CN204731265U - A kind of MEMS triaxial accelerometer - Google Patents
A kind of MEMS triaxial accelerometer Download PDFInfo
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- CN204731265U CN204731265U CN201520454674.9U CN201520454674U CN204731265U CN 204731265 U CN204731265 U CN 204731265U CN 201520454674 U CN201520454674 U CN 201520454674U CN 204731265 U CN204731265 U CN 204731265U
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Abstract
The utility model discloses MEMS triaxial accelerometer, comprise substrate and the twisting mass being suspended in surface; Symmetrical structure centered by twisting mass, comprises parenchyma gauge block and first, second inferior quality block, and is parallel to four elasticity tie-beams of y-axis; First time, the left side lateral edges of mass was connected with parenchyma gauge block by the first elasticity tie-beam, and the right side/left side edge of second time mass is connected with parenchyma gauge block by the second elasticity tie-beam; First time, the center of mass was connected on the first anchor point of substrate by the 3rd elasticity tie-beam, and the center of second time mass is connected on the second anchor point of substrate by the 4th elasticity tie-beam; First, second inferior quality block is provided with first, second, third movable electrode, substrate is provided with first, second, third fixed electorde forming x-axis, y-axis, z-axis Detection capacitance with first, second, third movable electrode.The utility model can eliminate external interference, and process for making is simple and easy to realize.
Description
Technical field
The utility model relates to sensor technical field, more specifically, relates to a kind of MEMS triaxial accelerometer.
Background technology
Micro-electro-mechanaccelerometer accelerometer is the inertia device based on MEMS technology, for measuring the line acceleration of motion of object of which movement.It has the features such as volume is little, reliability is high, with low cost, applicable production in enormous quantities, and therefore have wide market outlook, its application comprises consumer electronics, Aero-Space, automobile, Medical Devices and weapon etc.
At present because mems accelerometer chip size is more and more less, so MEMS triaxial accelerometer tends to the integrated single structure design of three axles, but due to the restriction of z-axis detection architecture, most of integrated MEMS three axis accelerometer all with adopt the design of certain direction bias, carried out single structure and three axial accelerations detected simultaneously.
The integrated MEMS three axis accelerometer of this bias is generally asymmetric design, and this asymmetric design has special requirement to manufacturing process on the one hand, also cannot eliminate the impact of external interference factor on the other hand completely.
Utility model content
An object of the present utility model is to provide a kind of new solution of MEMS triaxial accelerometer of full symmetrical configuration.
According to first aspect of the present utility model, provide a kind of MEMS triaxial accelerometer, comprising: substrate; Be suspended in the twisting mass of surface; Described twisting mass place plane is xy plane, and wherein the forward of x-axis points to the right side of xy plane, and the forward of y-axis points to the upside of xy plane; Symmetrical structure centered by described twisting mass, comprises parenchyma gauge block, is positioned at first time mass on the left of parenchyma gauge block, is positioned at second time mass on the right side of parenchyma gauge block, and be parallel to first, second, third, fourth elasticity tie-beam of y-axis; Described first time, the left side lateral edges of mass was connected with parenchyma gauge block by the first elasticity tie-beam, and the right side/left side edge of described second time mass is passed through the second elasticity tie-beam and is connected with parenchyma gauge block; Described first time, the center of mass was connected on the first anchor point of substrate by the 3rd elasticity tie-beam, and the center of described second time mass is connected on the second anchor point of substrate by the 4th elasticity tie-beam; First, second inferior quality block described is provided with respectively the first movable electrode, the second movable electrode and the 3rd movable electrode; Described substrate is provided with for forming x-axis Detection capacitance, y-axis Detection capacitance, the first fixed electorde of z-axis Detection capacitance, the second fixed electorde, the 3rd fixed electorde respectively with the first movable electrode, the second movable electrode, the 3rd movable electrode.
Preferably, described z-axis Detection capacitance is tabular electric capacity, and described 3rd movable electrode is top electrode, and described 3rd fixed electorde is bottom electrode; Described 3rd movable electrode is four, be arranged at the left and right edges of mass and second time mass for the first time respectively, described 3rd fixed electorde and the 3rd movable electrode one_to_one corresponding, form first, second, third, fourth z-axis Detection capacitance from left to right successively; Described first, the 4th z-axis Detection capacitance parallel connection is first group of z-axis Detection capacitance, second, third z-axis Detection capacitance parallel connection described is second group of z-axis Detection capacitance, and described first group of z-axis Detection capacitance and second group of z-axis Detection capacitance form a pair z-axis Differential Detection electric capacity.
