CN107063223B - One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement - Google Patents

One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement Download PDF

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Publication number
CN107063223B
CN107063223B CN201710248849.4A CN201710248849A CN107063223B CN 107063223 B CN107063223 B CN 107063223B CN 201710248849 A CN201710248849 A CN 201710248849A CN 107063223 B CN107063223 B CN 107063223B
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China
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gyroscope
accelerometer
resonance
decoupling
frame
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CN201710248849.4A
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Chinese (zh)
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CN107063223A (en
Inventor
李宏生
丁徐锴
高阳
黄丽斌
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东南大学
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure

Abstract

The invention discloses a kind of one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangements, the resonance type accelerometer constituted including three frame-type full decoupling gyroscopes, two resonance beams, the input terminal horizontal side of resonance type accelerometer is fixed by decoupling beam with anchor point, and vertical side is connected with gyroscope by coupled beams;The inertia sensitive-mass unit of resonance type accelerometer is made of gyroscope quality.A kind of one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement of the invention, can effectively measure the angular movement of vertical paper and the linear acceleration of vertical direction, and have the advantages that small in size, compact-sized, design is simple, with high accuracy.

Description

One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement

Technical field

The present invention relates to microelectronic fields, belong to the inertial sensor in MEMS (MEMS), specifically a kind of list Chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement.

Background technique

Silicon micro accerometer and gyroscope be two kinds of very important mini inertial sensors and minitype inertial navigation or The important component of guidance system.It, can batch since the processing technology of data processing is compatible with microelectronic processing technique Production has the advantages such as small in size, light weight and cost is low, low in energy consumption, reliability is high, is current micromechanics electronic technology field There is extensive prospect in one of hot spot direction of development in Military and civil fields.

Realize that the measurement of angular speed and linear acceleration can greatly reduce inertial measurement system and set simultaneously in single chip architecture The complexity of meter and assembly is conducive to miniaturising for inertial navigation or guidance system.Existing one chip accelerometer There are two main classes for accelerometer in gyroscope, and one is capacitive, one is resonant modes.The former generally utilizes gyroscope quick Capacitance variations caused by the displacement that mass block generates under acceleration effect are felt to measure the size of acceleration;The latter generally will Gyroscope and accelerometer are implemented separately, and are then integrated in single-chip.

The implementation method of capacitive accelerometer gyroscope mainly has following problem: 1, produced by angular speed and linear acceleration Response be reflected in the displacement of mass block, need more complex signal processing to separate two kinds of Inertia informations;2, mass block Have simultaneously with the movement outside face in face, it is very high to the symmetry requirement of structure processing;3, high-precision capacitive readout circuit compared with For complexity, the precision of accelerometer is limited.And in the realization of current resonance type accelerometer gyroscope, each inertia measurement The sensitive-mass block of unit is mutually indepedent, increases the total volume and complexity of structure, is unfavorable for the micromation of system, increases simultaneously The cost of manufacture is added.

Summary of the invention

Goal of the invention: in order to overcome the deficiencies in the prior art, the present invention provides a kind of one chip resonant acceleration Count gyroscope arrangement.

Technical solution: in order to solve the above technical problems, a kind of one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement of the invention, Including the resonance type accelerometer that three frame-type full decoupling gyroscopes, two resonance beams are constituted, the input of resonance type accelerometer End horizontal side is fixed by decoupling beam with anchor point, and vertical side is connected with gyroscope by attachment beam;Resonance type accelerometer Inertia sensitive-mass unit is made of gyroscope quality.

Wherein, three frame-type full decoupling gyroscopes include outline border, center and inside casing, and horizontal comb teeth is provided on outline border Frame, outline border are connect with center by horizontal positioned attachment beam, and center passes through the attachment beam placed vertically with inside casing and connect, inside casing Decoupling beam by being connected to anchor point supports and is equipped with vertical comb teeth frame.

Wherein, horizontal comb teeth frame and vertical comb teeth frame two sides are provided with fixed electrode, are configured to synovial membrane comb structure.

