CN104406579B - Micro-electromechanical deformable structure and triaxial multi-degree of freedom micro-electromechanical gyroscope - Google Patents
Micro-electromechanical deformable structure and triaxial multi-degree of freedom micro-electromechanical gyroscope Download PDFInfo
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- CN104406579B CN104406579B CN201410706276.1A CN201410706276A CN104406579B CN 104406579 B CN104406579 B CN 104406579B CN 201410706276 A CN201410706276 A CN 201410706276A CN 104406579 B CN104406579 B CN 104406579B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
Abstract
The invention relates to a triaxial multi-degree of freedom micro-electromechanical gyroscope. The triaxial multi-degree of freedom micro-electromechanical gyroscope comprises an inner framework, a middle framework, an outer framework, a linkage part positioned in the inner framework, an annular detection capacitor positioned in the center, an annular polar plate of which outer edge of the annular polar plate is connected with the linkage part, two groups of driving capacitors and two groups of second detection capacitors, wherein the two groups of driving capacitors are symmetrically distributed on the two sides, parallel to an x axis, of the outer framework; the two groups of second detection capacitors are symmetrically distributed on the two sides, parallel to a y axis, of the outer framework. The triaxial multi-degree of freedom micro-electromechanical gyroscope adopts a single structure design, capacitance type electrostatic driving and differential capacitance detection; the driving mode is simple; as the structure is compact, the gyroscope size is reduced; the gyroscope is suitable for massive production, small errors are produced under the influence of temperatures and the processing technology, and great measurement precision and sensitivity can be realized.
Description
Technical field
The present invention relates to micro-electromechanical technology, and in particular to a kind of micro electronmechanical deformable structure and a kind of three axles multiple degrees of freedom
Micro-electro-mechanical gyroscope.
Background technology
Microelectromechanical systems (Micro Electro Mechanical System), abbreviation MEMS is in microelectronics skill
Grow up on the basis of art integrate micromachine, microsensor, microactrator, signal processing, one of Based Intelligent Control
Emerging science and technology.
In microcomputer Electric Measurement Technology, it is often necessary to use deformable attachment structure, its design relation measurement scheme
Exploitativeness, its sensitivity be also related to measurement accuracy.
Micro-electro-mechanical gyroscope is based on the inertia device of MEMS technology, for the angular velocity of Measuring Object motion.It has
Small volume, reliability is high, with low cost, is adapted to the characteristics of producing in enormous quantities, therefore with wide market prospect, can be applicable to
Including the wide spectrum including consumer electronics, Aero-Space, automobile, armarium and weapon.
Microelectromechanicgyroscope gyroscope instrument system generally includes drive part and detection part, and its design has certain complexity, especially
It is to be related to micro-electro-mechanical gyroscope that three axles are measured simultaneously when.At present three-axis gyroscope mainly by by three single axis gyroscopes or
One Z axis gyroscope and plane monitoring-network gyroscope are carried out the design of orthogonal configuration to realize by person, but this group
The mode of conjunction is unfavorable for the miniaturization of device, therefore the three-axis gyroscope of exploitation single structure has become micro-electro-mechanical gyroscope now
The important directions of design research and development.During the three-axis gyroscope of exploitation single structure, a kind of compact conformation, volume is more needed to reduce, with
And the deformable attachment structure that sensitivity is high.
Additionally, the performance of micro-electro-mechanical gyroscope is very big by environment and Technological Factors：When variation of ambient temperature, gyro
Instrument sensitive structure dynamic characteristic changes, and causes to drive and the natural frequency of sensed-mode shifts, so as to change drive
The matching of dynamic and sensed-mode, causes the differentiation of gyroscope performance at different ambient temperatures.And work as processing technique presence
During error, the actual dynamic characteristic of gyroscope also can produce relatively large deviation between design parameter, affect designing gyroscope performance
Realization.Therefore, micro-electro-mechanical gyroscope also becomes micro-electro-mechanical gyroscope research and development in the vigorousness that the design phase strengthens its design
Important content.
The content of the invention
It is an object of the invention to provide a kind of simple structure is easily realized and the high micro electronmechanical deformable structure of sensitivity, with
It is realization and a kind of single structure design is affected three little axle multiple degrees of freedom micro-electro-mechanical gyroscopes by temperature and processing technique error
Above-mentioned purpose, the present invention is adopted the following technical scheme that：
A kind of micro electronmechanical deformable structure, including：Substrate；Concentric three layers of rectangular frame on the substrate,
Inner frame is from inside to outside followed successively by, the central frame of the inner frame is surrounded and is surrounded the outside framework of the central frame, institute
It is origin to state center, and the inner frame, central frame and outside framework respectively have two sides parallel to x-axis, and two other side is put down
Row is in y-axis；By the first decoupling beam connection between the outside framework and the central frame, the first decoupling beam is arranged at institute
State both sides of the central frame parallel to y-axis；It is described by the second decoupling beam connection between the central frame and the inner frame
Second decoupling beam is arranged at both sides of the inner frame parallel to x-axis；Linkage portion inside the inner frame, the linkage
Portion includes the first linkage beam, two lever beams and two second linkage beams；The first linkage beam and the second linkage beam
Each parallel to y-axis, the lever beam is each parallel to x-axis；Two lever beams are symmetrical with regard to x-axis, respectively with described first
Dynamic beam connects to form the frame structure of one end open；Two second linkage beams are symmetrical and positioned at the lever with regard to x-axis
Between beam and the inner frame, one end of the second linkage beam connects a neighbouring lever beam, and other end connection is described interior
Framework.
