CN104897147B - A kind of MEMS three-axis gyroscopes - Google Patents
A kind of MEMS three-axis gyroscopes Download PDFInfo
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- CN104897147B CN104897147B CN201510368747.7A CN201510368747A CN104897147B CN 104897147 B CN104897147 B CN 104897147B CN 201510368747 A CN201510368747 A CN 201510368747A CN 104897147 B CN104897147 B CN 104897147B
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- 238000001514 detection method Methods 0.000 claims abstract description 169
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 238000012857 repacking Methods 0.000 claims description 16
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- 230000005611 electricity Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 9
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
Abstract
The invention discloses a kind of MEMS three-axis gyroscopes, are servo-actuated the side wall of mass by driving spring beam to be connected with parenchyma gauge block；X, Y-axis detection mass are additionally provided with servo-actuated mass, X-axis detection mass is located in servo-actuated mass Y direction, and by being connected along the first tie-beam of Y direction with servo-actuated mass；Y-axis detection mass is located in servo-actuated mass X-direction, and by being connected along the second tie-beam of X-direction with servo-actuated mass；Z axis including being connected by the 3rd tie-beam with parenchyma gauge block decouples mass, and Z axis detects mass and is connected by the 4th tie-beam with Z axis decoupling mass；Z axis detection mass is connected on the anchor point of substrate by the 5th tie-beam.The MEMS three-axis gyroscopes of the present invention, can be by the integrated precision for improving the utilization rate of chip on a single chip, while also improving angular velocity signal detection of the detection of three-axis gyroscope by above-mentioned structure design.
Description
Technical field
The present invention relates to field of inertia measurement, more particularly, to a kind of three axis accelerometer based on MEMS manufacture
Instrument.
Background technology
MEMS gyroscope is the inertia device based on microelectromechanical processes manufacture, for measuring the angular speed of object of which movement.It
With small volume, reliability is high, and cost is cheap, the characteristics of being adapted to produce in enormous quantities, therefore has wide market prospects, can answer
For the wide spectrum including consumer electronics, Aero-Space, automobile, Medical Devices and weapon.
MEMS gyro instrument system generally includes drive part and detection part, and it uses Coriolis（Hereinafter referred to as coriolis force）
Principle carry out the detection of angular speed, and the coriolis force fictitious force that to be arteface go out, in particular it is required that in a first direction to knot
Structure is driven, and when second direction has turning rate input, coriolis force can be just produced on third direction, causes the position of mass
Move, by detecting the change of the displacement, to realize the detection of angular velocity.Therefore, the structure of MEMS gyroscope is more complicated, and one
As for, on single structure integrate XYZ three-axis gyroscopes have very big difficulty.
The content of the invention
It is an object of the present invention to provide a kind of new solution of MEMS three-axis gyroscopes.
According to the first aspect of the invention, there is provided a kind of MEMS three-axis gyroscopes, including substrate, and pass through anchor point bullet
Property be supported on parenchyma gauge block above substrate, the substrate, which is provided with, to be formed driving electric capacity with parenchyma gauge block and drives parenchyma gauge block
The driving electrodes of rotation；Using the horizontal direction of parenchyma gauge block as X-direction, using the vertical direction of parenchyma gauge block as Y direction, with
Direction perpendicular to plane where parenchyma gauge block is Z-direction；
Also include XY repacking geodesic structures, the XY repacking geodesic structure includes being resiliently supported above the substrate by anchor point
Servo-actuated mass, wherein, the side wall of the servo-actuated mass is by driving spring beam to be connected with parenchyma gauge block；Described servo-actuated
X-axis detection mass, Y-axis detection mass are additionally provided with mass, wherein, X-axis detection mass is located at servo-actuated mass
Y direction on, and by being connected along the first tie-beam of Y direction with servo-actuated mass；The Y-axis detection mass is located at
In the X-direction of servo-actuated mass, and by being connected along the second tie-beam of X-direction with servo-actuated mass；The X-axis detection
Mass, the both ends of Y-axis detection mass have movable along corresponding first tie-beam, the second tie-beam symmetrical first respectively
Electrode, the second movable electrode；It is provided with the substrate and forms Differential Detection electric capacity with the first movable electrode, the second movable electrode
Corresponding fixed electrode；
Also include Z axis detection structure, the Z axis detection structure includes the Z being connected by the 3rd tie-beam with parenchyma gauge block
Decoupler shaft mass, in addition to mass is detected with the Z axis of Z axis decoupling masses parallel arrangement, wherein the Z axis detects quality
Block decouples mass with Z axis by the 4th tie-beam positioned at its both sides and is connected；The Z axis detection mass passes through the 5th connection
Beam is connected on the anchor point for being fixed on substrate, and the 4th tie-beam is vertical with the 5th tie-beam；Set on the Z axis detection mass
The 3rd movable electrode, the 4th movable electrode are equipped with, is provided with the substrate and the 3rd movable electrode, the 4th movable electrode composition
The fixed electrode of differential capacitance.