Wherein, resonance type accelerometer is made of two resonance beams, and each resonance beam is provided with two groups of comb teeth, every group of comb teeth Outside is provided with driving comb electrode and detection comb electrode, and resonance beam one end connects anchor point, and the other end is that inertia force sensitivity is defeated Enter end.

Wherein, the inertia force sensitizing input end horizontal side of resonance type accelerometer is supported by the decoupling beam for being connected to anchor point, Gyroscope outline border is connected to longitudinally through attachment beam.

Wherein, the inertia force sensitive-mass unit of accelerometer is made of three frame-type full decoupling gyroscope quality, up and down Two resonance beams form difference output structure.

The utility model has the advantages that a kind of one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement of the invention, has the advantages that

The inertia sensing unit of 1 accelerometer is the quality of gyroscope, simplifies structure design, effectively reduces acceleration Count the total volume and cost of gyroscope.

The accelerometer of 2 differential frequencies output effectively inhibits the common-mode influence in the external world such as temperature, and direct frequency Output has the characteristics that anti-interference strong.

The designing gyroscope of 3 three frame-types independently of resonance type accelerometer design, the configuration of gyroscope mode with plus The design of speedometer is unrelated, reduces the complexity of Integrated design.

In conclusion one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement proposed by the present invention, can effectively measure vertical paper The angular movement in face and the linear acceleration of vertical direction, and have the advantages that small in size, compact-sized, design is simple, with high accuracy.

Detailed description of the invention

Fig. 1 is planar structure schematic diagram of the invention.

In figure, 1a, 1b are the fixing end anchor point of accelerometer resonance beam;2a, 2b are accelerometer resonance beam and anchor Point connector;3a, 3b, 3c, 3d are the fixed electrode of accelerometer resonance beam driving comb;4a, 4b, 4c, 4d are acceleration Count the fixed electrode of resonance beam detection comb;5a, 5b, 5c, 5d, 5e, 5f, 5g, 5h are the decoupling of accelerometer resonance beam input terminal The support anchor point of beam;6a, 6b, 6c, 6d are accelerometer resonance beam input terminal decoupling beam;7a, 7b, 7c, 7d are gyroscope Outline border driving comb fixes electrode;8a, 8b, 8c, 8d are gyroscope outline border comb teeth frame;9a, 9b, 9c, 9d are outside gyroscope Frame detection comb fixes electrode;10a, 10b are accelerometer resonance beam and gyroscope outer gimbal connector;11a, 11b are to add Speedometer input terminal and gyroscope outline border attachment beam;12a, 12b, 12c, 12d are gyroscope outline border and center attachment beam;13a, 13b, 13c, 13d are gyroscope center and inside casing attachment beam;14a, 14b, 14c, 14d are gyroscope inside casing decoupling beam; 15a, 15b are gyroscope inside casing decoupling beam support anchor point;16a, 16b, 16c, 16d are that gyroscope inside casing detection comb is fixed Electrode;17a, 17b, 17c, 17d are gyroscope inside casing comb teeth frame;18a, 18b, 18c, 18d are gyroscope inside casing force feedback Comb teeth fixes electrode;19a, 19b are accelerometer resonance beam;20 be gyroscope outline border;21 be gyroscope center;22 be gyro Instrument inside casing.

Specific embodiment

The present invention will be further explained with reference to the accompanying drawing.

As shown in Figure 1, a kind of one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement of the invention, including three frame-type full decouplings The input terminal horizontal side of the resonance type accelerometer that gyroscope, two resonance beams are constituted, resonance type accelerometer passes through decoupling beam It is fixed with anchor point, vertical side is connected with gyroscope by attachment beam;The inertia sensitive-mass unit of resonance type accelerometer by Gyroscope quality is constituted.