Further preferred technical scheme, the first decoupling beam is included with regard to the symmetrical four Z-types decoupling beam of y-axis, institute
The one end for stating Z-type decoupling beam vertically connects side of the central frame parallel to y-axis, and the other end vertically connects the outside framework
Parallel to the side of y-axis.
Further preferred technical scheme, the first decoupling beam is included with regard to the symmetrical four L-types decoupling beam of y-axis, institute
The one end for stating L-type decoupling beam vertically connects side of the central frame parallel to y-axis, and the other end vertically connects the outside framework
Parallel to the side of x-axis.
Further preferred technical scheme, the second decoupling beam is included with regard to the symmetrical four Z-types decoupling beam of x-axis, institute
The one end for stating Z-type decoupling beam vertically connects side of the inner frame parallel to x-axis, and the other end vertically connects the middle boxes
Side of the frame parallel to x-axis.
Further preferred technical scheme, the second decoupling beam is included with regard to the symmetrical four L-types decoupling beam of x-axis, institute
The one end for stating L-type decoupling beam vertically connects side of the inner frame parallel to x-axis, and the other end vertically connects the central frame
Parallel to the side of y-axis.
Further preferred technical scheme, one end that the lever beam is not connected with the described first linkage beam is support end,
The support end of two lever beams is respectively fixed on the substrate by one second anchor point.
Further preferred technical scheme, the linkage portion also includes two support beams, and two support beams are parallel
In y-axis；With regard to x-axis symmetrically and positioned at frame structure inner side, one end connects a neighbouring lever to two support beams
Beam, the other end is respectively fixed on the substrate by one the 3rd anchor point.
Further preferred technical scheme, one end that the lever beam is not connected with the described first linkage beam is support end,
Two levers beam support end is respectively fixed on the substrate by one second anchor point；The second linkage beam and lever beam
Link position be located at lever beam support end and lever beam and support beam junction point in the middle of.
Further preferred technical scheme, the linkage portion also includes the 3rd linkage beam, one end of the 3rd linkage beam
Connect the middle part of the first linkage beam, the other end is used for and part to be connected connection.
The present invention micro electronmechanical deformable structure, when being acted on by external force, outside framework, central frame, inner frame and
Frame structure can be deformed the effect for distorting, while also having the advantages that deformation drag small deformation space is big such that it is able to
Realize good certainty of measurement and sensitivity.The micro electronmechanical deformable structure of the present invention is simply compact, is conducive to reduction micro electronmechanical
The volume of system, is adapted to batch production in technique, and is affected little by temperature and processing technique error, is conducive to measurement scheme reality
Now good certainty of measurement and sensitivity.
A kind of three axle multiple degrees of freedom micro-electro-mechanical gyroscopes, including foregoing deformable structure, also include：Positioned at two
Between the lever beam annular detection electric capacity, it is described annular detection electric capacity center just to the origin at；The annular inspection
Survey electric capacity is including four bottom crowns being fixed on substrate and just to four bottom crowns and is suspended in the bottom crown
The annular top crown of top；Four bottom crowns are divided into two groups：First group of bottom crown is symmetrical in the both sides of origin along x-axis
And two bottom crown shapes in group are identical, the annular top crown of the corresponding part of first group of bottom crown is engaged structure
Into one group of first detection electric capacity；Second group of bottom crown along y-axis the both sides of origin are symmetrical and group in two bottom crown shapes
Shape is identical, and the annular top crown of the corresponding part of second group of bottom crown is engaged another group first detection electric capacity of composition；
The annular top crown at the origin is fixed on substrate by the first anchor point；The 3rd linkage beam and the annular top crown
Outer connection；Two groups of driving electric capacity, are symmetrically distributed in both sides of the outside framework parallel to x-axis, per group of driving electric capacity
All include movable drive electrode and the fixed drive electrode worked in coordination, wherein the movable drive electrode and the outside framework
Outer side edges connect；It is described to drive electric capacity to be used to provide driving force along the y-axis direction；Two group of second detection electric capacity, is symmetrically distributed in
The outside framework parallel to y-axis both sides, per group of the second detection electric capacity all include the movable detecting electrode worked in coordination and
Fixed test electrode, wherein the movable detecting electrode is connected with the outer side edges of the outside framework.
Further preferred technical scheme, the annular top crown is toroidal or square ring-shaped.
Further preferred technical scheme, also includes the support beam group being located in the annular detection electric capacity annular distance；It is described
Support beam group includes concentric interior annular and outer toroid, two internal ring support beams, two inner and outer ring tie-beams and four outer shrouds
Tie-beam；One end of four outer shroud tie-beams is connected respectively with outer toroid, the other end respectively with the annular top crown
Interior edge connection；The outer shroud tie-beam is divided into two one group, and one of which is distributed along x-axis, and another group is distributed along y-axis；Described two
One end of bar internal ring support beam is connected respectively with interior annular, and the other end is fixed on the substrate by first anchor point；Institute
The one end for stating two inner and outer ring tie-beams is connected respectively with interior annular, and the other end is connected respectively with outer toroid；The internal ring is supported
Beam is distributed along y-axis and the inner and outer ring tie-beam is distributed along x-axis, or, the internal ring support beam is distributed and described inside and outside along x-axis
Ring tie-beam is distributed along y-axis.
