CN113137959B - Micromechanical tuning fork gyroscope - Google Patents
Micromechanical tuning fork gyroscope Download PDFInfo
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- CN113137959B CN113137959B CN202011005131.0A CN202011005131A CN113137959B CN 113137959 B CN113137959 B CN 113137959B CN 202011005131 A CN202011005131 A CN 202011005131A CN 113137959 B CN113137959 B CN 113137959B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
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Abstract
The invention relates to a micromechanical tuning fork gyroscope, which comprises a substrate, an anchor point, a driving frame structure, an inertial mass block, a sensitive frame structure, an elastic beam, a detection electrode unit and a driving electrode unit, wherein the anchor point is used for fixing a gyroscope movable structure on the substrate; the detection electrode unit consists of a non-movable electrode, an anchor point for fixing the non-movable electrode and a movable electrode connected with the movable structure of the gyroscope; the driving electrode unit comprises a non-movable electrode, an anchor point for fixing the non-movable electrode and a movable electrode connected with the movable structure of the gyroscope. The invention adopts an axial symmetry structure and anchors the movable structure on a symmetry axis, so that the mechanical coupling among the working modes of the gyroscope can be inhibited, and the performance of the gyroscope is insensitive to the environmental temperature change and the processing error. The invention can be widely applied to the detection of the rotating angular speed of the object in various fields.
Description
Technical Field
The invention relates to a micromechanical gyroscope, in particular to a micromechanical tuning fork gyroscope which can inhibit mechanical coupling and is insensitive to environmental temperature change and processing errors.
Background
Micromechanical gyroscopes based on micro-electromechanical systems (MEMS) technology have been extensively studied and developed rapidly over the last 30 years. The vibrating micro-mechanical gyroscope based on the capacitance detection mode is developed particularly rapidly due to the advantages of simple process, high detection precision, stable and reliable work and the like, and is widely applied to the fields of consumer electronics, automobiles, medical rehabilitation, aerospace and even military. In order to obtain high performance capacitive micromachined gyroscopes, researchers are faced with technical challenges such as structural design, device processing and packaging, and control systems. The device structure type and the overall layout are the core problems in device design.
The mechanical coupling between the driving mode and the detection mode of the vibrating micromechanical gyroscope is one of key factors influencing the performance of the gyroscope. Although the mechanical coupling can be suppressed or eliminated by the control circuit, the complexity of the control system is increased, and the addition of a decoupling structure in the gyro structure is a simple and effective solution. The decoupling structure of the gyroscope usually adopts a single-degree-of-freedom elastic beam to restrain a driving unit and a detection unit of the gyroscope to only vibrate in respective modal directions, and the Coriolis acceleration vibration coupling between two modes is realized only by a vibrating mass block connected with the two modes through the single-degree-of-freedom elastic beam. Such as a four-mass gyroscope structure invented by the university of california at the european division (US patent US 8,322,213), a horizontal-axis micromechanical tuning fork gyroscope invented by the applicant (chinese patent ZL200610114485.2), and the like. In order to inhibit mechanical coupling and reduce the influence of processing errors on the performance of the micromechanical gyroscope, the gyroscope structure usually adopts an axisymmetric structure, but the structure is deformed due to thermal stress generated by environmental temperature change in the processing and using processes of the gyroscope, so that the symmetry of the original design is damaged, and the performance and the stability of the gyroscope are influenced. The anchor point of the gyroscope movable structure is arranged at the center of the structure, so that the influence of thermal stress can be reduced, but the design scheme is easy to realize on a horizontal axis gyroscope adopting torsion driving or torsion detection, for example, a single anchor point structure scheme is adopted in U.S. Pat. No. 4, 6513380, 2, but the realization difficulty of a vertical axis gyroscope for detecting vertical direction rotation is higher, and particularly, a vertical axis vibration type tuning fork gyroscope with a decoupling structure lacks a reasonable structure design scheme.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a micromechanical tuning fork gyroscope that can effectively suppress mechanical coupling between a driving mode and a detection mode, and is insensitive to processing errors and environmental temperature variations.
