CN104597287B - Inertia measuring module and three axis accelerometer - Google Patents
Inertia measuring module and three axis accelerometer Download PDFInfo
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- CN104597287B CN104597287B CN201510050223.3A CN201510050223A CN104597287B CN 104597287 B CN104597287 B CN 104597287B CN 201510050223 A CN201510050223 A CN 201510050223A CN 104597287 B CN104597287 B CN 104597287B
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- 230000008878 coupling Effects 0.000 abstract description 4
- 238000010168 coupling process Methods 0.000 abstract description 4
- 238000005859 coupling reaction Methods 0.000 abstract description 4
- 230000001133 acceleration Effects 0.000 description 22
- 230000008859 change Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses a kind of inertia measuring module and three axis accelerometer, including by spring beam flying shore surface mass；Spring beam includes being located at two the first spring beams for quality of connection block, and the second spring beam for connecting substrate being connected with two the first spring beam right-angled intersections, center line of two the first spring beams along mass X-direction is symmetrical, and the second spring beam deviates the center line of mass Y direction；Mass is additionally provided with the first movable electrode, the second movable electrode in Y-axis, X-direction；The inertia measuring module of the present invention, the motion of a certain axle in plane will not be influenceed by structure eccentric nature, and two are used along the symmetrical first spring beam quality of connection block of mass X-direction center line, it may insure that mass will not deflect along the first spring beam, only can occur line motion between mass and the first spring beam, so as to improve the precision of detection；Nor the coupling of between centers can be aggravated.
Description
Technical field
The invention belongs to micro electronmechanical (MEMS) field, more precisely, it is related to a kind of micro electronmechanical inertia measuring module, this
Invention further relates to a kind of three axis accelerometer.
Background technology
Micro-electro-mechanaccelerometer accelerometer is the inertia device based on MEMS technology, is accelerated for measuring the line of object of which movement and moving
Degree.It has the features such as high, with low cost small volume, reliability, suitable production in enormous quantities, therefore with before wide market
Scape, its application field includes consumer electronics, Aero-Space, automobile, Medical Devices and weapon etc..
Current three axis accelerometer generally has two kinds of implementations, and a kind of is the method pieced together, by three single-shaft configurations or
Two structures of one twin shaft of person and a single shaft combine the measurement for realizing three axial accelerations.Second is using single
Structure realizes the measurement of 3-axis acceleration.It is general in single structure implementation that z-axis acceleration is measured by eccentric structure, herein
Except z-axis detects that motion make use of the detection of the eccentric nature, planar a certain axle (such as x-axis or y-axis) of structure in the scheme of kind
Motion can also be influenceed by structure eccentric nature, thus it is to swing rather than line motion that its motion is actual, this motion mode
On the one hand inter-axis coupling can be aggravated, on the other hand can reduces capacitance change, so as to greatly reduce the precision of detection.Other one
Individual aspect, when detecting y-axis acceleration, the characteristics of due to its structure, it is also possible to so that its actual motion to swing rather than
Line is moved, and reduce further the precision of detection.
The content of the invention
It is an object of the present invention to provide a kind of new solution of inertia measuring module.
According to the first aspect of the invention there is provided a kind of inertia measuring module, including：
Substrate, and the first pole piece on substrate as bottom electrode,
The hanging mass in surface；The mass is provided with constitutes the upper of Z axis detection electric capacity with the first pole piece
Electrode；
For connecting substrate and the spring beam of mass, the spring beam includes two first elasticity positioned at X-direction
Beam and the second spring beam being connected positioned at Y direction and with two the first spring beam right-angled intersections, wherein, the second spring beam
Two ends be connected on the anchor point of substrate, the two ends difference quality of connection block of two the first spring beams；Wherein, described two first
Center line of the spring beam along mass X-direction is symmetrical, and second spring beam deviates the center line of mass Y direction；
The mass is also respectively provided with the first movable electrode, the second movable electrode in Y-axis, X-direction；The base
Be provided with plate for the first movable electrode, the second movable electrode separately constitute Y-axis detection electric capacity, X-axis detection electric capacity the
One fixed electrode, the second fixed electrode.
Preferably, the mass is provided with through hole, and first spring beam is connected on the side wall of through hole both sides.
Preferably, the quantity of first pole piece has two, is symmetrically distributed in the both sides of the second spring beam.
Preferably, first movable electrode and/or the second movable electrode are respectively arranged with two, respectively positioned at mass
Relative both sides.