The three axle multiple degrees of freedom micro-electro-mechanical gyroscopes of the present invention are using single structure design, condenser type electrostatic drive and differential electricity
Hold detection, type of drive is simple, compact conformation, be conducive to reducing gyroscope volume, batch production is adapted in technique, and by temperature
Degree and processing technique error affect little, can realize good certainty of measurement and sensitivity.
Description of the drawings
Fig. 1,2 for three axles multiple degrees of freedom micro-electro-mechanical gyroscope first embodiment of the invention schematic perspective view.
Fig. 3,4 for three axles multiple degrees of freedom micro-electro-mechanical gyroscope first embodiment of the invention floor map.
Fig. 5 is the structural representation of support beam group first embodiment of the present invention.
Fig. 6 is the structural representation of support beam group second embodiment of the present invention.
Fig. 7 is the structural representation of support beam group 3rd embodiment of the present invention.
Fig. 8 is the floor map of three axles multiple degrees of freedom micro-electro-mechanical gyroscope second embodiment of the invention.
Fig. 9 is the floor map of three axles multiple degrees of freedom micro-electro-mechanical gyroscope 3rd embodiment of the invention.
Figure 10 is the x and y-axis detecting system rough schematic view of three axles multiple degrees of freedom micro-electro-mechanical gyroscope of the invention.
Detect mass M2 in the frequency response curve for driving and detecting direction when Figure 11 is x and y-axis is detected.
Figure 12 is the z-axis detecting system rough schematic view of three axles multiple degrees of freedom micro-electro-mechanical gyroscope of the invention.
Detect mass M4 in the frequency response curve for driving and detecting direction when Figure 13 is detected for z-axis.
Description of reference numerals
1 substrate；
2 annular top crowns, first group of bottom crown of 6a, second group of bottom crown of 6b；
7 movable drive electrodes, 4 fixed drive electrodes；
17 movable detecting electrodes, 3 fixed test electrodes；
12 inner frames, 14 central frames, 16 outside frameworks；
15 first decoupling beams, 13 second decoupling beams；
8 first linkage beams, 9 lever beams, 11 second linkage beams, 10 support beams, 24 the 3rd linkage beams；
18 support beam groups, 19 interior annulars, 20 outer toroids, 21 internal ring support beams, 22 inner and outer ring tie-beams, the connection of 23 outer shrouds
Beam；
101 tie-beams, 102 support beams, 103 annulus；
The anchor points of 5a first, the anchor points of 5b second, the anchor points of 5c the 3rd.
Specific embodiment
Below with reference to shown in Fig. 1～13, embodiments of the invention are described in detail, the example of the embodiment is shown in the accompanying drawings
Go out, wherein from start to finish same or similar label represents same or similar element or the unit with same or like function
Part.It is exemplary below with reference to the embodiment of Description of Drawings, is only used for explaining the present invention, and can not be construed to this
Bright restriction.
Referring to the first embodiment that Fig. 1-Fig. 4 is three axles multiple degrees of freedom micro-electro-mechanical gyroscope of the invention, including：
Substrate 1, the central position of substrate 1 has an annular detection electric capacity, defines with the center of annular detection electric capacity as origin
O, the place plane of substrate 1 is the rectangular coordinate system in space of x/y plane, and the z-axis of rectangular coordinate system in space is perpendicular to substrate 1.
Annular detection electric capacity includes four bottom crowns fixed on substrate 1 and just to four bottom crowns and is being suspended in
The shape of 2,4 bottom crown arrangement compositions of the annular top crown above bottom crown and the mating shapes of annular top crown 2.
Four bottom crowns can be divided into two groups：First group of bottom crown 6a along x-axis the both sides of origin are symmetrical and group in
Two bottom crown shapes are identical, and the annular top crown of the corresponding part of first group of bottom crown 6a is engaged one group first of composition and examines
Survey electric capacity A；Second group of bottom crown 6b along y-axis the both sides of origin are symmetrical and group in two bottom crown shapes it is identical,
The annular top crown of the corresponding part of two groups of bottom crown 6b is engaged composition first and detects electric capacity B.
Annular top crown 2 is suspended in the top of bottom crown by supporting construction, and supporting construction is located at annular detection electric capacity
It is connected in annular distance and with the interior edge of annular top crown 2, supporting construction at the origin is fixed on substrate by the first anchor point 5a,
Because supporting construction only center is fixed, therefore annular top crown 2 can do angular oscillation around any one axles of xyz under external force.
The first embodiment of supporting construction is shown with reference to Fig. 5, supporting construction includes 103, three tie-beams of an annulus
101 and a support beam 102；Wherein, two tie-beams 101 are distributed along y-axis, and the 3rd tie-beam 101 is distributed and position along x-axis
In the positive direction of x-axis, one end of tie-beam 101 is connected with annulus 103, and the other end is connected with the interior edge of annular top crown 2；Support
Beam 102 is distributed and positioned at the negative direction of x-axis along x-axis, and one end connection annulus 103, other end at the origin passes through the first anchor point 5a
It is fixed on substrate.It is of course also possible to be that Article 3 tie-beam 101 is located at the negative direction and support beam 102 of x-axis positioned at x-axis
Positive direction.