In order to achieve the purpose, the invention adopts the following technical scheme:
1. a micromechanical tuning fork gyroscope, characterized by: the gyroscope comprises a substrate, an anchor point, a driving frame structure, an inertial mass block, a sensitive frame structure, an elastic beam, a detection electrode unit and a driving electrode unit, wherein the anchor point is used for fixing a gyroscope movable structure on the substrate; the detection electrode unit consists of a non-movable electrode, an anchor point for fixing the non-movable electrode and a movable electrode connected with the movable structure of the gyroscope; the driving electrode unit consists of a non-movable electrode, an anchor point for fixing the non-movable electrode and a movable electrode connected with a movable structure of the gyroscope.
2. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: the structure of the gyroscope is axially symmetrical in the driving shaft direction and the detection shaft direction of the gyroscope respectively.
3. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: the center points of the anchor points of the fixed gyroscope movable structure are arranged on the same symmetrical axis of the gyroscope structure.
4. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: the center points of the anchor points of the immovable structures in the driving electrode unit and the detecting electrode unit are on the same symmetry axis as in claim 3 or maximally close to the symmetry axis as in claim 3, as the structural space allows.
5. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: one or more frames of the gyro driving frame structure adopt a hollow truss structure.
6. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: the driving frame structure and the inertia mass block, the inertia mass block and the sensitive frame structure, the sensitive frame structure and the anchor point structure, the driving frame structure and the anchor point structure and the two driving frame structures are respectively connected by at least one single-degree-of-freedom folding elastic beam.
7. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: the movable electrode connected to the driving frame structure and the non-movable electrode fixed on the substrate form one or more groups of driving electrode units.
8. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: the movable electrode connected to the detection frame structure and the non-movable electrode fixed on the substrate form one or more groups of detection electrode units.
Due to the adoption of the technical scheme, the invention has the following advantages: 1. the anchor points of the gyroscope movable structure are all placed on the same symmetrical axis of the gyroscope structure, so that the thermal stress generated by the change of the environmental temperature and the mechanical coupling gyroscope and performance drift between the gyroscope working modes caused by the thermal stress can be reduced. 2. Because the invention adopts the axial symmetry structure, the influence trend of the processing error on the working mode of the gyroscope is consistent, and the influence of the processing error on the overall performance of the gyroscope can be reduced. 3. According to the invention, the hollow truss structure is adopted in the driving frame structure, so that the quality of the driving frame can be reduced and the detection sensitivity of the gyroscope can be improved under the condition that the driving frame has the same rigidity. The invention can be widely applied to the detection of the rotation angular speed of the object in various fields.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present invention
FIG. 2 is a schematic view of the truss framework of the present invention
FIG. 3 is a schematic view of a single degree of freedom elastic beam structure employed in the present invention
FIG. 4 is a schematic view of another single-degree-of-freedom elastic beam structure adopted by the present invention
Detailed Description
The invention is described in detail below with reference to the figures and examples.
As shown in the embodiment of FIG. 1, the gyroscope structures of the present invention are arranged axially symmetrically in the x-direction and the y-direction, and include anchor points 210-213 and 220-221 for fixing the gyroscope movable structure on the substrate 10, driving frame structures 100-101, inertial masses 110-111, sensing frame structures 120-121, elastic beams 130-137 for connecting the driving frame structures 100-101 and the inertial masses 110-111, elastic beams 140-147 for connecting the inertial masses 110-111 and the sensing frame structures 120-121, elastic beams 150-157 for connecting the sensing frame structures 120-121 and the anchor point structures 220-221, elastic beams 160-167 for connecting the driving frame structures 100-101 and the anchor points 210-213, elastic beams 170-171 for connecting the driving frame structures 100 and 101, detection electrode units 230-233 and 240-243, and driving electrode units 250-253 and 260-263, etc.
In the above embodiment, the center points of the anchor points 210 to 213 and 220 to 221 of the gyro movable structure are arranged on the symmetry axis 301 (x axis in the present embodiment) of the gyro structure.
In the above embodiments, the anchor point center points of the immovable structures in the gyro drive electrode units 260 to 264 are arranged on the symmetry axis 301 of the gyro structure.