Preferably, the XY repacking geodesic structure is provided with two, is distributed on the center line of parenchyma gauge block X-direction, and relatively
It is symmetrical in the anchor point of parenchyma gauge block.
Preferably, the X-axis detection mass is provided with two, is designated as the first X-axis detection mass, the second X-axis respectively
Mass is detected, the first X-axis detection mass, the second X-axis detection mass are located at the center line of servo-actuated mass Y direction
On, and it is symmetrical relative to the anchor point of servo-actuated mass；
The Y-axis detection mass is provided with two, is designated as the first Y-axis detection mass, the second Y-axis detection quality respectively
Block, the first Y-axis detection mass, the second Y-axis detection mass are located on the center line of servo-actuated mass X-direction, and phase
It is symmetrical for the anchor point of servo-actuated mass.
Preferably, through hole is provided with the parenchyma gauge block, the servo-actuated mass is located in corresponding through hole, described
Drive spring beam parallel with the side wall of servo-actuated mass.
Preferably, the driving spring beam is provided with four, respectively positioned at four sidewall directions of servo-actuated mass.
Preferably, the parenchyma gauge block is connected on its anchor point by the first cross spring beam；The servo-actuated mass leads to
The second cross spring beam is crossed to be connected on its anchor point.
Preferably, the Z axis detection structure is provided with two, is designated as the first Z axis detection structure, the second Z axis detection knot respectively
Structure, the first Z axis detection structure, the second Z axis detect structure distribution on the center line of parenchyma gauge block Y direction, and relative to
The anchor point of parenchyma gauge block is symmetrical.
Preferably, the 4th tie-beam extends along Y direction, and the 5th tie-beam extends along X-direction, and
5th tie-beam is provided with two, is located at the both sides of Y direction positioned at Z axis detection mass respectively.
Preferably, the Z axis detection mass includes detecting matter relative to symmetrical first Z axis of parenchyma gauge block Y-axis center line
Gauge block, the second Z axis detection mass, and connection the first Z axis detection mass, the connecting portion of the second Z axis detection mass；Its
In, the 3rd described movable electrode, the 4th movable is equipped with first Z axis detection mass, the second Z axis detection mass
Electrode.
Preferably, the driving electrodes are provided with four, are distributed in the relative both sides of parenchyma gauge block two-by-two.
The MEMS three-axis gyroscopes of the present invention, driving electrodes driving parenchyma gauge block is in the Z-axis direction clockwise or counterclockwise
Rotate, so that the servo-actuated mass in XY repacking geodesic structures is counterclockwise or rotates clockwise, make the Z in Z axis detection structure
Decoupler shaft mass can move clockwise or counterclockwise with parenchyma gauge block.Have X, Y direction turning rate input when, X, Y
Shaft detection mass can produce the coriolis force positioned at Z-direction, so that similar seesaw can occur for X, Y-axis detection mass
Motion, it is the measurement that X, Y-axis angular velocity signal can be achieved by corresponding fixed electrode；When the turning rate input for having Z-direction
When, Z axis detection mass can produce the coriolis force positioned at X-axis, Y direction, so that translation can occur for Z axis detection mass,
It is the measurement that Z axis angular velocity signal can be achieved by corresponding fixed electrode.
The MEMS three-axis gyroscopes of the present invention, can be by the detection of X, Y, Z three-axis gyroscope by above-mentioned structure design
It is integrated to improve the utilization rate of chip on a single chip, while also improve the precision of angular velocity signal detection.
It was found by the inventors of the present invention that in the prior art, the structure of MEMS gyroscope is more complicated, in general,
XYZ three-axis gyroscopes are integrated on single structure very big difficulty.Therefore, the technical assignment or want that the present invention to be realized
The technical problem of solution be it is that those skilled in the art never expect or it is not expected that, therefore the present invention is a kind of new skill
Art scheme.
By referring to the drawings to the present invention exemplary embodiment detailed description, further feature of the invention and its
Advantage will be made apparent from.
Brief description of the drawings
It is combined in the description and the accompanying drawing of a part for constitution instruction shows embodiments of the invention, and even
It is used for the principle for explaining the present invention together with its explanation.
Fig. 1 is the structural representation of three-axis gyroscope of the present invention.
Fig. 2 is the connection diagram of XY repacking geodesic structure of the present invention and parenchyma gauge block.
Fig. 3 is the schematic diagram of XY repacking geodesic structures.
Fig. 4 is the schematic diagram of Z axis detection structure.
Embodiment
The various exemplary embodiments of the present invention are described in detail now with reference to accompanying drawing.It should be noted that：Unless have in addition
Body illustrates that the unlimited system of part and the positioned opposite of step, numerical expression and the numerical value otherwise illustrated in these embodiments is originally
The scope of invention.
The description only actually at least one exemplary embodiment is illustrative to be never used as to the present invention below
And its application or any restrictions that use.
It may be not discussed in detail for technology, method and apparatus known to person of ordinary skill in the relevant, but suitable
In the case of, the technology, method and apparatus should be considered as part for specification.