Show the second embodiment of supporting construction with reference to Fig. 6, supporting construction include an annulus 103, two tie-beams 101,
And two support beams 102；Wherein, two tie-beams 101 are distributed along y-axis, and one end of tie-beam 101 is connected with annulus 103, separately
One end is connected with the interior edge of annular top crown 2；Two support beams 102 are distributed along x-axis, one end connection annulus 103, and the other end is in original
It is fixed on substrate by the first anchor point 5a at point.
The 3rd embodiment of supporting construction is shown with reference to Fig. 1-4 and Fig. 7, supporting construction is support beam group 18, including same
The interior annular 19 and the inner and outer ring tie-beam 22 of internal ring support beam 21, two of outer toroid 20, two and four outer shroud tie-beams of the heart
23；One end of four outer shroud tie-beams 23 is connected respectively with outer toroid 20, and the other end is interior along even with annular top crown 2 respectively
Connect；Outer shroud tie-beam 23 is divided into two one group, and one of which is distributed along x-axis, and another group along y-axis distribution, four outer shroud tie-beams
The periphery of 23 even partition outer toroids 20；One end of two internal ring support beams 21 is connected respectively with interior annular 19, and the other end passes through
First anchor point 5a is fixed on substrate 1；One end of two inner and outer ring tie-beams 22 is connected respectively with interior annular 19, other end difference
It is connected with outer toroid 20；Internal ring support beam 21 is distributed along y-axis and inner and outer ring tie-beam 22 is distributed along x-axis；In other embodiments,
Internal ring support beam 21 can also be arranged, and along x-axis distribution, inner and outer ring tie-beam 22 is distributed along y-axis.Can from the cross sectional portion of Fig. 2
Find out, the interior edge of annular top crown 2 is connected with the support beam group 18 in annular distance, the at the origin of support beam group 18 passes through the first anchor point
5a is fixed on substrate, and annular top crown 2 is suspended in bottom crown top by the support of the first anchor point 5a.Due to support beam group only
Center is fixed and very thin with certain elasticity, therefore annular top crown 2 can do angle and shake around any one axles of xyz under external force
It is dynamic.
Wherein, the annular top crown 2 in above example is toroidal, but should be noted that the present invention not
Toroidal is defined in, " annular " center of referring to sets pertusate structure in the present invention, such as interior is all circular circle along outer
Ring-shaped, it is interior along outer be all square square ring-shaped, outer be circular and interior edge be square and interior for square shape, outer
Along shape, cross-like shape of center drilling for circle etc., these belong to the protection of the embodiment in the present invention of equivalent
In the range of.
Wherein, annular top crown 2 and supporting construction can directly be structure as a whole, for example, be integrated after composition and etch shape
Into.
Wherein, the annular variable capacitance being made up of annular detection electric capacity and supporting construction：First group of bottom crown 6a exists along x-axis
The both sides of origin are symmetrical, and second group of bottom crown 6b is symmetrical in the both sides of origin along y-axis, so as to each with annular top crown
One group of detection electric capacity is formed, annular top crown is fixed and suspended by the anchor point 5a of center allows its own any around xyz
One axle does angular oscillation.This variable capacitance design can measure the deformation in both direction, while resistance is little when also having deformation
And the big advantage of deformation space, good certainty of measurement and sensitivity can be realized.The annular variable capacitor structure letter of the present invention
It is single compact, be conducive to reducing the volume of MEMS, batch production is adapted in technique, the three axle tops except being applied to the present invention
On spiral shell instrument, can be also used for making plane double shaft gyroscope, z-axis gyroscope and micro-actuator part, such as microswitch.
With reference to shown in Fig. 3-4, micro electronmechanical deformable structure includes three layers of rectangular frame centered on origin, from inside to outside
Inner frame 12 is followed successively by, the central frame 14 of the inner frame 12 is surrounded and is surrounded the outside framework 16 of the central frame 14.
The center of the inner frame 12, central frame 14 and outside framework 16 is all just to origin.The inner frame 12, central frame 14,
And outside framework 16 respectively has two sides parallel to x-axis, two other side is parallel to y-axis.
Connected by 4 first decoupling beams 15 between the outside framework 16 and the central frame 14, first decoupling
It is parallel to the both sides of y-axis and symmetrical with regard to y-axis that beam 15 is arranged at the central frame 14.The first decoupling beam 15 is Z-type
Decoupling beam, one end vertically connects side of the central frame 14 parallel to y-axis, and it is flat that the other end vertically connects the outside framework 16
Row is in the side of y-axis.
Connected by 4 second decoupling beams 13 between the central frame 14 and the inner frame 12, second decoupling
It is parallel to the both sides of x-axis and symmetrical with regard to x-axis that beam 13 is arranged at the inner frame 12.The second decoupling beam 13 is Z-type solution
Coupling beam, one end vertically connects side of the inner frame 12 parallel to x-axis, and it is parallel that the other end vertically connects the central frame 14
In the side of x-axis.
Linkage portion inside the inner frame 12, the linkage portion includes first linkage 8, two lever beams 9, two of beam
Article second linkage 11, two articles of support beams the 10, the 3rd of beam link beams 24.The first linkage linkage beam 11 of beam 8, second, support beam 10 are equal
Arrange parallel to y-axis, lever beam 9 and the 3rd links beam 24 parallel to x-axis setting.
