyma gauge block X-direction, and symmetrical relative to the anchor point of parenchyma gauge block.
Preferably, described X-axis Detection job block is provided with two, be designated as the first X-axis Detection job block, the second X-axis Detection job block respectively, described first X-axis Detection job block, the second X-axis Detection job block are positioned on the center line of servo-actuated mass Y direction, and symmetrical relative to the anchor point of servo-actuated mass;
Described Y-axis Detection job block is provided with two, be designated as the first Y-axis Detection job block, the second Y-axis Detection job block respectively, described first Y-axis Detection job block, the second Y-axis Detection job block are positioned on the center line of servo-actuated mass X-direction, and symmetrical relative to the anchor point of servo-actuated mass.
Preferably, described parenchyma gauge block is provided with through hole, described servo-actuated mass is positioned at corresponding through hole, and described driving elastic beam is parallel with the sidewall of servo-actuated mass.
Preferably, described driving elastic beam is provided with four, lays respectively at four sidewall direction of servo-actuated mass.
Preferably, described parenchyma gauge block is connected on its anchor point by the first cross elastic beam; Described servo-actuated mass is connected on its anchor point by the second cross elastic beam.
Preferably, described Z axis detection architecture is provided with two, be designated as the first Z axis detection architecture, the second Z axis detection architecture respectively, described first Z axis detection architecture, the second Z axis detection architecture are distributed on the center line of parenchyma gauge block Y direction, and symmetrical relative to the anchor point of parenchyma gauge block.
Preferably, described 4th tie-beam extends along Y direction, and described 5th tie-beam extends along X-direction, and described 5th tie-beam is provided with two, lays respectively at the both sides that Z axis Detection job block is positioned at Y direction.
Preferably, described Z axis Detection job block comprises the first Z axis Detection job block, the second Z axis Detection job block relative to parenchyma gauge block Y-axis center line symmetry, and connects the connecting portion of the first Z axis Detection job block, the second Z axis Detection job block; Wherein, described first Z axis Detection job block, the second Z axis Detection job block are equipped with the 3rd described movable electrode, the 4th movable electrode.
Preferably, described drive electrode is provided with four, is distributed in the both sides that parenchyma gauge block is relative between two.
MEMS three-axis gyroscope of the present utility model, drive electrode drives parenchyma gauge block in the Z-axis direction clockwise or rotate counterclockwise, thus make the servo-actuated mass in XY shaft detection structure counterclockwise or rotate clockwise, make Z axis decoupling zero mass in Z axis detection architecture can along with parenchyma gauge block clockwise or counterclockwise movement.When there being the turning rate input of X, Y direction, X, Y-axis Detection job block can produce the coriolis force being positioned at Z-direction, thus make X, similar seesaw can occur Y-axis Detection job block motion, the measurement of X, Y-axis angular velocity signal can be realized by corresponding fixed electorde; When there being the turning rate input of Z-direction, Z axis Detection job block can produce the coriolis force being positioned at X-axis, Y direction, thus makes Z axis Detection job block translation can occur, and can be realized the measurement of Z axis angular velocity signal by corresponding fixed electorde.
MEMS three-axis gyroscope of the present utility model, by above-mentioned structural design, by a single chip integrated for the detection of X, Y, Z three-axis gyroscope, can improve the utilization factor of chip, also improves the precision that angular velocity signal detects simultaneously.
Inventor of the present utility model finds, in the prior art, the complicated structure of MEMS gyro instrument, in general, on single structure, integrated XYZ three-axis gyroscope has very large difficulty.Therefore, the technical assignment that the utility model will realize or technical matters to be solved are that those skilled in the art never expect or do not anticipate, therefore the utility model is a kind of new technical scheme.
By referring to the detailed description of accompanying drawing to exemplary embodiment of the present utility model, further feature of the present utility model and advantage thereof will become clear.
Accompanying drawing explanation
In the description combined and the accompanying drawing forming a part for instructions shows embodiment of the present utility model, and illustrate that one is used from and explains principle of the present utility model together with it.
Fig. 1 is the structural representation of the utility model three-axis gyroscope.
Fig. 2 is the connection diagram of the utility model XY shaft detection structure and parenchyma gauge block.
Fig. 3 is the schematic diagram of XY shaft detection structure.
Fig. 4 is the schematic diagram of Z axis detection architecture.