In shown here and discussion all examples, any occurrence should be construed as merely exemplary, without
It is as limitation.Therefore, other examples of exemplary embodiment can have different values.
It should be noted that：Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined, then it need not be further discussed in subsequent accompanying drawing in individual accompanying drawing.
With reference to figure 1, the invention provides a kind of MEMS three-axis gyroscopes, it includes substrate（View does not provide）, and bullet
Property be suspended at parenchyma gauge block 1 above substrate, in addition to the driving electrodes 8 that driving parenchyma gauge block 1 rotates above substrate.This hair
It is bright for the ease of description, using the horizontal direction of parenchyma gauge block 1 as X-direction, using the vertical direction of parenchyma gauge block 1 as Y direction,
Using perpendicular to the direction of the place plane of parenchyma gauge block 1 as Z-direction.For a person skilled in the art, it should be understood that
It is that the direction of the X, Y, Z axis of definition should not be taken to be limiting protection scope of the present invention only to facilitate description, such as
The vertical direction that parenchyma gauge block 1 can be defined is X-direction, and the horizontal direction for defining parenchyma gauge block 1 is Y direction etc..
With reference to figure 1, Fig. 2, anchor point 1a is fixed with substrate, parenchyma gauge block 1 is connected to the anchor point by a spring beam
On 1a so that parenchyma gauge block 1 can be rotated, anchor point 1a is excellent when by the driving force in the external world using anchor point 1a as rotating shaft
Bit selecting is in the structure centre of parenchyma gauge block 1 so that parenchyma gauge block 1 has symmetrical structure.Between parenchyma gauge block 1 and anchor point 1a
This attachment structure belongs to the common knowledge of those skilled in the art.Wherein, the spring beam is preferably the first cross spring beam
1b, so as to so that principal mass block 1 is firm is connected on anchor point 1a.When parenchyma gauge block 1 is by extraneous corresponding driving, make it
The first cross spring beam 1b deformations can be reversed, and rotate clockwise or counterclockwise in the Z-axis direction using anchor point 1a as rotating shaft.
The driving electrodes 8 of the present invention are mainly that parenchyma gauge block 1 provides driving force, and the driving electrodes 8 can be for example distributed in
The relative both sides of parenchyma gauge block 1, and form driving electric capacity with parenchyma gauge block 1.In a specific embodiment of the invention, ginseng
Fig. 1 is examined, driving electrodes 8 are provided with four, are separately positioned on top, the bottom of 1 two Y direction side walls of parenchyma gauge block.Driving
Electrode 8 can be fixed on substrate by anchor point, and the side wall of itself and parenchyma gauge block 1 may be constructed broach electric capacity.It is located approximately at master
Two diagonally adjacent driving electrodes 8 of mass 1 are one group, and two groups of driving electrodes form differential driving electric capacity.With Fig. 1
View direction be defined, such as positioned at parenchyma gauge block upper left side, lower right two driving electrodes 8 be one group, master can be driven
Mass 1 rotates counterclockwise；Two driving electrodes 8 positioned at the lower left of parenchyma gauge block 1, upper right side are one group, can drive master
Mass 1 rotates clockwise.For those skilled in the art, four driving electrodes 8 can also be arranged on principal mass
Left, the right of 1 two X-direction side walls of block, it can equally realize the driving clockwise or counterclockwise of parenchyma gauge block 1.
The MEMS three-axis gyroscopes of the present invention, in addition to for detecting the XY shaft detection knots of X-axis angular speed, Y-axis angular speed
Structure 3, with reference to figure 2, the XY repacking geodesic structure 3 includes being resiliently supported at the servo-actuated mass above the substrate by anchor point 2a
2.It is consistent with the connected mode of parenchyma gauge block 1, anchor point 2a is fixed with substrate, mass 2 is servo-actuated and is connected by a spring beam
On the anchor point 2a so that servo-actuated mass 2 can be turned when by the driving force in the external world using anchor point 2a as rotating shaft
It is dynamic.Anchor point 2a is preferably placed at the structure centre of servo-actuated mass 2 so that servo-actuated mass 2 has symmetrical structure.Wherein,
The spring beam is preferably the second cross spring beam 2b, so as to so that servo-actuated mass 2 is consolidated and is connected on anchor point 2a.When with
When kinoplaszm gauge block 2 is by extraneous corresponding driving, it can be made using anchor point 2a as rotating shaft, the second cross spring beam 2b is reversed and become
Shape, and counterclockwise or rotate clockwise in the Z-axis direction.