In the above embodiment, the anchor points of the non-movable structures in the gyro detection electrode units 230 to 233 and 240 to 243 and the drive electrode units 250 to 253 are symmetrically distributed on two sides of the symmetry axis 301 of the gyro structure, and are maximally close to the symmetry axis 301 of the gyro structure on the premise of not affecting the movement of the movable structure.
In the above embodiments, one or more frames of the gyro drive frame structures 100 to 101 may adopt a truss structure shown in fig. 2, so as to reduce the mass of the drive frame structure on the premise of ensuring the same structural rigidity.
In the above embodiments, the elastic beams 130-137 connecting the driving frame structures 100-101 and the inertial masses 110-111, the elastic beams 140-147 connecting the inertial masses 110-111 and the sensing frame structures 120-121, the elastic beams 150-157 connecting the sensing frame structures 120-121 and the anchor point structures 220-221, the elastic beams 160-167 connecting the driving frame structures 100-101 and the anchor point structures 210-213, and the elastic beams 170-171 connecting the driving frame structures 100 and 101 for coupling the two driving structures to vibrate are all single-degree-of-freedom elastic beams. The single-degree-of-freedom elastic beam adopted by the invention can adopt a folding type elastic beam structure shown in figure 3 or figure 4.
In the above embodiments, the driving electrode units 250 to 253 and 260 to 263 are composed of the non-movable electrodes, the anchor points for fixing the non-movable electrodes on the substrate 10, and the movable electrodes connected to the gyro driving frame structures 100 to 101.
In the above embodiments, the detection electrode units 230 to 233 and 240 to 243 are composed of the immovable electrode, the anchor point for fixing the immovable electrode on the substrate 10, and the movable electrode connected to the gyro-sensitive frame structures 120 to 121.
In the above embodiments, the driving electrode units 250 to 253 and 260 to 263 preferably adopt a variable area comb capacitor structure.
In the above embodiments, the detecting electrode units 230 to 233 and 240 to 243 preferably adopt a variable area comb-tooth capacitor structure, and may also adopt a variable gap comb-tooth capacitor structure.
When the driving electrode unit driving device is used, the driving frame structure 100 resonates along the x axis under the driving control of the driving electrode units 250-251 and 260-261, the driving frame structure 101 resonates along the x axis under the driving control of the driving electrode units 252-253 and 262-263, and the driving frame structures 100 and 101 vibrate in the same amplitude and in opposite phases by reasonably applying driving control signals and coupling the vibration of the driving frame structures 100 and 101 through the coupling beams 170-171. The driving frame structure 100 drives the inertial mass 110 to vibrate with the same amplitude and phase through the elastic beams 130-133, and the driving frame structure 101 drives the inertial mass 111 to vibrate with the same amplitude and phase through the elastic beams 134-137. When the gyroscope is subjected to an input angular velocity along the z-axis of the sensitive axis, the inertial masses 110 and 111 vibrate in the y-axis direction of the detection axis under the action of coriolis force, and the vibration phases are opposite, and the vibration amplitude is proportional to the input angular velocity. The inertial mass 110 drives the sensitive frame structure 120 to vibrate with the same amplitude and phase in the y-axis direction of the detection axis through the elastic beams 140-143, and the inertial mass 111 drives the sensitive frame structure 121 to vibrate with the same amplitude and phase in the y-axis direction of the detection axis through the elastic beams 144-147. The vibration of the sensitive frame structure is obtained through the detection electrode units 230-231, 240-241, 232-233 and 242-243 by means of a matched signal processing circuit, and the amplitude and phase information of the input angular speed is obtained after demodulation processing. As the anchor points 210-213 and 220-221 of the gyroscope movable structure are positioned on the same symmetrical axis of the gyroscope structure, and the gyroscope structure is equivalent to a cantilever beam with two freely telescopic ends of a middle fixed support, when the environmental temperature changes, compared with a structure with anchor points distributed, the gyroscope movable structure can effectively reduce the thermal stress in the gyroscope structure, thereby ensuring the stable performance of the gyroscope when the environmental temperature changes.