Preferably, between the first movable electrode and the first fixed electrode and/or the second movable electrode and the second fixed electrode
Between constitute broach capacitance structure.
It is a further object of the present invention to provide a kind of three axis accelerometer, include the inertia measurement mould of two symmetrical configurations
Block；Also include the tie-beam for connecting the both sides of mass in two inertia measuring modules respectively.
Preferably, the tie-beam includes the crossbeam being located in X-direction, in addition in Y direction, one end with it is horizontal
Beam connects the longeron that one end is connected with mass side wall；The longeron and the second spring beam are point-blank.
Preferably, the buttress brace of two crossbeams of connection is additionally provided with, wherein, the second elasticity in two inertia measuring modules
Beam is symmetrical relative to buttress brace.
Preferably, the buttress brace is provided with two, and two buttress braces are be arranged in parallel, and a rectangle frame is surrounded with crossbeam.
Preferably, the cant beam in addition in rectangle frame.
The motion of a certain axle in the inertia measuring module of the present invention, plane will not be influenceed by structure eccentric nature.
And using two along the symmetrical first spring beam quality of connection block of mass X-direction center line, no matter mass is by which
The acceleration in individual direction, it can be ensured that mass will not deflect along the first spring beam, mass and the first spring beam it
Between only can occur line motion, so as to improve the precision of detection；Nor the coupling of between centers can be aggravated.
It was found by the inventors of the present invention that in the prior art, when acceleration of the mass by some direction of principal axis, quality
Block is actual, and make is wobbling action, is not also expected single line motion or individually rotates.Therefore, the present invention wants real
Existing technical assignment or technical problem to be solved be it is that those skilled in the art never expect or it is not expected that,
Therefore the present invention is a kind of new technical scheme.
By referring to the drawings to the detailed description of the exemplary embodiment of the present invention, further feature of the invention and its
Advantage will be made apparent from.
Brief description of the drawings
The accompanying drawing for being combined in the description and constituting a part for specification shows embodiments of the invention, and even
It is used for the principle for explaining the present invention together with its explanation.
Fig. 1 is the structural representation of inertia measuring module of the present invention.
Fig. 2 is the structural representation of spring beam in Fig. 1.
Fig. 3 is the structural representation of three axis accelerometer of the present invention.
Fig. 4 is the structural representation of tie-beam in Fig. 3.
Embodiment
The various exemplary embodiments of the present invention are described in detail now with reference to accompanying drawing.It should be noted that：Unless had in addition
Body illustrates that the part and the positioned opposite of step, numerical expression and numerical value otherwise illustrated in these embodiments does not limit this
The scope of invention.
The description only actually at least one exemplary embodiment is illustrative below, never as to the present invention
And its any limitation applied or used.
It may be not discussed in detail for technology, method and apparatus known to person of ordinary skill in the relevant, but suitable
In the case of, the technology, method and apparatus should be considered as a part for specification.
In shown here and discussion all examples, any occurrence should be construed as merely exemplary, without
It is as limitation.Therefore, other examples of exemplary embodiment can have different values.
It should be noted that：Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined, then it need not be further discussed in subsequent accompanying drawing in individual accompanying drawing.
With reference to Fig. 1, the invention provides the inertia measuring module in a kind of three axis accelerometer, including (view is not for substrate
Provide), on the substrate can be with parts such as the circuits of Butut inertia measuring module.As bottom electrode is provided with the substrate
One pole piece 4 (being represented by dotted lines in view).
The inertia measuring module of the present invention also includes the mass 1 positioned at surface, and the mass 1 is supported on
The support system 5 of surface.The support system 5 can be a spring beam, and mass 1 is by the spring beam flying shore in base
The top of plate.
Spring beam includes two the first spring beams 12 positioned at X-direction, and positioned at the second spring beam of Y direction 11,
This two the first spring beams 12 and the right-angled intersection of the second spring beam 11 are fixed together, that is to say, that the second spring beam 11 is distinguished
The right-angled intersection of the first spring beam 12 with two parallel arrangements is fixed together.Preferably, two the first spring beams 12 are relative
It is distributed in the Central Symmetry of the second spring beam 11.
Wherein, the two ends of the second spring beam 11 are connected on the anchor point 6 of substrate, two quality of connection blocks of the first spring beam 12
1.Mass 1 is supported on to the top of substrate by the first spring beam 12, the second spring beam 11, anchor point 6 so that at mass 1
In hanging state.In a specific embodiment of the invention, through hole, first elasticity are provided with the mass 1
The two ends of beam 12 are connected on the side wall of through hole both sides.