The side wall of the servo-actuated mass 2 is by driving the side wall of spring beam 25 and parenchyma gauge block 1 to link together.At this
Invent in a preferred embodiment, through hole is provided with the parenchyma gauge block 1, the servo-actuated mass 2 is suspended at substrate
Top and in the corresponding through hole, wherein, the side wall of the driving spring beam 25 and servo-actuated mass 2 be arranged in parallel, its
Both ends are fixed in the side wall of parenchyma gauge block 1, and the medium position of the driving spring beam 25 is connected to the side wall of servo-actuated mass 2
On.When driving electrodes 8 drive parenchyma gauge block 1 to rotate clockwise, because servo-actuated mass 2 is fixed on lining by anchor point 2a
On bottom, this allows for parenchyma gauge block 1 by driving the servo-actuated mass 2 of the driving of spring beam 25 to rotate counterclockwise；Based on identical road
Reason, when driving electrodes 8 drive parenchyma gauge block 1 to rotate counterclockwise, parenchyma gauge block 1 is servo-actuated by driving the driving of spring beam 25
Mass 2 rotates clockwise.
The driving spring beam 25 of the present invention can set four, be respectively distributed to four sidewall directions of servo-actuated mass 2,
The rotation of servo-actuated mass 2 is driven by four driving spring beams 25, allows it that there is very the surrounding for being servo-actuated mass 2
Good restriction effect, ensure the rotation with surface that servo-actuated mass 2 is only formed in X-axis, Y-axis.
X-axis detection mass, Y-axis detection mass are also distributed with the servo-actuated mass 2, is respectively used to X-axis angle
The measurement of speed, Y-axis angular speed.In one preferred embodiment of the invention, X-axis detection mass is provided with two, point
The first X-axis detection mass 20, the second X-axis detection mass 21 are not designated as；Wherein the first X-axis detection mass 20, the second X-axis
Detect mass 21 to be located in the Y direction of servo-actuated mass 2, be preferably placed on the Y-axis center line of servo-actuated mass 2, and relatively
It is symmetrical in the anchor point 2a of servo-actuated mass 2, so as to ensure that the symmetry of servo-actuated mass 2.Wherein, the first X-axis detects
Mass 20, the second X-axis detection mass 21 pass through the first tie-beam 20a extended along Y direction and servo-actuated mass 2 respectively
Link together；
The Y-axis detection mass is preferably provided with two, is designated as the first Y-axis detection mass 22, the inspection of the second Y-axis respectively
Mass metering block 23；Two Y-axis detection masses 22,23 are located in the X-direction of servo-actuated mass 2, are preferably placed at kinoplaszm
On the X-axis center line of gauge block 2, and it is symmetrical relative to the anchor point 2a of servo-actuated mass 2, so as to ensure that servo-actuated mass 2
Symmetry.Wherein, the first Y-axis detection mass 22, the second Y-axis detection mass 23 respectively by extend along X-direction the
Two tie-beam 22c link together with servo-actuated mass 2.
First Y-axis detection mass 22, the second Y-axis detection mass 23, the first X-axis detection mass 20, the inspection of the second X-axis
Mass metering block 21 has identical structure, and so that the first Y-axis detects mass 22 as an example, with reference to figure 3, it includes movable with first
Electrode 22a, the second movable electrode 22b both ends, also, the first movable electrode 22a, the second movable electrode 22b are relative to second
Tie-beam 22c is symmetrical.That is the first Y-axis detection mass 22 extends along Y direction, and its center is connected to
Second tie-beam 22c middle part.When by the angular speed of Y direction, under the driving force that driving electrodes 8 provide so that the
One Y-axis detects the motion that mass 22 makees similar seesaw in the presence of Ke Shili using the second tie-beam 22c as fulcrum, also
It is to say, one of movable electrode rises, another movable electrode declines, and passes through the corresponding fixed electricity of position setting on substrate
Pole so that differential capacitance structure is may be constructed between the first movable electrode 22a, the second movable electrode 22b, to realize Y-axis angle speed
The detection of degree.
Wherein, because the first Y-axis detection mass 22, the second Y-axis detect anchor of the mass 23 relative to servo-actuated mass 2
Point 2a is symmetrical, and this detection electric capacity allowed on the first Y-axis detection mass 22 and second Y-axis detection mass 23 also may be used
To form the differential capacitance structure for Y-axis angular velocity detection.
Based on identical reason, the first X-axis detection mass 20, the both ends of the second X-axis detection mass 21 also have
There are the first movable electrode, the second movable electrode, wherein two movable electrodes are symmetrical relative to the first tie-beam 22a.
That is the first X-axis detection mass 20, the second X-axis detection mass 21 extend along X-direction, its center is connected to
First tie-beam 20a middle part.When by the angular speed of X-direction, under the driving force that driving electrodes 8 provide so that the
One X-axis detection mass 20, the second X-axis detect mass 21 in the presence of coriolis force respectively with corresponding first tie-beam
20a is the motion that fulcrum makees similar seesaw, that is to say, that in single X-axis detection mass, on one of movable electrode
Rise, the decline of another movable electrode, by setting fixed electrode on corresponding position on substrate so that same X-axis detection
Differential capacitance structure is may be constructed between the first movable electrode, the second movable electrode on mass, to realize X-axis angular speed
Detection.