Wherein, resonance type accelerometer includes resonance beam 19a, 19b, and fixed support anchor point 1a, 1b, resonance beam and anchor point connect Meet device 2a, 2b, resonance beam driving comb fixed electrode 3a, 3b, 3c, 3d, the fixed electrode 4a, 4b of resonance beam detection comb, 4c, 4d, resonance beam input terminal decouple beam support anchor point 5a, 5b, 5c, 5d, 5e, 5f, 5g, 5h, resonance beam input terminal decouple beam 6a, 6b, 6c, 6d, resonance beam and gyroscope outer gimbal connector 10a, 10b, sensitizing input end and gyroscope outline border attachment beam 11a, 11b.Three Frame-type full decoupling gyroscope includes outline border 20, center 21, inside casing 22, outline border and center attachment beam 12a, 12b, 12c, 12d, in Frame and inside casing attachment beam 13a, 13b, 13c, 13d, outline border comb teeth frame 8a, 8b, 8c, 8d, the fixed electrode 7a of outline border driving comb, 7b, 7c, 7d, outline border driving comb detecting electrode 9a, 9b, 9c, 9d, inside casing comb teeth frame 17a, 17b, 17c, 17d, inside casing force feedback Comb teeth fixes electrode 18a, 18b, 18c, 18d, inside casing detection comb fixed electrode 16a, 16b, 16c, 16d, and inside casing decouples beam 14a, 14b, 14c, 14d and inside casing decoupling beam support anchor point 15a, 15b.

As shown in Figure 1, about horizontal axial symmetry above and below two resonance beams of resonance type accelerometer, it therefore, only need to be to wherein One resonance beam top resonance beam is illustrated.The resonance type accelerometer resonance beam 19a is by connector 2a by solid Determine anchor point 1a and fix support, the detection comb electrode of fixed driving comb electrode 3a, 3d and fixation is distributed in two sides 4a,4d.Described driving comb electrode 3a, 3d are placed on the upside of detection comb electrode 4a, 4d.The sensitivity of the resonance beam 19a is defeated Enter end to be connect with gyroscope outline border attachment beam 11a by connector 10a, and by decoupling beam 6a, 6d be connected to fixed anchor point 5a, 5b,5g,5h.Described decoupling beam 6a, 6d are respectively at left and right sides of connector 10a, and anchor point 5a, 5b, 5g, 5h are in decoupling beam 6a, 6d Upper and lower two sides distribution.

Add up and down as shown in Figure 1, three frame-type full decoupling gyroscope outline borders, 20 upper and lower sides are connected to by attachment beam 11a, 11b Speedometer inputs terminal adapter 10a, 10b, and by decoupling beam 6a, 6b, 6c, 6d and anchor point 5a, 5b, 5c, 5d, 5e, 5f, 5g, 5h It is supported.Gyroscope center 21 is hung on inside outline border 20 by four horizontal positioned attachment beam 12a, 12b, 12c, 12d.Top Spiral shell instrument inside casing 22 is hung on inside center 21 by four attachment beam 13a, 13b, 13c, 13d placed vertically, meanwhile, inside casing 22 Fixed anchor point 15a, 15b are connected to by four horizontal positioned decoupling beam 14a, 14b, 14c, 14d.

Four groups are provided on the outside of the gyroscope outline border 20 about horizontal middle spindle and vertical comb teeth frame substantially symmetrical about its central axis 8a,8b,8c,8d.Described outline border comb teeth frame 8a, 8b, 8c, 8d and 20 horizontal edge of outline border are disposed vertically, and two sides are disposed with drive Dynamic comb electrodes 7a, 7b, 7c, 7d and detection comb electrode 9a, 9b, 9c, 9d.It is provided on the inside of gyroscope inside casing 22 same symmetrical Four groups of comb teeth framves 17a, 17b, 17c, 17d.Described comb teeth frame 17a, 17b, 17c, 17d is vertical with 22 vertical edge of inside casing edge, Force feedback comb electrodes 18a, 18b, 18c, 18d and detection comb electrode 16a, 16b, 16c, 16d are arranged in two sides.

As shown in Figure 1, total body is distributed about horizontal axis and vertical formed symmetrical.