Two lever beams 9 are symmetrical with regard to x-axis, are connected to form the frame structure of one end open with the first linkage beam 8 respectively,
Frame structure is located inside inner frame 12, and annular detection electric capacity is located between two lever beams 9；
Second linkage beam 11 is symmetrical and between lever beam 9 and inner frame 12 with regard to x-axis, one end of the second linkage beam 11
A neighbouring lever beam 9 of connection, the other end is connected to inner frame 12, is connected with central frame 14 so as to pass through inner frame 12,
And then realization and the connection of outside framework 16；
The middle part of one end connection the first linkage beam 8 of the 3rd linkage beam 24, the other end connects with the outer of annular top crown 2
Connect.
Two support beams 10 are symmetrical with regard to x-axis and detect between electric capacity positioned at frame structure and annular, and one end connection is neighbouring
A lever beam 9, the other end is respectively fixed on substrate 1 by one the 3rd anchor point 5c.
Wherein, one end that lever beam 9 is not connected with the first linkage beam 8 is support end, and the support end of two lever beams 9 is each
It is fixed on substrate 1 by one second anchor point 5b.
Wherein, the second linkage beam 11 is located at the support end and lever beam 9 of lever beam 9 and props up with the link position of lever beam 9
In the middle of the junction point of support beam 10.
Wherein, two the second anchor point 5b are symmetrical arranged with regard to x-axis, and two the 3rd anchor point 5c are symmetrical arranged with regard to x-axis, this
Symmetrical fixed setting is more uniformly stressed annular detection electric capacity.
The present invention micro electronmechanical deformable structure, when being acted on by external force, outside framework, central frame, inner frame and
Frame structure can be deformed the effect for distorting, while also having the advantages that deformation drag small deformation space is big such that it is able to
Realize good certainty of measurement and sensitivity.The micro electronmechanical deformable structure of the present invention is simply compact, is conducive to reduction micro electronmechanical
The volume of system, is adapted to batch production in technique, and is affected little by temperature and processing technique error, is conducive to measurement scheme reality
Now good certainty of measurement and sensitivity.Except being applied on the three-axis gyroscope of the present invention, can be with frame for movement aspect
On realize the amplification of micro-displacement, be conducive to improving the detection sensitivity and signal to noise ratio of sensor, and reduce sensitive structure
Requirement to circuit system.
Two groups of driving electric capacity, are symmetrically distributed in both sides of the outside framework 16 parallel to x-axis；Per group drives electric capacity all to include mutually
The movable drive electrode 7 for coordinating and fixed drive electrode 4, side of the movable drive electrode 7 with outside framework 16 parallel to x-axis connects
Connect, fixed drive electrode 4 is fixed on substrate 1.
Two group of second detection electric capacity, is symmetrically distributed in both sides of the outside framework 16 parallel to y-axis；Per group second detection electric capacity is all
Including the movable detecting electrode 17 and fixed test electrode 3 worked in coordination, movable detecting electrode 17 is with outside framework 16 parallel to y-axis
Side connection, fixed test electrode 3 is fixed on substrate 1.
Wherein, the movable drive electrode 7 and fixed drive electrode 4 in the present embodiment, and movable detecting electrode 17 and solid
Determine detecting electrode 3 and be comb-like electrode, detected based on the change of overlapping length between pole plate.But the present invention is not limited to
This, drives electric capacity and the second detection electric capacity to be tabular electric capacity, is detected based on the change in gap between pole plate.
The operation principle of three axle multiple degrees of freedom micro-electro-mechanical gyroscope first embodiments of the invention is as follows：
It is described to drive electric capacity to be used to provide driving force along the y-axis direction, it is outside framework 16, movable when by extraneous driving
Drive electrode 7 and movable detecting electrode 17 do along the y-axis direction line motion, drive central frame 14, inner frame 12 along the y-axis direction
Do line motion, while the second linkage beam 11 drags lever beam 9 does along the y-axis direction line motion, lever beam 9 equivalent to lever, therefore
The first linkage beam 8 can be driven to do line motion in y-axis direction, wherein the direction of motion of the first linkage beam 8 and the second linkage phase of beam 11
Instead.It is connected with the outer of annular top crown 2 because the first linkage beam 8 passes through the 3rd linkage beam 24, and annular top crown 2 is by propping up
At the origin Jing the first anchor point 5a of support beam group 18 is fixed on substrate 1, therefore annular top crown 2 can dragging in the first linkage beam 8
Rotate around the first anchor point 5a under dynamic, i.e., do angular oscillation around z-axis.Therefore powered motion includes three layers of framework line fortune along the y-axis direction
Angular oscillation of the dynamic and annular top crown 2 around z-axis.
When gyroscope is rotated around x-axis, due to the effect of coriolis force, annular top crown 2 can do angular oscillation around y-axis, thus
Cause the change of first group of bottom crown 6a and the spacing of annular top crown 2, cause the change of the first detection electric capacity A, the electric capacity becomes
Change is directly proportional to gyroscope around the angular velocity that x-axis is rotated, therefore can be used to measure x-axis angular velocity.Now first detection electric capacity B and
Second detection electric capacity is unaffected, or affects very little to ignore.
When gyroscope is rotated around y-axis, due to the effect of coriolis force, annular top crown 2 can do angular oscillation around x-axis, thus
Cause the change of second group of bottom crown 6b and the spacing of annular top crown 2, cause the change of the first detection electric capacity B, the electric capacity becomes
Change is directly proportional to gyroscope around the angular velocity that y-axis is rotated, therefore can be used to measure y-axis angular velocity.Now first detection electric capacity A and
Second detection electric capacity is unaffected, or affects very little to ignore.