Wherein, the first X-axis detection mass 20, the second X-axis detect anchor point 2a of the mass 21 relative to servo-actuated mass 2
Symmetrical, this detection electric capacity allowed on the first X-axis detection mass 20 and second X-axis detection mass 21 can also structure
Into the differential capacitance structure for X-axis angular velocity detection.
In another preferred embodiment of the present invention, the XY repacking geodesic structure 3 sets two, two XY shaft detections
Structure 3 is located on the X-axis center line of parenchyma gauge block 1, and symmetrical relative to the anchor point 1a of parenchyma gauge block 1, so as to ensure that master
The symmetry of mass 1.X-axis detection mass in two XY repacking geodesic structures 3 may be constructed for detecting X-axis angular speed
Differential capacitance structure, the Y-axis detection mass in two XY repacking geodesic structures 3 may be constructed the difference for detecting Y-axis angular speed
Divide capacitance structure.That is, on the basis of parenchyma gauge block 1, the distribution setting X-axis on multiple positions of the parenchyma gauge block 1
Detect mass, Y-axis detection mass, so as to detected in the plurality of position X, Y-axis angular speed, and pass through respective difference
Divide capacitance structure by the target signal filter of interference so that the angular velocity signal of the XY axles of output is more accurate.
The MEMS three-axis gyroscopes of the present invention, in addition to Z axis detection structure, the measurement for Z axis angular speed.In the present invention
In one preferred embodiment, the Z axis detection structure setting has two, is designated as the first Z axis detection structure 7, the 2nd Z respectively
Repacking geodesic structure 6, wherein, the first Z axis detection structure 7, the second Z axis detection structure 6 are distributed in the Y-axis side of parenchyma gauge block 1
Upwards, it is preferably distributed on the center line of the Y direction of parenchyma gauge block 1, and it is symmetrical relative to the anchor point 1a of parenchyma gauge block 1, from
And it ensure that the symmetry of parenchyma gauge block 1.
The first Z axis detection structure 7, the second Z axis detection structure 6 have identical structure, and structure is detected with the first Z axis
Exemplified by 7, with reference to figure 1, Fig. 4, it includes Z axis decoupling mass 4 being connected by the 3rd tie-beam 40 with parenchyma gauge block 1, and this
Three tie-beams 40 can be located in X-direction, can also be located in Y direction；3rd tie-beam 40 can set two articles, distribution
In the relative both sides of Z axis decoupling mass 4；Four can also be set, is distributed in the surrounding of Z axis decoupling mass 4.
In a specific embodiment of the invention, Z axis decoupling mass 4 extends along X-direction, and is located at parenchyma
On the center line of the Y direction of gauge block 1, wherein, the 3rd tie-beam 40 extends along X-direction, and the both ends of the 3rd tie-beam 40 can be with
It is fixed on Z axis decoupling mass 4 to be located in the side wall of X-direction, its medium position is connected with the side wall of parenchyma gauge block 1.Work as drive
When the driving parenchyma of moving electrode 8 gauge block 1 rotates clockwise, because Z axis decoupling mass 4 is not connected to lining by anchor point
On bottom, this allows for parenchyma gauge block 1 can drive Z axis decoupling mass 4 to rotate clockwise by the 3rd tie-beam 40；Equally,
When driving electrodes 8 drive parenchyma gauge block 1 to rotate counterclockwise, parenchyma gauge block 1 drives Z axis to decouple by the 3rd tie-beam 40
Mass 4 rotates counterclockwise.
The first Z axis detection structure 7 of the present invention, in addition to the Z axis being arranged in parallel with Z axis decoupling mass 4 detect quality
Block 5, it is connected wherein the Z axis detects mass 5 by the 4th tie-beam 41 positioned at its both sides with Z axis decoupling mass 4；Make
Obtaining Z axis decoupling mass 4 can drive Z axis detection mass 5 be subjected to displacement by the 4th tie-beam 41.Wherein, the Z axis inspection
Mass metering block 5 is connected on the anchor point 50a of substrate by the 5th tie-beam 50, and the 4th tie-beam 41 and the phase of the 5th tie-beam 50
It is mutually vertical.For example, the 4th tie-beam 41 extends along Y direction, that is to say, that along the 4th connection of Y direction extension
One end of beam 41 is fixed on Z axis detection mass 5, and the other end is fixed on Z axis decoupling mass 4；And the edge of the 5th tie-beam 50
X-direction extension, its both ends can be fixed on Z axis detection mass 5, and its middle part is fixed on the anchor point 50a of substrate；It is excellent
Choosing, the 5th tie-beam 50 can set two articles, the both sides of the Z axis detection Y direction of mass 5 are distributed in, so that Z axis
Detection mass 5 is limited in the X-axis direction by the 5th tie-beam 50, prevents Z axis detection mass 5 from position occurring in the X-axis direction
Move.