Preferably, described first time mass and the left and right sides of second time mass offer third through-hole respectively; It is inner that described first fixed electorde is positioned at described third through-hole, and first movable electrode corresponding with it is arranged at the side of third through-hole.
Preferably, each described third through-hole inside is provided with left and right two the first fixed electordes arranged side by side; Described first movable electrode and described first fixed electorde one_to_one corresponding, form the first, second, third, fourth, the 5th, the 6th, the 7th, the 8th x-axis Detection capacitance from left to right successively; Described first, the 3rd, the 5th, the 7th x-axis Detection capacitance parallel connection is first group of x-axis Detection capacitance, described second, the 4th, the 6th, the 8th x-axis Detection capacitance parallel connection is second group of x-axis Detection capacitance, and described first group of x-axis Detection capacitance and second group of x-axis Detection capacitance form a pair differential capacitance.
Preferably, described first time mass and the both sides up and down of second time mass offer fourth hole respectively; It is inner that described second fixed electorde is positioned at described fourth hole, and second movable electrode corresponding with it is arranged at the side of fourth hole.
Preferably, each described fourth hole inside is provided with left and right two the second fixed electordes arranged side by side; Described second movable electrode and described second fixed electorde one_to_one corresponding, thus first time mass upside form the first y-axis Detection capacitance and the second y-axis Detection capacitance from left to right successively, the 3rd y-axis Detection capacitance and the 4th y-axis Detection capacitance is formed successively from left to right in the downside of the first mass, form the 5th y-axis Detection capacitance and the 6th y-axis Detection capacitance successively from left to right in the upside of second time mass, and form the 7th y-axis Detection capacitance and the 8th y-axis Detection capacitance successively from left to right in the downside of second time mass; Described first, the 4th, the 6th, the 7th y-axis Detection capacitance parallel connection is first group of y-axis Detection capacitance, described second, third, the 5th, the 8th y-axis Detection capacitance parallel connection is second group of y-axis Detection capacitance, described first group of y-axis Detection capacitance and second group of y-axis Detection capacitance form a pair y-axis Differential Detection electric capacity.
Preferably, described first time the center of mass be provided with the first through hole, the center of described second time mass is provided with the second through hole; It is inner that described 3rd elasticity tie-beam is arranged at the first through hole, and two ends are connected on the sidewall of the first through hole, and center is connected on the first anchor point of substrate; It is inner that described 4th elasticity tie-beam is arranged at the second through hole, and two ends are connected on the sidewall of the second through hole, and center is connected on the second anchor point of substrate.
Preferably, the two ends of described first elasticity tie-beam are connected with parenchyma gauge block respectively, and centre is connected with first time mass, and the two ends of described second elasticity tie-beam are connected with parenchyma gauge block respectively, and centre is connected with second time mass; Or the two ends of described first elasticity tie-beam are connected with first time mass respectively, centre is connected with parenchyma gauge block, and the two ends of described second elasticity tie-beam are connected with second time mass respectively, and centre is connected with parenchyma gauge block.
Preferably, the left and right sides of described parenchyma gauge block offers fifth hole respectively, described first time mass to be positioned at the fifth hole in left side inner, the fifth hole that described second time mass is positioned at right side is inner.
Preferably, described x-axis Detection capacitance and y-axis Detection capacitance are comb teeth-shaped electric capacity.
The MEMS triaxial accelerometer of the full symmetrical configuration that the utility model proposes, can eliminate the impact of external interference factor, and process for making is simple and easy to realize.
By referring to the detailed description of accompanying drawing to exemplary embodiment of the present utility model, further feature of the present utility model and advantage thereof will become clear.
Accompanying drawing explanation
In the description combined and the accompanying drawing forming a part for instructions shows embodiment of the present utility model, and illustrate that one is used from and explains principle of the present utility model together with it.
Fig. 1 is the structural representation of the utility model MEMS triaxial accelerometer first embodiment.
Fig. 2 is the principle schematic of the x-axis acceleration detection of the first embodiment.
Fig. 3 is the principle schematic of the y-axis acceleration detection of the first embodiment.
Fig. 4, Fig. 5 are the principle schematic of the z-axis acceleration detection of the first embodiment.