Embodiment
Various exemplary embodiment of the present utility model is described in detail now with reference to accompanying drawing.It should be noted that: unless specifically stated otherwise, otherwise positioned opposite, the numerical expression of the parts of setting forth in these embodiments and step and numerical value do not limit scope of the present utility model.
Illustrative to the description only actually of at least one exemplary embodiment below, never as any restriction to the utility model and application or use.
May not discuss in detail for the known technology of person of ordinary skill in the relevant, method and apparatus, but in the appropriate case, described technology, method and apparatus should be regarded as a part for instructions.
In all examples with discussing shown here, any occurrence should be construed as merely exemplary, instead of as restriction.Therefore, other example of exemplary embodiment can have different values.
It should be noted that: represent similar terms in similar label and letter accompanying drawing below, therefore, once be defined in an a certain Xiang Yi accompanying drawing, then do not need to be further discussed it in accompanying drawing subsequently.
With reference to figure 1, the utility model provides a kind of MEMS three-axis gyroscope, and it comprises substrate (view does not provide), and elastic mounting is at the parenchyma gauge block 1 of types of flexure, also comprises the drive electrode 8 driving parenchyma gauge block 1 to rotate at types of flexure.The utility model for convenience of description, with the horizontal direction of parenchyma gauge block 1 for X-direction, with the vertical direction of parenchyma gauge block 1 for Y direction, with the direction perpendicular to parenchyma gauge block 1 place plane for Z-direction.For a person skilled in the art; should be understood that; the direction of the X, Y, Z axis of definition just for convenience of description; should not be used for limiting protection domain of the present utility model; the vertical direction that such as also can define parenchyma gauge block 1 is X-direction, and the horizontal direction of definition parenchyma gauge block 1 is Y direction etc.
With reference to figure 1, Fig. 2, substrate is fixed with anchor point 1a, parenchyma gauge block 1 is connected on described anchor point 1a by an elastic beam, make parenchyma gauge block 1 when being subject to extraneous driving force, can with anchor point 1a for rotating shaft be rotated, this anchor point 1a is preferably placed at the structure centre of parenchyma gauge block 1, makes parenchyma gauge block 1 have symmetrical structure.This syndeton between parenchyma gauge block 1 and anchor point 1a belongs to the common practise of those skilled in the art.Wherein, described elastic beam is preferably the first cross elastic beam 1b, thus parenchyma gauge block 1 can be made firmly to be connected on anchor point 1a.When parenchyma gauge block 1 be subject to the external world drive accordingly time, make it with anchor point 1a for rotating shaft, the first cross elastic beam 1b can be reversed and be out of shape, and in the Z-axis direction clockwise or rotate counterclockwise.
Drive electrode 8 of the present utility model is mainly parenchyma gauge block 1 and provides driving force, and this drive electrode 8 such as can be distributed in the relative both sides of parenchyma gauge block 1, and forms with parenchyma gauge block 1 and drive electric capacity.In the embodiment that the utility model one is concrete, with reference to figure 1, drive electrode 8 is provided with four, is separately positioned on the top of parenchyma gauge block 1 two Y direction sidewalls, bottom.Drive electrode 8 can be fixed on substrate by anchor point, and the sidewall of itself and parenchyma gauge block 1 can form comb electric capacity.Approximate two drive electrodes 8 be positioned in parenchyma gauge block 1 diagonal are one group, and two groups of drive electrodes define differential driving electric capacity.Be as the criterion with the view direction of Fig. 1, such as, be positioned at parenchyma gauge block upper left side, bottom-right two drive electrodes 8 are one group, parenchyma gauge block 1 can be driven to rotate counterclockwise; Be positioned at parenchyma gauge block 1 lower left, top-right two drive electrodes 8 are one group, parenchyma gauge block 1 can be driven to rotate clockwise.Certainly to those skilled in the art, four drive electrodes 8 also can be arranged on left, the right of parenchyma gauge block 1 two X-direction sidewalls, can realize driving clockwise or counterclockwise of parenchyma gauge block 1 equally.