Need to point out herein when, the present invention is only to facilitate the first spring beam 12 of description and the second spring beam 11
Between relation, the first spring beam 12 is set to X-direction, the second spring beam 11 is set to Y direction, it is of course also possible to will
First spring beam 12 is set to Y direction, and the second spring beam 11 is set to X-direction, is relative therebetween.
The inertia measuring module of the present invention, the mass 1 is also respectively provided with the first movable electricity in Y-axis, X-direction
Pole 9, the second movable electrode 10；Two movable electrodes are fixed on mass 1, for example, can be arranged on the edge of mass 1,
And can be synchronized with the movement with the motion of mass.Accordingly, it is provided on the substrate and the first movable electrode 9, second
Movable electrode 10 separately constitutes the first fixed electrode 2, the second fixed electrode 3 that Y-axis detection electric capacity, X-axis detect electric capacity.This two
Fixed electrode is fixedly mounted on substrate, when two movable electrodes are moved with mass 1, change fixed electrode with can
Area or distance between moving electrode, so as to change the capacitance of corresponding capacitance, to realize the measurement of acceleration in this direction.
Wherein, first movable electrode 9 is provided with two, respectively positioned at the relative both sides of mass 1.With reference to Fig. 1's
View direction, two the first movable electrodes 9 are separately positioned on the top and bottom of mass 1, accordingly, on substrate be provided with
Two the first fixed electrodes 2 that two the first movable electrodes 9 coordinate, when there is Y direction acceleration, mass is along Y-axis side
To motion so that the area or big apart from becoming between one of them first movable electrode 9 and the first fixed electrode 2, and another
Area or distance between first movable electrode 9 and the first fixed electrode 2 diminish, and two Y-axis detection electric capacity constitute difference
Capacitance structure, improves the precision of Y-axis acceleration detection.
Based on same reason, second movable electrode 10 may also set up two, respectively positioned at mass 1 in X-axis
Both sides on direction.With reference to Fig. 1 view direction, two the second movable electrodes 10 are separately positioned on left end and the right side of mass 1
End, accordingly, on substrate is provided with two the second fixed electrodes 3 coordinated with two the second movable electrodes 10, when there is X-direction
Acceleration when, mass 1 is moved along X-direction so that one of them second movable electrode 10 and the second fixed electrode 3 it
Between area or big apart from becoming, and the area or distance between another fixed electrode 3 of the second movable electrode 10 and second diminish,
Two X-axis detection electric capacity constitute differential capacitance structure, improve the precision of X-axis acceleration detection.
Between first movable electrode 9 and the first fixed electrode 2 and/or the second movable electrode 10 and the second fixed electrode 3 it
Between can use the capacitance structure of comb teeth-shaped, the structure of broach electric capacity belongs to existing technology, no longer illustrates herein.
The inertia measuring module of the present invention, center line of two first spring beams 12 along mass X-direction is symmetrical
Distribution, second spring beam 11 deviates the center line of mass Y direction.When the inertia measuring module is by Z-direction
During acceleration, due to the eccentric setting of the second spring beam 11 so that mass 1 is that axle deflects fortune with the second spring beam 11
It is dynamic.
Specifically, using Fig. 1 view direction as reference, two the first spring beams 12 are relative in mass X-direction
Line is symmetrical, and the second spring beam 11 deviates the center line of mass Y direction, that is to say, that the second spring beam 11 arrives quality
The distance of the left end of block 1 arrives the distance of the right-hand member of mass 1 with it.For example, the second spring beam 11 deviates to mass Y direction
The right of center line, when mass 1 runs into the acceleration of Z-direction, due to the bias between the spring beam 11 of mass 1 and second
Set so that mass 1 can rotate relative to the second spring beam 11.
It is additionally provided with the mass 1 and constitutes the Top electrode (view is not provided) that Z axis detects electric capacity with the first pole piece 4,
In a preferred embodiment of the invention, the mass 1 inherently Z axis detects the Top electrode of electric capacity, now, mass 1, the
One movable electrode 9, the second movable electrode 10 can be used as the ground connection pole piece of each self-capacitance.