Fig. 6 is the structural representation of the utility model MEMS triaxial accelerometer second embodiment.
Embodiment
Various exemplary embodiment of the present utility model is described in detail now with reference to accompanying drawing.It should be noted that: unless specifically stated otherwise, otherwise positioned opposite, the numerical expression of the parts of setting forth in these embodiments and step and numerical value do not limit scope of the present utility model.
Illustrative to the description only actually of at least one exemplary embodiment below, never as any restriction to the utility model and application or use.
May not discuss in detail for the known technology of person of ordinary skill in the relevant, method and apparatus, but in the appropriate case, technology, method and apparatus should be regarded as a part for instructions.
In all examples with discussing shown here, any occurrence should be construed as merely exemplary, instead of as restriction.Therefore, other example of exemplary embodiment can have different values.
It should be noted that: represent similar terms in similar label and letter accompanying drawing below, therefore, once be defined in an a certain Xiang Yi accompanying drawing, then do not need to be further discussed it in accompanying drawing subsequently.
The first embodiment of MEMS triaxial accelerometer of the present utility model is depicted as with reference to figure 1-5, MEMS triaxial accelerometer of the present utility model is full symmetrical configuration, comprise substrate 400 (not illustrating in Fig. 1-3), and be suspended in the twisting mass above substrate 400.
Build three-dimensional cartesian coordinate system as shown in the figure, twisting mass place plane is xy plane, and the forward of z-axis points to twisting mass from substrate.Wherein the forward of x-axis points to the right side of xy plane, and the forward of y-axis points to the upside of xy plane.
Symmetrical structure centered by twisting mass, comprises parenchyma gauge block 300, for the first time mass 100 and second time mass 200, and is parallel to first, second, third, fourth elasticity tie-beam of y-axis.Wherein the left and right sides of parenchyma gauge block 300 offers fifth hole 405 respectively, and mass 100 is positioned at the inside of the fifth hole 405 in left side for the first time, and second time mass 200 is positioned at the inside of the fifth hole 405 on right side.
In a first embodiment, the right side edge of mass 100 is connected with parenchyma gauge block 300 by the first elasticity tie-beam 301 for the first time, and the left side edge of second time mass 200 is connected with parenchyma gauge block 300 by the second elasticity tie-beam 302.In other embodiments, also can be: the left side edge of mass 100 is connected with parenchyma gauge block 300 by the first elasticity tie-beam 301 for the first time, and the right side edge of second time mass 200 be connected with parenchyma gauge block 300 by the second elasticity tie-beam 302.
In a first embodiment, the two ends of the first elasticity tie-beam 301 are connected with parenchyma gauge block 300 respectively, and centre is connected with first time mass 100, and, the two ends of the second elasticity tie-beam 302 are connected with parenchyma gauge block 300 respectively, and centre is connected with second time mass 200.In other embodiments, also can be: the two ends of the first elasticity tie-beam 301 100 to be connected with first time mass to be respectively middlely connected with parenchyma gauge block 300, and, the two ends of the second elasticity tie-beam 302 are connected with second time mass 200 respectively, and centre is connected with parenchyma gauge block 300.
First time, the center of mass 100 was provided with the first through hole 401, and the center of second time mass 200 is provided with the second through hole 402.It is inner that 3rd elasticity tie-beam 303 is arranged at the first through hole 401, and two ends are connected on the sidewall of the first through hole 401, and center is connected on the first anchor point 501 of substrate.It is inner that 4th elasticity tie-beam 304 is arranged at the second through hole 402, and two ends are connected on the sidewall of the second through hole 402, and center is connected on the second anchor point 502 of substrate.Arrange through above, twisting mass relies on the support of the first anchor point 501 and the second anchor point 502 to be suspended at the top of substrate 400.
For the first time mass 100 and second time mass 200 are provided with the first movable electrode, the second movable electrode and the 3rd movable electrode respectively; Substrate 400 is provided with for forming x-axis Detection capacitance, y-axis Detection capacitance, the first fixed electorde of z-axis Detection capacitance, the second fixed electorde, the 3rd fixed electorde respectively with the first movable electrode, the second movable electrode, the 3rd movable electrode.