When gyroscope is rotated around z-axis, the annular top crown 2 itself for doing angular oscillation around z-axis is unaffected.Due to coriolis force
Effect, outside framework 16, central frame 14, inner frame 12 be subject to x-axis direction active force, but due to lever beam 9 be rigidity and
One end is securing, so motion of the inner frame 12 in x-axis direction is limited, does not also interfere with annular top crown 2, therefore
Annular detection electric capacity is unaffected.Due to first decoupling beam 15 decoupling function, will not to outside framework 16 x-axis to motion make
Into restriction, therefore, outside framework 16 understands line motion along the x-axis direction, causes the second detection electric capacity (by movable detecting electrode 17 and fixation
Detecting electrode 3 is constituted) change, the capacitance variations reflect angular velocity of the gyroscope around z-axis, therefore can be used for detecting z
Axis angular rate.
In the present embodiment, lever beam 9 also leads in addition to being connected with support beam 10 with the first linkage linkage beam 11 of beam 8, second
Cross support end to fix on substrate 1 (i.e. at the second anchor point 5b), and the second linkage beam 11 is located at the link position of lever beam 9
In the middle of the support end and lever beam 9 of lever beam 9 and the junction point of support beam 10, motion of the such case to three layers of framework is that have
Place, this is because：The free end of the script of lever beam 9 is fixed as after support end, between the second anchor point 5b and support beam 10
Lever beam 9 equivalent to beam on two supports, the deformation pattern of this section of lever beam 9 is the form that intermediate drum two ends are fixed, and its is vertical
Will not become in the state of y-axis, if at this moment the second linkage beam 11 is in intermediate position, the second linkage beam 11 will not be turned round
Square further causes to rotate, and if the deviation from centre position, lever beam 9 then can change perpendicular to the state of y-axis, this deflection
The mode of motion of three layers of framework can be affected.
Referring to the floor map that Fig. 8 is three axles multiple degrees of freedom micro-electro-mechanical gyroscope second embodiment of the invention, and first
The shape that the difference of embodiment essentially consists in the first decoupling beam 15 is different with connected mode.In second embodiment：The He of outside framework 16
Connected by 4 first decoupling beams 15 between central frame 14, the first decoupling beam 15 is arranged at central frame 14 parallel to y-axis
Both sides and symmetrical with regard to y-axis；First decoupling beam 15 is that L-type decouples beam, and one end vertically connects central frame 14 parallel to y-axis
Side, the other end vertically connects side of the outside framework 16 parallel to x-axis.
Referring to the floor map that Fig. 9 is three axles multiple degrees of freedom micro-electro-mechanical gyroscope 3rd embodiment of the invention, and second
The shape that the difference of embodiment essentially consists in the second decoupling beam 13 is different with connected mode.In 3rd embodiment：Central frame 14
Connected by 4 second decoupling beams 13 and inner frame 12 between, the second decoupling beam 13 is arranged at inner frame 12 parallel to the two of x-axis
Side and symmetrical with regard to x-axis；Second decoupling beam 13 is that L-type decouples beam, and one end vertically connects side of the inner frame 12 parallel to x-axis
Side, the other end vertically connects side of the central frame 14 parallel to y-axis.
The present invention has been specifically designed the structure of three layers of rectangular frame, by Z-type or L-type between inner frame and central frame
The second decoupling beam be attached, decouple beam by the first of Z-type or L-type between central frame and outside framework and be attached,
Wherein first decoupling beam limits outside framework 16 and central frame 14 relative motion in the y-axis direction, and the second decoupling beam is limited
Central frame 14 and inner frame 12 relative motion in the direction of the x axis, this particular design can strengthen the stalwartness of gyroscope
Property, specifically, have the advantages that：
Figure 10 is the x and y-axis detecting system rough schematic view of three axles multiple degrees of freedom micro-electro-mechanical gyroscope of the invention, Tu11Wei
X and y-axis detect mass M2 in the frequency response curve for driving and detecting direction when detecting.
With reference to shown in Figure 10, because the first decoupling beam 15 limits outside framework 16 and central frame 14 in the y-axis direction
Relative motion, so the combination of outside framework 16 and central frame 14 can be reduced to mass M1, inner frame 12 and the upper pole of annular
The combination of each linking beam of both plate 2 and connection can be reduced to detect mass M2.With reference to shown in Figure 11, mass M1
Detection mass M2 is driven to move in driving direction when being driven power, wherein mass M1 only can be moved in driving direction,
Detection mass M2 can drive and detect direction motion simultaneously.On the powered motion frequency response curve of detection mass M2, when
When flat segments between the peak value of frequency response curve two are driven, whole system realizes power augmentation, i.e. mass M1 motions to driving frequency
Amplitude reaches minimum, and detects that the motion amplitude of mass M2 reaches maximum.And now by temperature and mismachining tolerance cause humorous
The change of vibration frequency affects very little, therefore gyro powered motion to vary less the frequency response of driving flat segments, so as to improve gyro
Drive the stability of work.Further, while detection mass M2 is set in the natural frequency of the sensed-mode in detection direction
Count and driving the flat segments between the peak value of frequency response two, it becomes possible to realize driving and detecting the matching of frequency, improve gyroscope
The performance such as accuracy of detection and sensitivity.