MEMS three-axis gyroscope of the present utility model, also comprises the XY shaft detection structure 3 for detecting X-axis angular velocity, Y-axis angular velocity, and with reference to figure 2, described XY shaft detection structure 3 comprises by anchor point 2a resiliency supported servo-actuated mass 2 square over the substrate.Consistent with the connected mode of parenchyma gauge block 1, substrate is fixed with anchor point 2a, and servo-actuated mass 2 is connected on described anchor point 2a by an elastic beam, makes servo-actuated mass 2 when being subject to extraneous driving force, can with anchor point 2a for rotating shaft is rotated.This anchor point 2a is preferably placed at the structure centre of servo-actuated mass 2, makes servo-actuated mass 2 have symmetrical structure.Wherein, described elastic beam is preferably the second cross elastic beam 2b, thus servo-actuated mass 2 can be made firmly to be connected on anchor point 2a.When servo-actuated mass 2 be subject to the external world drive accordingly time, can be made it with anchor point 2a for rotating shaft, reverse the second cross elastic beam 2b and be out of shape, and in the Z-axis direction counterclockwise or rotate clockwise.
The sidewall of described servo-actuated mass 2 links together with the sidewall of parenchyma gauge block 1 by driving elastic beam 25.The utility model one preferred embodiment in, described parenchyma gauge block 1 is provided with through hole, described servo-actuated mass 2 is suspended at the top of substrate and is positioned at corresponding through hole, wherein, described driving elastic beam 25 be arranged in parallel with the sidewall of servo-actuated mass 2, its two ends are fixed on the sidewall of parenchyma gauge block 1, and the medium position of described driving elastic beam 25 is connected on the sidewall of servo-actuated mass 2.When drive electrode 8 drives parenchyma gauge block 1 to rotate clockwise time, because servo-actuated mass 2 is fixed on substrate by anchor point 2a, this just makes parenchyma gauge block 1 drive servo-actuated mass 2 to rotate counterclockwise by driving elastic beam 25; Based on identical reason, when drive electrode 8 drives parenchyma gauge block 1 to rotate counterclockwise time, parenchyma gauge block 1 drives servo-actuated mass 2 to rotate clockwise by driving elastic beam 25.
Driving elastic beam 25 of the present utility model can arrange four, be distributed in four sidewall direction of servo-actuated mass 2 respectively, the rotation driving elastic beam 25 to drive servo-actuated mass 2 by four, make it can have good restriction to the surrounding of servo-actuated mass 2, ensure that servo-actuated mass 2 is only at the rotation with in surface that X-axis, Y-axis are formed.
Described servo-actuated mass 2 is also distributed with X-axis Detection job block, Y-axis Detection job block, is respectively used to the measurement of X-axis angular velocity, Y-axis angular velocity.The utility model one preferred embodiment in, X-axis Detection job block is provided with two, is designated as the first X-axis Detection job block 20, second X-axis Detection job block 21 respectively; Wherein the first X-axis Detection job block 20, second X-axis Detection job block 21 is positioned in the Y direction of servo-actuated mass 2, be preferably placed on the Y-axis center line of servo-actuated mass 2, and symmetrical relative to the anchor point 2a of servo-actuated mass 2, thus ensure that the symmetry of servo-actuated mass 2.Wherein, the first X-axis Detection job block 20, second X-axis Detection job block 21 links together respectively by the first tie-beam 20a extended along Y direction and servo-actuated mass 2;
Described Y-axis Detection job block is preferably provided with two, is designated as the first Y-axis Detection job block 22, second Y-axis Detection job block 23 respectively; These two Y-axis Detection job blocks 22,23 are positioned in the X-direction of servo-actuated mass 2, are preferably placed on the X-axis center line of servo-actuated mass 2, and symmetrical relative to the anchor point 2a of servo-actuated mass 2, thus ensure that the symmetry of servo-actuated mass 2.Wherein, the first Y-axis Detection job block 22, second Y-axis Detection job block 23 links together respectively by the second tie-beam 22c extended along X-direction and servo-actuated mass 2.
First Y-axis Detection job block 22, second Y-axis Detection job block 23, first X-axis Detection job block 20, second X-axis Detection job block 21 has identical structure, for the first Y-axis Detection job block 22, with reference to figure 3, it comprises the two ends with the first movable electrode 22a, the second movable electrode 22b, further, the first movable electrode 22a, the second movable electrode 22b are symmetrical relative to the second tie-beam 22c.That is the first Y-axis Detection job block 22 extends along Y direction, and its center is connected to the middle part of the second tie-beam 22c.When being subject to the angular velocity of Y direction, under the driving force that drive electrode 8 provides, make the first Y-axis Detection job block 22 under the effect of Ke Shili with the second tie-beam 22c for fulcrum does the motion of similar seesaw, that is, one of them movable electrode rises, another movable electrode declines, fixed electorde is set by position corresponding on substrate, makes can form differential capacitance structure between the first movable electrode 22a, the second movable electrode 22b, to realize the detection of Y-axis angular velocity.