Introduce the principle of work of the utility model MEMS triaxial accelerometer below, for x-axis mode, shown in figure 2: when the acceleration input having x-axis direction, displacement to the left or to the right can occur parenchyma gauge block 300.Because first time mass 100 is only fixed on substrate by the 3rd elasticity tie-beam 303 in y-axis direction at its center, therefore first time can there is to the left or to the right displacement in mass 100 equally.In like manner, can there is displacement to the left or to the right equally in second time mass 200.This degree of displacement detecting mass 100 and second time mass 200 for the first time just can obtain the acceleration of x-axis.
For this reason, first time mass 100 and the left and right sides of second time mass 200 offer third through-hole 403 respectively, each third through-hole 403 inside is provided with left and right two the first fixed electordes arranged side by side.Whole like this mems accelerometer comprises 8 the first fixed electordes altogether, be followed successively by the first fixed electorde 11,12,13,14,15,16,17,18 from left to right, with its one to one the first movable electrode (not shown in FIG.) be arranged at the side of third through-hole 403, form the first, second, third, fourth, the 5th, the 6th, the 7th, the 8th x-axis Detection capacitance so from left to right successively.
Although do not illustrate in figure, it will be appreciated by those skilled in the art that, to the setting of the first movable electrode should make first time mass 100 or second time mass 200 there is the displacement on x-axis direction time, there is corresponding change in area or the distance of the x-axis Detection capacitance of the first fixed electorde composition of the first movable electrode and its correspondence, thus change the electric capacity of this x-axis Detection capacitance, to realize the detection of the acceleration on x-axis direction.
First movable electrode corresponding with the first fixed electorde 11 can be made to be arranged at the left side of the first fixed electorde 11 and relative with the first fixed electorde 11, first movable electrode relative with the first fixed electorde 12 is arranged at the right side of the first fixed electorde 12 and relative with the first fixed electorde 12.All the other first movable electrodes do similar setting.The first, the 3rd, the 5th, the 7th x-axis Detection capacitance parallel connection electric capacity simultaneously increased or reduce is first group of x-axis Detection capacitance, be second group of x-axis Detection capacitance by the change in contrast second, the 4th, the 6th, the 8th x-axis Detection capacitance parallel connection, first group of x-axis Detection capacitance and second group of x-axis Detection capacitance form a pair differential capacitance.
X-axis Detection capacitance can be tabular or comb teeth-shaped electric capacity, is preferably comb teeth-shaped electric capacity.
For y-axis mode, shown in figure 3: when the acceleration input having y-axis direction, parenchyma gauge block 300 can occur to upside or the motion to downside, and then drive mass 100 and second time mass 200 for the first time, because inferior quality block is fixed on the anchor point of substrate by the elasticity tie-beam in y-axis direction at its center, cannot at y-axis direction translational, can only with respective anchor point for axle, twist around respective anchor point, wherein two inferior quality block torsional directions are contrary.Specifically, when the direction of acceleration is y-axis forward, parenchyma gauge block 300 moves upward, and mass 100 reverses in the counterclockwise direction for the first time, and second time mass 200 reverses along clockwise direction; When the direction of acceleration is y-axis negative sense, parenchyma gauge block 300 moves downward, and mass 100 reverses along clockwise direction for the first time, and second time mass 200 reverses in the counterclockwise direction.This torsion degree detecting mass 100 and second time mass 200 for the first time just can obtain the acceleration of y-axis.
For this reason, first time mass 100 and the both sides up and down of second time mass 200 offer fourth hole 404 respectively, each fourth hole 404 inside is provided with left and right two the second fixed electordes arranged side by side.Whole like this mems accelerometer comprises 8 the second fixed electordes altogether, fourth hole 404 inside for the first time on the upside of mass 100 is followed successively by the second fixed electorde 21 and 22 from left to right, fourth hole 404 inside for the first time on the downside of mass 100 is followed successively by the second fixed electorde 23 and 24 from left to right, fourth hole 404 inside on the upside of second time mass 200 is followed successively by the second fixed electorde 25 and 26 from left to right, fourth hole 404 inside on the downside of second time mass 200 is followed successively by the second fixed electorde 27 and 28 from left to right, with its one to one the second movable electrode (not shown in FIG.) be arranged at the side of fourth hole 404.Like this first time mass 100 upside form the first y-axis Detection capacitance and the second y-axis Detection capacitance from left to right successively, the 3rd y-axis Detection capacitance and the 4th y-axis Detection capacitance is formed successively from left to right in the downside of the first mass, form the 5th y-axis Detection capacitance and the 6th y-axis Detection capacitance successively from left to right in the upside of second time mass 200, and form the 7th y-axis Detection capacitance and the 8th y-axis Detection capacitance successively from left to right in the downside of second time mass 200.