When driving electrodes 8 drive parenchyma gauge block 1 to rotate clockwise, parenchyma gauge block 1 is driven by the 3rd tie-beam 40
Dynamic Z axis decoupling mass 4 rotates clockwise, and Z axis decoupling mass 4 is then that Z axis detection mass 5 carries by the 4th tie-beam 41
For a moment of torsion rotated clockwise, when there is the turning rate input of Z-direction, Z axis detects mass 5 by positioned at X-axis side
To Coriolis force component and Y direction Coriolis force component, but because Z axis detects mass 5 by extending in X direction
5th tie-beam 50 is connected on the anchor point 50a of substrate, that is to say, that Z axis detects mass 5 due to by the 5th tie-beam 50
Limitation, it is not subjected to displacement in the X-axis direction, and Z axis detect mass 5 due to by the Coriolis positioned at Y direction
Force component, corresponding displacement can occur in the Y-axis direction.Thus, formed by being set on substrate with Z axis detection mass 5
Detect the fixed electrode 9 of electric capacity, you can realize the measurement of Z axis angular speed.
In order to form the differential capacitance structure of Z axis angular velocity measurement, being provided with the 3rd on the Z axis detection mass 5 can
Moving electrode, the 4th movable electrode, the fixed electrode 9 set on the substrate includes and the 3rd movable electrode, the 4th movable electrode
Respectively constitute the 3rd fixed electrode 90, the 4th fixed electrode 91 of detection electric capacity.For those skilled in the art, the 3rd
Movable electrode, the 4th movable electrode can be arranged on both sides relative on Z axis detection mass 5；And for mass block structure and
Speech, Z axis detection mass 5 opposite sides side wall are the 3rd movable electrode, the 4th movable electrode in itself, the 3rd movable electrode with
3rd fixed electrode 90, the 4th movable electrode and the 4th fixed electrode 91 can respectively constitute side capacitive, and collectively form
Differential capacitance structure, to realize the detection of Z axis angular speed.
In one preferred embodiment of the invention, the Z axis detection mass 4 is included relative to the Y of parenchyma gauge block 1
The symmetrical first Z axis detection mass 51 of axis of spindle, the second Z axis detection mass 52, and connection the first Z axis detection mass
51st, the connecting portion 53 of the second Z axis detection mass 52, wherein, the first Z axis detection mass 51, the second Z axis detection mass 52
The 3rd movable electrode, the 4th movable electrode are respectively arranged with, its corresponding fixed electrode is provided with the substrate.This just makes
The 3rd movable electrode, the 4th its corresponding fixed electrode of movable electrode for obtaining the first Z axis detection mass 51 may be constructed difference
Divide capacitance structure, the second Z axis detects the 3rd movable electrode, the 4th its corresponding fixed electrode of movable electrode of mass 52
Differential capacitance structure is may be constructed, and the first Z axis detection mass 51 is total to the detection electric capacity on the second Z axis detection mass 52
With composition differential capacitance structure.
Wherein the second Z axis detection structure 6 is identical with the structure of the first Z axis detection structure 7, and the two is preferably distributed in principal mass
On the center line of the Y direction of block 1, and it is symmetrical relative to the anchor point 1a of parenchyma gauge block 1 so that the first Z axis detects 7 groups of structure
Into detection electric capacity and the second Z axis detection structure 6 form detection electric capacity can also form differential capacitance structure, further improve
The precision of Z axis angular velocity detection.Structure 7 is detected by the first Z axis, the second Z axis detects structure so that can be in multiple positions
The angular speed of Z axis is detected, interference filtering caused by non-coriolis force can be fallen by the differential capacitance structure of composition, improved
The precision of Z axis angular velocity detection.
The first Z axis detection structure 7, the second Z axis detection structure 6 of above-mentioned introduction are distributed in the Y direction of parenchyma gauge block 1
On, XY repacking geodesic structure 3 is distributed in the X-direction of parenchyma gauge block 1, and such structure design can make the structure of whole chip tight
Gather, improve the utilization rate of chip.Certainly, for those skilled in the art, the first Z axis detection structure 7, the inspection of the second Z axis
Geodesic structure 6 can also be distributed in the X-direction of parenchyma gauge block 1, be preferably distributed on the X-axis center line of parenchyma gauge block 1, and relatively
It is symmetrical in the anchor point 1a of parenchyma gauge block 1, as long as now changing the direction of each tie-beam in each Z axis detection structure, such as select the
Four tie-beams 41 extend along X-direction, select the 5th tie-beam 50 to extend along Y direction, you can to realize the survey of Z axis angular speed
Amount.
The MEMS three-axis gyroscopes of the present invention, driving electrodes driving parenchyma gauge block is in the Z-axis direction clockwise or counterclockwise
Rotate, so that the servo-actuated mass in XY repacking geodesic structures is counterclockwise or rotates clockwise, make the Z in Z axis detection structure
Decoupler shaft mass can move clockwise or counterclockwise with parenchyma gauge block.Have X, Y direction turning rate input when, X, Y
Shaft detection mass can produce the coriolis force positioned at Z-direction, so that similar seesaw can occur for X, Y-axis detection mass
Motion, it is the measurement that X, Y-axis angular velocity signal can be achieved by corresponding fixed electrode；When the turning rate input for having Z-direction
When, Z axis detection mass can produce the coriolis force positioned at X-axis, Y direction, so that translation can occur for Z axis detection mass,
It is the measurement that Z axis angular velocity signal can be achieved by corresponding fixed electrode.