Wherein, because the first Y-axis Detection job block 22, second Y-axis Detection job block 23 is symmetrical relative to the anchor point 2a of servo-actuated mass 2, this just makes the Detection capacitance on the first Y-axis Detection job block 22 and the second Y-axis Detection job block 23 also can be configured for the differential capacitance structure of Y-axis angular velocity detection.
Based on identical reason, the two ends of described first X-axis Detection job block 20, second X-axis Detection job block 21 also have the first movable electrode, the second movable electrode, and wherein these two movable electrodes are symmetrical relative to the first tie-beam 22a.That is the first X-axis Detection job block 20, second X-axis Detection job block 21 extends along X-direction, and its center is connected to the middle part of the first tie-beam 20a.When being subject to the angular velocity of X-direction, under the driving force that drive electrode 8 provides, make the first X-axis Detection job block 20, second X-axis Detection job block 21 under the effect of coriolis force respectively with corresponding first tie-beam 20a for fulcrum does the motion of similar seesaw, that is, in single X-axis Detection job block, one of them movable electrode rises, another movable electrode declines, by position corresponding on substrate arranges fixed electorde, make the first movable electrode on same X-axis Detection job block, differential capacitance structure can be formed between second movable electrode, to realize the detection of X-axis angular velocity.
Wherein, first X-axis Detection job block 20, second X-axis Detection job block 21 is symmetrical relative to the anchor point 2a of servo-actuated mass 2, and this just makes the Detection capacitance on the first X-axis Detection job block 20 and the second X-axis Detection job block 21 also can be configured for the differential capacitance structure of X-axis angular velocity detection.
The utility model another preferred embodiment in, described XY shaft detection structure 3 arranges two, these two XY shaft detection structures 3 are positioned on the X-axis center line of parenchyma gauge block 1, and symmetrical relative to the anchor point 1a of parenchyma gauge block 1, thus ensure that the symmetry of parenchyma gauge block 1.X-axis Detection job block in two XY shaft detection structures 3 can be configured for the differential capacitance structure detecting X-axis angular velocity, and the Y-axis Detection job block in two XY shaft detection structures 3 can be configured for the differential capacitance structure detecting Y-axis angular velocity.That is, with parenchyma gauge block 1 for benchmark, on multiple positions of described parenchyma gauge block 1, distribution arranges X-axis Detection job block, Y-axis Detection job block, thus the angular velocity of X, Y-axis can be detected in the plurality of position, and by the target signal filter of respective differential capacitance structure by interference, make the angular velocity signal of the XY axle exported more accurate.
MEMS three-axis gyroscope of the present utility model, also comprises Z axis detection architecture, for the measurement of Z axis angular velocity.The utility model one preferred embodiment in, described Z axis detection architecture is provided with two, be designated as the first Z axis detection architecture 7, second Z axis detection architecture 6 respectively, wherein, described first Z axis detection architecture 7, second Z axis detection architecture 6 is distributed in the Y direction of parenchyma gauge block 1, be preferably distributed on the axial center line of parenchyma gauge block 1Y, and symmetrical relative to the anchor point 1a of parenchyma gauge block 1, thus ensure that the symmetry of parenchyma gauge block 1.
Described first Z axis detection architecture 7, second Z axis detection architecture 6 has identical structure, for the first Z axis detection architecture 7, with reference to figure 1, Fig. 4, it comprises the Z axis decoupling zero mass 4 be connected with parenchyma gauge block 1 by the 3rd tie-beam 40,3rd tie-beam 40 can be positioned in X-direction, also can be positioned in Y direction; 3rd tie-beam 40 can arrange two articles, is distributed in the both sides that Z axis decoupling zero mass 4 is relative; Also can arrange four, be distributed in the surrounding of Z axis decoupling zero mass 4.