Although do not illustrate in figure, it will be appreciated by those skilled in the art that, to the setting of the second movable electrode should make first time mass 100 or second time mass 200 when respective anchor point twists, there is corresponding change in area or the distance of the y-axis Detection capacitance of the second fixed electorde composition of the second movable electrode and its correspondence, thus change the electric capacity of this y-axis Detection capacitance, to realize the detection of the acceleration on y-axis direction.
Second movable electrode corresponding with the second fixed electorde 21 can be made to be arranged at the left side of the second fixed electorde 21 and relative with the second fixed electorde 21, second movable electrode relative with the second fixed electorde 22 is arranged at the right side of the second fixed electorde 22 and relative with the second fixed electorde 12.All the other second movable electrodes do similar setting.The first, the 4th, the 6th, the 7th y-axis Detection capacitance parallel connection electric capacity simultaneously increased or reduce is first group of y-axis Detection capacitance, by change in contrast second, third, the 5th, the 8th y-axis Detection capacitance parallel connection is second group of y-axis Detection capacitance, first group of y-axis Detection capacitance and second group of y-axis Detection capacitance form a pair y-axis Differential Detection electric capacity.
Y-axis Detection capacitance can be tabular or comb teeth-shaped electric capacity, is preferably comb teeth-shaped electric capacity.
For z-axis mode, shown in figure 4 and Fig. 5: when the acceleration input having z-axis direction, there is motion up or down in parenchyma gauge block 300, thus drive inferior quality block to move, and inferior quality block is fixed on anchor point by tie-beam in the heart wherein, so the translation in inferior quality block z-axis direction is limited, can only with elasticity tie-beam for rotating shaft rotates.Specifically, shown in figure 4, when the direction of acceleration is z-axis negative sense, parenchyma gauge block 300 moves downward, and the left-half of mass 100 moves upward for the first time, and right half part moves downward, the left-half of second time mass 200 moves downward, and right half part moves upward.Shown in figure 5, when the direction of acceleration is z-axis forward, parenchyma gauge block 300 moves upward, and the left-half of mass 100 moves downward for the first time, and right half part moves upward, and the left-half of second time mass 200 moves upward, and right half part moves downward.
For this reason, shown in figure 4 and Fig. 5, z-axis Detection capacitance can be set to tabular electric capacity, the 3rd movable electrode is top electrode, and the 3rd fixed electorde is bottom electrode.3rd movable electrode is four, is arranged at the left and right edges of mass 100 and second time mass 200 for the first time respectively, is followed successively by the 3rd movable electrode 31,32,33,34 from left to right.3rd fixed electorde and the 3rd movable electrode are arranged on substrate 400 correspondingly, are followed successively by the 3rd fixed electorde 31A, 32A, 33A, 34A from left to right, form first, second, third, fourth z-axis Detection capacitance so from left to right successively.
From foregoing teachings, when there being z directional acceleration to input, distance between two electrodes of the first, the 4th z-axis Detection capacitance increases simultaneously or reduces, the change of the distance between two electrodes of second, third z-axis Detection capacitance in contrast, therefore can be first group of z-axis Detection capacitance by the first, the 4th z-axis Detection capacitance parallel connection, second, third z-axis Detection capacitance parallel connection is second group of z-axis Detection capacitance, and first group of z-axis Detection capacitance and second group of z-axis Detection capacitance form a pair z-axis Differential Detection electric capacity.
The first fixed electorde in first embodiment and the second fixed electorde are fixed on substrate 400 by anchor point 503, schematically marked one of them anchor point 503 in Fig. 1.
The structure of MEMS triaxial accelerometer of the present utility model is full symmetric, can realize detecting the acceleration signal in xyz tri-directions simultaneously.Respectively there is an anchor point at the center of two inferior quality blocks, by the elasticity tie-beam being parallel to y-axis, inferior quality block is connected on anchor point, the edge of inferior quality block and parenchyma gauge block link together by the elasticity tie-beam again by being parallel to y-axis, realize the structure that can link.The comb electrodes of xy axle, with the form of differential pair, is distributed in inferior quality block, has certain gap with inferior quality block, thus forms the Differential Detection electric capacity of xy axle, realizes the detection to xy direction of principal axis acceleration signal.The bottom electrode of z-axis capacity plate antenna is distributed on the substrate below inferior quality block, has certain interval with the lower surface of inferior quality block, thus forms the Differential Detection electric capacity of z-axis, realizes the detection to z-axis directional acceleration signal.