Working principle of the present invention is as follows: resonance beam 19a, 19b of accelerometer by driving comb 3a, 3b of its two sides, 3c, 3d drive to resonance frequency, and movement is read by detection comb 4a, 4b, 4c, 4d of two sides.When structural body is by perpendicular When straight directional acceleration load, the quality of inside and outside three frame 20,21,22 of gyroscope is in the form of sensing unit by inertia masterpiece For input terminal adapter 10a, 10b of resonance type accelerometer, change the resonance frequency of accelerometer resonance beam 19a, 19b with this Rate.The frequency variation of resonance beam reflects acceleration magnitude suffered by structural body.Meanwhile upper and lower two resonance beams 19a, 19b Constitute difference output.Gyroscope outline border 20 makees simple string movement in the horizontal direction under the driving of horizontal comb teeth 3a, 3b, 3c, 3d, The vertical motion of outline border 20 is limited by sensitizing input terminal adapter 10a, 10b of resonance type accelerometer.Gyroscope outline border 20 Center 21 is driven to do horizontal simple string movement by attachment beam 12a, 12b, 12c, 12d.When structural body is transported by the angle of vertical paper When dynamic, center 21 generates the simple string movement of vertical direction simultaneously under coriolis force load, and by attachment beam 13a, 13b, 13c, 13d drives gyroscope inside casing 22 vertically moving, and the horizontal movement of inside casing 22 is connected to the decoupling of anchor point 15a, 15b Beam 14a, 14b, 14c, 14d limitation.The vertical simple string of inside casing 22, which moves, is detected comb teeth 16a, 16b, 16c, 16d reading, width Degree size reflects the angular speed size that structural body is subject to, and by applying on force feedback comb electrodes 18a, 18b, 18c, 18d Add suitable electrostatic force to balance the coriolis force load that inside casing 22 is subject to.

The above is only a preferred embodiment of the present invention, it should be pointed out that: for the ordinary skill people of the art For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered It is considered as protection scope of the present invention.

Claims (6)

1. a kind of one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement, it is characterised in that: including three frame-type full decoupling gyroscopes, two The input terminal horizontal side of the resonance type accelerometer that a resonance beam is constituted, resonance type accelerometer is solid by decoupling beam and anchor point Fixed, vertical side is connected with gyroscope by attachment beam;The inertia sensitive-mass unit of resonance type accelerometer is by gyroscope matter Amount is constituted;Two resonance beams of resonance type accelerometer are up and down about horizontal axial symmetry, on three frame-type full decoupling gyroscope outline borders Downside is connected to accelerometer input terminal adapter, upper and lower two resonance beams up and down by attachment beam and constitutes difference output.
2. one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement according to claim 1, it is characterised in that: wherein, three frames Formula full decoupling gyroscope includes outline border, center and inside casing, and horizontal comb teeth frame is provided on outline border, and outline border and center pass through level The attachment beam of placement connects, and center is connect with inside casing by the attachment beam placed vertically, and inside casing is by being connected to the decoupling beam of anchor point It supports and is equipped with vertical comb teeth frame.
3. one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement according to claim 2, it is characterised in that: wherein, level comb Braces and vertical comb teeth frame two sides are provided with fixed electrode, are configured to synovial membrane comb structure.
4. one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement according to claim 1, it is characterised in that: wherein, resonant mode Accelerometer is made of two resonance beams, and each resonance beam is provided with two groups of comb teeth, is provided with driving comb on the outside of every group of comb teeth Electrode and detection comb electrode, resonance beam one end connect anchor point, and the other end is inertia force sensitizing input end.
5. one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement according to claim 2, it is characterised in that: wherein, resonant mode The inertia force sensitizing input end horizontal side of accelerometer is supported by the decoupling beam for being connected to anchor point, is connected to longitudinally through attachment beam Gyroscope outline border.
6. one chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement according to claim 5, it is characterised in that: wherein, acceleration The inertia force sensitive-mass unit of meter is made of three frame-type full decoupling gyroscope quality, and it is defeated that upper and lower two resonance beams form difference Structure out.
CN201710248849.4A 2017-04-17 2017-04-17 One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement CN107063223B (en)

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