In the embodiment that the utility model one is concrete, Z axis decoupling zero mass 4 extends along X-direction, and be positioned on the axial center line of parenchyma gauge block 1Y, wherein, 3rd tie-beam 40 extends along X-direction, the two ends of the 3rd tie-beam 40 can be fixed on Z axis decoupling zero mass 4 and be positioned on the sidewall of X-direction, and its medium position is connected with the sidewall of parenchyma gauge block 1.When drive electrode 8 drives parenchyma gauge block 1 to rotate clockwise time, because Z axis decoupling zero mass 4 is not connected on substrate by anchor point, this just makes parenchyma gauge block 1 Z axis decoupling zero mass 4 can be driven to rotate clockwise by the 3rd tie-beam 40; Equally, when drive electrode 8 drives parenchyma gauge block 1 to rotate counterclockwise time, parenchyma gauge block 1 drives Z axis decoupling zero mass 4 to rotate counterclockwise by the 3rd tie-beam 40.
First Z axis detection architecture 7 of the present utility model, also comprises the Z axis Detection job block 5 be arranged in parallel with Z axis decoupling zero mass 4, and wherein said Z axis Detection job block 5 is connected with Z axis decoupling zero mass 4 by the 4th tie-beam 41 being positioned at its both sides; Make Z axis decoupling zero mass 4 Z axis Detection job block 5 can be driven to be subjected to displacement by the 4th tie-beam 41.Wherein, described Z axis Detection job block 5 is connected on the anchor point 50a of substrate by the 5th tie-beam 50, and the 4th tie-beam 41 is mutually vertical with the 5th tie-beam 50.Such as, described 4th tie-beam 41 extends along Y direction, and that is, the one end along the 4th tie-beam 41 of Y direction extension is fixed on Z axis Detection job block 5, and the other end is fixed on Z axis decoupling zero mass 4; And the 5th tie-beam 50 extends along X-direction, its two ends can be fixed on Z axis Detection job block 5, are fixed on the anchor point 50a of substrate in the middle part of it; Preferably, the 5th tie-beam 50 can arrange two articles, is distributed in the axial both sides of Z axis Detection job block 5Y, thus makes Z axis Detection job block 5 be limited in the X-axis direction by the 5th tie-beam 50, prevents Z axis Detection job block 5 to be subjected to displacement in the X-axis direction.
When drive electrode 8 drives parenchyma gauge block 1 to rotate clockwise time, parenchyma gauge block 1 drives Z axis decoupling zero mass 4 to rotate clockwise by the 3rd tie-beam 40, Z axis decoupling zero mass 4 by the 4th tie-beam 41 for Z axis Detection job block 5 provides a moment of torsion rotated clockwise, when there being the turning rate input of Z-direction, Z axis Detection job block 5 is subject to being positioned at the coriolis force component of X-direction and the coriolis force component of Y direction, but because Z axis Detection job block 5 is connected on the anchor point 50a of substrate by the 5th tie-beam 50 extended in X direction, that is, Z axis Detection job block 5 is owing to being subject to the restriction of the 5th tie-beam 50, it is made to be subjected to displacement in the X-axis direction, and Z axis Detection job block 5 is owing to being subject to the coriolis force component being positioned at Y direction, corresponding displacement can be there is in the Y-axis direction.Thus, by arranging the fixed electorde 9 forming Detection capacitance with Z axis Detection job block 5 on substrate, the measurement of Z axis angular velocity can be realized.
In order to form the differential capacitance structure of Z axis angular velocity measurement, described Z axis Detection job block 5 is provided with the 3rd movable electrode, the 4th movable electrode, the fixed electorde 9 that described substrate is arranged comprises the 3rd fixed electorde 90, the 4th fixed electorde 91 that form Detection capacitance with the 3rd movable electrode, the 4th movable electrode respectively.For a person skilled in the art, the 3rd movable electrode, the 4th movable electrode can be arranged on both sides relative on Z axis Detection job block 5; And for mass block structure, Z axis Detection job block 5 relative both sides sidewall itself is the 3rd movable electrode, the 4th movable electrode, 3rd movable electrode and the 3rd fixed electorde 90, the 4th movable electrode and the 4th fixed electorde 91 can form side capacitive respectively, and together constitute differential capacitance structure, to realize the detection of Z axis angular velocity.