With reference to the second embodiment that Figure 6 shows that MEMS triaxial accelerometer of the present utility model, be that the shape of parenchyma gauge block is different with the difference of the first embodiment, the parenchyma gauge block 300 in the second embodiment is wider, the middle thinner bar shape in two ends.
Although be described in detail specific embodiments more of the present utility model by example, it should be appreciated by those skilled in the art, above example is only to be described, instead of in order to limit scope of the present utility model.It should be appreciated by those skilled in the art, when not departing from scope and spirit of the present utility model, above embodiment can be modified.Scope of the present utility model is limited by claims.
Claims (10)
1. a MEMS triaxial accelerometer, is characterized in that, comprising:
Substrate;
Be suspended in the twisting mass of surface; Described twisting mass place plane is xy plane, and wherein the forward of x-axis points to the right side of xy plane, and the forward of y-axis points to the upside of xy plane;
Symmetrical structure centered by described twisting mass, the second time mass (200) comprising parenchyma gauge block (300), be positioned at the first time mass (100) in parenchyma gauge block (300) left side, be positioned at parenchyma gauge block (300) right side, and be parallel to the first, second, third, fourth elasticity tie-beam (301,302,303,304) of y-axis;
The left side lateral edges of described first time mass (100) is connected with parenchyma gauge block (300) by the first elasticity tie-beam (301), and the right side/left side edge of described second time mass (200) is connected with parenchyma gauge block (300) by the second elasticity tie-beam (302); The center of described first time mass (100) is connected on first anchor point (501) of substrate by the 3rd elasticity tie-beam (303), and the center of described second time mass (200) is connected on second anchor point (502) of substrate by the 4th elasticity tie-beam (304);
Described first, second inferior quality block (100,200) is provided with the first movable electrode, the second movable electrode and the 3rd movable electrode respectively; Described substrate is provided with for forming x-axis Detection capacitance, y-axis Detection capacitance, the first fixed electorde of z-axis Detection capacitance, the second fixed electorde, the 3rd fixed electorde respectively with the first movable electrode, the second movable electrode, the 3rd movable electrode.
2. MEMS triaxial accelerometer according to claim 1, is characterized in that,
Described z-axis Detection capacitance is tabular electric capacity, and described 3rd movable electrode is top electrode, and described 3rd fixed electorde is bottom electrode; Described 3rd movable electrode is four, be arranged at the left and right edges of first time mass (100) and second time mass (200) respectively, described 3rd fixed electorde and the 3rd movable electrode one_to_one corresponding, form first, second, third, fourth z-axis Detection capacitance from left to right successively;
Described first, the 4th z-axis Detection capacitance parallel connection is first group of z-axis Detection capacitance, second, third z-axis Detection capacitance parallel connection described is second group of z-axis Detection capacitance, and described first group of z-axis Detection capacitance and second group of z-axis Detection capacitance form a pair z-axis Differential Detection electric capacity.
3. MEMS triaxial accelerometer according to claim 1, is characterized in that,
The left and right sides of described first time mass (100) and second time mass (200) offers third through-hole (403) respectively; It is inner that described first fixed electorde is positioned at described third through-hole (403), and first movable electrode corresponding with it is arranged at the side of third through-hole (403).
4. MEMS triaxial accelerometer according to claim 3, is characterized in that,
Each described third through-hole (403) inside is provided with left and right two the first fixed electordes arranged side by side; Described first movable electrode and described first fixed electorde one_to_one corresponding, form the first, second, third, fourth, the 5th, the 6th, the 7th, the 8th x-axis Detection capacitance from left to right successively;
Described first, the 3rd, the 5th, the 7th x-axis Detection capacitance parallel connection is first group of x-axis Detection capacitance, described second, the 4th, the 6th, the 8th x-axis Detection capacitance parallel connection is second group of x-axis Detection capacitance, and described first group of x-axis Detection capacitance and second group of x-axis Detection capacitance form a pair differential capacitance.