The above embodiments are only preferred embodiments of the present invention, and any changes and modifications based on the technical solutions of the present invention in the technical field should not be excluded from the protection scope of the present invention.
Claims (7)
1. A micromechanical tuning fork gyroscope is characterized in that: the gyroscope comprises a substrate, an anchor point, a driving frame structure, an inertia mass block, a sensitive frame structure, an elastic beam, a detection electrode unit and a driving electrode unit, wherein the anchor point is used for fixing a gyroscope movable structure on the substrate; the detection electrode unit consists of a non-movable electrode, an anchor point for fixing the non-movable electrode and a movable electrode connected with the movable structure of the gyroscope; the driving electrode unit consists of a non-movable electrode, an anchor point for fixing the non-movable electrode and a movable electrode connected with the movable structure of the gyroscope;
the center points of the anchor points of the fixed gyroscope movable structure are arranged on the same symmetrical axis of the gyroscope structure.
2. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: the structure of the gyroscope is axially symmetrical in the driving shaft direction and the detection shaft direction of the gyroscope respectively.
3. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: under the condition that the structure space allows, the anchor point central points of the immovable structures in the driving electrode unit and the detection electrode unit are positioned on the same symmetry axis or are maximally close to the symmetry axis.
4. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: one or more frames of the gyro driving frame structure adopt a hollow truss structure.
5. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: the driving frame structure and the inertia mass block, the inertia mass block and the sensitive frame structure, the sensitive frame structure and the anchor point structure, the driving frame structure and the anchor point structure and the two driving frame structures are respectively connected by at least one single-degree-of-freedom folding elastic beam.
6. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: the movable electrode connected to the driving frame structure and the non-movable electrode fixed on the substrate form one or more groups of driving electrode units.
7. A micromechanical tuning fork gyroscope according to claim 1, characterized in that: the movable electrode connected to the detection frame structure and the non-movable electrode fixed on the substrate form one or more groups of detection electrode units.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010050722 | 2020-01-17 | ||
| CN2020100507223 | 2020-01-17 |
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| CN113137959A CN113137959A (en) | 2021-07-20 |
| CN113137959B true CN113137959B (en) | 2022-06-17 |
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| CN113390402A (en) * | 2020-03-12 | 2021-09-14 | 北京微元时代科技有限公司 | Micromechanical tuning fork gyroscope |
| CN117537794B (en) * | 2024-01-09 | 2024-04-23 | 南京理工大学 | Four-mass micromechanical gyroscope with driving and amplifying coupling structure |
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| CN108507555A (en) * | 2018-04-16 | 2018-09-07 | 四川知微传感技术有限公司 | MEMS (micro-electromechanical system) micro-mechanical fully-decoupled closed-loop gyroscope |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107063223B (en) * | 2017-04-17 | 2019-04-30 | 东南大学 | One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement |
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|---|---|---|---|---|
| JP2007155489A (en) * | 2005-12-05 | 2007-06-21 | Hitachi Ltd | Inertial sensor |
| CN101303234A (en) * | 2008-05-22 | 2008-11-12 | 北京航空航天大学 | Self-decoupling high-sensitivity resonance silicon micro mechanical gyroscope |
| JP2011237265A (en) * | 2010-05-10 | 2011-11-24 | Denso Corp | Dynamic quantity sensor |
| CN103292798A (en) * | 2013-05-22 | 2013-09-11 | 同济大学 | Tuning fork type micromechanical gyroscope capable of resisting high-strength impact |
| CN103398708A (en) * | 2013-07-15 | 2013-11-20 | 哈尔滨工程大学 | Micromechanical gyroscope with double-sensitive mode |
| CN104897147A (en) * | 2015-06-29 | 2015-09-09 | 歌尔声学股份有限公司 | MEMS (micro-electro-mechanical system) three-axis gyroscope |
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| CN108507555A (en) * | 2018-04-16 | 2018-09-07 | 四川知微传感技术有限公司 | MEMS (micro-electromechanical system) micro-mechanical fully-decoupled closed-loop gyroscope |
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