The utility model one preferred embodiment in, described Z axis Detection job block 4 comprises the first Z axis Detection job block 51, second Z axis Detection job block 52 relative to parenchyma gauge block 1Y axis of spindle symmetry, and connect the connecting portion 53 of the first Z axis Detection job block 51, second Z axis Detection job block 52, wherein, first Z axis Detection job block 51, second Z axis Detection job block 52 is respectively arranged with the 3rd movable electrode, the 4th movable electrode, and described substrate is provided with its corresponding fixed electorde.This just makes the 3rd movable electrode of the first Z axis Detection job block 51, its corresponding fixed electorde of the 4th movable electrode can form differential capacitance structure, 3rd movable electrode, its corresponding fixed electorde of the 4th movable electrode of the second Z axis Detection job block 52 also can form differential capacitance structure, and the Detection capacitance on the first Z axis Detection job block 51 and the second Z axis Detection job block 52 forms differential capacitance structure jointly.
Wherein the second Z axis detection architecture 6 is identical with the structure of the first Z axis detection architecture 7, the two is preferably distributed on the axial center line of parenchyma gauge block 1Y, and it is symmetrical relative to the anchor point 1a of parenchyma gauge block 1, the Detection capacitance that the Detection capacitance that first Z axis detection architecture 7 is formed and the second Z axis detection architecture 6 form also can form differential capacitance structure, further increases the precision of Z axis angular velocity detection.By the first Z axis detection architecture 7, second Z axis detection architecture, make it possible to the angular velocity detecting Z axis in multiple position, the interference filtering that non-coriolis force brings can be fallen by the differential capacitance structure formed, improve the precision of Z axis angular velocity detection.
First Z axis detection architecture 7, second Z axis detection architecture 6 of above-mentioned introduction is distributed in the Y direction of parenchyma gauge block 1, XY shaft detection structure 3 is distributed in the X-direction of parenchyma gauge block 1, such structural design can make the compact conformation of whole chip, improves the utilization factor of chip.Certainly, for a person skilled in the art, first Z axis detection architecture 7, second Z axis detection architecture 6 can also be distributed in the X-direction of parenchyma gauge block 1, be preferably distributed on the X-axis center line of parenchyma gauge block 1, and symmetrical relative to the anchor point 1a of parenchyma gauge block 1, as long as now change the direction of each tie-beam in each Z axis detection architecture, such as, select the 4th tie-beam 41 to extend along X-direction, select the 5th tie-beam 50 to extend along Y direction, the measurement of Z axis angular velocity can be realized.
MEMS three-axis gyroscope of the present utility model, drive electrode drives parenchyma gauge block in the Z-axis direction clockwise or rotate counterclockwise, thus make the servo-actuated mass in XY shaft detection structure counterclockwise or rotate clockwise, make Z axis decoupling zero mass in Z axis detection architecture can along with parenchyma gauge block clockwise or counterclockwise movement.When there being the turning rate input of X, Y direction, X, Y-axis Detection job block can produce the coriolis force being positioned at Z-direction, thus make X, similar seesaw can occur Y-axis Detection job block motion, the measurement of X, Y-axis angular velocity signal can be realized by corresponding fixed electorde; When there being the turning rate input of Z-direction, Z axis Detection job block can produce the coriolis force being positioned at X-axis, Y direction, thus makes Z axis Detection job block translation can occur, and can be realized the measurement of Z axis angular velocity signal by corresponding fixed electorde.
MEMS three-axis gyroscope of the present utility model, by above-mentioned structural design, by a single chip integrated for the detection of X, Y, Z three-axis gyroscope, can improve the utilization factor of chip, also improves the precision that angular velocity signal detects simultaneously.
Although be described in detail specific embodiments more of the present utility model by example, it should be appreciated by those skilled in the art, above example is only to be described, instead of in order to limit scope of the present utility model.It should be appreciated by those skilled in the art, when not departing from scope and spirit of the present utility model, above embodiment can be modified.Scope of the present utility model is limited by claims.