5. MEMS triaxial accelerometer according to claim 1, is characterized in that,
The both sides up and down of described first time mass (100) and second time mass (200) offer fourth hole (404) respectively; It is inner that described second fixed electorde is positioned at described fourth hole (404), and second movable electrode corresponding with it is arranged at the side of fourth hole (404).
6. MEMS triaxial accelerometer according to claim 5, is characterized in that,
Each described fourth hole (404) inside is provided with left and right two the second fixed electordes arranged side by side, described second movable electrode and described second fixed electorde one_to_one corresponding, thus form the first y-axis Detection capacitance and the second y-axis Detection capacitance from left to right successively in the upside of first time mass (100), the 3rd y-axis Detection capacitance and the 4th y-axis Detection capacitance is formed successively from left to right in the downside of the first mass, the 5th y-axis Detection capacitance and the 6th y-axis Detection capacitance is formed successively from left to right in the upside of second time mass (200), and form the 7th y-axis Detection capacitance and the 8th y-axis Detection capacitance successively from left to right in the downside of second time mass (200),
Described first, the 4th, the 6th, the 7th y-axis Detection capacitance parallel connection is first group of y-axis Detection capacitance, described second, third, the 5th, the 8th y-axis Detection capacitance parallel connection is second group of y-axis Detection capacitance, described first group of y-axis Detection capacitance and second group of y-axis Detection capacitance form a pair y-axis Differential Detection electric capacity.
7. MEMS triaxial accelerometer according to claim 1, is characterized in that,
The center of described first time mass (100) is provided with the first through hole (401), and the center of described second time mass (200) is provided with the second through hole (402); It is inner that described 3rd elasticity tie-beam (303) is arranged at the first through hole (401), and two ends are connected on the sidewall of the first through hole (401), and center is connected on first anchor point (501) of substrate; It is inner that described 4th elasticity tie-beam (304) is arranged at the second through hole (402), and two ends are connected on the sidewall of the second through hole (402), and center is connected on second anchor point (502) of substrate.
8. MEMS triaxial accelerometer according to claim 1, is characterized in that,
The two ends of described first elasticity tie-beam (301) are connected with parenchyma gauge block (300) respectively, centre was connected with first time mass (100), and, the two ends of described second elasticity tie-beam (302) are connected with parenchyma gauge block (300) respectively, and centre is connected with second time mass (200); Or,
The two ends of described first elasticity tie-beam (301) are connected with first time mass (100) respectively, centre is connected with parenchyma gauge block (300), and, the two ends of described second elasticity tie-beam (302) are connected with second time mass (200) respectively, and centre is connected with parenchyma gauge block (300).
9. MEMS triaxial accelerometer according to claim 1, is characterized in that,
The left and right sides of described parenchyma gauge block (300) offers fifth hole (405) respectively, the fifth hole (405) that described first time mass (100) is positioned at left side is inner, and the fifth hole (405) that described second time mass (200) is positioned at right side is inner.
10. the three axis accelerometer according to any one of claim 1-9, is characterized in that,
Described x-axis Detection capacitance and y-axis Detection capacitance are comb teeth-shaped electric capacity.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104931729A (en) * | 2015-06-29 | 2015-09-23 | 歌尔声学股份有限公司 | MEMS triaxial accelerometer |
| CN110308308A (en) * | 2019-06-27 | 2019-10-08 | 深迪半导体(上海)有限公司 | Flatly moving type accelerometer in a kind of face with compensating electrode |
| EP3644066A1 (en) * | 2018-10-25 | 2020-04-29 | Analog Devices, Inc. | Low-noise multi-axis accelerometers and related methods |
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2015
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104931729A (en) * | 2015-06-29 | 2015-09-23 | 歌尔声学股份有限公司 | MEMS triaxial accelerometer |
| EP3644066A1 (en) * | 2018-10-25 | 2020-04-29 | Analog Devices, Inc. | Low-noise multi-axis accelerometers and related methods |
| CN111103436A (en) * | 2018-10-25 | 2020-05-05 | 美国亚德诺半导体公司 | Low noise multi-axis accelerometer and related methods |
| US11099207B2 (en) | 2018-10-25 | 2021-08-24 | Analog Devices, Inc. | Low-noise multi-axis accelerometers and related methods |
| CN110308308A (en) * | 2019-06-27 | 2019-10-08 | 深迪半导体(上海)有限公司 | Flatly moving type accelerometer in a kind of face with compensating electrode |
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Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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Granted publication date: 20151028 Effective date of abandoning: 20171205 |