The MEMS three-axis gyroscopes of the present invention, can be by the detection of X, Y, Z three-axis gyroscope by above-mentioned structure design
It is integrated to improve the utilization rate of chip on a single chip, while also improve the precision of angular velocity signal detection.
Although some specific embodiments of the present invention are described in detail by example, the skill of this area
Art personnel it should be understood that example above merely to illustrating, the scope being not intended to be limiting of the invention.The skill of this area
Art personnel to above example it should be understood that can modify without departing from the scope and spirit of the present invention.This hair
Bright scope is defined by the following claims.
Claims (10)
- A kind of 1. MEMS three-axis gyroscopes, it is characterised in that：Including substrate, and pass through anchor point（1a）It is resiliently supported on substrate The parenchyma gauge block of side（1）, the substrate be provided with and parenchyma gauge block（1）Form driving electric capacity and drive parenchyma gauge block（1）Rotate Driving electrodes（8）；With parenchyma gauge block（1）Horizontal direction be X-direction, with parenchyma gauge block（1）Vertical direction be Y-axis side To with perpendicular to parenchyma gauge block（1）The direction of place plane is Z-direction；Also include XY repacking geodesic structures（3）, the XY repacking geodesic structure（3）Including passing through anchor point（2a）It is resiliently supported at the lining Servo-actuated mass above bottom（2）, wherein, the servo-actuated mass（2）Side wall by driving spring beam（25）With principal mass Block（1）Connection；In the servo-actuated mass（2）On be additionally provided with X-axis detection mass, Y-axis detection mass, wherein, X-axis inspection Mass metering block is located at servo-actuated mass（2）Y direction on, and pass through the first tie-beam along Y direction（20a）With with kinoplaszm Gauge block（2）Connection；The Y-axis detection mass is located at servo-actuated mass（2）X-direction on, and by along the of X-direction Two tie-beams（22c）With servo-actuated mass（2）Connection；The X-axis detection mass, the both ends of Y-axis detection mass, which have, to be divided Not along corresponding first tie-beam（20a）, the second tie-beam（22c）Symmetrical first movable electrode, the second movable electrode；It is described The corresponding fixed electrode that Differential Detection electric capacity is formed with the first movable electrode, the second movable electrode is provided with substrate；Also include Z axis detection structure, the Z axis detection structure includes passing through the 3rd tie-beam（40）With parenchyma gauge block（1）Connection Z axis decoupling mass（4）, in addition to Z axis decouple mass（4）The Z axis detection mass of parallel arrangement（5）, wherein institute State Z axis detection mass（5）Pass through the 4th tie-beam positioned at its both sides（41）Mass is decoupled with Z axis（4）Connection；The Z Shaft detection mass（5）Pass through the 5th tie-beam（50）It is connected to the anchor point for being fixed on substrate（50a）On, and the 4th tie-beam （41）With the 5th tie-beam（50）Vertically；The Z axis detects mass（5）On be provided with the 3rd movable electrode, the 4th movable electricity Pole, the fixed electrode that differential capacitance is formed with the 3rd movable electrode, the 4th movable electrode is provided with the substrate.
- 2. MEMS three-axis gyroscopes according to claim 1, it is characterised in that：The XY repacking geodesic structure（3）Provided with two It is individual, it is distributed in parenchyma gauge block（1）On the center line of X-direction, and relative to parenchyma gauge block（1）Anchor point（1a）Symmetrically.
- 3. MEMS three-axis gyroscopes according to claim 2, it is characterised in that：The X-axis detection mass is provided with two, is designated as the first X-axis detection mass respectively（20）, the second X-axis detection quality Block（21）, the first X-axis detection mass（20）, the second X-axis detection mass（21）Positioned at servo-actuated mass（2）Y-axis side To center line on, and relative to servo-actuated mass（2）Anchor point（2a）Symmetrically；The Y-axis detection mass is provided with two, is designated as the first Y-axis detection mass respectively（22）, the second Y-axis detection quality Block（23）, the first Y-axis detection mass（22）, the second Y-axis detection mass（23）Positioned at servo-actuated mass（2）X-axis side To center line on, and relative to servo-actuated mass（2）Anchor point（2a）Symmetrically.
- 4. MEMS three-axis gyroscopes according to claim 3, it is characterised in that：In the parenchyma gauge block（1）On be provided with Through hole, the servo-actuated mass（2）In corresponding through hole, the driving spring beam（25）With servo-actuated mass（2）Side Wall is parallel.
- 5. MEMS three-axis gyroscopes according to claim 4, it is characterised in that：The driving spring beam（25）Provided with four It is individual, respectively positioned at servo-actuated mass（2）Four sidewall directions.