The quantity of first pole piece 4 can set two, be symmetrically distributed in the both sides of the second spring beam 11.When Z-direction has
During acceleration, mass 1 deflects relative to the second spring beam 11, that is to say, that mass 1 is around 11 turns of the second spring beam
It is dynamic, so as to change the distance between pole piece 4 of mass 1 and first, realize that Z axis detects the change of electric capacity.Mass 1 and wherein one
The distance between individual first pole piece 4 becomes big, diminishes with the distance between another the first pole piece 4 so that two the first pole pieces 4 with
Differential capacitance structure is may be constructed between mass, to improve the precision of Z axis acceleration detection.When Y direction has acceleration,
Mass 1 is subjected to displacement by the deformation of the first spring beam 12 in Y direction, so that solid by the first movable electrode 9 and first
Fixed electrode 2 measures the acceleration of Y direction.When X-direction has acceleration, the change that mass 1 passes through the second spring beam 11
Shape is subjected to displacement in the X-axis direction, so as to measure adding for X-direction by the second movable electrode 10 and the second fixed electrode 3
Speed.
The motion of a certain axle (X-axis, Y-axis) in the inertia measuring module of the present invention, plane will not be eccentric special by structure
The influence of property.And using two along the symmetrical first spring beam quality of connection block of mass X-direction center line, no matter quality
Acceleration of the block by which direction, it can be ensured that it will not deflect along the first spring beam, mass and the first elasticity
Only can occur line motion between beam, so as to improve the precision of detection；Nor the coupling of between centers can be aggravated.
The inertia measuring module of the present invention, can be used in combination, and constitute three axis accelerometer, for example, can pass through
Tie-beam connects the mass 1 in multiple inertia measuring modules.
With reference to Fig. 3, a kind of three axis accelerometer disclosed by the invention includes the inertia measuring module of two symmetrical configurations,
And respectively connected the both sides of mass 1 in two inertia measuring modules using two tie-beams；The tie-beam includes
Crossbeam 7 in X-direction, and in Y direction, one end and the connection of crossbeam 7 one end be connected with the side wall of mass 1
Longeron 8；The longeron 8 is conllinear with the second spring beam 11, that is to say, that the spring beam 11 of longeron 8 and second point-blank, with
The influence that reduction longeron 8 is overturn to mass along Z-direction；Further, the longeron 8 can use nonrigid material
It is made.
With reference to Fig. 3 view direction, the upper end side wall of two masses 1 is connected to by crossbeam 7 above, longeron 8
Together；Underlying crossbeam 7, longeron 8 link together the bottom side of the wall of two masses 1；Between two crossbeams 7 also
Rigid buttress brace 130 is provided with, two crossbeams 7 are linked together by the buttress brace 130, buttress brace 130 is in two horizontal strokes
Position on beam 7 so that the second spring beam 11 in two inertia measuring modules is symmetrical relative to the buttress brace 130.
The three axis accelerometer of the present invention, when the acceleration by Z-direction, due to the spring beam of mass 1 and second
Eccentric setting between 11 so that mass 1 deflects relative to the second spring beam 11, is carried out by two the first pole pieces 4
Detection.And when the acceleration by X-direction, due to crossbeam 7, longeron 8, buttress brace 130 and two the first spring beams 12
Effect so that translational motion can only occur in the X-axis direction for mass 1, thus improve X-direction detection precision.When
When mass receives the acceleration of Y direction, because the second spring beam 11 is symmetrical relative to buttress brace 130 so that the Z axis
The center of gravity and geometric center of gravity of structure are overlapping, and using two quality of connection blocks 1 of the first spring beam 12, so as to ensure that mass
It can only be translated in the Y-axis direction, without the phenomenon twisted.
In order to further improve the anti-torsion ability of tie-beam, the buttress brace 130 is provided with two, two buttress braces
130 are be arranged in parallel, and a rectangle frame is surrounded with crossbeam 7.Further, two cant beams 131 in addition in rectangle frame, two
Bar cant beam 131 can be along diagonal distribution of rectangle frame etc., with reference to Fig. 4.
Although some specific embodiments of the present invention are described in detail by example, the skill of this area
Art personnel are it should be understood that example above is merely to illustrate, the scope being not intended to be limiting of the invention.The skill of this area
Art personnel to above example it should be understood that can modify without departing from the scope and spirit of the present invention.This hair
Bright scope is defined by the following claims.