Figure 12 is the z-axis detecting system rough schematic view of three axles multiple degrees of freedom micro-electro-mechanical gyroscope of the invention, and Figure 13 is z-axis
Detect mass M4 in the frequency response curve for driving and detecting direction during detection.
With reference to shown in the left figure of Figure 12, the powered motion power augmentation principle of z-axis detecting system is identical with Fig. 7, because being
Same powered motion.With reference to shown in the right figure of Figure 12, when gyroscope arrangement is rotated around z-axis, inner frame 12 receives x-axis to Ge Shi
Power drives, and the second decoupling beam 13 limits inner frame 12 and central frame 14 relative motion in the direction of the x axis, therefore inner frame
12 and outside framework 14 equivalent to two connected masses, mass M3 can be reduced to, the company of outside framework 16 and central frame 14
Connect equivalent to connecting to spring in x-axis, outside framework 16 can be reduced to detect mass M4.With reference to shown in Figure 13, mass
M3 is subject to coriolis force to drive detection mass M4 in the motion of detection direction, when coriolis force frequency is in the peak value of sensed-mode curve two
Between flat segments when, detect that the moving displacement of mass M4 is maximum, and mass M3 moving displacements are minimum, that is, realize power and put
Greatly.Simultaneously the structure also has the characteristics of being affected little by temperature and processing technique error, so as to be conducive to improve system
Drive and detect the performances such as the accuracy and sensitivity of stability and gyroscope detection of motion.
The three axle multiple degrees of freedom micro-electro-mechanical gyroscopes of the present invention are using single structure design, condenser type electrostatic drive and differential electricity
Hold detection, type of drive is simple, compact conformation, be conducive to reducing gyroscope volume, batch production is adapted in technique, and by temperature
Degree and processing technique error affect little, can realize good certainty of measurement and sensitivity.
Construction, feature and the action effect of the present invention is described in detail according to the embodiment shown in schema above, the above is only
For presently preferred embodiments of the present invention, but the present invention is not limiting practical range, every conception institute according to the present invention shown in drawing
The change of work, or be revised as the Equivalent embodiments of equivalent variations, still without departing from description and diagram covered it is spiritual when, all should
Within the scope of the present invention.
Claims (12)
1. a kind of micro electronmechanical deformable structure, it is characterised in that include：
Substrate；
Concentric three layers of rectangular frame on the substrate, is from inside to outside followed successively by inner frame, surrounds the inner frame
Central frame and surround the outside framework of the central frame, the center is origin, the inner frame, central frame,
And outside framework respectively has two sides parallel to x-axis, two other side is parallel to y-axis；
Between the outside framework and the central frame by first decoupling beam connection, it is described first decoupling beam be arranged at it is described in
Between frame parallel in the both sides of y-axis；By the second decoupling beam connection between the central frame and the inner frame, described second
Decoupling beam is arranged at both sides of the inner frame parallel to x-axis；
Linkage portion inside the inner frame, the linkage portion includes the first linkage beam, two articles of lever beams and two articles the
Two linkage beams；, each parallel to y-axis, the lever beam is each parallel to x-axis for the first linkage beam and the second linkage beam；
Two lever beams are symmetrical with regard to x-axis, and the square frame being connected to form one end open with the described first linkage beam respectively is tied
Structure；
Two second linkage beams are symmetrical and between the lever beam and the inner frame with regard to x-axis, and described second
One end of dynamic beam connects a neighbouring lever beam, and the other end connects the inner frame.
2. deformable structure as claimed in claim 1, it is characterised in that：
The first decoupling beam includes that one end of the Z-type decoupling beam vertically connects with regard to y-axis symmetrical four Z-types decoupling beam
Parallel to the side of y-axis, the other end vertically connects side of the outside framework parallel to y-axis to the central frame.
3. deformable structure as claimed in claim 1, it is characterised in that：
The first decoupling beam includes that one end of the L-type decoupling beam vertically connects with regard to y-axis symmetrical four L-types decoupling beam
Parallel to the side of y-axis, the other end vertically connects side of the outside framework parallel to x-axis to the central frame.
4. deformable structure as claimed in claim 1, it is characterised in that：
The second decoupling beam includes that one end of the Z-type decoupling beam vertically connects with regard to x-axis symmetrical four Z-types decoupling beam
Parallel to the side of x-axis, the other end vertically connects side of the central frame parallel to x-axis to the inner frame.
5. deformable structure as claimed in claim 1, it is characterised in that：
The second decoupling beam includes that one end of the L-type decoupling beam vertically connects with regard to x-axis symmetrical four L-types decoupling beam
Parallel to the side of x-axis, the other end vertically connects side of the central frame parallel to y-axis to the inner frame.
6. deformable structure as claimed in claim 1, it is characterised in that：
One end that the lever beam is not connected with the described first linkage beam is support end, and the support end of two lever beams is each logical
Cross one second anchor point to be fixed on the substrate.
7. deformable structure as claimed in claim 1, it is characterised in that：
The linkage portion also includes two support beams, and two support beams are each parallel to y-axis；
With regard to x-axis symmetrically and positioned at frame structure inner side, one end connects a neighbouring lever beam to two support beams,
The other end is respectively fixed on the substrate by one the 3rd anchor point.
8. deformable structure as claimed in claim 7, it is characterised in that：
One end that the lever beam is not connected with the described first linkage beam is support end, and each of two levers beam support end is led to
Cross one second anchor point to be fixed on the substrate；
The second linkage beam is located at the support end and lever beam and the support beam of lever beam with the link position of lever beam
In the middle of junction point.