- 6. MEMS three-axis gyroscopes according to claim 1, it is characterised in that：The parenchyma gauge block（1）Pass through the 10th Word spring beam（1b）It is connected to its anchor point（1a）On；The servo-actuated mass（2）Pass through the second cross spring beam（2b）It is connected to Its anchor point（2a）On.
- 7. MEMS three-axis gyroscopes according to claim 1, it is characterised in that：The Z axis detection structure is provided with two, point The first Z axis detection structure is not designated as（7）, the second Z axis detection structure（6）, the first Z axis detection structure（7）, the second Z axis inspection Geodesic structure（6）It is distributed in parenchyma gauge block（1）On the center line of Y direction, and relative to parenchyma gauge block（1）Anchor point（1a）Symmetrically.
- 8. MEMS three-axis gyroscopes according to claim 7, it is characterised in that：4th tie-beam（41）Along Y-axis Direction extends, the 5th tie-beam（50）Extend along X-direction, and the 5th tie-beam（50）Two are provided with, point Wei Yu not Z axis detection mass（5）Positioned at the both sides of Y direction.
- 9. MEMS three-axis gyroscopes according to claim 7, it is characterised in that：The Z axis detects mass（5）Including phase For parenchyma gauge block（1）The symmetrical first Z axis detection mass of Y-axis center line（51）, the second Z axis detection mass（52）, and Connect the first Z axis detection mass（51）, the second Z axis detection mass（52）Connecting portion（53）；Wherein, first Z axis Detect mass（51）, the second Z axis detection mass（52）On be equipped with the 3rd described movable electrode, the 4th movable electrode.
- 10. MEMS three-axis gyroscopes according to claim 1, it is characterised in that：The driving electrodes（8）Provided with four, Parenchyma gauge block is distributed in two-by-two（1）Relative both sides.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105486310A (en) * | 2015-12-17 | 2016-04-13 | 安徽寰智信息科技股份有限公司 | Three-dimensional human-computer interaction system with inertial tracking module |
| CN105371845A (en) * | 2015-12-17 | 2016-03-02 | 安徽寰智信息科技股份有限公司 | Inertia tracking module |
| CN105589559A (en) * | 2015-12-17 | 2016-05-18 | 安徽寰智信息科技股份有限公司 | Movement inertial tracking system applied to human-computer interaction |
| CN107782297B (en) * | 2016-08-27 | 2023-08-18 | 深迪半导体(绍兴)有限公司 | Triaxial MEMS gyroscope |
| CN107782298B (en) * | 2016-08-27 | 2023-09-29 | 深迪半导体(绍兴)有限公司 | Triaxial MEMS gyroscope |
| CN107782296B (en) * | 2016-08-27 | 2023-10-27 | 深迪半导体(绍兴)有限公司 | Triaxial MEMS gyroscope |
| CN107328402B (en) * | 2017-07-12 | 2022-06-24 | 深迪半导体(绍兴)有限公司 | Three-axis MEMS gyroscope |
| CN110779510B (en) * | 2019-11-14 | 2021-07-13 | 无锡莱斯能特科技有限公司 | Three-axis MEMS gyroscope |
| CN110926445B (en) | 2019-12-06 | 2022-03-08 | 深迪半导体(绍兴)有限公司 | Three-axis MEMS gyroscope |
| CN113137959B (en) * | 2020-01-17 | 2022-06-17 | 北京大学 | Micromechanical tuning fork gyroscope |
| CN113702665B (en) * | 2021-10-27 | 2022-02-11 | 杭州麦新敏微科技有限责任公司 | MEMS accelerometer and forming method thereof |
| CN114526718B (en) * | 2022-02-11 | 2023-04-11 | 绍兴圆方半导体有限公司 | Gyroscope |
| CN114646309B (en) * | 2022-05-18 | 2022-08-23 | 绍兴圆方半导体有限公司 | Three-axis gyroscope |
| CN115077508A (en) * | 2022-07-19 | 2022-09-20 | 苏州米洛微纳电子科技有限公司 | MEMS device and forming method thereof |
| CN116907466B (en) * | 2023-09-14 | 2023-12-08 | 苏州敏芯微电子技术股份有限公司 | Microelectromechanical triaxial gyroscope and electronic device |
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| JP5287939B2 (en) * | 2011-06-28 | 2013-09-11 | 株式会社デンソー | Angular velocity sensor |
| CN103245340B (en) * | 2012-02-01 | 2016-07-13 | 苏州敏芯微电子技术股份有限公司 | A kind of single-chip tri-axial gyroscope |
| CN103438878A (en) * | 2013-09-15 | 2013-12-11 | 滕金燕 | Triaxial micromechanical gyroscope |
| CN104457726B (en) * | 2014-11-27 | 2017-07-04 | 歌尔股份有限公司 | A kind of three axis microelectromechanicdevice gyroscopes |
| CN204679079U (en) * | 2015-06-29 | 2015-09-30 | 歌尔声学股份有限公司 | A kind of MEMS three-axis gyroscope |
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