Claims (10)
1. a kind of inertia measuring module, it is characterised in that including：
Substrate, and the first pole piece (4) on substrate as bottom electrode,
The hanging mass (1) in surface；The mass (1) is provided with and the first pole piece (4) composition Z axis detection electric capacity
Top electrode；
For connecting substrate and the spring beam of mass (1), the spring beam includes two the first spring beams positioned at X-direction
(12) the second spring beam (11) and positioned at Y direction and with two the first spring beam (12) right-angled intersections being connected, wherein,
The two ends of second spring beam (11) are connected on the anchor point of substrate (6), two the first spring beams (12) difference quality of connection blocks
(1)；Wherein, center line of two first spring beams (12) along mass (1) X-direction is symmetrical, second bullet
Property beam (11) deviate mass (1) Y direction center line；
The mass (1) is also respectively provided with the first movable electrode (9), the second movable electrode (10) in Y-axis, X-direction；
It is provided with the substrate for separately constituting Y-axis detection electric capacity, X-axis with the first movable electrode (9), the second movable electrode (10)
Detect the first fixed electrode (2), the second fixed electrode (3) of electric capacity.
2. inertia measuring module according to claim 1, it is characterised in that：The mass (1) is provided with through hole, described
First spring beam (12) is connected on the side wall of through hole both sides.
3. inertia measuring module according to claim 1, it is characterised in that：The quantity of first pole piece (4) has two,
It is symmetrically distributed in the both sides of the second spring beam (11).
4. inertia measuring module according to claim 1, it is characterised in that：First movable electrode (9) and/or second
Movable electrode (10) is respectively arranged with two, respectively positioned at the relative both sides of mass (1).
5. inertia measuring module according to claim 1, it is characterised in that：First movable electrode (9) fixes electricity with first
Broach capacitance structure is constituted between pole (2) and/or between the second movable electrode (10) and the second fixed electrode (3).
6. a kind of three axis accelerometer, it is characterised in that：Including two symmetrical configurations as described in any one of claim 1 to 5
Inertia measuring module；Also include the tie-beam for connecting the both sides of mass (1) in two inertia measuring modules respectively.
7. three axis accelerometer according to claim 6, it is characterised in that：The tie-beam includes being located in X-direction
Crossbeam (7), in addition in Y direction, one end and the longeron that is connected with mass (1) side wall of crossbeam (7) connection one end
(8)；The longeron (8) and the second spring beam (11) are point-blank.
8. three axis accelerometer according to claim 7, it is characterised in that：It is additionally provided with adding for two crossbeams (7) of connection
Brutal (130), wherein, the second spring beam (11) in two inertia measuring modules is symmetrical relative to buttress brace (130).
9. three axis accelerometer according to claim 8, it is characterised in that：The buttress brace (130) is provided with two, two
Individual buttress brace (130) is be arranged in parallel, and a rectangle frame is surrounded with crossbeam (7).
10. three axis accelerometer according to claim 9, it is characterised in that：Also include the cant beam being located in rectangle frame
(131)。
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510050223.3A CN104597287B (en) | 2015-01-30 | 2015-01-30 | Inertia measuring module and three axis accelerometer |
| PCT/CN2015/084970 WO2016101611A1 (en) | 2014-12-25 | 2015-07-23 | Inertia measurement module and three-axis accelerometer |
| KR1020177019099A KR101929149B1 (en) | 2014-12-25 | 2015-07-23 | Inertia measurement module and three-axis accelerometer |
| EP15871685.2A EP3239723B1 (en) | 2014-12-25 | 2015-07-23 | Inertia measurement module and three-axis accelerometer |
| US15/538,230 US10473686B2 (en) | 2014-12-25 | 2015-07-23 | Inertia measurement module and triaxial accelerometer |
| JP2017533906A JP6303074B2 (en) | 2014-12-25 | 2015-07-23 | Inertial measurement module and 3-axis accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510050223.3A CN104597287B (en) | 2015-01-30 | 2015-01-30 | Inertia measuring module and three axis accelerometer |
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| CN104597287A CN104597287A (en) | 2015-05-06 |
| CN104597287B true CN104597287B (en) | 2017-09-05 |
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| CN201510050223.3A Active CN104597287B (en) | 2014-12-25 | 2015-01-30 | Inertia measuring module and three axis accelerometer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2016101611A1 (en) * | 2014-12-25 | 2016-06-30 | 歌尔声学股份有限公司 | Inertia measurement module and three-axis accelerometer |
| CN106809799B (en) * | 2015-11-27 | 2018-07-20 | 上海微联传感科技有限公司 | Acceleration transducer and its manufacturing method |
| CN107782913B (en) * | 2016-08-26 | 2022-02-22 | 深迪半导体(绍兴)有限公司 | Triaxial capacitive accelerometer |
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