Claims (10)
1. a MEMS three-axis gyroscope, it is characterized in that: comprise substrate, and by anchor point (1a) resiliency supported at the parenchyma gauge block (1) of types of flexure, described substrate is provided with to form with parenchyma gauge block (1) and drives electric capacity and the drive electrode (8) driving parenchyma gauge block (1) to rotate; With the horizontal direction of parenchyma gauge block (1) for X-direction, with the vertical direction of parenchyma gauge block (1) for Y direction, with the direction perpendicular to parenchyma gauge block (1) place plane for Z-direction;
Also comprise XY shaft detection structure (3), described XY shaft detection structure (3) comprises by anchor point (2a) resiliency supported servo-actuated mass (2) square over the substrate, wherein, the sidewall of described servo-actuated mass (2) is connected with parenchyma gauge block (1) by driving elastic beam (25); Described servo-actuated mass (2) is also provided with X-axis Detection job block, Y-axis Detection job block, wherein X-axis Detection job block is positioned in the Y direction of servo-actuated mass (2), and is connected with servo-actuated mass (2) by the first tie-beam (20a) along Y direction; Described Y-axis Detection job block is positioned in the X-direction of servo-actuated mass (2), and is connected with servo-actuated mass (2) by the second tie-beam (22c) along X-direction; The two ends of described X-axis Detection job block, Y-axis Detection job block have respectively along the first movable electrode, second movable electrode of corresponding the first tie-beam (20a), the second tie-beam (22c) symmetry; Described substrate is provided with the corresponding fixed electorde forming Differential Detection electric capacity to the first movable electrode, the second movable electrode;
Also comprise Z axis detection architecture, described Z axis detection architecture comprises the Z axis decoupling zero mass (4) be connected with parenchyma gauge block (1) by the 3rd tie-beam (40), also comprise the Z axis Detection job block (5) be arranged in parallel with Z axis decoupling zero mass (4), wherein said Z axis Detection job block (5) is connected with Z axis decoupling zero mass (4) by the 4th tie-beam (41) being positioned at its both sides; Described Z axis Detection job block (5) be connected to by the 5th tie-beam (50) be fixed on substrate anchor point (50a) on, and the 4th tie-beam (41) is vertical with the 5th tie-beam (50); Described Z axis Detection job block (5) is provided with the 3rd movable electrode, the 4th movable electrode, described substrate is provided with the fixed electorde forming differential capacitance with the 3rd movable electrode, the 4th movable electrode.
2. MEMS three-axis gyroscope according to claim 1, it is characterized in that: described XY shaft detection structure (3) is provided with two, be distributed on the center line of parenchyma gauge block (1) X-direction, and symmetrical relative to the anchor point (1a) of parenchyma gauge block (1).
3. MEMS three-axis gyroscope according to claim 2, is characterized in that:
Described X-axis Detection job block is provided with two, be designated as the first X-axis Detection job block (20), the second X-axis Detection job block (21) respectively, described first X-axis Detection job block (20), the second X-axis Detection job block (21) are positioned on the center line of servo-actuated mass (2) Y direction, and symmetrical relative to the anchor point (2a) of servo-actuated mass (2);
Described Y-axis Detection job block is provided with two, be designated as the first Y-axis Detection job block (22), the second Y-axis Detection job block (23) respectively, described first Y-axis Detection job block (22), the second Y-axis Detection job block (23) are positioned on the center line of servo-actuated mass (2) X-direction, and symmetrical relative to the anchor point (2a) of servo-actuated mass (2).
4. MEMS three-axis gyroscope according to claim 3, it is characterized in that: on described parenchyma gauge block (1), be provided with through hole, described servo-actuated mass (2) is positioned at corresponding through hole, and described driving elastic beam (25) is parallel with the sidewall of servo-actuated mass (2).
5. MEMS three-axis gyroscope according to claim 4, is characterized in that: described driving elastic beam (25) is provided with four, lays respectively at four sidewall direction of servo-actuated mass (2).
6. MEMS three-axis gyroscope according to claim 1, is characterized in that: described parenchyma gauge block (1) is connected on its anchor point (1a) by the first cross elastic beam (1b); Described servo-actuated mass (2) is connected on its anchor point (2a) by the second cross elastic beam (2b).
7. MEMS three-axis gyroscope according to claim 1, it is characterized in that: described Z axis detection architecture is provided with two, be designated as the first Z axis detection architecture (7), the second Z axis detection architecture (6) respectively, described first Z axis detection architecture (7), the second Z axis detection architecture (6) are distributed on the center line of parenchyma gauge block (1) Y direction, and symmetrical relative to the anchor point (1a) of parenchyma gauge block (1).
8. MEMS three-axis gyroscope according to claim 7, it is characterized in that: described 4th tie-beam (41) extends along Y direction, described 5th tie-beam (50) extends along X-direction, and described 5th tie-beam (50) is provided with two, lays respectively at the both sides that Z axis Detection job block (5) is positioned at Y direction.