9. the deformable structure as described in any one of claim 1-8, it is characterised in that：
The linkage portion also includes the 3rd linkage beam, and one end of the 3rd linkage beam connects the middle part of the first linkage beam,
The other end is used for and part to be connected connection.
10. a kind of three axles multiple degrees of freedom micro-electro-mechanical gyroscope, it is characterised in that including deformable as claimed in claim 9 knot
Structure, also includes：
Annular detection electric capacity between two lever beams, the center of the annular detection electric capacity is just to the origin
Place；
The annular detection electric capacity and including four bottom crowns being fixed on substrate and just to four bottom crowns hang
The annular top crown being placed in above the bottom crown；
Four bottom crowns are divided into two groups：First group of bottom crown along x-axis the both sides of origin are symmetrical and group in two
Bottom crown shape is identical, and the annular top crown of the corresponding part of first group of bottom crown is engaged one group first of composition and detects
Electric capacity；Second group of bottom crown along y-axis the both sides of origin are symmetrical and group in two bottom crown shapes it is identical, described second
The annular top crown of the corresponding part of group bottom crown is engaged another group first detection electric capacity of composition；The annular top crown exists
It is fixed on substrate by the first anchor point at origin；
The 3rd linkage beam is connected with the outer of the annular top crown；
Two groups of driving electric capacity, are symmetrically distributed in both sides of the outside framework parallel to x-axis, and per group of driving electric capacity is all included mutually
The movable drive electrode being engaged and fixed drive electrode, wherein the movable drive electrode connects with the outer side edges of the outside framework
Connect；It is described to drive electric capacity to be used to provide driving force along the y-axis direction；
Two group of second detection electric capacity, is symmetrically distributed in both sides of the outside framework parallel to y-axis, per group of the second detection electric capacity
All include movable detecting electrode and the fixed test electrode worked in coordination, wherein the movable detecting electrode and the outside framework
Outer side edges connect.
11. three axles multiple degrees of freedom micro-electro-mechanical gyroscopes as claimed in claim 10, it is characterised in that：
The annular top crown is toroidal or square ring-shaped.
12. three axles multiple degrees of freedom micro-electro-mechanical gyroscopes as claimed in claim 10, it is characterised in that：
Also include the support beam group being located in the annular detection electric capacity annular distance；
The support beam group include concentric interior annular and outer toroid, two internal ring support beams, two inner and outer ring tie-beams and
Four outer shroud tie-beams；
One end of four outer shroud tie-beams is connected respectively with outer toroid, the other end respectively with the interior edge of the annular top crown
Connection；The outer shroud tie-beam is divided into two one group, and one of which is distributed along x-axis, and another group is distributed along y-axis；
One end of two internal ring support beams is connected respectively with interior annular, and the other end is fixed on described by first anchor point
On substrate；
One end of two inner and outer ring tie-beams is connected respectively with interior annular, and the other end is connected respectively with outer toroid；
The internal ring support beam is distributed along y-axis and the inner and outer ring tie-beam is distributed along x-axis, or, the internal ring support beam is along x
Axle is distributed and the inner and outer ring tie-beam is distributed along y-axis.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410706276.1A CN104406579B (en) | 2014-11-27 | 2014-11-27 | Micro-electromechanical deformable structure and triaxial multi-degree of freedom micro-electromechanical gyroscope |
| JP2017528429A JP6448793B2 (en) | 2014-11-27 | 2015-07-23 | 3-axis MEMS gyro |
| PCT/CN2015/084973 WO2016082571A1 (en) | 2014-11-27 | 2015-07-23 | Tri-axial micro-electro-mechanical gyroscope |
| US15/529,491 US10330471B2 (en) | 2014-11-27 | 2015-07-23 | Triaxial micro-electromechanical gyroscope |
| EP15863686.0A EP3217146B1 (en) | 2014-11-27 | 2015-07-23 | Tri-axial micro-electro-mechanical gyroscope |
| KR1020177014294A KR101927647B1 (en) | 2014-11-27 | 2015-07-23 | Tri-axial micro-electro-mechanical gyroscope |
| EP19180147.1A EP3561451B1 (en) | 2014-11-27 | 2015-07-23 | Triaxial micro-electromechanical gyroscope |
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| US10330471B2 (en) | 2014-11-27 | 2019-06-25 | Goertek, Inc. | Triaxial micro-electromechanical gyroscope |
| CN105466408B (en) * | 2015-07-21 | 2017-12-22 | 东南大学 | Three axle solid football shaped gyroscopes and its processing method |
| CN110702088B (en) * | 2018-07-09 | 2023-08-22 | 北京大学 | Wheel type double-shaft micromechanical gyroscope |
| CN111024057B (en) * | 2019-12-30 | 2021-12-14 | 无锡莱斯能特科技有限公司 | Three-axis MEMS gyroscope |
| CN111174772B (en) * | 2020-01-13 | 2023-05-02 | 无锡莱斯能特科技有限公司 | Triaxial MEMS gyroscope |
| CN114543780B (en) * | 2020-11-24 | 2023-04-07 | 北京晨晶电子有限公司 | Angular velocity measuring structure |
| CN114487483B (en) * | 2022-04-18 | 2022-07-01 | 苏州敏芯微电子技术股份有限公司 | MEMS triaxial accelerometer |
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