9. MEMS three-axis gyroscope according to claim 7, it is characterized in that: described Z axis Detection job block (5) comprises the first Z axis Detection job block (51), the second Z axis Detection job block (52) relative to parenchyma gauge block (1) Y-axis center line symmetry, and connect the connecting portion (53) of the first Z axis Detection job block (51), the second Z axis Detection job block (52); Wherein, described first Z axis Detection job block (51), the second Z axis Detection job block (52) are equipped with the 3rd described movable electrode, the 4th movable electrode.
10. MEMS three-axis gyroscope according to claim 1, is characterized in that: described drive electrode (8) is provided with four, is distributed in the both sides that parenchyma gauge block (1) is relative between two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520455400.1U CN204679079U (en) | 2015-06-29 | 2015-06-29 | A kind of MEMS three-axis gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520455400.1U CN204679079U (en) | 2015-06-29 | 2015-06-29 | A kind of MEMS three-axis gyroscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204679079U true CN204679079U (en) | 2015-09-30 |
Family
ID=54178764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520455400.1U Withdrawn - After Issue CN204679079U (en) | 2015-06-29 | 2015-06-29 | A kind of MEMS three-axis gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204679079U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897147A (en) * | 2015-06-29 | 2015-09-09 | 歌尔声学股份有限公司 | MEMS (micro-electro-mechanical system) three-axis gyroscope |
| CN107271722A (en) * | 2017-07-19 | 2017-10-20 | 深迪半导体(上海)有限公司 | A kind of three axle capacitive accelerometers |
| CN107976180A (en) * | 2016-10-24 | 2018-05-01 | 意法半导体股份有限公司 | Frequency modulation(PFM) MEMS three-axis gyroscopes |
-
2015
- 2015-06-29 CN CN201520455400.1U patent/CN204679079U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897147A (en) * | 2015-06-29 | 2015-09-09 | 歌尔声学股份有限公司 | MEMS (micro-electro-mechanical system) three-axis gyroscope |
| CN107976180A (en) * | 2016-10-24 | 2018-05-01 | 意法半导体股份有限公司 | Frequency modulation(PFM) MEMS three-axis gyroscopes |
| US11448507B2 (en) | 2016-10-24 | 2022-09-20 | Stmicroelectronics S.R.L. | Frequency modulation MEMS triaxial gyroscope |
| CN107271722A (en) * | 2017-07-19 | 2017-10-20 | 深迪半导体(上海)有限公司 | A kind of three axle capacitive accelerometers |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104897147A (en) | MEMS (micro-electro-mechanical system) three-axis gyroscope | |
| EP2846132B1 (en) | Multiple sense axis MEMS gyroscope having a single drive mode | |
| CN106370889B (en) | Multi-axis inertial sensor with dual mass blocks and integrated damping structure | |
| CN101639487B (en) | Triaxial acceleration sensor | |
| US10473686B2 (en) | Inertia measurement module and triaxial accelerometer | |
| CN104931729B (en) | A kind of MEMS triaxial accelerometer | |
| JP6448793B2 (en) | 3-axis MEMS gyro | |
| CN108955663B (en) | Resonant double-shaft micro-mechanical wheel type gyroscope | |
| CN107192384B (en) | MEMS triaxial gyroscope | |
| TW201310005A (en) | Inertia sensing apparatus | |
| CN104406579B (en) | Micro-electromechanical deformable structure and triaxial multi-degree of freedom micro-electromechanical gyroscope | |
| CN204679079U (en) | A kind of MEMS three-axis gyroscope | |
| CN103438878A (en) | Triaxial micromechanical gyroscope | |
| CN107782299B (en) | Two-axis MEMS gyroscope | |
| US11493533B2 (en) | Single proof mass based three-axis accelerometer | |
| CN110702088B (en) | Wheel type double-shaft micromechanical gyroscope | |
| CN104459204B (en) | Inertia measuring module and three axis accelerometer | |
| CN204731265U (en) | A kind of MEMS triaxial accelerometer | |
| CN113624995A (en) | Three-axis accelerometer | |
| CN108449950B (en) | Micromechanical rotational speed sensor and method for producing a micromechanical rotational speed sensor | |
| CN116222531A (en) | Micro-electromechanical system gyroscope | |
| CN107532903B (en) | Rotational rate sensor and method | |
| CN104597287A (en) | Inertia measurement module and triaxial accelerometer | |
| CN109163717B (en) | Single-chip triaxial MEMS gyroscope based on wheel-ring form | |
| CN105589559A (en) | Movement inertial tracking system applied to human-computer interaction |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150930 Effective date of abandoning: 20171229 |